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Inventors

MICHAEL J. SELSER ERROL B. ARKILIC BABAK A. TAHERI

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SMC KABUSHIKI KAISHA

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REDWOOD MICROSYSTEMS, INC., Assignor

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APPARATUS AND METHOD FOR MOUNTING MICROMECHANICAL FLUID CONTROL COMPONENTS

09/368,456 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed July 9, 1999

Examiner JOHN C FOX

Class 137

Art Group 3753

Patent No. 6,123,107

Case Type Utility - 137/884000

Status Patented Case

Child PCT/US00/18765 -

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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APPARATUS AND METHOD FOR MOUNTING MICROMECHANICAL FLUID CONTROL COMPONENTS

09/368,456 | U.S. Patent Application

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