Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 1 of 40
`
`ncap DOE - LIV Measurements pre and post
`barrier dep and after 1600 hours in ambience
`
`Plate6.9 -Devicel
`
`Plate6.9 - Device2
`
`1 00E+00
`
`• Cuff nt-post
`
`1 00E 01
`
`• Reserse I V-post
`
`1 00E02
`
`1 00E03
`
`1 00E04
`
`1 00E05
`
`1 00E 06
`
`1 00E07
`
`Voltage (V)
`
`soo
`
`ma 1,-
`
`05
`
`Cuff nt-pre
`
`Reserse I V-pre
`
`• Cuff ft
`
`• Reserse I V-post2
`(1654hrs)
`
`Luminance-post
`
`— Luminance-poste
`
`1 00E+00
`
`1 00E-01
`
`1 00E-02
`
`1 00E-03
`
`00E-04
`
`1 00E-05
`
`1 00E 06
`
`1 00E-07
`
`• __________
`
`Voltage (V)
`
`Plate6.9 - Device3
`
`Plate6.9 -Device4
`
`1 -1 -9 -0 -7 -8 -8 .4 -3.2 -1
`
`• Gwent-post
`
`• Reserse I V-post
`
`Gwent-pre
`
`Reserse I V-pre
`
`• Cuff ni-post2
`
`• Reserse I V-post2
`(1654hrs)
`
`r Luminance-post
`
`— Luminance-post2
`
`1 -1 -9 -6 -7 -6 .6 -4 -3
`
`E 3
`
`1.00E-04
`
`1.00E-05
`
`1.00E-06
`
`Voltage (V)
`
`voltage (V)
`
`Minimize I-V Shift due to Barrier Depositiv-
`
`1.00E+00
`
`1.0M-01
`
`1.0M-02
`
`1.0M 03
`
`e) 1.0M-04
`
`1.0M-05
`
`1.0M-06
`
`1.0M-07
`
`SLIDE 42
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`• Cuff nt-post
`
`• Reserse I V-post
`
`Cuff nt-pre
`
`Reserse I V-pre
`
`• Cumnt-post2
`
`• Reserse I V-post2
`(165410s)
`
`-4-- Luminance-post
`
`— Luminance-post2
`
`• Cuihent-post
`
`• Reserse I V-post
`
`Cuihent-pre
`
`Reserse I V-pre
`
`• Cuihent-post2
`
`• Reserse I V-post2
`(165410s)
`
`Luminanc0post
`
`— Luminance-post2
`
`SYMMORPHIX
`
`DEFTS-PA_0003249
`
`
`
`ncap DOE - LIV Measurements pre and post
`barrier dep and after 1600 hours in ambience
`
`Plate6.9 -Devicel
`
`Plate6.9 - Device2
`
`1 00E+00
`
`• Cuff nt-post
`
`1 00E 01
`
`• Reserse I V-post
`
`1 00E02
`
`1 00E03
`
`1 00E04
`
`1 00E05
`
`1 00E 06
`
`1 00E07
`
`Voltage (V)
`
`soo
`
`ma 1,-
`
`05
`
`Cuff nt-pre
`
`Reserse I V-pre
`
`• Cuff ft
`
`• Reserse I V-post2
`(1654hrs)
`
`Luminance-post
`
`— Luminance-poste
`
`1 00E+00
`
`1 00E-01
`
`1 00E-02
`
`1 00E-03
`
`00E-04
`
`1 00E-05
`
`1 00E 06
`
`1 00E-07
`
`• __________
`
`Voltage (V)
`
`Plate6.9 - Device3
`
`Plate6.9 -Device4
`
`1 -1 -9 -0 -7 -8 -8 .4 -3.2 -1
`
`• Gwent-post
`
`• Reserse I V-post
`
`Gwent-pre
`
`Reserse I V-pre
`
`• Cuff ni-post2
`
`• Reserse I V-post2
`(1654hrs)
`
`r Luminance-post
`
`— Luminance-post2
`
`1 -1 -9 -6 -7 -6 .6 -4 -3
`
`E 3
`
`1.00E-04
`
`1.00E-05
`
`1.00E-06
`
`Voltage (V)
`
`voltage (V)
`
`Minimize I-V Shift due to Barrier Depositiv-
`
`1.00E+00
`
`1.0M-01
`
`1.0M-02
`
`1.0M 03
`
`e) 1.0M-04
`
`1.0M-05
`
`1.0M-06
`
`1.0M-07
`
`SLIDE 42
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`• Cuff nt-post
`
`• Reserse I V-post
`
`Cuff nt-pre
`
`Reserse I V-pre
`
`• Cumnt-post2
`
`• Reserse I V-post2
`(165410s)
`
`-4-- Luminance-post
`
`— Luminance-post2
`
`• Cuihent-post
`
`• Reserse I V-post
`
`Cuihent-pre
`
`Reserse I V-pre
`
`• Cuihent-post2
`
`• Reserse I V-post2
`(165410s)
`
`Luminanc0post
`
`— Luminance-post2
`
`SYMMORPHIX
`
`DEFTS-PA_0003249
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 2 of 40
`
`ncap DOE — Optimize Luminance Change on
`Pixelated OLED test Devices > 1600 Hours in
`Ambience
`
`Percent change in Luminance
`[Plate-ID_7.4]
`
`Percent change in Luminance
`[Plate-ID_7.1]
`
`so
`2 60
`
`Z 40
`
`20
`
`1 00
`
`pre-poSh %change
`pre-poS121 %change
`laashp0512: %change
`
`cu cct (n14)
`
`Percent change in Luminance
`[Plate-ID_6.3]
`
`6.- pre-posh %Change
`pre-pos121 %change
`pOst-poS12: %change
`
`P.-POSC%change
`pre-p042: %Change
`poshpos12: %change
`
`80
`
`Cure 1.4)
`
`Ready for Accelerated Testing at Dupont
`
`SLIDE 43
`
`Thin-film encapsulated OLEDs lighting up with
`minimal luminance change after 1654 hours in
`damp heat
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003250
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 3 of 40
`
`,604,
`
`le;
`
`Aval,
`
`Cleaning: Pinhole Reduction
`
`Cleaned substrate
`before barrier dep
`
`Ca Test Results After 569 hours in 50 °C / 95% RH
`
`Substrate cleaning reduces pinholes from external causes
`
`DEFTS-PA_0003251
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 4 of 40
`
`Ca OD Results
`
`Densitometer Readings
`
`130.00%
`
`120.00%
`
`1 10.00%
`
`8E, 100.00%
`
`90.00%
`
`80.00%
`
`70.00%
`
`60.00%
`
`50.00%
`
`• Glass
`M PEN Process1
`A PEN Process2
`— Linear (PEN Process1)
`— Linear (PEN Process2)
`— Linear (Glass)
`
`200
`
`400
`
`600
`
`800
`
`1000
`
`1200
`
`Elapsed Time (Hr)
`
`SYMMORPH IX
`
`DEFTS-PA_0003252
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 5 of 40
`
`As-received Substrates for test
`1. Two kinds of substrates will be transported to Symmorphix
`1-1. OLED's substrate (ca. 27x20 mm2, 5 ea)
`1-2. OLED's substrate with evaporated Al layer (ca. 27x20 mm2, 5 ea)
`
`2. Images of OLED's substrate
`
`<4,s4
`
`Separator
`
`Insulator
`
`4'
`,;;Xti
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003253
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 6 of 40
`
`Zfr
`
`Photographs of substrates w/ the Aluminum layer
`
`As-received
`
`After Deposition:
`
`SLIDE 47
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003254
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 7 of 40
`
`44,21'
`
`Cross-section SEM with 2,500A AIOSi film
`(on substrate with the Al layer)
`
`S4700 15.0kV 6.1mm x15.05 SE(M) 4/29/05 11:21
`
`3 00um
`
`Conformal
`barrier
`coverage
`underside of
`the separator
`
`,
`
`WiyjyroPIF" ATC:!A
`•
`,
`k,7140gpkii
`ilOWHANIVtilf/OgOite,
`
`77
`
`AOK
`
`-
`
`^4700 15.0kV 6.1mm x50 0k SE(M) 4129/051130
`-
`,...SLIDE 48
`
`•
`
`*5;
`
`S4700 15.0kV 5.8mm x100k SE(M) 4(29/051308
`
`500nm
`
`SYMMORPHIX'
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003255
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 8 of 40
`
`Barrier Film Slow Tapering Capability
`
`Great mushroom under coverage
`— Single layer solution possible
`Barrier Film Thickness Tapering Capability for Contact Exposure
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003256
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 9 of 40
`
`xample of Undercut Filling
`
`34700 15.0kV 5.7mm x100k SE(U) 5/2/05 1546
`
`.411%
`
`Note the conformal
`barrier coverage
`underside and
`corner
`
`Cross-section SEM with 2,500A AIOSi film
`
`•
`SLIDE 50
`
`SYMMORPH IX
`
`DEFTS-PA_0003257
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 10 of 40
`
`• Plastic roughness and defects
`
`•Spikes — plastic, handling
`
`•Particles from plastic/handling
`
`• Scratches - handling
`
`• Pits — arcing, possible metal
`contamination of plastic
`
`• Barrier Cracking — local adhesion
`issues (pre-contamination)
`
`Defect Pa reto Analysis
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003258
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 11 of 40
`
`, i/eVfiqii
`g4,4AMO
`c404,0J9`4„,,ebnii,k
`
`P,11/
`
`Flexible Electronics Industry Challenges
`
`(Future Application)
`
`Most of today's displays (TFT-LCDs) and semiconductor ICs (CMOS on
`Si) use substrates that are inflexible, heavy, brittle and expensive
`Cheap displays and electronics require cheap flexible substrates
`(plastics)
`Requires low-temperature barrier
`semiconductor and gate dielectric film
`
`LED DISPLAY STRUCTURE
`
`6D-nfr
`
`'- 1'Iu1ic
`
`tate
`
`OM PAN Y
`
`SYMMORPHIX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003259
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 12 of 40
`
`Ingle Layer Barrier on Plastic WVTR
`Performance Improvement History
`
`PEN -1!Pretreatme
`Barrier Process
`Optimization
`
`WVTR (g/m2/day) vs Date
`
`* Median WVTR
`
`Consistent Improvement in Barrier Performance with < 2000A Single
`Layer Barrier
`
`SLIDE 53
`
`SYMMORPHIX '
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003260
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 13 of 40
`
`• % transmission of barrier film on PEN equivalent to bare PEN
`• Transmission change minimal post boiling water test (4 hours)
`
`4(X)
`WA
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003261
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 14 of 40
`
`E Samples - % T (Nov '04)
`
`Transmission of November Samples vs. Air
`
`‘0,:r00
`
`,44
`
`apioad~r.
`_ loorrwiw
`
`I
`
`0-
`P
`
`Baseline
`Process C
`
`'" Process D
``'m Process E
`
`- Process B
`—"— Process A
`
`,i0NvelengthIcni°m)
`
`Tuning Some DOE Parameters affect %T
`
`Lower %I Barrier may be useful for encapsulation or barrier lid for bottom emitting devices
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003262
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 15 of 40
`
`Defect Pareto Analysis Summary
`
`Particles -
`
`,
`
`90
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003263
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 16 of 40
`
`ccelerated Lifetime Measurements of
`er Coated PEN (May 2004)
`
`Calcium Test OD Measurements
`
`= -0.0002x ± 0.92
`
`•
`
`. Sample1
`. Sample2
`Glass Control
`Linear (Sample1)
`Linear(Sample2)
`— Linear (Glass Control)
`
`y = -0.0004x -1.- 0.9475
`
`1
`0.9
`0.8
`0.7
`0.6
`0.5
`0.4
`0.3
`0.2
`0.1
`0
`
`Normalized Ca OD
`
`0
`
`200
`
`400
`
`600
`
`800
`
`1000
`
`1200
`
`# of Hours in 60c/90% R.H
`
`>1000 hours on accelerated testing (50°C, 95% RH)
`As-received substrate sample based on empirical calculations
`WVTR —1.2 E-3 g/m2/day
`Cleaned substrate reduces pinholes and has a WVTR — 4.4E-4 g/m2/day
`
`SLIDE 57
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003264
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 17 of 40
`
`Ca OD (Nov '04)
`
`Densitometer Readings (As % Of Original)
`
`110% ,
`
`100%
`
`90%
`
`80%
`
`70% I
`
`60% k
`
`50%
`
`40%
`
`30%
`
`20%
`
`10%
`
`0%
`
`0 100
`
`200
`
`300
`
`1.00
`
`Improved Barrier
`Process A
`
`Glass on
`Glass Control
`
`Improved Barrier
`Process D
`
`Improved Barrier
`Process B
`
`'Baseline
`
`,
`600
`500
`EraptFdltolir§
`
`700
`
`800
`
`900
`
`1000
`
`1100
`
`—0—Glass —0-1201 process A
`
`1 1204 Process B
`
`1206 Baseline
`
`—0-1207 Process C —0-1208 Process D
`
`1 1210 Process E
`
`Improvement in Ca OD performance with DOE Parameter Tuning
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003265
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 18 of 40
`
`n of Barrier on PEN
`
`Sake Test
`
`150 °C for 1 Hr on a hot plate
`
`No visible damage
`16% Curl which remained after cooling
`
`Ambient moisture uptake 4 10 mbar
`for 18 hours -*Inspect 50x
`
`Submerge for 1 hr - Air dry -*
`
`Film unaffected
`„..„„..„„„..„„•„..„„•„..„„
`'•
`
`'• '
`
`Submerge for 1 hr 4 Air dry 4
`Inspect 50x
`
`Submerge for 1 hr 5 Air dry 4
`Inspect 50x
`
`Submerge for 1 hr 4 Air dry 4
`Inspect 50x
`
`••.filinOneiteCtecl:•,,
`• •
`.
`
`Solvent Test: THF
`
`Minor damage; no concern
`
`Material is suitable for conformal or flexible displays and electronics
`
`DEFTS-PA_0003266
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 19 of 40
`
`Encapsulation Summary of Progress
`
`Pixelated OLEDs from Dupont encapsulated successfully
`lasting 1600 hours in ambience.
`— Accelerated testing is next, substrates shipped to Dupont SB
`, Equipment Setup for LIV measurements on backlights and
`pixelated OLEDs is complete and working inside glove
`box.
`- Preliminary Process DOE to find the process window of
`barrier deposition process complete.
`- Detailed DOE to close in on the optimized process
`underway.
`Samples ready for accelerated lifetime testing to be done
`at Dupont.
`
`SLIDE 60
`
`SYMMORPHIX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003267
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 20 of 40
`
`0,000 Footview of Symmorphix
`
`Barrier
`on
`Plastic
`
`Thin
`Dielectrics
`and Metals
`
`Substrates
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003268
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 21 of 40
`
`Barrier Process on PEN: 2500A TEM
`
`AS HD2000 200kV x250k TE
`
`klAS HD2000 200kV ,800k I E
`
`30. nm
`
`SLIDE 62
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003269
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 22 of 40
`
`s-section
`
`UAS1-02000 200V x250k TE
`
`250nm Aluminosilicate barrier on
`plastic;
`
`showing a metal "breath" treatment
`on TEOS coated PEN Plastic
`
`6.2 nm of Niobium Oxide at atomic
`resolution (r. 25 atomic lavers thick)
`
`•shows the dense defect free
`amorphous dielectric laver
`
`.deposited on a similar defect free
`layer of Niobium Nitride and
`
`•niobium metal- IV and CV on
`request.
`
`SLIDE 63
`
`SYMMORPH IX '
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003270
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 23 of 40
`
`Acknowledgements
`
`• USDC Funding
`• Rich Wessell, Terri Cardellino (DuPont)
`• Bill MacDonald, Bob Rustin & Keith Rollins (Dupont
`Teijin)
`, Jens Hauch (Konarka Technologies)
`• Jay Lewis & Sonia Grego (MCNC —RDI)
`• Giovanni Nisato (Philips)
`• Anna Chwang, Janice Mahon (UDC)
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003271
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 24 of 40
`
`,fi,koy"
`
`ymmorphix Summary
`
`, Develop equipment and process for production of high-quality glass-
`ceramic films using Symmorphix physical vapor deposition
`(PVD) technology
`
`, Develop products based on high-quality amorphous dielectric films for:
`— Barriers and protective films in OLEDs, touch sensors and flexible
`ICs
`— High-capacitance dielectrics for capacitors and energy storage
`— Polymer substrates and polymer electronics
`— Planar integrated optical devices with gain
`
`Business model
`— In large-volume applications, license technology
`— In high-value (low volume) applications, develop and market
`products
`
`OMPANY
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003272
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 25 of 40
`
`Appendix A: Metrology Data
`
`Y•-_,-
`
`Birefringence
`
`DigpeFsicii
`
`Stress
`
`PL Intensity Map
`
`Lifetime & Cup
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003273
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 26 of 40
`
`,..,nnn,00■PeoVAWIPM0
`1115461004010,' ,74r,,,,
`
`7
`
`4, •
`
`Thickness Uniformity 2.7% 6 sigma
`
`1
`
`Lertialitaki
`-01,1P42
`
`$1600,0 -11004
`311140711,-164111
`
`- 1 (+01 ,
`1.1161049 Raid
`INFrzs
`1 p-
`oploosr,ime
`
`s
`
`sinifot-!ms?
`
`
`
`. . errnigion .6111111.1,5 INre .210.111 illatr$.11
`-Q
`4'423 1D % fii.1576$9i
`
`.
`
`, .
`
`91:4141115.16.11%
`
`SYMMORPHIX'
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003274
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 27 of 40
`
`w
`
`•
`
`4
`
`0
`
`o oi
`
`o o •
`
`ro j m
`
`ro
`
`W o
`
`MAL, l4X173 Q
`
`MEM IliminumAIASIkki
`JThM LOs 1.459373
`
`LIME
`4111114 0. I AMU
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003275
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 28 of 40
`
`-MUM fficEir,
`Jima o Row. MOM 111(ps .1411016
`
`9I%.( ]
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003276
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 29 of 40
`
`01)416''57''''Y
`
`ndex) for three Aluminosilicate optical alloy
`ide films. k values less then E-5 over visible
`
`1.6
`
`1.58
`
`1.56
`
`1.48
`
`1.46
`
`1.44
`
`83-17
`
`92-8
`
`0
`
`500
`
`1000
`
`1500
`
`2000
`
`Wavelength
`
`O MPANY CONFIDENT
`
`SYMMORPHIX'
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003277
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 30 of 40
`
`010.00800,0"'"
`
`ress on silicon from as deposited with 3
`nneal cycles blue, pink and yellow
`
`161
`
`/211441 sivIsswi r oripsnisr.s
`
`mosmormamomem
`
`tf1011
`
`aaaaarata.
`
`11..44
`
`ow 1. ra
`
`01,4 y91.
`1.4evoltvo.0.14*.'
`
`416
`
`Tommie
`
`:44,64e $4
`
`O MPANY CONFIDENT
`
`SYMMORPHIX'
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003278
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 31 of 40
`
`0000PooM;00,.00:O,' oo,o•;',41o."1,0Hrro
`44.oliknoV000',ophoovllo°
`.
`**010.oril%
`
`• E
`
`r+3 active waveguide over passive waveguide — after
`mode size converter
`SEM of fracture cross section
`
`C OMPANY
`
`SYMMORPHIX''
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003279
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 32 of 40
`
`Vtfrgt*VA9V''''""
`
`Differential Scanning Calorimetry of an Aluminosilicate Film
`Note: exothermal stable annealing to —MOO C where spinodal composition (opaque)
`phases are formed.
`
`V$.
`
`Y
`
`OMPANY
`
`_...6SYMMORPHIX"
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003280
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 33 of 40
`
`ride" PL of the Er+3 doped Aluminosilicate
`waveguide core after 850 C anneal
`
`1
`
`1515-1565 nm
`
`1500
`
`1520
`
`1540
`
`1560
`
`1580
`
`Wavelength ( nm )
`
`O MPANY CONFIDENT IAA...
`
`SYMMORPHIX'
`
`1
`
`0.9
`
`0.8
`
`0.7
`
`^ 0 6
`
`— 0.5
`
`0- 0.4
`
`0.3
`
`0.2
`
`0.1
`
`Pr"
`
`480
`
`0 1
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003281
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 34 of 40
`
`rbium Up-conversion (green glow) as low as 4.8E-18 (for improved
`rsion) is shown with lifetimes greater than 3.4 msec.
`
`Data: L048614_C,L048630_C,L048640_C,L048650_C,L048670_C,L0486100_C,L0486200_C
`Model: Up-Conv
`
`±0.00004
`
`= 3.9953E-9
`ChN2/DoF
`FV2 = 0.99961
`
`naii-0>%0D12010>
`NO
`0.14894
`Cup
`4.82E-18
`tau
`0.00345
`x0
`0
`±0
`N_total 2.3E20 ±0
`N0_2 0.33768
`N0_3 0.41998
`N0_4 0.44033
`N0_5 0.56495
`N0_6 0.56633
`N0_7 0.58579
`
`0.03957
`±0.00016
`±0
`±2.1218E-6
`
`±0.00035
`±0.00044
`±0.00047
`±0.00061
`±0.00062
`±0.00064
`
`0.00
`
`0.01
`t (sec)
`
`0.02
`
`O MPANY
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003282
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 35 of 40
`
`w birefringence) amplified C band single
`mode output
`
`Peak intensity(count,)
`Peak position(um)
`Total beam energy(counts)
`Grav2ty position(um)
`Beam width(um)
`Beam Gauss width(um)
`Beam area(u52)
`Beam energy(counts)
`Average energy(counts)
`-Isperslon(%)
`Ilt(deg)
`PAliptisity(%)
`
`FWAM
`
`1
`
`97.00,40.00
`115.64,105.83
`117.11,111.57
`9685.00
`2712809
`280.10
`19.54
`29.19
`118.21
`
`1/e
`386
`-94.00, 40.00
`5595992
`-97.00,40.00
`136.23,125.25
`140.66,134.00
`13634.00
`3370331
`247.20
`28.10
`29.51
`117.76
`
`1
`
`1/e2
`
`-98.00,41.00
`186.50,178.44
`198.93,189.51
`26541.00
`4522978
`170.41
`55.80
`31.19
`114.12
`
`c'eb.
`
`Frof1le
`
`300
`
`200
`
`ntomoity
`(counl_s)
`
`cursucl curSor2 CR1-CR2
`197_28
`188,6
`2_42
`187.26
`18,22
`9.04
`
`length
`f um)
`
`-56.00
`-56,00
`
`60.00
`60.00
`
`116.00
`706.0fl
`
`IntensIty
`
`cummorl curson2 CR1 CR2
`18,.41
`1,3.44
`-4.03
`
`length
`
`(UM)
`
`-52.00
`-52.00
`
`5,00
`54.00
`
`106.00
`106.00
`
`Analyzing Condition
`
`m ame:17/04/02
`Accumulation No..32
`
`Line widmlul
`Smoothing points No. :1
`
`O M PAN Y
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003283
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 36 of 40
`
`Low Contamination
`
`Deposited intrinsic amorphous silicon film
`
`ppm
`
`5.0
`0.3
`3.3
`0.0
`0.0
`0.0
`0.0
`0.0
`0.0
`0.0
`
`H
`Ar
`0
`N
`C
`B
`P
`Na
`K
`Li
`In
`Al
`Ni
`Cu
`
`As-dep Si
`<0.1%
`<0.1%
`3.E+18
`2.E+17
`2.E+18
`2.E+16
`2.E+15
`1.E+15
`1.E+16
`1.E+14
`2.E+13
`1.E+16
`ND <3E+15
`ND <2E+15
`atoms/cm3
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003284
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 37 of 40
`
`*OW
`
`ispersion of several aluminosilicate
`allo
`
`n(2)= n, + 1(2 —1500.74), 1500nm < A <1649nm
`
`X = 1500.74
`no
`1.45983
`1.46098
`1.47411
`1.47507
`1.55294
`1.55278
`
`92-8 TE
`92-8 TM
`83-17 TE
`83-17 TM
`35-65 TE
`35-65 TM
`
`1649.08
`
`1.45824
`1.45938
`1.47250
`1.47346
`1.55125
`1.55108
`
`dn/cD,
`-1.07186E-05
`-1.07860E-05
`-1.08534E-05
`-1.08534E-05
`-1.13927E-05
`-1.14602E-05
`
`500
`
`1000
`Wavelength
`
`1500
`
`2000
`
`O MPANY
`
`SYMMORPH IX
`
`1.6
`
`1.44
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003285
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 38 of 40
`
`nd k for 92% silica- 8% alumina
`
`Layer #1
`
`1.485
`
`1.48
`
`1.475
`
`1.47
`
`1.465
`
`1.46
`
`1.455
`
`Index Of Refraction (N)
`
`300
`
`500
`
`700
`
`900
`
`1100
`
`1300
`
`1500
`
`1700
`
`Wavelength (nm)
`
`O MPANY
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003286
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 39 of 40
`
`ange of index control for several alumino-silicate
`alloy films as % from silica
`
`Refractive Index as a function of Al% in Aluminosilicates
`
`A-n choices:
`
`Al%
`1Oook-to-0% 9%
`35%-to-8% 6%
`17%-to-8% 1%
`0.5%
`13%-to-8%
`
`y = -7E08x 1E-05x' + 0 0006x - 1 4625
`O 969
`
`• RI (As Den)
`
`E R.I Post Anneal
`
`— Poly. (R.I (As Dep))
`
`10
`
`20
`
`30
`
`40
`
`50
`
`Al%
`
`60
`
`70
`
`80
`
`90
`
`100
`
`O M PAN Y
`
`SYMMORPH IX '
`
`1.7
`
`1.65
`
`1.6
`
`1.55
`
`1.5
`
`1.45
`
`1.4
`
`Refractive Index
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003287
`
`
`
`Case 6:20-cv-00636-ADA Document 77-3 Filed 03/10/21 Page 40 of 40
`
`Materials for the Symmorphix Processes
`
`Dielectrics (Glass / Ceramic)
`— A1203ABI {D}
`— SiO2 Si 3N4 4-B1_ _ 2 , _ 3
`
`— Aluminosilicate {B}
`— TiO2 / TiOxNi_{B} {D}
`— Ta205{D}
`— ZrO2
`— Various titanates {D}
`
`, Conductors
`— Al {E}
`— Ti / TiN / TiS2 {E}
`— Ta / TaN {E}
`— Mo / MoSi2{E}
`— Cr
`— w
`— ITO
`
`Underlined = Have fabricated
`{B} = Barrier layer candidate
`{D} = Dielectric layer candidate
`{E} = Electrode layer candidate
`
`• Semiconductors
`— Si
`— SiO
`— Ge
`
`• Substrates
`— Glass
`— Quartz
`— Silicon
`— Alumina / Sapphire
`— LiTa03
`— FR4
`— Polymers (various)
`— Stainless steel
`
`O MPANY
`
`SYMMORPH IX
`
`<Presentation Name>
`
`1/15/2021
`
`C OMPANY CONFIDENTIAL
`
`DEFTS-PA_0003288
`
`
Accessing this document will incur an additional charge of $.
After purchase, you can access this document again without charge.
Accept $ Charge
Still Working On It
This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.
Give it another minute or two to complete, and then try the refresh button.
A few More Minutes ... Still Working
It can take up to 5 minutes for us to download a document if the court servers are running slowly.
Thank you for your continued patience.
This document could not be displayed.
We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.
Your account does not support viewing this document.
You need a Paid Account to view this document. Click here to change your account type.
Your account does not support viewing this document.
Set your membership
status to view this document.
With a Docket Alarm membership, you'll
get a whole lot more, including:
- Up-to-date information for this case.
- Email alerts whenever there is an update.
- Full text search for other cases.
- Get email alerts whenever a new case matches your search.
One Moment Please
The filing “” is large (MB) and is being downloaded.
Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.
Your document is on its way!
If you do not receive the document in five minutes, contact support at support@docketalarm.com.
Sealed Document
We are unable to display this document, it may be under a court ordered seal.
If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.
Access Government Site
