III
`
`IIIIII IN IIII
`
`US010707057B2
`
`( 12 ) United States Patent
`(12) United States Patent
`Bhutta et al .
`Bhutta et al.
`
`(10) Patent No.: US 10,707,057 B2
`( 10 ) Patent No .: US 10,707,057 B2
`* Jul . 7 ,
`2020
`( 45 ) Date of Patent :
`(45) Date of Patent:
`*Jul. 7, 2020
`
`( 54 )
`(54)
`
`( * ) Notice :
`Notice:
`(*)
`
`RF IMPEDANCE MATCHING CIRCUIT AND
`RF IMPEDANCE MATCHING CIRCUIT AND
`SYSTEMS AND METHODS
`SYSTEMS AND METHODS
`INCORPORATING SAME
`INCORPORATING SAME
`( 71 ) Applicant : Reno Technologies , Inc. , Wilmington ,
`(71)
`Applicant: Reno Technologies, Inc., Wilmington,
`DE ( US )
`DE (US)
`( 72 ) Inventors : Imran Ahmed Bhutta , Moorestown ,
`Inventors: Imran Ahmed Bhutta, Moorestown,
`(72)
`NJ ( US ) ; Michael Gilliam Ulrich ,
`NJ (US); Michael Gilliam Ulrich,
`Delran , NJ ( US )
`Delran, NJ (US)
`( 73 ) Assignee : RENO TECHNOLOGIES , INC . ,
`Assignee: RENO TECHNOLOGIES, INC.,
`(73)
`Wilmington , DE ( US )
`Wilmington, DE (US)
`Subject to any disclaimer , the term of this
`Subject to any disclaimer, the term of this
`patent is extended or adjusted under 35
`patent is extended or adjusted under 35
`U.S.C. 154 ( b ) by 0 days .
`U.S.C. 154(b) by 0 days.
`This patent is subject to a terminal dis
`This patent is subject to a terminal dis-
`claimer .
`claimer.
`( 21 ) Appl . No .: 16 / 665,778
`(21)
`Appl. No.: 16/665,778
`( 22 ) Filed :
`Oct. 28 , 2019
`Filed:
`(22)
`Oct. 28, 2019
`( 65 )
`Prior Publication Data
`(65)
`Prior Publication Data
`US 2020/0058471 A1 Feb. 20 , 2020
`US 2020/0058471 Al
`Feb. 20, 2020
`Related U.S. Application Data
`Related U.S. Application Data
`Continuation of application No. 16 / 111,776 , filed on
`Continuation of application No. 16/111,776, filed on
`Aug. 24 , 2018 , now Pat . No. 10,460,912 , which is a
`Aug. 24, 2018, now Pat. No. 10,460,912, which is a
`( Continued )
`(Continued)
`
`( 63 )
`(63)
`
`( 51 ) Int . Ci .
`(51) Int. Cl.
`HO1J 3732
`HO1J 37/32
`H03H 11/28
`H03H 11/28
`
`( 52 ) U.S. Cl .
`(52) U.S. Cl.
`CPC
`CPC
`
`( 2006.01 )
`(2006.01)
`( 2006.01 )
`(2006.01)
`( Continued )
`(Continued)
`
`( 58 )
`(58)
`
`HOIJ 37/32183 ( 2013.01 ) ; HOIG 7700
` HO1J 37/32183 (2013.01); HO1G 7/00
`( 2013.01 ) ; HOIJ 37/32935 ( 2013.01 ) ;
`(2013.01); HO1J 37/32935 (2013.01);
`( Continued )
`(Continued)
`Field of Classification Search
`Field of Classification Search
`HO1J 37/32183 ; H01J 37/32935 ; HO1J
`CPC
`CPC
` H01J 37/32183; H01J 37/32935; H01J
`2237/334 ; HO1J 2237/327 ;
`2237/334; H01J 2237/327;
`( Continued )
`(Continued)
`
`( 56 )
`(56)
`
`3,641,451 A
`3,641,451 A
`3,681,662 A
`3,681,662 A
`
`References Cited
`References Cited
`U.S. PATENT DOCUMENTS
`U.S. PATENT DOCUMENTS
`2/1972 Hollingsworth et al .
`2/1972 Hollingsworth et al.
`8/1972 Spescha
`8/1972 Spescha
`( Continued )
`(Continued)
`FOREIGN PATENT DOCUMENTS
`FOREIGN PATENT DOCUMENTS
`
`CN
`CN
`CN
`CN
`
`12/2011
`102297538
`12/2011
`102297538
`12/2011
`103629851
`12/2011
`103629851
`( Continued )
`(Continued)
`
`OTHER PUBLICATIONS
`OTHER PUBLICATIONS
`Han , Yufeng , et al . , “ Power accuracy and source - pull effect for a
`Han, Yufeng, et al., "Power accuracy and source-pull effect for a
`high - power RF generator ” . 67th ARTFG Conference , 2006 , pp .
`high-power RF generator". 67th ARTFG Conference, 2006, pp.
`81-92 .
`81-92.
`
`( Continued )
`(Continued)
`
`Primary Examiner — Don P Le
`Primary Examiner — Don P Le
`( 74 ) Attorney , Agent , or Firm
`The Belles Group , P.C.
`(74) Attorney, Agent, or Firm — The Belles Group, P.C.
`
`ABSTRACT
`( 57 )
`ABSTRACT
`(57)
`In one embodiment , an RF impedance matching circuit is
`In one embodiment, an RF impedance matching circuit is
`disclosed . The matching circuit is coupled between a plasma
`disclosed. The matching circuit is coupled between a plasma
`chamber and an RF source providing an RF signal having a
`chamber and an RF source providing an RF signal having a
`frequency . The matching circuit includes a first electroni
`frequency. The matching circuit includes a first electroni-
`cally variable capacitor having a first variable capacitance
`cally variable capacitor having a first variable capacitance
`and a second electronically variable capacitor having a
`and a second electronically variable capacitor having a
`second variable capacitance . A control circuit determines a
`second variable capacitance. A control circuit determines a
`first parameter related to the plasma chamber , and then
`first parameter related to the plasma chamber, and then
`determines , based on the first parameter , a first capacitance
`determines, based on the first parameter, a first capacitance
`value for the first electronically variable capacitor and a
`value for the first electronically variable capacitor and a
`second capacitance value for the second electronically vari
`second capacitance value for the second electronically vari-
`able capacitor . The control circuit then generates a control
`able capacitor. The control circuit then generates a control
`signal to alter the first variable capacitance and the second
`signal to alter the first variable capacitance and the second
`variable capacitance accordingly , causing the RF power
`variable capacitance accordingly, causing the RF power
`reflected back to the RF source to decrease while the
`reflected back to the RF source to decrease while the
`frequency of the RF source is not altered .
`frequency of the RF source is not altered.
`
`17 Claims , 31 Drawing Sheets
`17 Claims, 31 Drawing Sheets
`
`RF Source
`RF Source
`15
`15
`
`11
`11
`
`13
`13
`
`17
`-17
`
`Sensor
`Sensor
`21
`21
`
`RF
`RF
`Input
`Input
`
`Series
`Series
`Series
`Series
`RF
`RF
`Capacitor Inductor
`Capacitor
`Inductor
`Output
`Output
`35
`31
`35
`31
`
`Sensor
`Senso
`49
`49
`
`40
`40
`
`Shunt
`RF Choke
`RF Choke
`Shunt
`Capacitor
`& Filter
`Capacitor & Filter
`37
`33
`3.1
`31
`
`RF Choke
`Driver
`RF Choke Driver
`& Filter
`Circuit
`& Filter
`Circuit
`41
`39
`41
`
`Driver
`Driver
`Circuit
`Circuit
`43
`43
`
`Control
`Control
`Circuit
`Circuit
`45
`45
`
`Power
`Power
`Supply
`Supply
`47
`47
`
`Plasma
`Plasma
`Chamber
`Chamber
`19
`12
`23
`27
`C27 D
`25
`22
`
`COL
`
`Page 1 of 63
`
`ADVANCED ENERGY INDUSTRIES INC.
`Exhibit 1001
`
`

`

`US 10,707,057 B2
`US 10,707,057 B2
`Page 2
`Page 2
`
`Related U.S. Application Data
`Related U.S. Application Data
`continuation of application No. 15 / 637,271 , filed on
`continuation of application No. 15/637,271, filed on
`Jun . 29 , 2017 , now Pat . No. 10,431,428 , which is a
`Jun. 29, 2017, now Pat. No. 10,431,428, which is a
`continuation - in - part of application No. 15 / 467,667 ,
`continuation-in-part of application No. 15/467,667,
`filed on Mar. 23 , 2017 , now Pat . No. 10,455,729 ,
`filed on Mar. 23, 2017, now Pat. No. 10,455,729,
`which is a continuation - in - part of application No.
`which is a continuation-in-part of application No.
`14 / 982,244 , filed on Dec. 29 , 2015 , now Pat . No.
`14/982,244, filed on Dec. 29, 2015, now Pat. No.
`10,454,453 , which is a continuation - in - part of appli
`10,454,453, which is a continuation-in-part of appli-
`cation No. 14 / 935,859 , filed on Nov. 9 , 2015 , now
`cation No. 14/935,859, filed on Nov. 9, 2015, now
`abandoned , which is a continuation - in - part of appli
`abandoned, which is a continuation-in-part of appli-
`cation No. 14 / 622,879 , filed on Feb. 15 , 2015 , now
`cation No. 14/622,879, filed on Feb. 15, 2015, now
`abandoned , which is a continuation - in - part of appli
`abandoned, which is a continuation-in-part of appli-
`cation No. 14 / 616,884 , filed on Feb. 9 , 2015 , now Pat .
`cation No. 14/616,884, filed on Feb. 9, 2015, now Pat.
`No. 9,865,432 , which is a continuation - in - part of
`No. 9,865,432, which is a continuation-in-part of
`application No. 14 / 594,262 , filed on Jan. 12 , 2015 ,
`application No. 14/594,262, filed on Jan. 12, 2015,
`now Pat . No. 9,496,122 , said application No. 15/637 ,
`now Pat. No. 9,496,122, said application No. 15/637,
`271 is a continuation - in - part of application No.
`271 is a continuation-in-part of application No.
`15 / 223,984 , filed on Jul . 29 , 2016 , now Pat . No.
`15/223,984, filed on Jul. 29, 2016, now Pat. No.
`9,728,378 , which is a continuation - in - part of appli
`9,728,378, which is a continuation-in-part of appli-
`cation No. 15 / 061,020 , filed on Mar. 4 , 2016 , now
`cation No. 15/061,020, filed on Mar. 4, 2016, now
`Pat . No. 9,543,122 , which is a continuation - in - part of
`Pat. No. 9,543,122, which is a continuation-in-part of
`application No. 14 / 700,209 , filed on Apr. 30 , 2015 ,
`application No. 14/700,209, filed on Apr. 30, 2015,
`now Pat . No. 9,345,122 , said application No. 15/637 ,
`now Pat. No. 9,345,122, said application No. 15/637,
`271 is a continuation - in - part of application No.
`271 is a continuation-in-part of application No.
`14 / 702,900 , filed on May 4 , 2015 , now Pat . No.
`14/702,900, filed on May 4, 2015, now Pat. No.
`9,745,660 , and a continuation - in - part of application
`9,745,660, and a continuation-in-part of application
`No. 14 / 788,888 , filed on Jul . 1 , 2015 , now Pat . No.
`No. 14/788,888, filed on Jul. 1, 2015, now Pat. No.
`9,697,991 , which is a continuation - in - part of appli
`9,697,991, which is a continuation-in-part of appli-
`cation No. 14 / 622,879 , filed on Feb. 15 , 2015 , now
`cation No. 14/622,879, filed on Feb. 15, 2015, now
`abandoned , said application No. 15 / 637,271 is a
`abandoned, said application No. 15/637,271 is a
`continuation - in - part of application No. 14 / 936,978 ,
`continuation-in-part of application No. 14/936,978,
`filed on Nov. 10 , 2015 , now Pat . No. 9,844,127 ,
`filed on Nov. 10, 2015, now Pat. No. 9,844,127,
`which is a continuation - in - part of application No.
`which is a continuation-in-part of application No.
`14 / 935,859 , filed on Nov. 9 , 2015 , now abandoned ,
`14/935,859, filed on Nov. 9, 2015, now abandoned,
`said application No. 15 / 637,271 is a continuation - in
`said application No. 15/637,271 is a continuation-in-
`part of application No. 15 / 450,495 , filed on Mar. 6 ,
`part of application No. 15/450,495, filed on Mar. 6,
`2017 , which is a continuation - in - part of application
`2017, which is a continuation-in-part of application
`No. 15 / 196,821 , filed on Jun . 29 , 2016 .
`No. 15/196,821, filed on Jun. 29, 2016.
`( 60 ) Provisional application No. 61 / 925,974 , filed on Jan.
`(60) Provisional application No. 61/925,974, filed on Jan.
`10 , 2014 , provisional application No. 61 / 940,139 ,
`10, 2014, provisional application No. 61/940,139,
`filed on Feb. 14 , 2014 , provisional application No.
`filed on Feb. 14, 2014, provisional application No.
`61 / 940,165 , filed on Feb. 14 , 2014 , provisional
`61/940,165, filed on Feb. 14, 2014, provisional
`application No. 62 / 077,753 , filed on Nov. 10 , 2014 ,
`application No. 62/077,753, filed on Nov. 10, 2014,
`provisional application No. 62 / 097,498 , filed on Dec.
`provisional application No. 62/097,498, filed on Dec.
`29 , 2014 , provisional application No. 62 / 312,070 ,
`29, 2014, provisional application No. 62/312,070,
`filed on Mar. 23 , 2016 , provisional application No.
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`61 / 987,718 , filed on May 2 , 2014 , provisional
`61/987,718, filed on May 2, 2014, provisional
`application No. 61 / 987,725 , filed on May 2 , 2014 ,
`application No. 61/987,725, filed on May 2, 2014,
`provisional application No. 62 / 019,591 , filed on Jul .
`provisional application No. 62/019,591, filed on Jul.
`1 , 2014 , provisional application No. 62 / 077,750 , filed
`1, 2014, provisional application No. 62/077,750, filed
`on Nov. 10 , 2014 , provisional application No.
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`62 / 185,998 , filed on Jun . 29 , 2015 , provisional
`62/185,998, filed on Jun. 29, 2015, provisional
`application No. 62 / 303,625 , filed on Mar. 4 , 2016 .
`application No. 62/303,625, filed on Mar. 4, 2016.
`( 51 ) Int . Cl .
`(51) Int. Cl.
`( 2006.01 )
`HOIG 7700
`HO1G 7/00
`(2006.01)
`( 2006.01 )
`HOIL 21/02
`HO1L 21/02
`(2006.01)
`HOIL 21/311
`( 2006.01 )
`HO1L 21/311
`(2006.01)
`( 2006.01 )
`?03H 738
`HO3H 7/38
`(2006.01)
`( 2006.01 )
`H05K 7/20
`HO5K 7/20
`(2006.01)
`( 2006.01 )
`HOIL 23/473
`HO1L 23/473
`(2006.01)
`( 52 ) U.S. CI .
`(52) U.S. Cl.
`CPC
`HOIL 21/02274 ( 2013.01 ) ; HOIL 21/31116
`CPC .. HO1L 21/02274 (2013.01); HO1L 21/31116
`( 2013.01 ) ; H03H 7/38 ( 2013.01 ) ; HO3H 11/28
`(2013.01); HO3H 7/38 (2013.01); HO3H 11/28
`( 2013.01 ) ; H05K 7/20609 ( 2013.01 ) ; HOIJ
`(2013.01); HO5K 7/20609 (2013.01); HOLJ
`
`( 56 )
`(56)
`
`2237/327 ( 2013.01 ) ; HOIJ 2237/332
`2237/327 (2013.01); HO1J 2237/332
`( 2013.01 ) ; HOIJ 2237/334 ( 2013.01 ) ; HOIL
`(2013.01); HO1J 2237/334 (2013.01); HOlL
`23/473 ( 2013.01 )
`23/473 (2013.01)
`( 58 ) Field of Classification Search
`(58) Field of Classification Search
`CPC . HO1J 2237/332 ; HO5K 7/20609 ; HO3H 7/38 ;
`CPC . H01J 2237/332; H05K 7/20609; H03H 7/38;
`HO3H 11/28 ; HO1L 21/31116 ; HOLL
`H03H 11/28; H01L 21/31116; H01L
`21/02274 ; HOIL 23/473 ; HONG 7/00
`21/02274; H01L 23/473; H01G 7/00
`315 / 111.21 , 111 , 210
`USPC
` 315/111.21, 111, 210
`USPC
`See application file for complete search history .
`See application file for complete search history.
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`6,027,601 A
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`6,332,961 B1
`6,332,961 B1
`6,343,478 B1
`6,343,478 B1
`6,400,012 B1
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`6,424,232 B1
`6,424,232 B1
`6,449,568 B1
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`6,583,572 B2
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`6,617,920 B2
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`6,621,372 B2
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`6,657,395 B2
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`6,677,828 B1
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`6,683,496 B2
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`6,703,080 B2
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`6,791,274 B1
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`6,794,951 B2
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`6,818,562 B2
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`6,873,114 B2
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`6,888,313 B2
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`6,888,396 B2
`6,888,396 B2
`6,946,847 B2
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`6,967,547 B2
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`6,995,545 B2
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`7,002,799 B2
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`7,004,107 B1
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`RE39,051 E
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`7,071,786 B2
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`7,095,178 B2
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`7,113,761 B2
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`7,164,236 B2
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`7,199,678 B2
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`5/2007 Rockenfeller
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`
`Page 2 of 63
`
`ADVANCED ENERGY INDUSTRIES INC.
`Exhibit 1001
`
`

`

`US 10,707,057 B2
`US 10,707,057 B2
`Page 3
`Page 3
`
`( 56 )
`(56)
`
`References Cited
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`Page 3 of 63
`
`ADVANCED ENERGY INDUSTRIES INC.
`Exhibit 1001
`
`

`

`US 10,707,057 B2
`US 10,707,057 B2
`Page 4
`Page 4
`
`( 56 )
`(56)
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