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`US008320077B 1
`
`c12) United States Patent
`Tang et al.
`
`(10) Patent No.:
`(45) Date of Patent:
`
`US 8,320,077 Bl
`Nov. 27, 2012
`
`(54) METHOD AND SYSTEM FOR PROVIDING A
`HIGH MOMENT FILM
`
`(75)
`
`Inventors: Yunjun Tang, Pleasanton, CA (US);
`Yun-Fei Li, Fremont, CA (US);
`Yingjian Chen, Fremont, CA (US)
`
`(73) Assignee: Western Digital (Fremont), LLC,
`Fremont, CA (US)
`
`( *) Notice:
`
`Subject to any disclaimer, the term ofthis
`patent is extended or adjusted under 35
`U.S.C. 154(b) by 796 days.
`
`(21) Appl. No.: 12/334,753
`
`(22)
`
`Filed:
`
`Dec. 15, 2008
`
`(51)
`
`(52)
`
`(58)
`
`Int. Cl.
`GllB 51127
`(2006.01)
`GllB 51147
`(2006.01)
`GllB 5131
`(2006.01)
`U.S. Cl. ......... 360/125.12; 360/125.08; 360/125.45;
`360/125.5
`Field of Classification Search ............. 360/125.08,
`360/125.12, 125.24, 125.26, 125.28, 125.45,
`360/125.58, 125.63, 125.69, 125.5
`See application file for complete search history.
`
`(56)
`
`References Cited
`
`U.S. PATENT DOCUMENTS
`12/2000 Gill et al.
`6,163,442 A
`2/2004 Minor et al.
`6,687,085 B2
`8/2004 Tabakovic et al.
`6,778,357 B2
`6,778,358 Bl *
`8/2004 Jiang et al. ................. 360/125.5
`9/2004 Shukh et al.
`6,791,796 B2
`11/2004 Minor et al.
`6,822,829 B2
`5/2006 Crue et al.
`7,038,882 B2
`9/2006 Wang et al.
`7,102,854 B2
`7,177,117 Bl*
`2/2007 Jiang et al. ............... 360/ 125 .12
`6/2007 Brusca et al.
`7,233,458 B2
`
`7,294,418 B2
`7,382,574 B2
`7,522,377 Bl*
`2002/0021529 Al
`2003/0133223 Al*
`2003/0133224 Al*
`2004/0004786 Al*
`2004/0072036 Al
`2004/0120074 Al*
`2006/0044680 Al *
`2006/0119981 Al*
`2006/0209458 Al
`
`11/2007
`6/2008
`4/2009
`2/2002
`7/2003
`7/2003
`1/2004
`4/2004
`6/2004
`3/2006
`6/2006
`9/2006
`
`Ikeda et al.
`Li et al.
`Jiang et al. ............... 360/125.12
`He et al.
`Minor ........................... 360/125
`Minor et al.
`.................. 360/125
`Shukh et al. .................. 360/126
`Kubota et al.
`Okada et al. .................. 360/126
`Liu et al. ....................... 360/126
`Li et al. ......................... 360/125
`Kane et al.
`
`JP
`
`FOREIGN PATENT DOCUMENTS
`2003229310 A
`8/2003
`
`OTHER PUBLICATIONS
`
`N.X. Sun, et al., "High-Frequency Behavior and Damping ofFe-Co(cid:173)
`N-Based High-Saturation Soft Magnetic Films", IEEE Transactions
`on Magnetics, vol. 38, No. 1, Jan. 2002, pp. 146-150.
`H.S. Jung, et al., "Influence ofunderlayers on the soft properties of
`high magnetization FeCo films", Journal of Applied Physics, vol. 93,
`No. 10, May 15, 2003, pp. 6462-6464.
`
`(Continued)
`
`Primary Examiner - Craig A. Renner
`Assistant Examiner - Adam B Dravininkas
`
`ABSTRACT
`(57)
`A method and system for providing a high moment film are
`disclosed. The high moment film might be used in structures,
`such as a pole, of a magnetic transducer. The method and
`system includes providing a plurality of high moment layers
`and at least one soft magnetic layer interleaved with and
`ferromagnetically coupled with the plurality of high moment
`layers. Each of the plurality of high moment layers has a
`magnetic moment of greater than 2.4 Tesla. The at least one
`soft magnetic layer has a hard axis coercivity of not more than
`twenty Oersted. The high moment film has a total thickness of
`at least one thousand Angstroms.
`
`21 Claims, 4 Drawing Sheets
`
`100'
`
`/
`
`118
`
`119
`
`High Moment Layer --- -
`
`- 1
`17
`114
`
`/
`
`--
`
`115
`
`1
`
`/'
`-
`
`13 ~~::}~
`
`05'
`1
`102'
`
`Soft Layer
`
`-
`
`High Moment Layer
`
`,,..-
`
`Soft Layer
`
`High Moment Layer
`
`,,.--
`
`Soft Layer
`
`16
`\_
`
`12
`\_
`
`04'
`\_
`
`08
`\_
`
`-
`
`-
`
`-
`
`-
`
`High Moment Layer .,..--
`
`03'
`1
`
`Soft Layer
`
`109
`
`Ex.1034 / IPR2022-00117 / Page 1 of 10
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`

`

`US 8,320,077 Bl
`Page 2
`
`OTHER PUBLICATIONS
`
`Kenji Ikeda, et al., "Multilayer nanogranular magnetic thin films for
`GHz applications", Journal of Applied Physics vol. 92, No. 9, Nov. 1,
`2002, pp. 5395-5400.
`M. Vopsaroiu, et al. "Preparation of high moment Co Fe films with
`controlled grain size and coercivity", Journal of Applied Physics 97,
`10N301-l, (2005), 3 pages.
`
`N.X. Sun, eta!, "Soft High SaturationMagnetization(Fe0.7Co0.3)1-
`xNx Thin Films for Inductive Write Heads", IEEE Transactions on
`Magnetics, vol. 36, No. 5, Sep. 2000, pp. 2506-2508.
`H. Katada, et al, "Soft Magnetic Properties and Microstructure of
`NiFe(Cr)/FeCo/NiFe(Cr) Films With Large Saturation Magnetiza(cid:173)
`tion", IEEE Transactions on Magnetics, vol. 38, No. 5, Sep. 2002, pp.
`2225-2227.
`
`* cited by examiner
`
`Ex.1034 / IPR2022-00117 / Page 2 of 10
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
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`

`

`U.S. Patent
`
`Nov. 27, 2012
`
`Sheet 1 of 4
`
`US 8,320,077 Bl
`
`1Q
`
`Conventional Return Shield
`
`□□□□------
`
`Conventional Main Pole
`
`Conventional Auxiliary Pole
`
`I\.)
`0
`
`□□ DD
`Conventional First Pole (P1)
`
`1--------s-e_c_o_n_d_S_h_ie-ld-(S_2_)---------1 t} ~
`
`First Shield (S1)
`
`Prior Art
`FIG. 1
`
`100
`
`,--
`
`;-
`
`106
`
`107
`
`05
`1
`102
`
`r
`
`---
`
`-----
`
`103
`
`High Moment Layer
`
`Soft Layer
`
`~
`
`-
`
`High Moment Layer
`
`- '
`
`FIG. 2
`
`16
`
`+
`
`ABS
`
`10
`4
`\._
`
`l t
`!
`
`~
`
`~
`
`~ -
`
`Ex.1034 / IPR2022-00117 / Page 3 of 10
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
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`

`

`U.S. Patent
`
`Nov. 27, 2012
`
`Sheet 2 of 4
`
`US 8,320,077 Bl
`
`100'
`
`High Moment Layer
`
`,---
`
`Soft Layer
`
`-~
`
`-
`
`High Moment Layer
`
`Soft Layer
`
`-
`
`High Moment Layer
`
`,---
`
`Soft Layer
`
`-
`
`High Moment Layer ,--
`
`/
`
`/
`
`/
`
`118
`
`119
`
`117
`114
`
`115
`
`113
`106'
`
`107'
`
`1
`05'
`102'
`
`r
`
`1
`03'
`
`0 .....
`.....
`
`-----
`
`--
`
`-
`----
`
`~ -
`
`t'
`
`1 16
`
`"-
`
`1 12
`
`"-
`
`10 4'
`
`"-
`
`10 8
`
`"-
`
`-----
`
`-----
`
`-
`----
`
`Soft Layer
`
`FIG. 3
`
`~
`
`109
`
`100"
`
`106'
`11 °0~4 · , - - - - - - - - - - - - - - - ,p }
`:
`106'
`110-n
`_____________
`}110-(n-1)
`- - - - - - - - - - - - -
`
`4'
`10
`\.._
`4'
`10
`\._
`10 4'
`\.._
`
`FIG. 3A
`
`106'
`l-..1
`6'} 110-3
`10
`l-..1
`6' } 110-2
`10
`l--,1
`
`} 110-1
`
`Ex.1034 / IPR2022-00117 / Page 4 of 10
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
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`

`

`U.S. Patent
`
`Nov. 27, 2012
`
`Sheet 3 of 4
`
`US 8,320,077 Bl
`
`150
`
`Return Shield
`
`□ □ □ □
`
`Auxiliary Pole
`
`D D D D
`
`First Pole (P1)
`
`Second Shield (S2)
`
`156
`
`• ABS
`
`First Shield (S1)
`
`FIG. 4
`
`......
`0)
`0
`
`;~
`
`(JI
`(JI
`~ I\.,)
`
`Ex.1034 / IPR2022-00117 / Page 5 of 10
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
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`

`

`U.S. Patent
`
`Nov. 27, 2012
`
`Sheet 4 of 4
`
`US 8,320,077 Bl
`
`200
`
`202
`
`Provide Pole(s) Including Thick High
`Moment Film(s) Having Thicker,
`High Moment Layers Interleaved and
`Ferromagnetically Coupled With
`Thinner Soft Layers
`
`H
`
`Provide Coil(s) for Energizing
`One or More of the Pole(s)
`
`H
`
`Provide Write Gap
`, ,
`Complete Fabrication of
`Transducer
`
`FIG. 5
`
`r 204
`
`r 206
`
`20 8
`
`Ex.1034 / IPR2022-00117 / Page 6 of 10
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`

`

`US 8,320,077 Bl
`
`1
`METHOD AND SYSTEM FOR PROVIDING A
`HIGH MOMENT FILM
`
`BACKGROUND
`
`FIG. 1 depicts a conventional magnetic recording head 10
`used in recording to and reading from a media (not shown).
`The conventional magnetic recording head 10 includes a read
`transducer 12 and a write transducer 20. The conventional
`read transducer 12 includes shields 14 and 18 and a read
`sensor 16. The conventional write transducer 20 may be a
`perpendicular magnetic recording (PMR) transducer or a lon(cid:173)
`gitudinal magnetic recording transducer. The conventional
`write transducer 20 includes a first pole 22 that may be
`merged with shield 18, a first coil 24, an auxiliary pole 26, a
`main pole 28, write gap 30, a second coil 32, and a return
`shield 34.
`In the conventional PMR transducer 10, the conventional
`first pole 22, main pole 28, and auxiliary pole 26 are desired
`to be made of a high moment material. In addition, the high
`moment materials are desired to be magnetically soft and
`have a high permeability. Various materials have been pro(cid:173)
`posed for use in the conventional pole 28. However, such
`films typically have drawbacks such as a significant remanent
`magnetization that results in domain lockup, reduced mag(cid:173)
`netic moment that results in a lower write field, a thickness
`that is too small to have a sufficient magnetic flux for use in a
`write transducer 20, and/or lower permeability that results in
`poor high frequency response. Consequently, such conven(cid:173)
`tional films are still not appropriate for use in the pole 28.
`
`SUMMARY
`
`A method and system for providing a high moment film are
`disclosed. The high moment film might be used in structures,
`such as a pole, of a magnetic transducer. The method and
`system includes providing a plurality of high moment layers
`and at least one soft magnetic layer interleaved with and
`ferromagnetically coupled with the plurality of high moment
`layers. Each of the plurality of high moment layers has a
`magnetic moment of greater than 2.4 Tesla. The at least one
`soft magnetic layer has a hard axis coercivity of not more than
`twenty Oersted. The high moment film has a total thickness of
`at least one thousand Angstroms.
`
`BRIEF DESCRIPTION OF SEVERAL VIEWS OF
`THE DRAWINGS
`
`FIG. 1 depicts a conventional PMR transducer.
`FIG. 2 depicts an exemplary embodiment of a high mag(cid:173)
`netic moment film.
`FIG. 3 depicts another exemplary embodiment of a high
`magnetic moment film. FIG. 3A depicts another exemplary
`embodiment of a high magnetic moment film
`FIG. 4 depicts an exemplary embodiment of a magnetic
`transducer utilizing an exemplary embodiment of a high mag(cid:173)
`netic moment film.
`FIG. 5 is a flow chart depicting an exemplary embodiment
`of a method for providing a magnetic transducer including a
`high magnetic moment film.
`
`DETAILED DESCRIPTION OF THE PREFERRED
`EMBODIMENTS
`
`FIG. 2 depicts an exemplary embodiment of a high mag- 65
`netic moment film 100. For clarity, FIG. 2 is not to scale. The
`film 100 may be used in a device, such as a write transducer
`
`10
`
`2
`(not shown in FIG. 2). Such a transducer may be part of a
`merged head that also includes a read head (not shown) and
`resides on a slider (not shown) in a disk drive.
`In the embodiment shown, the film 100 includes multiple
`5 high moment layers 102 and 106 separated by a soft magnetic
`layer 104. Although only two high moment layers 102 and
`106 are shown, more high moment layers may be included.
`Further, each of the high moment layers 102 and 106 would
`be interleaved with soft magnetic layers analogous to the soft
`magnetic layer 104. Thus, any high moment layer, such as the
`layers 102 and 106, would be adjacent to one or more soft
`layers, such as the layer 104, and vice versa. In any embodi(cid:173)
`ment, the film 100 includes at least two high moment layers.
`15 In some embodiments up to sixteen high moment layers, such
`as the layers 102 and 106, may be employed.
`The high moment layers 102 and 106 have magnetizations
`103 and 107, respectively. Each of the high moment layers
`102 and 106 has a moment that is greater than 2.4 Tesla.
`20 Consequently, high moment materials may be used for the
`high moment layers 102 and 106. For example, the high
`moment layers 102 and/or 106 may include FexCoyNz,
`where X+ Y +Z equals one hundred, Xis greater than or equal
`to twenty, Yis less than or equal to eighty, andZ is greater than
`25 or equal to zero.Although the magnetizations 103 and107 are
`shown as being equal, they may differ in magnitude as long as
`the magnetization of each layer 102 and 106 is at least 2.4 T.
`Further, the high moment layers 102 and 106 may be thick.
`Each of the high moment layers 102 and 106 may have a
`30 thickness of at least one hundred Angstroms and not more
`than one thousand Angstroms. In some such embodiments,
`the high moment layers 102 and 106 each has a thickness of
`at least three hundred fifty Angstroms and not more than four
`hundred fifty Angstroms. Further, the high moment film 100
`35 is also thick, having a thickness, t, of at least one thousand
`Angstroms. Regardless of the thickness of each of the layers
`102, 104, and 106, the high moment film 100 has a total
`thickness of at least one thousand Angstroms. In some
`embodiments the thickness of the high moment film 100 may
`40 be at least two thousand Angstroms. In one such embodiment,
`the high moment film 100 may be not more than three thou(cid:173)
`sand Angstroms thick.
`The soft magnetic layer 104 is interleaved with the high
`moment layers 102 and 106. The soft magnetic layer 104 is
`45 also magnetic and has a magnetization 105. However, the
`moment of the soft magnetic layer 104 may be less than that
`of the high moment layers 102 and 106. The soft magnetic
`layer 104 is considered to be soft and have a high permeabil(cid:173)
`ity. For example, the hard axis coercivity of the soft magnetic
`50 layer 104 is not more than twenty Oersteds. In some embodi(cid:173)
`ments, the hard axis coercivity may be not more than five
`Oersteds. Soft materials, such as one or more of at FeCoB,
`FeCoZr, FeCoNb, and NixFey, where X+Y equals one hun(cid:173)
`dred, and X is at least thirty and not greater than ninety; may
`55 be used in the soft magnetic layer 104. For example, in one
`such embodiment, the soft magnetic layer 104 may include
`Ni 81Fe 19 .
`In another embodiment, Ni 55Fe45 may be
`employed.
`In addition to being interleaved with the high moment
`60 layers 102 and 106, the soft magnetic layer 104 is ferromag(cid:173)
`netically coupled with the high moment layers 102 and 106.
`Thus, the magnetizations 103,105, and 107 of the layers 102,
`104, and 106 are in the same direction. The magnetizations
`103, 105, and 107 are shown as being in plane and in a
`particular direction. In another embodiment, the magnetiza(cid:173)
`tions 103,105, and107 maybeinanotherdirection, including
`partially or completely out of plane. However, as the magne-
`
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`US 8,320,077 Bl
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`10
`
`3
`tizations 103, 105, and 107 are ferromagnetically coupled, at
`equilibrium they are all substantially in the same direction.
`In addition to generally having a lower moment than the
`high moment layers 102 and 106, the soft magnetic layer 104
`generally has a lower thickness than that of the high moment 5
`layers 102 and 106. The thickness of the soft magnetic layer
`104 is at least ten and not more than fifty Angstroms. In one
`such embodiment, the soft magnetic layer 104 has a thickness
`of at least thirteen Angstroms and not more than seventeen
`Angstroms.
`The film 100 may have a high moment. In one embodi(cid:173)
`ment, the moment of the film 100 is at least 2.4 Tesla. Further,
`the film 100 may be sufficiently soft and have a sufficiently
`high permeability for use in a magnetic transducer. For
`example, the film 100 may have a small, or zero, remanent 15
`field as well as a substantially square easy axis B-H loop.
`Issues such as domain lockup may thus be reduced or elimi(cid:173)
`nated. The improved permeability may aid in the higher fre(cid:173)
`quency response of the film 100. This may be achieved sub(cid:173)
`stantially without adversely affecting the magnitude of the 20
`field produced by the high moment of the film 100. Conse(cid:173)
`quently, writeability of a magnetic transducer using the film
`100 may be improved.
`FIG. 3 depicts another exemplary embodiment of a high
`magnetic moment film 100'. For clarity, FIG. 3 is not to scale. 25
`The film 100' is analogous to the film 100. Consequently,
`analogous portions of the film 100' are labeled similarly to the
`film 100. The film 100' thus includes high moment layers 102'
`and 106' having magnetizations 103' and 107', respectively, as
`well as soft layer 104' having magnetization 105'. The film 30
`100' may be used in a device, such as a write transducer (not
`explicitly shown). Such a transducer may be part of a merged
`head that also includes a read head (not shown) and resides on
`a slider (not shown) in a disk drive.
`In addition, the film 100' includes soft layer 108 having 35
`magnetization 109 below the high moment layer 102'. The
`film 100' also includes soft layers 112 and 116 having mag(cid:173)
`netizations 113 and 117, respectively, as well as high moment
`layers 114 and 118 having magnetizations 115 and 119,
`respectively. The high moment layers 114 and 118 are analo- 40
`gous to high moment layers 102' and 106'. Similarly, the soft
`layers 108, 112, and 116 are analogous to soft layer 104'. The
`high moment layers 102', 106', 114', and 118' are interleaved
`with soft layers 108, 104', 112, and 116. Thus, each high
`moment layer 102', 106', 114', and 118' is adjacent to soft 45
`layers soft layers 108 and 104', 104' and 112,112 and 116, and
`116, respectively. The film 100' may, therefore, be considered
`to be formed of repetitions of the bilayer 110, which have
`been repeated four times. In other embodiments, the bilayer
`110 may be repeated another number of times. For example, 50
`FIG. 3A depicts an embodiment of the film 100" in which
`there are n bilayers that are analogous to the bilayer 110.
`These bilayers are 110-1, 110-2, 110-3 ... 110-(n-1), and
`110-n. In the embodiment shown, n may be two through
`sixteen. Each bilayer includes a soft magnetic layer 104' and 55
`a high moment layer 106' analogous to those in the film 100'.
`Thus, referring back to FIG. 3, although four repetitions are
`shown, the bilayer 110 might be repeated two through sixteen
`times.
`Each of the high moment layers 102', 106', 114, and 118 60
`has a moment that is greater than 2.4 Tesla. Consequently,
`materials such as FexCoyN2 , where X+ Y +Z equals one hun(cid:173)
`dred and X is greater than or equal to twenty, Y is less than or
`equal to eighty, and Z is greater than or equal to zero, may be
`used for the high moment layers 102', 106', 114, and 118. 65
`Although shown as being equal, the magnetizations 103',
`107', 115, and 119 may differ in magnitude as long as the
`
`4
`magnetization 103', 107', 115, and 119 of each layer 102',
`106', 114, and 118 is at least 2.4 T. Further, the high moment
`layers 102', 106', 114, and 118 may be thick. Each of the high
`moment layers 102', 106', 114, and 118 may have a thickness
`of at least one hundred Angstroms and not more than one
`thousand Angstroms. In some such embodiments, the high
`moment layers 102', 106', 114, and 118 each has a thickness
`of at least three hundred fifty Angstroms and not more than
`four hundred fifty Angstroms. Further, the high moment film
`100' is also thick, having a thickness t', of at least one thou(cid:173)
`sand Angstroms. In some embodiments the t' may be at least
`two thousand Angstroms. In one such embodiment, t' may be
`not more than three thousand Angstroms.
`The soft magnetic layers 108, 104', 112, and 116 are inter(cid:173)
`leaved with the high moment layers 102', 106', 114, and 118.
`The soft magnetic layers 108, 104', 112, and 116 are mag(cid:173)
`netic, having magnetizations 109, 105', 113, and 117 respec(cid:173)
`tively. However, the moments of the soft magnetic layers 108,
`104', 112, and 116 may be less than that of the high moment
`layers 102', 106', 114, and 118. Although depicted as being
`the same, the magnetizations 109, 105', 113, and 117 may
`differ in magnitude. The soft magnetic layers 108, 104', 112,
`and 116 are magnetically soft and have a high permeability.
`Consequently, the hard axis coercivity of each of the soft
`magnetic layers 108, 104', 112, and 116 is not more than
`twenty Oersteds. In some embodiments, the hard axis coer(cid:173)
`civity ofthe soft magnetic layers 108,104', 112, and 116 may
`not be more than five Oersteds. Materials, for example one or
`more of at FeCoB, FeCoZr, FeCoNb, and Ni,yf ey, where
`X+ Y equals one hundred, and X is at least thirty and not
`greater than ninety, may be used in the soft magnetic layers
`108, 104', 112, and 116 104. For example, in one such
`embodiment, the soft magnetic layer 104 may include
`Ni 81 Fe 19 may be used. In another embodiment, Ni 55Fe45 may
`be employed.
`In addition to generally having a lower moment than the
`high moment layers 102', 106', 114, and 118, the soft mag(cid:173)
`netic layers 108, 104', 112, and 116 generally has a lower
`thickness than that of the high moment layers 102', 106', 114,
`and 118. The thickness of each of the soft magnetic layers
`108, 104', 112, and 116 is at least ten and not more than fifty
`Angstroms. In one such embodiment, each of the soft mag(cid:173)
`netic layers 108, 104', 112, and 116 has a thickness of at least
`thirteen Angstroms and not more than seventeen Angstroms.
`The high moment layers 102', 106', 114, and 118 and the
`soft magnetic layers 108, 104', 112, and 116 are interleaved
`and ferromagnetically coupled. Thus, the magnetizations
`109,103', 105', 107', 113,115,117, and 119 of the layers 108,
`102', 104', 106', 112, 114, and 118 are in the same direction.
`Although the magnetizations 109, 103', 105', 107', 113, 115,
`117, and 119 are shown as being in plane and in a particular
`direction, they may be in another direction, including par(cid:173)
`tially or completely out of plane. However, as the magnetiza(cid:173)
`tions 109, 103', 105', 107', 113, 115, 117, and 119 are ferro(cid:173)
`magnetically coupled, at equilibrium they are all substantially
`in the same direction.
`Like the film 100, the film 100' may have a high moment,
`yet may be sufficiently soft and have a sufficiently high per(cid:173)
`meability for use in a magnetic transducer. For example, the
`film 100' may have a small, or zero, remanent field. Issues
`such as domain locknp may thus be reduced or eliminated.
`Further, the high frequency response may be improved by the
`permeability of the film 100'. This is achieved without
`adversely affecting the magnitude of the field produced by the
`high moment of the film 100'. Consequently, writeability ofa
`magnetic transducer using the film 100' may be improved.
`
`Ex.1034 / IPR2022-00117 / Page 8 of 10
`APPLE INC. v. SCRAMOGE TECHNOLOGY, LTD.
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`US 8,320,077 Bl
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`6
`Y is less than or equal to eighty, and Z is greater than or equal
`to zero. Step 202 may also include depositing on the high
`moment layer a soft layer. The soft layer may include, for
`example at least one of FeCoB, FeCoZr, FeCoNb, and
`NixFey, where X+Y equals one hundred, and Xis at least
`three and not greater than ninety. In one embodiment,
`Ni 81Fe 19 might be used. In another embodiment, Ni 55Fe45
`might be used. This process may be repeated until there are at
`least two high moment layers. In one embodiment, step 202
`10 includes repeatedly depositing high moment and soft layers
`until not more than sixteen high moment layers have been
`provided. Deposition in trench(es), photolithography, ion
`milling, and/or other mechanisms for shaping the film 100/
`100' into a pole may also be utilized in step 202. Other
`15 processing, for example annealing, may be included as part of
`depositing the film 100/100' in step 202.
`One or more coils for energizing the pole(s) are provided,
`via step 204. Step 204 may include, for example, formation of
`the coils 164 and 172. Although pancake coils are shown in
`20 FIG. 4, solenoidal coils might be fabricated in another
`embodiment. A write gap, such as the gap 168 may also be
`formed, via step 206. Fabrication of the transducer 150 is
`completed, via step 208.
`Thus, using the method 200 a transducer, such as the trans-
`25 ducer 150 may be provided. Because high moment film(s),
`such as the films 100 and/or 100' are used, the transducer 150
`formed using the method 200 may have improved permeabil(cid:173)
`ity and reduced domain lockup, but still have a sufficiently
`high moment. As a result, writeability and performance may
`30 be enhanced.
`
`5
`FIG. 4 depicts an exemplary embodiment of a magnetic
`transducer 150 utilizing an exemplary embodiment of a high
`magnetic moment film, such as the films 100 and/or 100'. The
`transducer 150 being fabricated may be part of a merged head
`that also includes a read head 152 and resides on a slider (not 5
`shown) in a disk drive. The read transducer 152 includes
`shields 154 and 158 and a read sensor 156. The write trans(cid:173)
`ducer 160 may be a PMR transducer or a longitudinal mag(cid:173)
`netic recording transducer. The write transducer 160 includes
`a first pole 162 that may be merged with shield 158, a first coil
`164, an auxiliary pole 166, a main pole 168, write gap 170, a
`second coil 17, and a return shield 174.
`A high moment soft film, such as the films 100 and 100',
`may be desired to be used in a pole, such as the main pole 168.
`Because the films such as the films 100 and/or 100' may be
`used in poles such as the main pole 168, the main pole 168
`may have a high moment, be soft, and have a high permeabil-
`ity at the read and write frequencies. Consequently, issues
`such as domain lockup may be ameliorated. Consequently,
`performance may be improved.
`FIG. 5 is a flow chart depicting an exemplary embodiment
`of a method 200 for providing a magnetic transducer includ(cid:173)
`ing a high magnetic moment film. For simplicity, some steps
`may be omitted. The method 200 is described in the context of
`the films 100/100' and transducer 150 in FIGS. 2-4. However,
`the method 200 may be used to form another device (not
`shown). The method 200 is also described in the context of
`providing a single transducer. However, the method 200 may
`be used to fabricate multiple transducers at substantially the
`same time. The method 200 and device 150 are also described
`in the context of particular layers. However, in some embodi(cid:173)
`ments, such layers may include multiple sublayers.
`Referring to FIGS. 2-5, at least one pole having at least one
`thick, high moment film is provided, via step 202. The high
`moment film includes multiple high moment layers and at 35
`least one soft magnetic layer interleaved with and ferromag(cid:173)
`netically coupled with the high moment layers. The thick,
`high moment film has a thickness of at least one thousand
`Angstroms. In some embodiments, the high moment film is at
`least two thousand Angstroms thick. However, in some 40
`embodiments, the high moment film is not thicker than three
`thousand Angstroms. The high moment film also has a mag(cid:173)
`netic moment of at least 2.4 Tesla.
`Each high moment layer of the high moment film has a
`magnetic moment of greater than 2.4 Tesla and is relatively 45
`thick. For example, the thickness of each high moment layer
`may be at least one hundred and not more than one thousand
`Angstroms. In some embodiments, the thickness of each high
`moment layer is at least three hundred and fifty Angstroms
`and not more than four hundred and fifty Angstroms.
`Each soft magnetic layer of the high moment film has a
`hard axis coercivity of not more than five Oersted and is
`relatively thin. For example, each soft magnetic layer may
`have a thickness of at least ten and not more than fifty Ang(cid:173)
`stroms. In some embodiments, each soft magnetic layer pro- 55
`vided in step 202 may have a thickness of at least thirteen
`Angstroms and not more than seventeenAngstroms. The high
`moment film(s) provided in step 202 are, therefore, analogous
`to the films 100 and/or 100'. The pole provided in step 202
`thus correspond a pole such as the main pole 168 of the 60
`transducer 150.
`Step 202 may including plating, sputtering, or otherwise
`alternately depositing the high moment layers 102 and 104/
`102', 104', 114, and 118 with the soft layers 104/108, 104',
`112, and 116. For example, step 202 may include depositing 65
`a high moment layer including FexCo~z, where X+ Y +Z
`equals one hundred and X is greater than or equal to twenty,
`
`50
`
`We claim:
`1. A high moment film comprising:
`a plurality of high moment layers, each of the plurality of
`high moment layers having a magnetic moment of
`greater than 2.4 Tesla and including FexCo~z, where
`X+Y +Z=l00 andX is greater than or equal to twenty, Y
`is less than or equal to eighty, and Z is greater than zero;
`and
`at least one soft magnetic layer interleaved with and ferro(cid:173)
`magnetically coupled with the plurality of high moment
`layers, the at least one soft magnetic layer having a hard
`axis coercivity of not more than twenty Oersteds, each of
`the at least one soft magnetic layer including at least one
`ofFeCoB, FeCoZr and FeCoNb;
`wherein the high moment film has a total thickness of at
`least one thousand Angstroms.
`2. The high moment film of claim 1 wherein the hard axis
`coercivity of the at least one soft magnetic layer is not more
`than five Oersteds.
`3. The high moment film of claim 1 wherein the plurality of
`high moment layers includes greater than two high moment
`layers.
`4. A magnetic transducer comprising:
`a pole having a high moment film including a plurality of
`high moment layers and at least one soft magnetic layer
`interleaved with and ferromagnetically coupled with the
`plurality of high moment layers, each of the plurality of
`the high moment layers having a magnetic moment of
`greater than 2.4 Tesla and including FexCo~z, where
`X+Y +Z=l00 andX is greater than or equal to twenty, Y
`is less than or equal to eighty, and Z is greater than zero,
`the at least one soft magnetic layer having a hard axis
`coercivity of not more than twenty Oersted, the high
`moment film having a total thickness of at least one
`thousand Angstroms, each of the at least one soft mag(cid:173)
`netic layer including at least one ofFeCoB, FeCoZr and
`FeCoNb; and
`a coil for energizing the pole.
`
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`7
`5. The magnetic transducer of claim 4 wherein the hard axis
`coercivity of the at least one soft magnetic layer is not more
`than five Oersteds.
`6. The magnetic transducer of claim 4 wherein the plurality
`of high moment layers includes not more than sixteen high
`moment layers.
`7. The magnetic transducer of claim 4 wherein the total
`thickness is at least two thousand Angstroms.
`8. The magnetic transducer of claim 7 wherein the total
`thickness is not more than three thousand Angstroms.
`9. The magnetic transducer of claim 4 wherein the at least
`one soft magnetic layer has a thickness of at least ten and not
`more than fifty Angstroms and each of the plurality of high
`moment layers has a thickness of at least one hundred and not
`more than one thousand Angstroms.
`10. The magnetic transducer of claim 9 wherein the at least
`one soft magnetic layer has a thickness of at least thirteen
`Angstroms and not more than seventeen Angstroms and each
`of the plurality of high moment layers has a thickness of at
`least three hundred fifty Angstroms and not more than four 20
`hundred fifty Angstroms.
`11. The magnetic transducer of claim 4 wherein the plural(cid:173)
`ity of high moment layers includes greater than two high
`moment layers.
`12. A disk drive comprising:
`a slider;
`a magnetic transducer coupled with the slider, the magnetic
`transducer including a pole and a coil for energizing the
`pole, the pole having a high moment film including a
`plurality of high moment layers and at least one soft 30
`magnetic layer interleaved with and ferromagnetically
`coupled with the plurality of high moment layers, each
`of the plurality ofhigh moment layers having a magnetic
`moment of at least 2.4 Tesla and including FexCo~z,
`where X+Y+Z=l00 and Xis greater than or equal to 35
`twenty, Y is less than or equal to eighty, and Z is greater
`than zero, each of the at least one soft magnetic layer
`having a hard axis coercivity of not more than twenty
`Oersted, the high moment film having a total thickness
`of greater than one thousand Angstroms, each of the at 40
`least one soft magnetic layer including at least one of
`FeCoB, FeCoZr and FeCoNb.
`13. The disk drive of claim 12 wherein the plurality of high
`moment layers includes greater than two high moment layers.
`
`10
`
`8
`14. A method for fabricating a magnetic transducer having
`an air-bearing surface (ABS) comprising:
`providing a pole having a high moment film including a
`plurality of high moment layer and at least one soft
`magnetic layer interleaved with and ferromagnetically
`coupled with the plurality of high moment layers, each
`of the plurality ofhigh moment layers having a magnetic
`moment of greater than 2.4 Tesla and including Fex(cid:173)
`CoyNz, where X+Y+Z=l00 and Xis greater than or
`equal to twenty, Y is less than or equal to eighty, and Z is
`greater than zero, each of the at least one soft magnetic
`layer having a hard axis coercivity of not more than
`twenty Oersted, the high moment film having a total
`thickness of at least one thousandAngstroms, each of t