LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

10/966,147 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 18, 2004
Examiner HUNG NGUYEN
Class 355
Art Group 2851
Patent No. 7,177,012
Case Type Utility - 355/069000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 11/703,823 Patented
Last Updated: 5 years, 8 months ago
Date # Transaction
3/18/2019Expire Patent
10/1/2018Maintenance Fee Reminder Mailed
4/10/2007Certificate of Correction - Post Issue Communication Office Actions Communications
3/21/2007Post Issue Communication - Certificate of Correction
3/9/2007Request for Certificate of Correction Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/9/2007EFS Acknowledgment Receipt Office Actions Communications
3/9/2007Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/13/2007Recordation of Patent Grant Mailed
2/13/2007Patent Issue Date Used in PTA Calculation
2/13/200744Patent Issue Date Used in PTA Calculation
2/1/2007Electronic Review
1/25/2007Issue Notification
1/25/2007Issue Notification Mailed
1/24/2007Email Notification
1/12/2007Dispatch to FDC
1/12/200742Dispatch to FDC
1/11/2007Application Is Considered Ready for Issue
1/11/200741Application Is Considered Ready for Issue
1/3/2007Issue Fee Payment (PTO-85B) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
1/3/2007Issue Fee Payment Verified
1/3/2007Issue Fee Payment Received
1/3/200740Issue Fee Payment Verified
1/3/200739Issue Fee Payment Received
10/4/2006Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
10/4/2006Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
10/4/2006Examiner Interview Summary Record (PTOL - 413) Office Actions Communications
10/4/2006Issue Information including classification, examiner, name, claim, renumbering, etc. Documents including classifications
10/4/2006Search information including classification, databases and other search related notes Documents including classifications
10/4/2006

Event:

Allowance
Mail Notice of Allowance
10/4/2006Mail Examiner's Amendment
10/4/200636Mail Notice of Allowance
10/4/200635Mail Examiner's Amendment
10/3/2006Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
10/2/2006

Event:

Allowance
Notice of Allowance Data Verification Completed
10/2/2006Examiner's Amendment Communication
10/2/200633Notice of Allowance Data Verification Completed
10/2/200632Examiner's Amendment Communication
9/25/2006Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
9/25/2006Examiner Interview Summary Record (PTOL - 413)
9/25/2006Date Forwarded to Examiner
9/25/200631Examiner Interview Summary Record (PTOL - 413)
9/25/200629Date Forwarded to Examiner
9/8/2006Amendment/Req. Reconsideration-After Non-Final Reject Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/8/2006Claims Application Documents
9/8/2006Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/8/2006Authorization for Extension of Time all replies Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/8/2006Response after Non-Final Action
9/8/200628Response after Non-Final Action
6/16/2006Non-Final Rejection First Office Action (substantive examination)
6/16/2006List of References cited by applicant and considered by examiner Documents including citations
6/16/2006List of references cited by examiner Documents including citations
6/16/2006Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
6/16/2006Search information including classification, databases and other search related notes Documents including classifications
6/16/2006Mail Non-Final Rejection
6/16/200627Mail Non-Final Rejection
6/10/2006Non-Final Rejection
6/10/200626Non-Final Rejection
6/3/2006Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
6/2/2006Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
3/29/2006Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
3/29/2006Foreign Reference Documents including citations
3/29/2006Non Patent Literature
3/29/2006Information Disclosure Statement considered
3/29/2006Reference capture on IDS
3/29/2006Information Disclosure Statement (IDS) Filed
3/29/2006Information Disclosure Statement (IDS) Filed
3/29/200625Information Disclosure Statement considered
3/29/200624Reference capture on IDS
3/29/200623Information Disclosure Statement (IDS) Filed
3/16/2006Information Disclosure Statement (IDS) Filed
1/5/2006Case Docketed to Examiner in GAU
1/5/200620Case Docketed to Examiner in GAU
5/4/2005Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
5/4/2005Information Disclosure Statement considered
5/4/2005Reference capture on IDS
5/4/2005Information Disclosure Statement (IDS) Filed
5/4/2005Information Disclosure Statement (IDS) Filed
5/4/200522Information Disclosure Statement considered
5/4/200519Reference capture on IDS
5/4/200518Information Disclosure Statement (IDS) Filed
3/14/2005IFW TSS Processing by Tech Center Complete
3/14/2005Case Docketed to Examiner in GAU
3/14/200517IFW TSS Processing by Tech Center Complete
3/14/200514Case Docketed to Examiner in GAU
3/7/2005Application Return from OIPE
3/7/2005Application Return TO OIPE
3/7/2005Application Dispatched from OIPE
3/7/2005Application Is Now Complete
3/7/200513Application Return from OIPE
3/7/200512Application Return TO OIPE
3/7/200511Application Dispatched from OIPE
3/7/200510Application Is Now Complete
2/22/2005Applicant Response to Pre-Exam Formalities Notice Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/22/2005Oath or Declaration filed Application Documents
2/22/2005Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
2/22/2005Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
2/22/2005Foreign Reference Documents including citations
2/22/2005Foreign Reference Documents including citations
2/22/2005Information Disclosure Statement considered
2/22/2005Reference capture on IDS
2/22/2005Information Disclosure Statement (IDS) Filed
2/22/2005Information Disclosure Statement (IDS) Filed
2/22/2005Additional Application Filing Fees
2/22/2005A statement by one or more inventors satisfying the requirement under 35 USC 115, Oath of the Applic
2/22/200521Information Disclosure Statement considered
2/22/200516Reference capture on IDS
2/22/200515Information Disclosure Statement (IDS) Filed
2/22/20059Additional Application Filing Fees
2/22/20058A statement by one or more inventors satisfying the requirement under 35 USC 115, Oath of the Applic
12/21/2004Pre-Exam Formalities Notice Office Actions Communications
12/21/2004Notice Mailed--Application Incomplete--Filing Date Assigned
12/21/20047Notice Mailed--Application Incomplete--Filing Date Assigned
12/7/2004Miscellaneous Incoming Letter Written Arguments, Opinions, Incoming amendments, Papers received from applicants
12/7/2004Cleared by L&R (LARS)
12/7/20045Cleared by L&R (LARS)
11/16/2004Referred to Level 2 (LARS) by OIPE CSR
11/16/20044Referred to Level 2 (LARS) by OIPE CSR
11/1/2004IFW Scan & PACR Auto Security Review
11/1/20042IFW Scan & PACR Auto Security Review
10/18/2004Transmittal of New Application Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/18/2004Specification Application Documents
10/18/2004Claims Application Documents
10/18/2004Abstract Application Documents
10/18/2004Drawings-only black and white line drawings Application Documents
10/18/2004Application Data Sheet Application Documents
10/18/2004Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
10/18/2004Initial Exam Team nn
10/18/20041Initial Exam Team nn