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PROCESS OPTIMIZATION IN GAS PHASE DRY ETCHING

08/942,583 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Oct. 2, 1997
Examiner ALLAN W OLSEN
Class 216
Art Group 1763
Patent No. 5,980,766
Case Type Utility - 216/059000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 08/433,623 Patented
Child 09/358,951 Abandoned
Child 09/798,787 Abandoned
Last Updated: 2 years, 3 months ago
Date # Transaction