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METHOD AND APPARATUS FOR PLASMA ETCHING

15/841,230 | U.S. Patent Application

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Location ELECTRONIC
Filed Dec. 13, 2017
Examiner DUY VU NGUYEN DEO
Class 216
Art Group 1713
Patent No. 10,580,617
Case Type Utility - 216/056000
Status Patented Case
Parent 15/133,989 Patented
Child 10-2016-0006955
Last Updated: 4 years, 3 months ago
Date # Transaction
3/3/2020Recordation of Patent Grant Mailed
3/3/2020Patent Issue Date Used in PTA Calculation
3/3/202050.5PTA 36 Months
3/3/202050Patent Issue Date Used in PTA Calculation
2/13/2020Email Notification
2/12/2020Issue Notification
2/12/2020Issue Notification Mailed
1/27/2020Dispatch to FDC
1/27/2020Application Is Considered Ready for Issue
1/27/202048Dispatch to FDC
1/27/202047Application Is Considered Ready for Issue
1/20/2020Issue Fee Payment (PTO-85B) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
1/20/2020Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
1/20/2020EFS Acknowledgment Receipt Office Actions Communications
1/20/2020Issue Fee Payment Verified
1/20/2020Issue Fee Payment Received
1/20/202046Issue Fee Payment Verified
1/20/202045Issue Fee Payment Received
10/21/2019

Event:

Office Action
Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
10/21/2019Issue Information including classification, examiner, name, claim, renumbering, etc. Documents including classifications
10/21/2019Search information including classification, databases and other search related notes Documents including classifications
10/21/2019Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
10/21/2019Electronic Review
10/21/2019Email Notification
10/21/2019

Event:

Allowance
Mail Notice of Allowance
10/21/201943Electronic Review
10/21/201941Email Notification
10/21/201940Mail Notice of Allowance
10/17/2019

Event:

Allowance
Notice of Allowance Data Verification Completed
10/17/201935Notice of Allowance Data Verification Completed
10/16/2019

Event:

Allowance
Reasons for Allowance
10/16/201934Reasons for Allowance
9/9/2019Date Forwarded to Examiner
9/9/201932Date Forwarded to Examiner
9/4/2019Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/4/2019Claims Application Documents
9/4/2019Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/4/2019EFS Acknowledgment Receipt Office Actions Communications
9/4/2019Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
9/4/2019Response after Non-Final Action
9/4/201931Response after Non-Final Action
6/6/2019

Event:

Office Action
Non-Final Rejection First Office Action (substantive examination)
6/6/2019List of references cited by examiner Documents including citations
6/6/2019Index of Claims In-house documents including Examiner Notes/Search Results
6/6/2019Search information including classification, databases and other search related notes Documents including classifications
6/6/2019List of References cited by applicant and considered by examiner Documents including citations
6/6/2019List of References cited by applicant and considered by examiner Documents including citations
6/6/2019Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
6/6/2019Electronic Review
6/6/2019Email Notification
6/6/2019

Event:

Office Action
Mail Non-Final Rejection
6/6/201930Electronic Review
6/6/201929Email Notification
6/6/201928Mail Non-Final Rejection
6/3/2019

Event:

Office Action
Non-Final Rejection
6/3/2019Information Disclosure Statement considered
6/3/2019Information Disclosure Statement considered
6/3/201927Non-Final Rejection
6/3/201926Information Disclosure Statement considered
6/3/201925Information Disclosure Statement considered
5/20/2019Case Docketed to Examiner in GAU
5/20/201924Case Docketed to Examiner in GAU
8/1/2018Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
8/1/2018Non Patent Literature
8/1/2018EFS Acknowledgment Receipt Office Actions Communications
8/1/2018Information Disclosure Statement (IDS) Filed
8/1/2018Information Disclosure Statement (IDS) Filed
8/1/201823Information Disclosure Statement (IDS) Filed
8/1/201822Information Disclosure Statement (IDS) Filed
4/13/2018Email Notification
4/13/201821Email Notification
4/12/2018Notice of Publication
4/12/2018PG-Pub Issue Notification
4/12/201820PG-Pub Issue Notification
2/2/2018Priority document has successfully retrieved via PDX/DAS
2/2/201819Priority document has successfully retrieved via PDX/DAS
2/1/2018Priority Documents electronically retrieved by USPTO from a participating IP Office In-house documents including Examiner Notes/Search Results
1/24/2018Case Docketed to Examiner in GAU
1/24/201818Case Docketed to Examiner in GAU
1/5/2018Filing Receipt
1/5/2018Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
1/5/2018Email Notification
1/5/2018Application ready for PDX access by participating foreign offices
1/5/2018Application Is Now Complete
1/5/2018Filing Receipt
1/5/201816Email Notification
1/5/201815Application ready for PDX access by participating foreign offices
1/5/201811Application Is Now Complete
1/5/201810Filing Receipt
1/4/2018Application Dispatched from OIPE
1/4/2018FITF set to YES - revise initial setting
1/4/201814Application Dispatched from OIPE
1/4/201813FITF set to YES - revise initial setting
12/22/2017Cleared by OIPE CSR
12/22/20175Cleared by OIPE CSR
12/13/2017Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/13/2017Assignee showing of ownership per 37 CFR 3.73
12/13/2017Application Data Sheet Application Documents
12/13/2017Drawings-only black and white line drawings Application Documents
12/13/2017Oath or Declaration filed Application Documents
12/13/2017Specification Application Documents
12/13/2017Claims Application Documents
12/13/2017Abstract Application Documents
12/13/2017Foreign Reference Documents including citations
12/13/2017Foreign Reference Documents including citations
12/13/2017Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
12/13/2017Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
12/13/2017EFS Acknowledgment Receipt Office Actions Communications
12/13/2017Information Disclosure Statement (IDS) Filed
12/13/2017Patent Term Adjustment - Ready for Examination
12/13/2017Request from applicant for the USPTO to retrieve the Priority Document
12/13/2017PTO/SB/69-Authorize EPO Access to Search Results
12/13/2017Applicants have given acceptable permission for participating foreign
12/13/2017Request from applicant for the USPTO to retrieve the Priority Document
12/13/2017Information Disclosure Statement (IDS) Filed
12/13/2017IFW Scan & PACR Auto Security Review
12/13/2017ENTITY STATUS SET TO UNDISCOUNTED (INITIAL DEFAULT SETTING OR STATUS CHANGE)
12/13/2017Initial Exam Team nn
12/13/201717Information Disclosure Statement (IDS) Filed
12/13/201712Patent Term Adjustment - Ready for Examination
12/13/20179Request from applicant for the USPTO to retrieve the Priority Document
12/13/20178PTO/SB/69-Authorize EPO Access to Search Results
12/13/20177Applicants have given acceptable permission for participating foreign
12/13/20176Request from applicant for the USPTO to retrieve the Priority Document
12/13/20174Information Disclosure Statement (IDS) Filed
12/13/20173IFW Scan & PACR Auto Security Review
12/13/20172ENTITY STATUS SET TO UNDISCOUNTED (INITIAL DEFAULT SETTING OR STATUS CHANGE)
12/13/20171Initial Exam Team nn
12/13/20170.5Filing date
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