Reticle Cooling in a Lithographic Apparatus

13/97,781 | U.S. Patent Application

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Location ELECTRONIC
Filed April 29, 2011
Examiner COLIN WRIGHT KREUTZER
Class 355
Art Group 2882
Case Type Utility - 355/075000
Status Abandoned -- Failure to Respond to an Office Action
Parent 61/369,960 Expired
Last Updated: 5 years, 1 month ago
Date # Transaction
7/16/2014Abandonment Office Actions Communications
7/16/2014Mail Abandonment for Failure to Respond to Office Action
7/11/2014Aband. for Failure to Respond to O. A.
2/26/2014Advisory Action (PTOL-303) Office Actions Communications
2/26/2014Amendment After Final or under 37CFR 1.312, initialed by the examiner. In-house documents including Examiner Notes/Search Results
2/26/2014Mail Advisory Action (PTOL - 303)
2/18/2014Advisory Action (PTOL-303)
2/16/2014Date Forwarded to Examiner
2/12/2014Response After Final Action Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/12/2014Claims Application Documents
2/12/2014Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/12/2014EFS Acknowledgment Receipt Office Actions Communications
2/12/2014Transmittal Letter
2/12/2014Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/12/2014Response after Final Action
1/10/2014Final Rejection Office Actions Communications
1/10/2014List of references cited by examiner Documents including citations
1/10/2014Search information including classification, databases and other search related notes Documents including classifications
1/10/2014Index of Claims In-house documents including Examiner Notes/Search Results
1/10/2014Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
1/10/2014Mail Final Rejection (PTOL - 326)
1/10/2014Final Rejection
12/11/2013Date Forwarded to Examiner
12/9/2013Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/9/2013Specification Application Documents
12/9/2013Claims Application Documents
12/9/2013Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/9/2013EFS Acknowledgment Receipt Office Actions Communications
12/9/2013Transmittal Letter
12/9/2013Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
12/9/2013Response after Non-Final Action
9/10/2013Non-Final Rejection First Office Action (substantive examination)
9/10/2013List of references cited by examiner Documents including citations
9/10/2013List of References cited by applicant and considered by examiner Documents including citations
9/10/2013Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
9/10/2013Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/10/2013Index of Claims In-house documents including Examiner Notes/Search Results
9/10/2013Search information including classification, databases and other search related notes Documents including classifications
9/10/2013Mail Non-Final Rejection
9/3/2013Non-Final Rejection
8/23/2013Date Forwarded to Examiner
8/21/2013Response to Election / Restriction Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/21/2013EFS Acknowledgment Receipt Office Actions Communications
8/21/2013Transmittal Letter
8/21/2013Response to Election / Restriction Filed
7/23/2013Requirement for Restriction/Election Office Actions Communications
7/23/2013Index of Claims In-house documents including Examiner Notes/Search Results
7/23/2013Mail Restriction Requirement
7/19/2013Restriction/Election Requirement
12/4/2012Case Docketed to Examiner in GAU
4/13/2012Case Docketed to Examiner in GAU
2/2/2012Notice of Publication
2/2/2012PG-Pub Issue Notification
9/19/2011Case Docketed to Examiner in GAU
8/12/2011Application Dispatched from OIPE
7/22/2011Filing Receipt
7/22/2011Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/22/2011Communication - Re: Power of Attorney (PTOL-308) Office Actions Communications
7/22/2011Application Is Now Complete
7/22/2011Change in Power of Attorney (May Include Associate POA)
7/22/2011Sent to Classification Contractor
7/22/2011Filing Receipt - Updated
7/13/2011Applicant Response to Pre-Exam Formalities Notice Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/13/2011Oath or Declaration filed Application Documents
7/13/2011Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/13/2011Assignee showing of ownership per 37 CFR 3.73
7/13/2011Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/13/2011EFS Acknowledgment Receipt Office Actions Communications
7/13/2011Payment of additional filing fee/Preexam
7/13/2011A statement by one or more inventors satisfying the requirement under 35 USC 115, Oath of the Applic
6/13/2011Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
6/13/2011Foreign Reference Documents including citations
6/13/2011EFS Acknowledgment Receipt Office Actions Communications
6/13/2011Transmittal Letter
6/13/2011Transmittal Letter
6/13/2011Information Disclosure Statement considered
6/13/2011Information Disclosure Statement (IDS) Filed
6/13/2011Information Disclosure Statement (IDS) Filed
5/16/2011Filing Receipt
5/16/2011Notice to File Missing Parts
5/16/2011Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
5/16/2011Notice Mailed--Application Incomplete--Filing Date Assigned
5/16/2011Filing Receipt
5/2/2011Cleared by OIPE CSR
4/29/2011Transmittal of New Application Written Arguments, Opinions, Incoming amendments, Papers received from applicants
4/29/2011Authorization for Extension of Time all replies Written Arguments, Opinions, Incoming amendments, Papers received from applicants
4/29/2011Application Data Sheet Application Documents
4/29/2011Auth or Resc of Auth to Access Appl by DAS/PDX Office Written Arguments, Opinions, Incoming amendments, Papers received from applicants
4/29/2011Specification Application Documents
4/29/2011Claims Application Documents
4/29/2011Abstract Application Documents
4/29/2011Drawings-only black and white line drawings Application Documents
4/29/2011EFS Acknowledgment Receipt Office Actions Communications
4/29/2011Applicants have given acceptable permission for participating foreign
4/29/2011IFW Scan & PACR Auto Security Review
4/29/2011Initial Exam Team nn