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DANIEL L. FLAMM JOHN P. VERBONCOEUR

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FLAMM, DANIEL L.

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PROCESS OPTIMIZATION IN GAS PHASE DRY ETCHING

08/433,623 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed May 3, 1995

Examiner MARTIN J ANGEBRANNDT

Class 156

Art Group 1752

Patent No. 5,711,849

Case Type Utility - 156/999999

Status Application Involved in Court Proceedings

Child 08/942,583 Patented

Child 09/798,787 Abandoned

Last Updated: 3 years, 6 months ago

Date	#	Transaction
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PROCESS OPTIMIZATION IN GAS PHASE DRY ETCHING

08/433,623 | U.S. Patent Application

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