SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD

17/872,461 | U.S. Patent Application

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Location ELECTRONIC
Filed July 25, 2022
Examiner HUNG NGUYEN
Class 355
Art Group 2882
Patent No. 11,921,430
Case Type Utility - 355/046000
Status Patented Case
Parent 17/189,371 Patented
Parent 63/29,040 Expired
Child 18/593,469 Pending
Last Updated: 8 months, 4 weeks ago
Date # Transaction
3/5/2024eGrant day-of Notification
3/5/2024Recordation of Patent Grant Mailed
3/5/2024Email Notification
3/5/2024Mail Patent eGrant Notification
3/5/2024Patent eGrant Notification
3/5/2024Recordation of Patent eGrant
3/5/2024Patent Issue Date Used in PTA Calculation
3/5/202474.5PTA 36 Months
3/5/202474Patent Issue Date Used in PTA Calculation
2/15/2024Email Notification
2/14/2024Issue Notification
2/14/2024Issue Notification Mailed
1/30/2024Dispatch to FDC
1/30/2024Application Is Considered Ready for Issue
1/30/202472Dispatch to FDC
1/30/202471Application Is Considered Ready for Issue
1/24/2024Response to Amendment under Rule 312 Office Actions Communications
1/24/2024Amendment After Final or under 37CFR 1.312, initialed by the examiner. In-house documents including Examiner Notes/Search Results
1/24/2024Email Notification
1/24/2024Mail Response to 312 Amendment (PTO-271)
1/24/202469Email Notification
1/24/202467Mail Response to 312 Amendment (PTO-271)
1/23/2024Issue Fee Payment (PTO-85B) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
1/23/2024Electronic Filing System Acknowledgment Receipt Office Actions Communications
1/23/2024Electronic Fee Payment
1/23/2024Issue Fee Payment Verified
1/23/2024Issue Fee Payment Received
1/23/202470Issue Fee Payment Verified
1/23/202468Issue Fee Payment Received
1/18/2024Response to Amendment under Rule 312
1/18/2024Pubs Case Remand to TC
1/18/202465Response to Amendment under Rule 312
1/18/202464Pubs Case Remand to TC
1/10/2024Electronic Filing System Acknowledgment Receipt Office Actions Communications
1/10/2024Amendment after Notice of Allowance (Rule 312) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
1/10/2024Claims Application Documents
1/10/2024Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
1/10/2024Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
1/10/2024

Event:

Allowance
Amendment after Notice of Allowance (Rule 312)
1/10/2024

Event:

Allowance
Response to Reasons for Allowance
1/10/202463Amendment after Notice of Allowance (Rule 312)
1/10/202462Response to Reasons for Allowance
12/20/2023

Event:

Office Action
Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
12/20/2023List of References cited by applicant and considered by examiner Documents including citations
12/20/2023Email Notification
12/20/2023Mailing Corrected Notice of Allowability
12/20/202361Email Notification
12/20/202360Mailing Corrected Notice of Allowability
12/15/2023Corrected Notice of Allowability
12/15/2023Information Disclosure Statement considered
12/15/202358Corrected Notice of Allowability
12/15/202357Information Disclosure Statement considered
12/14/2023Pubs Case Remand to TC
12/14/202356Pubs Case Remand to TC
12/7/2023Foreign Reference Documents including citations
12/7/2023Electronic Filing System Acknowledgment Receipt Office Actions Communications
12/7/2023Patent Term Adjustment Statement under 37 CFR 1.704(d) filed with an IDS
12/7/2023Foreign Reference Documents including citations
12/7/2023Electronic Fee Payment
12/7/2023Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
12/7/2023Information Disclosure Statement (IDS) Filed
12/7/2023Information Disclosure Statement (IDS) Filed
12/7/202355Information Disclosure Statement (IDS) Filed
12/7/202354Information Disclosure Statement (IDS) Filed
10/24/2023

Event:

Office Action
Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
10/24/2023Search information including classification, databases and other search related notes Documents including classifications
10/24/2023Issue Information including classification, examiner, name, claim, renumbering, etc. Documents including classifications
10/24/2023Index of Claims In-house documents including Examiner Notes/Search Results
10/24/2023Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
10/24/2023Electronic Review
10/24/2023Email Notification
10/24/2023

Event:

Allowance
Mail Notice of Allowance
10/24/202352Electronic Review
10/24/202351Email Notification
10/24/202349Mail Notice of Allowance
10/20/2023

Event:

Allowance
Notice of Allowance Data Verification Completed
10/20/202344Notice of Allowance Data Verification Completed
10/3/2023Disposal for a RCE / CPA / R129
10/3/202340Disposal for a RCE / CPA / R129
9/19/2023Advisory Action (PTOL-303) Office Actions Communications
9/19/2023Amendment After Final or under 37CFR 1.312, initialed by the examiner. In-house documents including Examiner Notes/Search Results
9/19/2023Request for Continued Examination (RCE) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/19/2023Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
9/19/2023Electronic Filing System Acknowledgment Receipt Office Actions Communications
9/19/2023Request for Continued Examination (RCE)
9/19/2023Workflow - Request for RCE - Begin
9/19/2023Email Notification
9/19/2023Mail Advisory Action (PTOL - 303)
9/19/202341Request for Continued Examination (RCE)
9/19/202339Workflow - Request for RCE - Begin
9/19/202338Email Notification
9/19/202337Mail Advisory Action (PTOL - 303)
9/13/2023Advisory Action (PTOL-303)
9/13/202336Advisory Action (PTOL-303)
9/12/2023Date Forwarded to Examiner
9/12/202335Date Forwarded to Examiner
9/11/2023Terminal Disclaimer review decision In-house documents including Examiner Notes/Search Results
9/11/2023PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
9/11/202332PARALEGAL OR ELECTRONIC TERMINAL DISCLAIMER APPROVED
9/10/2023Response After Final Action Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/10/2023Claims Application Documents
9/10/2023Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/10/2023After Final Consideration Program Request
9/10/2023Terminal Disclaimer Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/10/2023Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
9/10/2023Electronic Filing System Acknowledgment Receipt Office Actions Communications
9/10/2023Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
9/10/2023Response after Final Action
9/10/2023PILOT- Request for After Final Consideration Program
9/10/2023Terminal Disclaimer Filed
9/10/202334Response after Final Action
9/10/202333PILOT- Request for After Final Consideration Program
9/10/202331Terminal Disclaimer Filed
7/12/2023

Event:

Office Action
Final Rejection Office Actions Communications
7/12/2023Search information including classification, databases and other search related notes Documents including classifications
7/12/2023Index of Claims In-house documents including Examiner Notes/Search Results
7/12/2023Electronic Review
7/12/2023Email Notification
7/12/2023

Event:

Office Action
Mail Final Rejection (PTOL - 326)
7/12/202330Electronic Review
7/12/202329Email Notification
7/12/202328Mail Final Rejection (PTOL - 326)
7/7/2023

Event:

Office Action
Final Rejection
7/7/202327Final Rejection
5/13/2023Date Forwarded to Examiner
5/13/202326Date Forwarded to Examiner
5/8/2023Amendment/Request for Reconsideration-After Non-Final Rejection Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/8/2023Claims Application Documents
5/8/2023Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/8/2023Electronic Filing System Acknowledgment Receipt Office Actions Communications
5/8/2023Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
5/8/2023Response after Non-Final Action
5/8/202325Response after Non-Final Action
2/22/2023Email Notification
2/22/202323Email Notification
2/10/2023

Event:

Office Action
Non-Final Rejection First Office Action (substantive examination)
2/10/2023List of references cited by examiner Documents including citations
2/10/2023Index of Claims In-house documents including Examiner Notes/Search Results
2/10/2023Search information including classification, databases and other search related notes Documents including classifications
2/10/2023List of References cited by applicant and considered by examiner Documents including citations
2/10/2023Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
2/10/2023Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/10/2023Electronic Review
2/10/2023

Event:

Office Action
Mail Non-Final Rejection
2/10/202324Electronic Review
2/10/202322Mail Non-Final Rejection
2/7/2023

Event:

Office Action
Non-Final Rejection
2/7/202321Non-Final Rejection
2/3/2023Information Disclosure Statement considered
2/3/202320Information Disclosure Statement considered
1/7/2023Case Docketed to Examiner in GAU
1/7/202319Case Docketed to Examiner in GAU
11/11/2022Email Notification
11/11/202218Email Notification
11/10/2022Notice of Publication
11/10/2022Application ready for PDX access by participating foreign offices
11/10/2022PG-Pub Issue Notification
11/10/202217Application ready for PDX access by participating foreign offices
11/10/202216PG-Pub Issue Notification
9/13/2022Case Docketed to Examiner in GAU
9/13/202215Case Docketed to Examiner in GAU
8/4/2022Filing Receipt
8/4/2022Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
8/4/2022Email Notification
8/4/2022Application Is Now Complete
8/4/2022Filing Receipt
8/4/202213Email Notification
8/4/20229Application Is Now Complete
8/4/20228Filing Receipt
8/3/2022Application Dispatched from OIPE
8/3/2022FITF set to YES - revise initial setting
8/3/202212Application Dispatched from OIPE
8/3/202211FITF set to YES - revise initial setting
7/25/2022Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/25/2022Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
7/25/2022Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/25/2022Electronic Filing System Acknowledgment Receipt Office Actions Communications
7/25/2022Specification Application Documents
7/25/2022Claims Application Documents
7/25/2022Abstract Application Documents
7/25/2022Drawings-other than black and white line drawings
7/25/2022Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE)
7/25/2022Information Disclosure Statement (IDS) Filed
7/25/2022Patent Term Adjustment - Ready for Examination
7/25/2022PTO/SB/69-Authorize EPO Access to Search Results
7/25/2022Applicants have given acceptable permission for participating foreign
7/25/2022Information Disclosure Statement (IDS) Filed
7/25/2022Entity Status Set To Undiscounted (Initial Default Setting or Status Change)
7/25/2022Initial Exam Team nn
7/25/202214Information Disclosure Statement (IDS) Filed
7/25/202210Patent Term Adjustment - Ready for Examination
7/25/20227PTO/SB/69-Authorize EPO Access to Search Results
7/25/20226Applicants have given acceptable permission for participating foreign
7/25/20223Information Disclosure Statement (IDS) Filed
7/25/20222Entity Status Set To Undiscounted (Initial Default Setting or Status Change)
7/25/20221Initial Exam Team nn
7/25/20220.5Filing date