Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 1 of 18
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`Exhibit 29
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`

`

`United States Patent (19)
`Kroeker et al.
`
`54 DUAL PLANE ROBOT
`75) Inventors: Tony Kroeker. Georgetown; Ben
`Mooring, Austin, both of Tex.
`
`73) Assignee: Applied Materials, Inc., Santa Clara.
`Calif.
`
`.: 67986
`21 Appl. No.: 679,868
`22 Filed:
`Jul. 15, 1996
`(51) Int. Cl. ............................. B25, 18/00; B65G 49/07
`52 U.S. Cl. ................................. 318/45:901/14: 901/23;
`464/29: 74,490.03; 318/625
`58 Field of Search .......................... 318/15, 45,568.11,
`318/625; 901/14, 15, 23, 24, 25: 464/29:
`74/490.01, 490.03, 490.05; 414/222, 225.
`744.1, 74.4.4, 744.5, 744.6, 749, 750, 751,
`917
`
`56)
`
`References Cited
`U.S. PATENT DOCUMENTS
`4,712,971 12/1987 Flyer.
`
`
`
`USOO5789878A
`Patent Number:
`11
`45 Date of Patent:
`
`5,789,878
`Aug. 4, 1998
`
`1/1990 Abbe et al. .
`4.897,015
`4,990,047 2/1991 Wagner et al. ......................... 414217
`5,102,280 4/1992 Podujeet al..
`5,227,708 7/1993 Lowrance ................................ 38,640
`5,324,155 6/1994 Goodwin et al..
`5,522.275 6/1996 Mauletti.
`Primary Examiner-Bentsu Ro
`Attorney; Agent, or Firm-Patterson & Streets, L.L.P.
`57
`ABSTRACT
`w
`The present invention provides a robot assembly for trans
`ferring objects, namely substrates, through a process system.
`A robot linkage is provided to a multi-plane, multi-arm robot
`assembly driven by two motors. In one embodiment, a
`linkage is provided which is driven by two magnetic retain
`ing rings. In another embodiment, a linkage is provided
`which is driven by three magnetic retaining rings, two of
`which are coupled to the same motor. Both embodiments
`enable a substrate shuttle operation to be performed wherein
`a pair of substrates can be shuttled into and out of a selected
`chamber without having the robot assembly rotate in the
`transfer and by actuation of only two motors.
`45 Claims, 9 Drawing Sheets
`
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 2 of 18
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`

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`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 3 of 18
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 3 of 18
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`US. Patent
`
`Aug. 4, 1993
`
`Sheet 1 of 9
`
`5,789,878
`
`
`
`

`

`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 4 of 18
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 4 of 18
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`US. Patent
`
`Aug. 4, 1998
`
`Sheet 2 of 9
`
`5,789,878
`
`
`
`

`

`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 5 of 18
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`US. Patent
`
`Aug. 4, 1998
`
`Sheet 3 of 9
`
`5,789,878
`
`FIG.3
`
`

`

`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 6 of 18
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 6 of 18
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`US. Patent
`
`Aug. 4, 1998
`
`Sheet 4 of 9
`
`5,789,878
`
`
`
`

`

`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 7 of 18
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 7 of 18
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`US. Patent
`
`Aug. 4, 1998
`
`Sheet 5 of 9
`
`5,789,878
`
`
`
`

`

`U.S. Patent
`
`Aug. 4, 1998
`
`Sheet 6 of 9
`
`5,789,878
`
`
`
`a-
`
`1^
`
`86
`
`b-e
`
`St.
`
`N N N N N N N N N N N N N N N
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`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 8 of 18
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`

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`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 9 of 18
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 9 of 18
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`US. Patent
`
`Aug. 4, 1998
`
`Sheet 7 of 9
`
`5,789,878
`
`
`
`
`
`VE
`
`““““““
`M!
`IIL“““““.““
`WW
`
`
`80
`
`
`
`
`
`L‘“ I
`
`
`‘ 78
`‘IIIIIIIIIWm I
`
`
`
`FIG. 7
`
`

`

`U.S. Patent
`
`Aug. 4, 1998
`
`Sheet 8 of 9
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`5,789,878
`
`CoNTRoll ER 126
`MCRO
`PROCESSOR
`
`
`
`124
`
`122
`
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 10 of 18
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`FIG. 8
`
`

`

`U.S. Patent
`
`Aug. 4, 1998
`
`Sheet 9 of 9
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`5,789,878
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`
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`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 11 of 18
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`FIG. 9
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`

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`5,789,878
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`O
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`25
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`35
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`1.
`DUAL PLANE ROBOT
`BACKGROUND OF THE INVENTION
`1. Field of the Invention
`The present invention relates to an apparatus for trans
`ferring objects in integrated circuit production and relates
`more particularly to a multi-blade, multi-plane robot for
`transferring substrates through a process system while
`reducing the time in which a process chamber is idle.
`2. Background of the Related Art
`The advantages of using robots in the production of
`integrated circuits to transfer substrates throughout a pro
`cessing system are well established. Current practice
`includes the use of robot arms to move substrates from a
`loading port into various process chambers within a multiple
`chamber processing system. The robot arms can then
`retrieve a substrate from a particular processing chamber
`and shuttle the substrate into another chamber for additional
`processing. When substrate processing is complete, the
`robot arm returns the substrate to the loading port and
`another substrate is moved into the system by the robot for
`processing. Typically, several substrates are handled in this
`manner during each process run, and several substrates are
`passed through the system during a single process cycle.
`In multiple chamber process systems, it is desirable to
`increase the substrate throughput of the system by concur
`rently processing substrates in each of the chambers. A
`typical substrate handling sequence used in multiple cham
`ber process systems includes removing a substrate from a
`30
`process chamber, storing the substrate in a selected location,
`and then moving a new substrate from a storage location into
`the processing chamber from which the first substrate was
`removed. Although this sequence improves use of the sys
`tem and provides improved throughput, the robot arm itself
`must go through significant repetitive motion to simply
`exchange substrates within a selected processing chamber.
`To increase the efficiency of substrate handling, a robot
`arm having the ability to handle two substrates at the same
`time may be provided. For example, one such robot includes
`two carrier arms which are located at opposed ends of a
`support, and the support is rotated about a pivot. One wafer
`may be stored on one arm while the other arm is used to
`retrieve and place a second wafer. The arms are then rotated
`and the stored wafer may be placed as desired. Such
`mechanism does not allow the two arms to be present in the
`same process chamber at the same time, nor does it allow for
`the immediate replacement of a fresh wafer in a process
`chamber after a processed wafer is removed, because the
`support must be rotated 180° to place the wafer on the
`second arm in a position for loading into the location from
`which the first wafer was removed. Likewise, simultaneous
`use of the two arms for placement or removal of wafers from
`a process or storage position is not possible with this
`configuration.
`Another robot configuration includes a central hub having
`two opposed arms, each arm arranged for rotation relative to
`the hub while arcuately fixed in relation to one another. A
`blade is linked to the free ends of the arms, and a drive is
`provided for rotating the arms in opposite directions from
`each other to extend the blade radially from the central hub,
`and in the same direction to effect a circular movement of
`the blade about the central hub. Preferably, a second pair of
`arms extend opposed from the first pair, on the ends of which
`is connected a second blade. Opposed rotation of the arms
`in one direction extends the first arm while retracting the
`second arm. Opposed rotation of the arms in the opposite
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`direction results in retraction of the first arm and extension
`of the second arm. Simultaneous motion of the arms in the
`same direction swings the blades in a circular or orbital path
`around the hub. The use of two blades increases throughput,
`however, this device still does not permit simultaneous
`insertion of a fresh wafer into a process chamber as a
`processed wafer is being withdrawn from the same chamber.
`Rather, the support must still be rotated 180° to place the
`wafer on the second arm in a position for loading into the
`location from which the first wafer was removed.
`In an attempt to further increase throughput and decrease
`chamber idle time associated with wafer transfer, another
`robot configuration includes two robot assemblies having at
`least coaxially upper and lower robots which can operate
`independently to remove a first wafer from a processing
`chamber and insert a fresh wafer into the same processing
`chamber without having to rotate and retrieve the fresh
`wafer. One such assembly is disclosed in U.S. patent appli
`cation Ser. No. 08/608.237, entitled “Multiple Independent
`Robot Assembly and Apparatus for Processing and Trans
`ferring Semiconductor Wafers." filed Feb. 28, 1996 and
`commonly assigned to Applied Materials, Inc. The upper
`robot operates independently of the lower robot to obtain
`improved throughput and increased wafer handling capacity
`of the robot assembly as compared to the opposed, single
`plane, dual blade robots. The upper robot is typically stacked
`above the lower robot and the two robots may be mounted
`concentrically to allow fast wafer transfer. Either robot can
`be either a single blade robot or dual blade robot.
`However, in order to achieve independent operation of the
`two robots, the assemblies require at least four magnetic or
`mechanical linkages and the same number of drive motors to
`maneuver the robot blades within the x-y plane. Compared
`to a conventional robot assembly, this dual robot configu
`ration is considerably more complex. more expensive to
`build and maintain, and requires more space, typically above
`and below the transfer chamber,
`The use of upper and lower blades having independent
`rotation to enable sequential transfer of a processed substrate
`out of a processing chamber and a fresh wafer into the
`processing chamber has great advantage. As an example, a
`typical processing chamber is idle during the period of time
`during which a first wafer is removed from the chamber and
`the robot assembly is rotated to insert a second wafer into the
`chamber. Dual plane blades which can perform a shuttle
`operation significantly decrease the amount of time in which
`the chamber is not operational. In addition, the time that the
`slit valve must remain open while the robot transfers a first
`wafer out of the chamber and inserts a second wafer into the
`chamber is also decreased. As a result, the throughput of the
`chamber can be significantly increased and the period of
`time in which particles present outside the chamber may
`enter into the chamber can be significantly decreased.
`However, there remains a need for a robot which can
`shuttle substrates through a process system and which
`provides multi-plane robot arms which can be actuated by a
`minimal number of motors. There is also a need for a robot
`that reduces the amount of idle time that a chamber expe
`riences during removal of a first wafer and insertion of a
`second wafer and also reduces the amount of time that a slit
`valve needs to be opened during this sequence.
`SUMMARY OF THE INVENTION
`The present invention provides an apparatus for transfer
`ring objects. The apparatus comprises a first motor coupled
`to a first rotatable member that is rotatable about an axis of
`
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`5,789,878
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`4
`BRIEF DESCRIPTION OF THE DRAWINGS
`So that the manner in which the above recited features,
`advantages and objects of the present invention are attained
`can be understood in detail, a more particular description of
`the invention, briefly summarized above, may be had by
`reference to the embodiments thereof which are illustrated in
`the appended drawings.
`It is to be noted, however, that the appended drawings
`illustrate only typical embodiments of this invention and are
`therefore not to be considered limiting of its scope, for the
`invention may admit to other equally effective embodi
`entS.
`FIG. 1 is a substantially top perspective view of one
`embodiment of the present invention showing the robot arms
`in a retracted position;
`FIG. 2 is a substantially top perspective view showing the
`lower robot arm of embodiment of FIG. 1 in an extended
`position;
`FIG. 3 is a substantially top perspective view of another
`embodiment of the present invention showing the robot arms
`in a retracted position;
`FIG. 4 is a substantially top perspective view of the
`embodiment shown in FIG. 3 showing the upper robot arm
`in an extended position;
`FIG. 5 is a substantially top perspective view of the
`embodiment of FIGS. 3 and 4 showing the lower robot arm
`in an extended position;
`FIG. 6 is a schematic cross sectional view of a magnetic
`linkage which magnetically couples rotation to three mag
`netic retaining rings in accordance with the embodiment as
`illustrated in FIGS. 3-5;
`FIG. 7 is a schematic cross sectional view of a magnetic
`assembly which magnetically couples rotation to two mag
`netic retaining rings in accordance with the embodiment as
`illustrated in FIGS. 1 and 2;
`FIG. 8 is a schematic top view of a process system
`including a robot; and
`FIG. 9 is a top view of a robot wrist having intermeshed
`gears,
`
`25
`
`3
`rotational symmetry; a second motor coupled to a second
`rotatable member that is rotatable about an axis of rotational
`symmetry; a plurality of blades vertically spaced from one
`another; and a linkage to enable coordinated movement of
`the blades on rotation of the first and second rotatable
`members. In one embodiment, the coordinated movement of
`the blades includes simultaneous extension and retraction.
`Rotation of the first and second rotatable members in the
`same direction provides rotation of the blades and the
`rotation in the opposite direction provides extension of the
`one blade and retraction of the other blade.
`The invention also provides an apparatus for transferring
`objects between multiple positions, comprising: a first arm
`assembly positioned on a first plane; a second arm assembly
`positioned on a second plane; and a drive member coupled
`to both the first and second arm assemblies to actuate each
`arm assembly. The first and second arm assemblies are
`actuated by rotation of two or three coaxially aligned hubs
`connected to two motors.
`The invention further provides a method for transferring
`objects between a plurality of positions within an enclosure,
`comprising the steps of: providing a first object transfer
`assembly having an object support occupying a first plane
`and positionable at multiple positions about an axis of
`rotation; providing a second object transfer assembly having
`an object support occupying a second plane and positionable
`at multiple positions about the axis of rotation; coaxially
`positioning the first and the second object transfer assem
`blies about the axis of rotation; and moving the first and
`second object transfer assemblies by rotating a plurality of
`hubs with a drive assembly.
`The invention also includes an apparatus for transferring
`an object through an enclosure, comprising: a first extend
`able arm assembly comprising a first drive arm movable
`about a central axis, a second drive arm movable about the
`central axis, a pair of strut arms movably connected to the
`first and second drive arms, a substrate transfer blade
`pivotally coupled to the pair of strut arms; a second extend
`able arm assembly comprising a third drive arm movable
`about the central axis, a fourth drive arm movable about the
`central axis, a pair of strut arms movably connected to the
`third and fourth drive arms, and a substrate transfer blade
`pivotally coupled to the pair of strut arms; and a drive
`assembly coupled to the first and second extendable arm
`assemblies to provide rotational and translational motion to
`45
`the arm assemblies.
`The invention further includes a robot linkage to impart
`rotational and linear motion to at least two multi-plane
`transfer blades, comprising: first and second drive arms
`coupled to a first blade by a pair of strut arms; third and
`fourth drive arms coupled to a second blade by a second pair
`of strut arms; and first and second drive hubs coupled to the
`drive arms to impart rotational and linear motion to the first
`and second blades. The robot may further comprising a third
`hub to impart rotational and linear motion to the first and
`second blades.
`The present invention also provides a multi-chamber
`process system, comprising: a load lock; at least one transfer
`chamber connected to the load lock; a plurality of process
`chambers connected to at least one transfer chamber; and a
`robot comprising: a first motor coupled to a first rotatable
`member that is rotatable about an axis; a second motor
`coupled to a second rotatable member that is rotatable about
`an axis; and a plurality of object supports vertically spaced
`from one another, and is a linkage to enable coordinated
`movement of the blades on rotation of the first and second
`rotatable members.
`
`Case 6:20-cv-00636-ADA Document 92-8 Filed 03/31/21 Page 13 of 18
`
`DETALED DESCRIPTION OF THE
`PREFERRED EMBODIMENT
`The present invention generally provides a multi-blade,
`multi-plane, robot assembly useful for transferring objects
`between process chambers with increased throughput of
`objects. In one aspect of the invention, a mechanical linkage
`is provided to enable multi-plane robot blades to cooperate
`in a substrate shuttle operation to remove one substrate from
`a process chamber and immediately introduce a fresh sub
`strate into the chamber, thereby decreasing the chamber idle
`time associated with substrate transfer which typically
`requires rotation of the robot assembly. The mechanical
`linkage preferably couple rotary output from only two
`motors to rotational and translational motion of multiple
`transfer blades located on different planes within the process
`system. Preferably, magnetic coupling of two motors pro
`vides two degrees of freedom to the assembly, thereby
`providing a simplified robot assembly requiring fewer mov
`ing parts and less cumbersome equipment. In another aspect
`of the invention, a method for performing a substrate shuttle
`operation is provided which can be accomplished with a
`robot having only two degrees of freedom.
`Referring to FIG. 1, a substantially top perspective view
`of a multi-arm, multi-plane robot linkage is shown. Dual
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`S
`robot arms, upper arm 10 and lower arm 12, are shown in a
`retracted position ready for rotation within a transfer cham
`ber or for extension of one of the arms 10, 12 into a selected
`chamber. Upper and lower magnetic retaining rings 14, 16
`drive the robot linkage in this embodiment to actuate the
`substrate support blades 35.37 and the robot wrists 27, 29
`which form an integral part of the robot arms 10, 12. The
`movement imparted to the magnetic retaining rings 14, 16 is
`preferably accomplished through magnetic coupling which
`is described in detail in U.S. Pat. No. 5.227,708, entitled
`"Two-Axis Magnetically Coupled Robot", issued on Jul. 13.
`1993, which is hereby incorporated in its entirety by refer
`ence. Generally, actuation of the robot arms 10, 12 is
`provided by the rotation of the magnetic retaining rings 14,
`16 which is achieved through magnetic coupling of rotary
`motion of actuators located outside of the vacuum environ
`ment across a thin wall of the transfer chamber to the
`magnetic retaining rings 14, 16. Rotation of the magnetic
`retaining rings 14, 16 in the same direction rotates the robot
`assembly in that direction within the transfer chamber.
`Rotation of the magnetic retaining rings in opposite direc
`tions extends one of the robot arms 10 or 12 depending on
`the direction of rotation of the magnetic retaining rings.
`Rotation of the magnetic retaining rings in the opposite
`direction extends the other robot arm 10 or 12. Actuation of
`the robot arms in this manner is known in the art. The
`aspects of this invention which depart from that which is
`already known in the art will be described in detail below.
`Referring again to FIG. 1. three cantilevered arms 18, 20.
`22 extend from two magnetic retaining rings 14, 16 to
`support struts 24, 26, 28. and 30, wrists 27.29 and dual plane
`substrate support blades 27. 29 to form robot arms 10, 12.
`Cantilevered arm 18 extends radially from the lower mag
`netic retaining ring 16 and includes an upwardly extending
`end portion 19 which supports transverse strut 32 above the
`concentric magnetic retaining rings 14, 16. Transverse strut
`32 is pivotally connected to strut 28 on its lower surface at
`pivot 25 and to strut 26 on its upper surface at pivot 23. The
`thickness of transverse strut 32 determines the spacing
`between the blades 27, 29 and is preferably minimized. The
`pivots 23, 25 are preferably substantially equally spaced
`from the axis of rotation of the concentric magnetic retaining
`rings 14, 16. The equal spacing of pivots 23, 25, while using
`struts 24, 26 having equal length, allow substantially equal
`extension of each of the struts 24, 26 connected thereto on
`rotation of the magnetic retaining rings 14, 16. However, it
`is understood that certain configurations may exist where
`extension of the struts are not at equal distances such that
`different angular displacements of the blades is permitted.
`Cantilevered arm 20 extends radially from magnetic
`retaining ring 14 and is vertically disposed between canti
`levered arm 18 and transverse strut 32, inwardly of the end
`portion 19. Strut 30 is pivotally coupled at one end to the
`upper surface of cantilevered arm 20 at a pivot which is
`located an equal distance from the axis of rotation of the
`magnetic retaining rings as the pivots 23.25. Struts 28 and
`30 are thereby located in coplanar relationship with one
`another.
`Cantilevered arm 22 extends radially from magnetic
`retaining ring 14 opposite cantilevered arms 18, 32 and
`includes an upwardly extending end portion 31 on which an
`inwardly extending strut mounting portion 33 is supported.
`Strut 24 is pivotally connected at one end to the lower
`surface of the mounting portion 33 and at the other end to
`wrist 27 such that strut 24 is positioned in a coplanar
`relationship with strut 26 supported on the upper surface of
`transverse strut 32. Therefore, the struts 24, 26 are coplanar.
`as are the struts 28, 30.
`
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`Referring now to FIG. 9. each of the upper struts 24, 26.
`as well as the lower struts 28, 30 (not shown), are provided
`with a pivot 130 on the distal end (blade end) including a
`toothed, intermeshed gear 132. In this embodiment, a wrist
`housing 134 is provided into which the ends of the struts 24,
`26 extend. The toothed gears of upper struts 24, 26, as well
`as lower struts 28, 30 (not shown), are intermeshed to
`provide equal and controlled movement of the blades 35.37
`which are connected to the wrists 27, 29. In this manner the
`blade always extends radially without wobbling or becom
`ing cocked sideways. Other methods of providing equal and
`controlled movement of the blades may also be employed
`within the scope of the present invention.
`In the position shown in FIG. 1, the two magnetic rings
`14, 16 may be rotated in the same direction to provide
`rotation to the robot assembly around the axis of rotation
`within the transfer chamber. In this position, the robot
`assembly is sufficiently compact to enable rotation of the
`assembly necessary to service various chambers located on
`a process system.
`Referring to FIG. 2, a substantially top perspective view
`showing extension of the lower arm 12 is provided. In FIGS.
`2-5, the blades 35.37 are not shown in order to more clearly
`illustrate the robot arms 10, 12. In the configuration shown
`in FIG. 2, the lower arm 12 is extended by rotating magnetic
`ring 16 in a clockwise direction (as shown by arrow A) and
`magnetic ring 14 in a counterclockwise direction (as shown
`by arrow B). This opposed motion moves the ends of
`cantilevered arms 20 and 32 from a position 180 degrees
`opposed to a position approaching 90 degrees, thereby
`extending struts 28 and 30 into an extended position. Can
`tilevered arms 18 and 22 are similarly moved from a 180°
`opposed position to a position more nearly approaching 90'
`behind the magnetic retaining rings 14, 16 relative to the
`extension of robot arm 12. In this position the wrist 27
`moves a short distance opposite the wrist 29 to position over
`the magnetic retaining ring 14. The relative amount of
`motion of each cantilevered arm determines the length of
`extension and the positioning of each arm can be adjusted to
`achieve similar results with more or less rotation of the
`magnetic retaining rings 14. 16. To retract the lower arm 12,
`the rotation of the magnetic retaining rings is reversed
`thereby moving cantilevered arms 20, 32 back into a 180°
`opposed position.
`Similarly, to extend upper arm 10, magnetic retaining ring
`14 is rotated in a counterclockwise direction and magnetic
`ring 16 is rotated in a clockwise direction. The opposed
`motion of the magnetic rings 14, 16 moves the ends of the
`cantilevered arms 18 and 22 from a 180° opposed position
`into a more proximal relationship, thereby extending struts
`24 and 26 and wrist 27 connected thereto. Robot arm 10 is
`then retracted when magnetic ring 14 moves in a clockwise
`direction and magnetic ring 16 moves in a counterclockwise
`direction, thus returning the cantilevered arms 18, 22 into a
`180° opposed position.
`Referring to FIG. 7, a cross sectional view of a robot drive
`system is shown. A magnetic coupling assembly is config
`ured to rotate magnetic retaining rings 14, 16 about a central
`axis A, thereby providing a drive mechanism to actuate the
`two blades 35, 37 within the system, both rotationally and
`linearly. Additionally, the magnetic coupling assembly pro
`vides rotational movement of the magnetic retaining rings
`14, 16 with minimal contacting moving parts within the
`vacuum enclosure to minimize particle generation. In this
`embodiment, the robot features are provided by fixing first
`and second stepper or servo motors in a housing located
`above or below the transfer chamber, preferably below, and
`
`

`

`7
`coupling the output of the motors to magnetic ring assem
`blies located inwardly of and adjacent to a thin wall 60 of a
`motor chamber 56. The thin wall 60 is connected to the
`upper or lower wall of the transfer chamber 58 at a sealed
`connection to seal the interior of the transfer chamber from
`the environment outside of the chambers. Magnetic retain
`ing rings 14. 16 are located on the vacuum side of chamber
`58, adjacent to and surrounding the thin wall 60.
`A first motor output 52 drives shaft 62 and intermeshed
`gears 70 to provide rotation to the first magnetic ring
`assembly 72 that is magnetically coupled to a first magnetic
`retaining ring 14. A second motor output 54 drives shaft 76
`and intermeshed gears 80 to provide rotation to the second
`magnetic ring assembly 82 that is magnetically coupled to a
`second magnetic retaining ring 16. Rotation of the motor
`rotor causes rotation of the magnet ring assemblies 72, 82
`which magnetically couple the rotary output to magnetic
`retaining rings 14, 16, thereby rotating the base of each
`cantilevered arm around the perimeter of the thin wall 60 to
`impart rotational and translational motion to the blades. The
`cantilevered arms described above are connected to selected
`magnetic retaining rings as described to convert magneti
`cally coupled rotational output of the motors into rotational
`and translational motion of the substrate support blades,
`preferably within a vacuum environment.
`To couple each magnet ring assembly to its respective
`magnetic retaining ring, each magnet ring assembly 72, 82
`and magnetic retaining ring 14, 16 preferably include an
`equal plurality of magnets paired with one another through
`wall 60. To increase magnetic coupling effectiveness, the
`magnets may be positioned with their poles aligned
`vertically, with pole pieces extending therefrom and toward
`the adjacent magnet to which it is coupled. The magnets
`which are coupled are flipped, magnetically, so that north
`pole to south pole coupling occurs at each pair of pole pieces
`located on either side of the thin walled section. While
`magnetic coupling is preferred, direct coupling of the motors
`to the retaining rings may also be employed.
`Referring to FIG. 3, another dual plane robot assembly of
`the present invention is provided with three magnetic retain
`ing rings which enable the wrists 27, 29 (as well as blades
`35. 37 which are not shown) to be more closely spaced to
`one another by eliminating transverse strut 32 of FIGS. 1
`and 2. In this embodiment, an additional magnetic retaining
`ring 34 provides actuation of strut 28, a function which in the
`embodiment of FIG. 1 is provided by pivot 25 on transverse
`strut 32.
`The robot assembly is shown in FIG. 3 in the retracted
`position ready for rotation within the transfer chamber or
`extension of one of the robot arms 10, 12. Cantilevered arms
`18.20,22 and 38 extend radially from the retaining rings 14,
`16 and 34 to actuate robot arms 10, 12 in a rotational or
`linear motion. Cantilevered arm 18 extends radially from
`retaining ring 16 and includes an upwardly extending end
`portion 71 on which an inwardly extending strut mounting
`portion 73 is supported. Strut 26 is pivotally connected at
`one end to the lower surface of the mounting portion 73 and
`to the wrist 27 at its opposite end. Cantilevered arm 22
`extends radially from magnetic retaining ring 14 and
`includes an upwardly extending end portion 91 from which
`a strut mounting portion 83 is supported and extends
`inwardly. Strut 24 is pivotally connected at one end to the
`lower surface of strut mounting portion 83 and at its other
`end to wrist 27. Both inwardly extending mounting portions
`83.73 include pivots 75.77 on the lower surfaces thereof,
`respectively, to locate struts 24, 26 in the same plane.
`Cantilevered arm 20 extends radially from magnetic
`retaining ring 14 opposite arm 22 and angles upwardly to
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`provide a strut mounting surface 79 at the end thereof.
`Support strut 30 of lower robot arm 12 is pivotally connected
`at one end to the mounting surface 79 of arm 20 and at its
`other end to wrist 29. Cantilevered arm 38 extends radially
`from magnetic retaining ring 34 opposite cantilevered arm
`20 and includes a strut mounting surface 81 which is
`coplanar with strut mounting surface 79 on cantilevered arm
`20. Support strut 28 of lower robot arm 12 is pivotally
`connected at one end to the mounting surface 81 of arm 38
`and at its other end to wrist 29. Extension of lower robot arm
`12 is provided by rotation of magnetic retaining rings 14 and
`34 in opposed directions.
`In operation, retaining ring 14 cooperates with both
`retaining rings 16 and 34 to drive robot arms 10.12, respec
`tively as shown in FIG. 4. Robot arm 10 is actuated on
`rotation of retaining rings 16 and 14 in opposite directions,
`while robot arm 12 is actuated on rotation of retaining rings
`14 and 34 in opposite directions.
`Referring to the configuration in FIG. 4. arm 10 is
`extended on rotation of retaining ring 18 a clockwise direc
`tion and retaining ring 22 in a counterclockwise direction
`which moves arms 18, 22 into closer relationship with one
`another thereby driving co-planar struts 24, 26 into an
`extended position along with wrist 27. Wrist 27 is preferably
`pivotally connected on the ends of struts 24, 26 at pivots
`101, 103. As arm 10 is extended, struts 28, 30 of robot arm
`12 are moved in the opposite direction so that wrist 29 is
`moved to a position over the magnetic retaining ring 34. To
`retract the wrist 27, the direction of rotation of the magnetic
`retaining rings 14, 16 is reversed to move the arms 18, 22
`into a 180° opposed position, thereby retracting struts 24, 26
`and wrist 27.
`Referring to FIG. S. arm 12 is extended on rotation of
`magnetic retaining ring 14 in a clockwise direction and
`magnetic retaining ring 38 in a counterclockwise direction to
`drive co-planar struts 28, 30 into an extended position along
`with pivotally coupled wrist 29 as the cantilevered arms 20,
`38 are moved in closer relationship to one another. As the
`wrist 29 is extended, wrist