Lithographic apparatus and method

11/730,191 | U.S. Patent Application

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Location ELECTRONIC
Filed March 29, 2007
Examiner COLIN WRIGHT KREUTZER
Class 355
Art Group 2882
Patent No. 8,947,641
Case Type Utility - 355/052000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 11/589,300 Patented
Last Updated: 4 years, 10 months ago
Date # Transaction
3/11/2019Expire Patent
9/24/2018Maintenance Fee Reminder Mailed
2/3/2015Recordation of Patent Grant Mailed
2/3/2015Patent Issue Date Used in PTA Calculation
2/3/2015116.5PTA 36 Months
2/3/2015116Patent Issue Date Used in PTA Calculation
1/14/2015Issue Notification
1/14/2015Issue Notification Mailed
12/19/2014Dispatch to FDC
12/19/2014114Dispatch to FDC
12/17/2014Issue Fee Payment (PTO-85B) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/17/2014Post Allowance Communication - Incoming Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/17/2014Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
12/17/2014EFS Acknowledgment Receipt Office Actions Communications
12/17/2014Transmittal Letter
12/17/2014

Event:

Allowance
Response to Reasons for Allowance
12/17/2014Issue Fee Payment Verified
12/17/2014Application Is Considered Ready for Issue
12/17/2014Issue Fee Payment Received
12/17/2014113Response to Reasons for Allowance
12/17/2014112Issue Fee Payment Verified
12/17/2014111Application Is Considered Ready for Issue
12/17/2014110Issue Fee Payment Received
10/1/2014Response to Amendment under Rule 312 Office Actions Communications
10/1/2014Mail Response to 312 Amendment (PTO-271)
10/1/2014108Mail Response to 312 Amendment (PTO-271)
9/30/2014Response to Amendment under Rule 312
9/30/2014106Response to Amendment under Rule 312
9/26/2014Response to Amendment under Rule 312 Office Actions Communications
9/26/2014Amendment After Final or under 37CFR 1.312, initialed by the examiner. In-house documents including Examiner Notes/Search Results
9/26/2014Printer Rush- No mailing
9/26/2014Printer Rush- No mailing
9/26/2014105Printer Rush- No mailing
9/26/2014104Printer Rush- No mailing
9/25/2014Pubs Case Remand to TC
9/25/2014103Pubs Case Remand to TC
9/23/2014Amendment after Notice of Allowance (Rule 312) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/23/2014Specification Application Documents
9/23/2014Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/23/2014EFS Acknowledgment Receipt Office Actions Communications
9/23/2014Transmittal Letter
9/23/2014

Event:

Allowance
Amendment after Notice of Allowance (Rule 312)
9/23/2014102Amendment after Notice of Allowance (Rule 312)
9/18/2014Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
9/18/2014Examiner initiated interview summary (PTOL-413B)
9/18/2014Search information including classification, databases and other search related notes Documents including classifications
9/18/2014Issue Information including classification, examiner, name, claim, renumbering, etc. Documents including classifications
9/18/2014Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
9/18/2014

Event:

Allowance
Mail Notice of Allowance
9/18/2014100Mail Notice of Allowance
9/17/2014

Event:

Allowance
Notice of Allowance Data Verification Completed
9/17/201492Notice of Allowance Data Verification Completed
9/9/2014Interview Summary - Examiner Initiated - Telephonic
9/9/2014Interview Summary - Examiner Initiated
9/9/2014

Event:

Allowance
Reasons for Allowance
9/9/2014Examiner's Amendment Communication
9/9/201491Interview Summary - Examiner Initiated - Telephonic
9/9/201490Interview Summary - Examiner Initiated
9/9/201489Reasons for Allowance
9/9/201488Examiner's Amendment Communication
6/23/2014Date Forwarded to Examiner
6/23/201486Date Forwarded to Examiner
6/19/2014Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/19/2014Claims Application Documents
6/19/2014Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/19/2014EFS Acknowledgment Receipt Office Actions Communications
6/19/2014Transmittal Letter
6/19/2014Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
6/19/2014Response after Non-Final Action
6/19/201485Response after Non-Final Action
4/2/2014Non-Final Rejection Office Actions Communications
4/2/2014List of references cited by examiner Documents including citations
4/2/2014List of References cited by applicant and considered by examiner Documents including citations
4/2/2014Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
4/2/2014Index of Claims In-house documents including Examiner Notes/Search Results
4/2/2014Search information including classification, databases and other search related notes Documents including classifications
4/2/2014Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
4/2/2014Mail Non-Final Rejection
4/2/201484Mail Non-Final Rejection
3/28/2014Non-Final Rejection
3/28/201480Non-Final Rejection
3/25/2014Information Disclosure Statement considered
3/25/201477Information Disclosure Statement considered
3/24/2014Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
3/24/2014Foreign Reference Documents including citations
3/24/2014Foreign Reference Documents including citations
3/24/2014Foreign Reference Documents including citations
3/24/2014Foreign Reference Documents including citations
3/24/2014Non Patent Literature
3/24/2014Non Patent Literature
3/24/2014EFS Acknowledgment Receipt Office Actions Communications
3/24/2014Transmittal Letter
3/24/2014Transmittal Letter
3/24/2014Reference capture on IDS
3/24/2014Information Disclosure Statement (IDS) Filed
3/24/2014Information Disclosure Statement (IDS) Filed
3/24/201482Reference capture on IDS
3/24/201481Information Disclosure Statement (IDS) Filed
3/24/201476Information Disclosure Statement (IDS) Filed
3/23/2014Date Forwarded to Examiner
3/23/2014Disposal for a RCE / CPA / R129
3/23/201475Date Forwarded to Examiner
3/23/201472Disposal for a RCE / CPA / R129
3/18/2014Request for Continued Examination (RCE) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/18/2014Amendment Submitted/Entered with Filing of CPA/RCE Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/18/2014Claims Application Documents
3/18/2014Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/18/2014Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/18/2014EFS Acknowledgment Receipt Office Actions Communications
3/18/2014Transmittal Letter
3/18/2014Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/18/2014Request for Continued Examination (RCE)
3/18/2014Workflow - Request for RCE - Begin
3/18/201473Request for Continued Examination (RCE)
3/18/201471Workflow - Request for RCE - Begin
1/31/2014Patent Board Decision - Examiner Affirmed in Part Office Actions Communications
1/31/2014Mail BPAI Decision on Appeal - Affirmed in Part
1/31/2014BPAI Decision - Examiner Affirmed in Part
1/31/201470Mail BPAI Decision on Appeal - Affirmed in Part
1/31/201469BPAI Decision - Examiner Affirmed in Part
9/15/2011Appeal Docketing Notice Office Actions Communications
9/15/2011Docketing Notice Mailed to Appellant
9/15/201167Docketing Notice Mailed to Appellant
9/14/2011Assignment of Appeal Number
9/14/201166Assignment of Appeal Number
9/12/2011Reply Brief Noted - Patent Board Office Actions Communications
9/12/2011Appeal Awaiting BPAI Docketing
9/12/2011Mail Reply Brief Noted by Examiner
9/12/201165Appeal Awaiting BPAI Docketing
9/12/201164Mail Reply Brief Noted by Examiner
9/7/2011Reply Brief Noted by Examiner
9/7/201162Reply Brief Noted by Examiner
8/26/2011Date Forwarded to Examiner
8/26/201161Date Forwarded to Examiner
8/22/2011Reply Brief Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/22/2011EFS Acknowledgment Receipt Office Actions Communications
8/22/2011Transmittal Letter
8/22/2011Reply Brief Filed
8/22/201160Reply Brief Filed
7/11/2011Exam. Ans. Review Complete
7/11/201159Exam. Ans. Review Complete
6/22/2011Examiner's Answer to Appeal Brief Office Actions Communications
6/22/2011Mail Examiner's Answer
6/22/201158Mail Examiner's Answer
6/20/2011Examiner's Answer to Appeal Brief
6/20/201157Examiner's Answer to Appeal Brief
3/31/2011Date Forwarded to Examiner
3/31/201156Date Forwarded to Examiner
3/18/2011Appeal Brief Review Complete
3/18/201154Appeal Brief Review Complete
3/16/2011Appeal Brief Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/16/2011Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/16/2011EFS Acknowledgment Receipt Office Actions Communications
3/16/2011Transmittal Letter
3/16/2011Extension of Time Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/16/2011Appeal Brief Filed
3/16/2011Request for Extension of Time - Granted
3/16/201155Appeal Brief Filed
3/16/201153Request for Extension of Time - Granted
9/20/2010Pre-Brief Appeal Conference decision Office Actions Communications
9/20/2010Mail Appeals conf. Proceed to BPAI
9/20/201052Mail Appeals conf. Proceed to BPAI
9/16/2010Pre-Appeals Conference Decision - Proceed to BPAI
9/16/201051Pre-Appeals Conference Decision - Proceed to BPAI
8/20/2010Pre-Brief Conference request Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/20/2010Transmittal Letter
8/20/2010Notice of Appeal Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/20/2010Extension of Time Written Arguments, Opinions, Incoming amendments, Papers received from applicants
8/20/2010Request for Pre-Appeal Conference Filed
8/20/2010Notice of Appeal Filed
8/20/2010Request for Extension of Time - Granted
8/20/201050Request for Pre-Appeal Conference Filed
8/20/201049Notice of Appeal Filed
8/20/201048Request for Extension of Time - Granted
7/8/2010Advisory Action (PTOL-303) Office Actions Communications
7/8/2010Miscellaneous Internal Document In-house documents including Examiner Notes/Search Results
7/8/2010Mail Advisory Action (PTOL - 303)
7/8/201047Mail Advisory Action (PTOL - 303)
7/6/2010Advisory Action (PTOL-303)
7/6/201046Advisory Action (PTOL-303)
6/22/2010Date Forwarded to Examiner
6/22/201045Date Forwarded to Examiner
6/21/2010Response After Final Action Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/21/2010Claims Application Documents
6/21/2010Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/21/2010EFS Acknowledgment Receipt Office Actions Communications
6/21/2010Transmittal Letter
6/21/2010Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
6/21/2010Response after Final Action
6/21/201044Response after Final Action
4/20/2010Final Rejection Office Actions Communications
4/20/2010Index of Claims In-house documents including Examiner Notes/Search Results
4/20/2010Mail Final Rejection (PTOL - 326)
4/20/201043Mail Final Rejection (PTOL - 326)
4/19/2010Final Rejection
4/19/201042Final Rejection
3/12/2010Date Forwarded to Examiner
3/12/201041Date Forwarded to Examiner
2/18/2010Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/18/2010Claims Application Documents
2/18/2010Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/18/2010EFS Acknowledgment Receipt Office Actions Communications
2/18/2010Transmittal Letter
2/18/2010Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/18/2010Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
2/18/2010Response after Non-Final Action
2/18/201040Response after Non-Final Action
11/18/2009Non-Final Rejection Office Actions Communications
11/18/2009List of references cited by examiner Documents including citations
11/18/2009List of References cited by applicant and considered by examiner Documents including citations
11/18/2009Search information including classification, databases and other search related notes Documents including classifications
11/18/2009Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
11/18/2009Index of Claims In-house documents including Examiner Notes/Search Results
11/18/2009List of References cited by applicant and considered by examiner Documents including citations
11/18/2009List of References cited by applicant and considered by examiner Documents including citations
11/18/2009Mail Non-Final Rejection
11/18/200939Mail Non-Final Rejection
11/9/2009Non-Final Rejection
11/9/200938Non-Final Rejection
10/6/2009Case Docketed to Examiner in GAU
10/6/200935Case Docketed to Examiner in GAU
8/27/2009Date Forwarded to Examiner
8/27/200934Date Forwarded to Examiner
7/15/2009Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/15/2009Specification Application Documents
7/15/2009Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/15/2009Claims Application Documents
7/15/2009Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/15/2009Drawings-only black and white line drawings Application Documents
7/15/2009EFS Acknowledgment Receipt Office Actions Communications
7/15/2009Transmittal Letter
7/15/2009Response after Non-Final Action
7/15/200933Response after Non-Final Action
7/7/2009Case Docketed to Examiner in GAU
7/7/200930Case Docketed to Examiner in GAU
5/28/2009Communication - Re: Power of Attorney (PTOL-308) Office Actions Communications
5/28/2009Communication - Re: Power of Attorney (PTOL-308) Office Actions Communications
5/28/2009Change in Power of Attorney (May Include Associate POA)
5/28/200929Change in Power of Attorney (May Include Associate POA)
5/4/2009Non-Final Rejection First Office Action (substantive examination)
5/4/2009List of references cited by examiner Documents including citations
5/4/2009Index of Claims In-house documents including Examiner Notes/Search Results
5/4/2009Search information including classification, databases and other search related notes Documents including classifications
5/4/2009Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/4/2009Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
5/4/2009List of References cited by applicant and considered by examiner Documents including citations
5/4/2009List of References cited by applicant and considered by examiner Documents including citations
5/4/2009List of References cited by applicant and considered by examiner Documents including citations
5/4/2009Mail Non-Final Rejection
5/4/200928Mail Non-Final Rejection
5/2/2009Non-Final Rejection
5/2/200927Non-Final Rejection
4/13/2009Case Docketed to Examiner in GAU
4/13/200920Case Docketed to Examiner in GAU
4/8/2009Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
4/8/2009EFS Acknowledgment Receipt Office Actions Communications
4/8/2009Transmittal Letter
4/8/2009Information Disclosure Statement (IDS) Filed
4/8/2009Reference capture on IDS
4/8/2009Information Disclosure Statement considered
4/8/2009Information Disclosure Statement (IDS) Filed
4/8/200937Information Disclosure Statement (IDS) Filed
4/8/200936Reference capture on IDS
4/8/200921Information Disclosure Statement considered
4/8/200919Information Disclosure Statement (IDS) Filed
2/19/2009Transmittal Letter
2/19/2009Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
2/19/2009Non Patent Literature
2/19/2009EFS Acknowledgment Receipt Office Actions Communications
2/19/2009Reference capture on IDS
2/19/2009Information Disclosure Statement (IDS) Filed
2/19/2009Information Disclosure Statement considered
2/19/2009Information Disclosure Statement (IDS) Filed
2/19/200932Reference capture on IDS
2/19/200931Information Disclosure Statement (IDS) Filed
2/19/200922Information Disclosure Statement considered
2/19/200918Information Disclosure Statement (IDS) Filed
1/26/2009Correspondence Address Change
1/26/200917Correspondence Address Change
12/29/2008Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/29/2008Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/29/2008Assignee showing of ownership per 37 CFR 3.73
12/29/2008EFS Acknowledgment Receipt Office Actions Communications
7/25/2008Transmittal Letter
7/25/2008Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
7/25/2008EFS Acknowledgment Receipt Office Actions Communications
7/25/2008Information Disclosure Statement considered
7/25/2008Reference capture on IDS
7/25/2008Information Disclosure Statement (IDS) Filed
7/25/2008Information Disclosure Statement (IDS) Filed
7/25/200823Information Disclosure Statement considered
7/25/200816Reference capture on IDS
7/25/200815Information Disclosure Statement (IDS) Filed
7/25/200814Information Disclosure Statement (IDS) Filed
5/1/2008Notice of Publication
5/1/2008PG-Pub Issue Notification
5/1/200813PG-Pub Issue Notification
2/15/2008Case Docketed to Examiner in GAU
2/15/200812Case Docketed to Examiner in GAU
1/9/2008IFW TSS Processing by Tech Center Complete
1/9/200811IFW TSS Processing by Tech Center Complete
11/19/2007Application Dispatched from OIPE
11/19/200710Application Dispatched from OIPE
6/11/2007Filing Receipt
6/11/2007Sent to Classification Contractor
6/11/2007Application Is Now Complete
6/11/20079Sent to Classification Contractor
6/11/20078Application Is Now Complete
5/31/2007Applicant Response to Pre-Exam Formalities Notice Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/31/2007Oath or Declaration filed Application Documents
5/31/2007Payment of additional filing fee/Preexam
5/31/2007A statement by one or more inventors satisfying the requirement under 35 USC 115, Oath of the Applic
5/31/20077Payment of additional filing fee/Preexam
5/31/20076A statement by one or more inventors satisfying the requirement under 35 USC 115, Oath of the Applic
4/19/2007Filing Receipt
4/19/2007Pre-Exam Formalities Notice Office Actions Communications
4/19/2007Notice Mailed--Application Incomplete--Filing Date Assigned
4/19/20075Notice Mailed--Application Incomplete--Filing Date Assigned
4/14/2007Cleared by OIPE CSR
4/14/20073Cleared by OIPE CSR
4/10/2007IFW Scan & PACR Auto Security Review
4/10/20072IFW Scan & PACR Auto Security Review
3/29/2007Transmittal of New Application Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/29/2007Specification Application Documents
3/29/2007Claims Application Documents
3/29/2007Abstract Application Documents
3/29/2007Drawings-only black and white line drawings Application Documents
3/29/2007Application Data Sheet Application Documents
3/29/2007Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/29/2007Initial Exam Team nn
3/29/20071Initial Exam Team nn
3/29/20070.5Filing date