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Inventors

SHIGERU SAKUMA TSUTOMU MIZUGAKI MASAKI SHIOZAWA

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NIKON CORPORATION

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PROJECTION EXPOSURE APPARATUS

09/26,507 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Feb. 19, 1998

Examiner DELLA J RUTLEDGE

Class 355

Art Group 2851

Patent No. 5,978,070

Case Type Utility - 355/053000

Status Patented Case

Last Updated: 4 years, 11 months ago

Date	#	Transaction
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PROJECTION EXPOSURE APPARATUS

09/26,507 | U.S. Patent Application

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