We show that a short period superlattice of AlGaN/GaN grown on the AlN buffer can be used to block defects propagating through GaN, resulting in good crystal and luminescence quality.
High growth temperature of 1130–1190 K, combined with carefully controlled deposition of an Al layer at the onset of epitaxy, suppress formation of SiNx islands and result in very rapid transition to two-dimensional ~2D!
The pro- cedure used results in hydrogen terminated surface.7 Wafers prepared by this process showed the (737) surface struc- ture, observed by reflection high-energy electron diffraction ~RHEED!, after heating to 920 K for a few minutes.
4 H. Marchand, N. Zhang, L. Zhao, Y. Golan, S. J. Rosner, G. Girolami, Paul T. Fini, J. P. Ibbetson, S. Keller, S. DenBaars, J. S. Speck, and U. K. Mishra, MRS Internet J. Nitride Semicond.
5 S. A. Nikishin, V. G. Antipov, S. Francoeur, N. N. Faleev, G. A. Seryo- gin, V. A. Elyukhin, H. Temkin, T. Prokofyeva, M. Holtz, A. Konkar, and S. Zollner, Appl.