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POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARAT...

Docket 18/33,530, U.S. Patent Application (Apr. 24, 2023)
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Transmittal of New Application

Document POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF, 18/33,530, No. LGVEX9QHXBLUEX4 (U.S. Pat. App. Apr. 24, 2023)
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Power of Attorney

Document POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF, 18/33,530, No. LGVEX9QUXBLUEX3 (U.S. Pat. App. Apr. 24, 2023)
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Authorization for Extension of Time all replies

Document POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF, 18/33,530, No. LGVEX9QJXBLUEX4 (U.S. Pat. App. Apr. 24, 2023)
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Power of Attorney

Document POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF, 18/33,530, No. LGVEX9QWXBLUEX4 (U.S. Pat. App. Apr. 24, 2023)
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Certified Copy of Foreign Priority Application

Document POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF, 18/33,530, No. LGX56RM5XBLUEX3 (U.S. Pat. App. Apr. 24, 2023)
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Notice of Publication

Document POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF, 18/33,530, No. LQ4KPQXDGREENX2 (U.S. Pat. App. Dec. 14, 2023)
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Claims Worksheet (PTO-2022)

Document POLARIZATION SELECTION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF, 18/33,530, No. LM692MG8GREENX5 (U.S. Pat. App. Sep. 6, 2023)
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