`
`flm
`
`Artisan Technology Group is your source for quality
`
`new and certified-used/pre—owned equipment
`
`' FAST SHIPPING AND
`DELIVERY
`0 TENS CIF THOUSANDS OF
`IN-STOCK ITEMS
`0 EQUIPMENT DEMOS
`' HUNDREDS OF
`MANUFACTURERS
`SUPPORTED
`' LEASING/MONTH LY
`RENTALS
`ITAR CERTIFIED
`SECURE ASSET SOLUTIONS
`
`'
`
`

`

`THE
`ADVANCED ENERGY®
`
`MDX MAGNETRON DRIVE
`
`
`
`Version: domestic input voltage (200/208 V ac)
`
`
`ADVANCED ENERGY
`INDUSTRIES, INC
`
`1600 Prospect Parkway
`Fort Collins, Colorado 80525
`(303)221-4670
`Telex #45-0938
`
`PN: 5700092-0
`March 1993
`
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.anisantg_com
`
`Page 2 of 245
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`

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`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 3 of 245
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`

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`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 4 of 245
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`

`

`SAFETY
`
`WARNING
`
`SAFE OPERATING PROCEDURES AND PROPER USE OF THE
`EQUIPMENT ARE THE RESPONSIBILITY OF THE USER OF THIS SYSTEM.
`
`Advanced Energy Industries, Inc., provides information on its products and
`associated halzards. but it assumes no responsibility for the alter-sale
`operation of the equipment or the safety practices of the owner or operator.
`
`This equipment produces potentially lethal high-voltage and high-current
`energy. You should read this manual and understand its contents before you
`attempt to hook up or operate the equipment it describes. Follow all safety
`precautions. Never defeat interlocks or grounds.
`
`Am
`SHOULD KNOW. ..
`
`
`
`
`
`DANGER! All personnel who work with or
`who are exposed to this equipment must
`take precautions to protect themselves
`against serious or possibly fatal bodily
`injury.
`
`DO NOT BE CARELESS AROUND THIS EQUIPMENT.
`
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www_artisantg_com
`
`Page 5 of 245
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 6 of 245
`
`

`

`CONTENTS
`
`
`INTRODUCTION
`
`Read This Page! ..................................... vii
`Overview of the Manual ................................ ix
`
`Interpreting the Manual ................................ xi
`
`PART I GETTING TO KNOW YOUR MDX MAGNETRON DRIVE
`
`1. WHAT IT IS
`Table of Contents .................................... 1-3
`General Description ................................... 1-5
`Typical Applications ................................... 1-9
`Specifications ........................................ 1-17
`
`2. HOW IT WORKS
`Table of Contents .................................... 2-1
`
`Theory of Operation ................................... 2-3
`Connectors .......................................... 2-7
`Status lnfonnation .................................... 2-13
`Interfacing .......................................... 2-25
`
`PART II OPERATING YOUR MDX MAGNETRON DRIVE
`
`3. PREPARING FOR USE
`Table of Contents .................................... 3-3
`Setting Up .......................................... 3-5
`Making Rear Panel Connections ......................... 3-13
`First-time Operation ................................... 3-31
`
`4. CHOOSING MODES/SETTINGS
`Table of Contents .................................... 4-1
`
`Output Regulation .................................... 4-5
`Program Mode ....................................... 4-5
`Lock Mode .......................................... 4-19
`Remotes ............................................ 4-21
`Tap Selection ........................................ 4-27
`Impedance Options ................................... 4-45
`Line Voltage Changes ................................. 4-47
`Master/Slave Operation ................................ 4-49
`
`5. USING THE SPECIAL FEATURES/OPTIONS
`Table of Contents .................................... 5-1
`ARC-CHECK“....................................... 5-3
`Fast Ramp .......................................... 5-5
`Contactor Hold ....................................... 5-7
`
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`Page 7 of 245
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`

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`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 8 of 245
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`

`

`INTRODUCTION
`
`
`READ THIS PAGE!
`
`We know that some of you want to start the magnetron drive now and that
`you don't feel you have time to read the entire manual. Below is a list of the
`subsections you will need to read in order to get started. We also think that
`you will find Overview of the Manual (page ix) and Interpreting the Manual
`(page xi) useful. They are very short sections. and are intended to guide you
`through the manual.
`
`Overview of the Manual explains the organization of the manual, so that you
`can more quickly find what you need. Interpreting the Manual explains the
`type conventions (what it means when a word appears in capitalized italic
`type, for instance). and what the five icons (symbols) mean.
`
`Physical specifications
`0
`0 Connectors
`o
`Setting up
`0
`Start-up procedures
`. Control panel switches and LEDs
`.
`Line voltage changes
`
`page 1-19
`page 2-7
`page 3-5
`page 329
`page 2-15, 2-17. 2-21. 2-25
`page 4-47
`
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`vii
`
`Page 9 of 245
`
`

`

`INTRODUCTION
`
`
`OVERVIEW OF THE MANUAL
`
`The main table of contents is a general outline of major topics covered in the
`manual. it contains only the main headings within each chapter so that you
`can skim it and get a general idea of what is contained here, without having to
`look at a lot of headings. When you turn to one of the six chapters, you will
`find a detailed table of contents that lists every heading in that particular
`chapter. This will help you to quickly decide which page contains the
`information you are looking for. Throughout the manual. the chapter titles are
`printed at the top right-hand comer of each odd-numbered page.
`
`Part 1 contains two chapters: What It is, and How it Works. What It is gives a
`general overview of the MDX magnetron drive, its various features and
`configurations. and typical applications. A detailed description of the functional
`specifications and a list of the physical specifications are also included.
`
`How It Works contains a functional block diagram and important information
`on connections, including listings of all input. output, and reference pins.
`Status indicators and messages (and suggested responses) are briefly
`discussed. and functions that are available through each of the interfaces are
`described. The transmission parameters for the Host (RS-232) port are also
`included in this section, as are several tables detailing recognized commands
`and explaining possible responses to those commands.
`
`Part it consists of three chapters: Preparing for Use, Choosing
`Modes/Settings, and Using the Special Features. Preparing for Use provides
`information on connection and wiring options. spacing and cooling
`requirements, and start-up procedures.
`
`Choosing Modes/Settings contains information on selecting one of the three
`methods of output regulation: power, current, or voltage. The subsection on
`“program” mode describes the target controls and various programmable
`setpoints and timers. Accessing functions through the analog/digital ("User")
`interface is discussed. Step-by-step procedures are provided for changing
`taps and line voltage settings. Also included is an explanation of the
`impedance options and a table that shows the maximum output cunent
`for various MDX models. Special considerations for systems that use both
`“master” and "slave" MDX units are briefly examined.
`
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`ix
`
`Page 10 of 245
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 11 of 245
`
`

`

`INTRODUCTION
`
`INTERPRETING THE MANUAL
`
`Type Conventions
`
`To help you quickly pick out what is being discussed. the manual presents
`certain words and phrases in type that is different from the rest of the text.
`
`Pin and line names appear in capitalized italics (RAMP IN.A). Labels that are
`on the MDX (switches, indicators, etc.) generally appear in boldface capital
`letters (MODIFY). Exceptions are port names, which simply begin with a
`capital letter (User port).
`
`Specific messages that will appear on the control panel meters are indicated
`by quotation marks (“E-02"). Functions are printed in boldface lowercase
`letters (contactor hold).
`
`How to Use the Symbols
`
`Am
`SHOULD KNOW. . .
`
`
`people.
`
` Safety notes. Important notes oonoeming potential harm to
`
`Warning notes. Important notes concerning possible harm to
`this unit or associated equ'pment
`
`
`
`YOU
`HOULD KNOW. . .
`
`
`
`AS
`
`afghmm
`
`Operating notes. More thoughts on how to use the extended
`
`features prowded.
`
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`xi
`
`Page 12 of 245
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
`
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`Page 13 of 245
`
`

`

`PART I
`
`GETTING TO KNOW YOUR
`
`MDX MAGNETRON DRIVE
`
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.altisantg_com
`
`Page 14 of 245
`
`

`

`WHAT IT IS
`
`CONTENTS
`
`General Description .................................. 1-5
`
`Output Impedance Range ...................... 1-5
`
`Output Regulation ............................. 1-5
`interfaces ................................... 1-5
`
`Microprocessor Advantages ..................... 1-6
`
`Displays .................................... 1-6
`Built-in Protection ............................. 1-6
`
`Arc-suppression Circuitry ....................... 1-6
`
`Sophisticated Options .......................... 1-6
`
`Typical Applications .................................. 1-9
`
`Basic Magnetron Sputtering ........................ 1-9
`
`Factory Configuration (Negative Output) ........... 1-9
`
`Optimum Configuration (Positive or Negative Output). 1-10
`
`Optimum Configuration (Floating Output) .......... 1-12
`
`DC Sputtering with RF Bias ........................ 1-13
`
`DG-biased RF Sputtering .......................... 1-15
`
`Specifications ....................................... 1-17
`
`Functional Specifications........................... 1-17
`
`Physical Specifications ............................ 1-19
`
`1 - 3
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`Page 15 of 245
`
`

`

`WHAT IT IS
`
`
`GENERAL DESCRIPTION
`
`The dc magnetron drives in the MDX series prove just how convenient and
`efficient advanced high-frequency switchmode power supplies are.
`They...
`
`are light and compact
`are highly efficient (low heat emission)
`provide excellent regulation and stability
`have a highly reliable solid state design
`are modular
`
`store very little energy in the output filter
`
`These magnetron drives exhibit superior output response time, low output
`ripple voltage, and considerable space savings over lower frequency designs.
`The internal microprocessor ensures ease of use, and the modular design
`allows the supplies to be easily serviced.
`
`Output Impedance Range
`
`Each MDX is equipped with a built-in impedance-matching transformer. These
`tap-selectable transformers are available in high 2, standard 2, or low Z
`configurations. With the proper transformer and tap (see pages 4-27 and
`4-45), load impedances requiring voltages from 400 V to 1250 V can be
`aocomodated.
`
`Plasma strike voltages are available on all taps — levels reach as high as
`1500 V, depending on the model. The full rated power output for each MDX is
`available throughout the range of each tap.
`
`Output Regulation
`
`The MDX can be used as a power, current, or voltage source, depending on
`the method of output regulation selected. Since setpoint levels are stored in
`nonvolatile memory, they can be used in recovering from input power
`lnten’uptions and to ensure repeatability from run to run.
`
`Interfaces
`
`The MDX can be controlled from a variety of attached or remote control
`panels, an analog/digital connector, or an RS-232 serial data port. The RS-232
`(Host) interface provides access to all operating parameters and control
`functions. The analog/digital (User) interface provides data logging capability
`and access to a number of features.
`
`1-5
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www_artisantg_com
`
`Page 16 of 245
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 17 of 245
`
`

`

`WHAT IT IS
`
`cathodic arc processes. When recovering from a low-impedance condition. the
`MDX automatically ramps up slowly in current regulation. As the chamber
`impedance increases (with the removal of excess ions). the power supply
`automatically crosses over to the previously selected method of output
`regulation (power or voltage). Timing and current magnitudes can be adjusted
`to protect sensitive targets and system components.
`
`1 - 7
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www_ar‘tisantg_com
`
`Page 18 of 245
`
`

`

`WHAT IT IS
`
`
`TYPICAL APPLICATIONS
`
`Basic Magnetron Sputtering
`
`Three output configurations are possible for the MDX: negative output voltage.
`positive output voltage, and floating ground. Provisions within the MDX chassis
`allow you to tie either the anode or the cathode to ground; altematively. you
`can let the output float with respect to ground by not grounding either the
`anode or the cathode.
`
`Am
`
`SHOULD KNOW. . .
`
`
`
`Danger! An understanding of grounding and
`the proper hookup of grounds is essential to
`personnel safety and is necessary for the
`proper operation of your system. In all cases
`you must connect the chassis ground stud
`on the rear of the MDX to earth-ground with
`the lowest possible impedance (see
`operating note on grounding methods and
`definitions, page 7-1).
`
`Factory Configuration (negative output)
`Most MDX applications require a negative output voltage. which in turn
`requires that the anode be connected to ground. The MDX is shipped with a
`safety jumper installed as shown in Fig. 1-1 to make this ground connection,
`although this is not the optimum configuration. The reason is related to safety
`-- most people associate the braided shield layer of a coaxial cable with a
`ground connection. If we shipped products with no internal ground. it is
`conceivable that a system could be configured with a lethal voltage on the
`coaxial cable's sheath. This would be extremely dangerous because of the
`possibility that people could unknowingly be exposed to such a voltage at the
`connectors.
`
`The disadvantage of having an installed ground is that additional grOunds
`invariably do exist in the system. This means that there are two or more
`ground paths in the system. When multiple ground paths exist. the chassis is
`made to conduct some of this current. This current flow can cause a loss of
`
`instrumentation accuracy, electrical noise, and heating of the chassis or
`connectors and joints; it may even raise the ground-reference voltage level so
`that extemal and internal control signals either control the MDX enatically or
`not at all. Thus the best system performance is obtained using the “optimum
`configuration (positive or negative output)" described next.
`
`1-9
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`Page 19 of 245
`
`

`

`PART I
`
`
`L\E
`
`/
`
`Insulated
`Feedthrough
`
`
` Fcelery-installed
`Sciety Jumper
`
`
`
`Cathode
`(Target Material)
`
`Substrate
`
`Optional
`Grounded
`Substrate
`
`Figure 1-1. Factory configuration (factory-installed safetyjumper).
`
`Optimum Configuration (positive or negative output)
`The configuration that AE recommends is illustrated in Fig. 1-2. which shows
`an independently grounded anode at the chamber, forcing all return current
`through the anode return path. The design of the chamber may use the
`chamber wall, special intemal shielding structure, or the substrate holder as
`the actual anode. With this setupronly one current path will exist, thus
`eliminating the problems caused by multiple returns.
`
`Make certain that you have established a good ground at the chamber anode
`or the ground reference will be lost. The integrity of this ground connection
`should be checked as part of a periodic maintenance schedule to ensure
`continued optimum performance and safety. \Mlenever a system is configured
`in this manner. it is recommended that secondary dielectric shielding be
`installed over all parts of the coaxial cable and connectors that are exposed.
`
`When this connection degrades, as it will overtime, the system could become
`unsafe (as described in the two preceding paragraphs); more likely.
`performance will be lost. This slow loss of performance can be subtle and very
`difficult to detect. Some indications of ground degradation are loss of
`instrumentation accuracy, symptoms of increased noise such as display flicker
`and jittery data-logging lines, secondary plasma development between the
`target and the closest point at ground potential. change in the appearance of
`the chamber plasma at known power levels. and increasingly erratic behavior
`of the power supply or the system controller.
`
`1-10
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.ar1isantg.com
`
`Page 20 of 245
`
`

`

`WHAT IT IS
`
`
`All of these considerations hold true when the MDX is used in the positive
`output voltage (grounded cathode) configuration.
`
`/
`
`Insulated
`Feedthrough
`
`(Target Material)
`
`Cathode
`
`Substrate
`
`Optional
`Grounded
`Substrate
`
`figure 1-2. Optimum grounding configuration (negative output),
`
`/
`
`Insulated
`Feedthrough
`
`
`
`Chamber
`
`Cathode
`(Target Material)
`
`Substrate
`
`Optional
`Grounded
`Substrate
`
`Figure 1-3. Optimum grounding configuration (positive output).
`
`1 - 11
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.ar‘tisantg_com
`
`Page 21 of 245
`
`

`

`PART I
`
`
`_.
`L\:
`
`Optimum Configuration (floating output)
`In some applications it is desirable to bias the positive or negative output of
`the MDX with another power supply. This supply may be another dc supply or
`an RF supply. The MDX may be biased by a voltage of up to $400 V
`referenced to its own (MDX) chassis ground. Figure 1-4 illustrates a typical
`configuration of this type.
`
`Men using the MDX in this configuration, it is again very important to provide
`a good chassis ground for each power supply. Further, all power supply
`chassis grounds should be connected at one common point. All
`interconnecting power supply output lines and connectors must be fully
`insulated to protect personnel from accidental exposure to potentially lethal
`voltages.
`
`/
`
`Insulated
`Feedthrough
`
`Cathode
`
`(Target Material) Chamber
`
`Optional
`Biased
`Su bstrate
`
`figure 1-4. Floating-output configuration.
`
`1 - 12
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www_artisantg_com
`
`Page 22 of 245
`
`

`

`WHAT IT IS
`
`
`DC Sputtering with RF Bias
`
` Am
`SHOULD KNOW. ..
`
`
`
`WARNING! You must place an ac blocking
`filter in series with the output of the dc
`power supply if your system uses a dc
`power supply in combination with an ac
`power supply that has an output frequency
`greater than 50 kHz.
`
`In this application (see the illustration on the next page), proper installation of
`the RF generator and tuner is critical to proper operation of the system. Proper
`installation includes good. solid. RF grounding and dc installation.
`
`An RF fitter must be placed between the dc output and the chamber because
`13.56 MHz can damage the typical dc magnetron power supply. There is no
`need to put a fitter between the RF tuner output and the chamber because
`Advanced Energy® tuners provide a dc block.
`
`The purpose of this type of installation is to elevate the potential on the biased
`substrate. Vlfith proper installation and programming, an Advanced Energy®
`RFX can control the developed dc bias on the substrate (see the operating
`note on dc bias, page 6-3).
`
`This extra control parameter (RF bias) may provide higher deposition rates or
`better film structure. The results will vary with each application. Biasing alters
`the ion and acceleration potentials. and these altered potentials provide the
`desired results.
`
`1-13
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`Page 23 of 245
`
`

`

`PART I
`
`L\E°
`
`Insulated
`Feedthrough
`
`RF Filter
`
`\
`
` 500
`
`I
`
`Substrate
`
`- ~\ Alternate
`Method
`
`Figure 1- 5. Typical configuration for do sputtering with RF bias.
`
`1 - 14
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`Page 24 of 245
`
`

`

`WHAT IT IS
`
`
`DC-biased RF Sputtering
`
` Am
`
`SHOULD KNOW. . .
`
`
`WARNINGI You must place an ac blocking
`filter in series with the output of the dc
`power supply if your system uses a dc
`power supply in combination with an ac
`power supply that has an output frequency
`greater than 50 kHz.
`
`Figure 1-6 (on the next page) shows a typical RF sputtering application, where
`the target shield and chamber walls are referenced to ground. but the
`substrate is directly biased with a dc power supply. This could be a planar
`magnetron or an “S" gun installation.
`
`lmproper grounding of the tuner. chamber. and MDX will result in radio
`frequency interference (RFI), which is often evidenced in this application by
`chattering valves or your computer behaving erratically.
`
` Am
`
`SHOULD KNOW. . .
`
`
`
`DANGER! Lethal high-voltage potentials will
`be present if the tuner, chamber. and MDX
`are not properly grounded.
`
`Some RF sputtering appfications require a length of cable between the tuner
`output and the vacuum feedthrough. This type of connection should only be
`used, with extreme caution, ifthere is no way to mount the tuner directly to the
`vacuum feedthrough. The impedance transformation that takes place within
`the interconnect cable can create large circulating currents on this cable. The
`power dissipated is a function of IZR losses. This formula shows that any
`increase in circulating current greatly increases the losses in the cable.
`
`In light of this fact, a tetlon dielectric cable should be used because teflon has
`a more favorable thermal characteristic than other cable materials. The teflon
`
`will minimize migration of the center conductor due to overheating, thus
`reducing the probability of the center conductor shorting to the outer sheath.
`
`A key consideration in any RF installation is the RF retum path. Power
`supply/tuner connection: The power supply is usually connected to the
`tuning network through a coaxial cable, and the braided shield on this cable
`acts as an adequate RF return forthis section of the circuit. Tuner/chamber
`connection: Pay special attention to the connection between the tuning
`
`1-15
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg_com
`
`Page 25 of 245
`
`

`

`PART I
`
`
`network and chamber. On all Advanced Energy® tuners, the aluminum
`chassis provides the RF return path. Ideally, this chassis should be bolted
`directly onto the vacuum chamber, thus establishing good surface contact. If
`this is not possible. connect the tuner and chamber with a solid copper strap.
`Avoid using braid — the fine strands within the braid form a highly inductive
`path and may melt from overheating. Also avoid using stainless steel hardware
`— steel is a poor conductor at high frequencies because of its ferromagnetic
`properties.
`
`Brass hardware is most commonly used because brass is a good conductor
`and is readily available.
`
`Insulated
`
`50 0
`
`/
`
`Feedthrough
`
`Target
`
`
`
`KRF Filter
`iii“if”? il.
`Hill i
`
`
`
`
`
`
`Substrate
`
`'
`
`Figure 1-6. Typical configuration for RF sputtering with dc bias.
`
`1 - 16
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www_artisantg_com
`
`Page 26 of 245
`
`

`

`WHAT IT IS
`
`
`SPECIFICATIONS
`
`Functional Specifications
`
`Mode of Control
`
`Control Signal
`Sources
`
`Program —- full control is available from all
`Interfaces.
`
`Lock— front-panel control is limited to output
`onloff. emergency stop, and test functions; also,
`setpoints can be viewed for whatever method of
`output regulation (power, current, or voltage) was
`selected in program mode.
`017— all functions are disabled.
`
`Output can be controlled from the control panel, the
`host-remote (RS-232) interface, or the user-remote
`interface. Control of output regulation. ramp time,
`output on/off, or target select can be split between
`the User port and the control panel or between the
`User port and the Host port.
`
`Methods of Output
`Regulation
`
`The value that remains constant when the MDX is
`
`producing output can be power, current, or voltage.
`
`Programmable
`Setpoints
`
`Target Supervision
`
`An output level (up to the unit's maximum rated
`output) can be programmed for power, current, or
`voltage.
`
`One of eight target-life counters (0-7) can be
`selected either remotely or from a control panel.
`Target life can be specified and monitored from a
`host computer or from a control panel (1~9900
`kWh).
`
`Arc Suppression
`
`Arc conditions are quickly detected and MDX
`output is quickly modified to prevent damage to the
`target and substrate.
`
`1-17
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www_artisantg_com
`
`Page 27 of 245
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
`
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`Page 28 of 245
`
`

`

`WHAT IT IS
`
`
`Physical Specifications
`
`Input Voltages
`
`200 V ac or 208 V ac rms :t 10%. 50/60 Hz,
`three-phase “Y' connection; maximum ground
`leakage current less than 3.5 mA.
`
`Input Current
`
`200 V ac or 208 V ac full load; see table below for
`maximums.
`
`MDX
`
`Model
`
`MDX 5K
`MDX 10K
`MDX 15K
`MDX 20K
`MDX 25K
`MDX 30K
`
`Maximum Current (at
`-10% input line voltage)
`
`19A
`38A
`57A
`76A
`95A
`114A
`
`Output Power
`
`See table below for details.
`
`Chassis Per Output Ripple
`System
`Voltage (% rms)
`
`Output Ripple
`Frequency
`
`50 kHz
`100 kHz
`100kHz
`100 kHz
`100 kHz
`100 kHz
`
`5 N
`
`NNNN
`
`1
`
`UMNN—l
`
`Output
`Power
`
`0-5000 W
`
`0-10,000 W
`0-15.000 W
`0-20.000 W
`0-25,000 W
`0-30,000 W
`
`Output Display
`Accuracy
`
`Within 2% of actual output level or 0.2% of
`maximum rated output level. whichever is greater.
`
`Target Accumulator
`
`Target life is displayed in 1-kWh Increments; the
`counter is updated every 4.7 ms.
`
`Methods of Control
`
`Full or restricted access, local or remote control,
`programmed or manual operation.
`
`1-19
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www.artisantg.com
`
`Page 29 of 245
`
`

`

`Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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`Page 30 of 245
`
`

`

`WHAT IT IS
`
`
`Output Parameters
`
`The table below indicates the maximum current
`that can be produced at each tap. It also shows the
`range of output voltages available at each tap.
`when the MDX Is in voltage regulation (see page
`4-3).
`
`MDX 10K
`
`MDX 15K
`
`MDX 20K
`
`MDX 25K
`
`MDX 30K
`
`Maximum Output Current Low Impedance (“Low Z")
`
`25.00 A
`20.00 A
`15.50 A
`
`37.50 A
`30.00 A
`23.50 A
`
`50.00 A
`40.00 A
`31.00 A
`
`62.50 A
`50.00 A
`38.75 A
`
`75.00 A
`60.00 A
`46.50 A
`
`Maximum Output Current Standard Impedance (“Standard Z")
`
`20.00 A
`16.00 A
`12.50 A
`
`30.00 A
`24.00 A
`18.75 A
`
`40.00 A
`32.00 A
`25.00 A
`
`50.00 A
`40.00 A
`31.25 A
`
`60.00 A
`48.00 A
`37.50 A
`
`48.00 A
`38.40 A
`30.00 A
`
`Maximum Output Current: High Impedance (“High 2”)
`
`O V to 775 V
`0 V to 1000 V
`0 V to 1250 V
`
`8.00 A
`6.40 A
`5.00 A
`
`16.00 A
`12.80 A
`10.00 A
`
`24.00 A
`19.20 A
`15.00 A
`
`32.00 A
`25.60 A
`20.00 A
`
`40.00 A
`32.00 A
`25.00 A
`
`Tap
`I‘fl
`
`Output Volt.
`
`Range
`
`
`MDX 5K
`
`12.50 A
`10.00 A
`7.75 A
`
`
`
`10.00 A
`8.00 A
`6.25 A
`
`0 V to 500 V
`0 V to 640 V
`0 V to 800 V
`
`0 V to 600 V
`0 V to 800 V
`0 V to 1000 V
`
`1
`2
`3
`
`1
`2
`3
`
`1
`2
`3
`
`1 - 21
`Artisan Technology Group - Quality Instrumentation Guaranteed | (888) 88-SOURCE | www_artisantg_com
`
`Page 31 of 245
`
`

`

`HOW IT WORKS
`
`CONTENTS
`
`Theory of Operation .................................. 2-3
`Connectors ......................................... 2-7
`
`Input Power Connector ............................ 2-7
`
`Output Connector ................................ 2-7
`Remote Control Panel Connector .................... 2—7
`
`Analog/Digital IIO Port............................. 2-8
`
`Pin-description Table .......................... 2-8
`Host RS-232 Port ................................ 2-10
`
`Translating Responses to Status Requests ......... 2—43
`
`Pin-description Table .......................... 2-10
`
`Cathode Port (Mlnipanel) .......................... 2-10
`Master/Slave Interface Connectors ................... 2-11
`
`Status Information ........