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`
`FEATURES
`Low cost
`High resolution
`Dual-axis accelerometer on a single IC chip
`5 mm × 5 mm × 2 mm CLCC package
`Low power < 400 µA (typ)
`X-axis and Y-axis aligned to within 0.1° (typ)
`BW adjustment with a single capacitor
`Single-supply operation
`High shock survival
`
`APPLICATIONS
`Tilt and motion sensing in cost-sensitive applications
`Smart handheld devices
`Computer security
`Input devices
`Pedometers and activity monitors
`Game controllers
`Toys and entertainment products
`
`Low Cost, Ultracompact
`±2 g Dual-Axis Accelerometer
`ADXL311
`
`GENERAL DESCRIPTION
`The ADXL311 is a low cost, low power, complete dual-axis
`accelerometer with signal conditioned voltage outputs, all on a
`single monolithic IC. The ADXL311 is built using the same
`proven iMEMS® process used in over 100 million Analog
`Devices accelerometers shipped to date, with demonstrated
`1 FIT reliability (1 failure per 1 billion device operating hours).
`
`The ADXL311 will measure acceleration with a full-scale
`range of ±2 g. The ADXL311 can measure both dynamic
`acceleration (e.g., vibration) and static acceleration (e.g.,
`gravity). The outputs are analog voltages proportional to
`acceleration.
`
`The typical noise floor is 300 µg/√Hz allowing signals below
`2 mg (0.1° of inclination) to be resolved in tilt sensing appli-
`cations using narrow bandwidths (10 Hz).
`
`The user selects the bandwidth of the accelerometer using
`capacitors CX and CY at the XFILT and YFILT pins. Bandwidths
`of 1 Hz to 2 kHz may be selected to suit the application.
`
`The ADXL311 is available in a 5 mm × 5 mm × 2 mm
`8-terminal hermetic CLCC package
`
`3.0V
`
`VDD
`
`CX
`
`XOUT
`
`SELF TEST
`
`X SENSOR
`
`RFILT
`32kΩ
`
`DEMOD
`
`CDC
`
`OSCILLATOR
`
`ADXL311JE
`
`DEMOD
`
`Y SENSOR
`
`COM
`
`32kΩ
`RFILT
`
`YOUT
`
`CY
`
`Figure 1. Functional Block Diagram
`
`BIAS
`
`200kΩ
`
`Rev. A
`Information furnished by Analog Devices is believed to be accurate and reliable.
`However, no responsibility is assumed by Analog Devices for its use, nor for any
`infringements of patents or other rights of third parties that may result from its use.
`Specifications subject to change without notice. No license is granted by implication
`or otherwise under any patent or patent rights of Analog Devices. Trademarks and
`registered trademarks are the property of their respective companies.
`
`One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.
`Tel: 781.329.4700
`www.analog.com
`Fax: 781.326.8703
`© 2003 Analog Devices, Inc. All rights reserved.
`
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`
`
`ADXL311
`
`
`
`TABLE OF CONTENTS
`Specifications..................................................................................... 3
`Absolute Maximum Ratings............................................................ 4
`Typical Performance Characteristics ............................................. 5
`Theory of Operation ........................................................................ 7
`Applications................................................................................... 7
`Design Trade-Offs for Selecting Filter Characteristics: The
`Noise/BW Trade-Off.................................................................... 7
`Using the ADXL311 as a Dual-Axis Tilt Sensor....................... 8
`
`
`
`
`REVISION HISTORY
`7/03—Data sheet changed from Rev. 0 to Rev. A.
`Change to OUTLINE DIMENSIONS.......................................... 10
`
`Revision 0: Initial Version
`
`
`
`
`
`
`
`Pin Configuration and Functional Descriptions...........................9
`Outline Dimensions....................................................................... 10
`Ordering Guide .......................................................................... 10
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
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`
`SPECIFICATIONS
`Table 1. TA = 25oC, VDD = 3 V, RBIAS = 125 kΩ, Acceleration = 0 g, unless otherwise noted.)
`Parameter
`Conditions
`Min
`Typ
`SENSOR INPUT
`Each Axis
`
`
`Measurement Range
`
`
`±2
`Nonlinearity
`Best Fit Straight Line
`
`0.2
`Aligment Error1
`
`
`±1
`Aligment Error
`X Sensor to Y Sensor
`
`0.01
`Cross Axis Sensitivity2
`
`
`±2
`SENSITIVITY
`Each Axis
`
`
`Sensitivity at XFILT, YFILT V
`DD = 3 V
`140
`167
`Sensitivity Change due to Temperature3
`Delta from 25°C
`
`−0.025
`ZERO g BIAS LEVEL
`Each Axis
`
`
`0 g Voltage XFILT, YFILT V
`DD = 3 V
`1.2
`1.5
`0 g Offset vs. Temperature
`Delta from 25°C
`
`2.0
`NOISE PERFORMANCE
`
`
`
`Noise Density
`@25°C
`
`300
`FREQUENCY RESPONSE
`
`
`
`3 dB Bandwidth
`At Pins XFILT, YFILT
`
`6
`Sensor Resonant Frequency
`
`
`10
`FILTER
`
`
`
`RFILT Tolerance
`32 kΩ Nominal
`
`±15
`Minimum Capacitance
`At Pins XFILT, YFILT
`1000
`
`SELF TEST
`
`
`
`XFILT, YFILT
`Self Test 0 to 1
`
`45
`POWER SUPPLY
`
`
`
`Operating Voltage Range
`
`2.7
`
`Quiescent Supply Current
`
`
`0.4
`Turn-On Time
`
`
`160 × CFILT + 0.3
`TEMPERATURE RANGE
`
`
`
`Operating Range
`
`0
`
`
`
`
`
`
`ADXL311
`
`Max
`
`
`
`
`
`
`
`195
`
`
`1.8
`
`
`
`
`
`
`
`
`
`
`
`
`5.25
`1.0
`
`
`70
`
`Units
`
`g
`% of FS
`Degrees
`Degrees
`%
`
`mV/g
`%/°C
`
`V
`mg/°C
`
`µg/√Hz RMS
`
`kHz
`kHz
`
`%
`pF
`
`mV
`
`V
`mA
`ms
`
`°C
`
`
`). Figure 1
`1 Alignment error is specified as the angle between the true and indicated axis of sensitivity (
`2 Cross axis sensitivity is the algebraic sum of the alignment and the inherent sensitivity errors.
`3 Defined as the output change from ambient to maximum temperature or ambient to minimum temperature.
`
`
`
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`
`
`ADXL311
`
`
`
`ABSOLUTE MAXIMUM RATINGS
`Table 2.
`Parameter
`Acceleration
`(Any Axis, Unpowered)
`Acceleration
`(Any Axis, Powered, VDD = 3 V)
`VDD
`Output Short-Circuit Duration,
`(Any Pin to Commom)
`Operating Temperature Range
`–55°C to +125°C
`Storage Temperature
`–65°C to +150°C
`Stresses above those listed under Absolute Maximum Ratings
`may cause permanent damage to the device. This is a stress rat-
`ing only and functional operation of the device at these or any
`other conditions above those indicated in the operational sec-
`tion of this specification is not implied. Exposure to absolute
`maximum rating conditions for extended periods may affect
`device reliability.
`
`Rating
`3,500 g, 0.5 ms
`
`3,500 g, 0.5 ms
`
`–0.3 V to +0.6 V
`Indefinite
`
`Table 3. Package Characteristics
`Package Type
`θJC
`θJA
`8-Lead CLCC
`120°C/W
`TBD°C/W
`
`Device Weight
`<1.0 gram
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
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`
`
`
`
`TYPICAL PERFORMANCE CHARACTERISTICS
`
`ADXL311
`
`0.157
`
`0.161
`
`0.165
`
`0.169
`
`0.173
`
`0.177
`
`0.181
`
`V/g
`
`
`
`14
`
`12
`
`10
`
`8
`
`6 4 2 00
`
`.153
`
`PERCENT OF PARTS
`
`.33
`
`1.37
`
`1.41
`
`1.45
`
`1.53
`
`1.57
`
`1.61
`
`1.49
`V
`
`
`
`Figure 2. X-Axis Zero g BIAS Output Distribution
`
`Figure 5. Y-Axis Sensitivity Distribution at YOUT
`
`70
`
`110
`
`108
`
`106
`
`104
`
`102
`
`100
`
`98
`
`96
`
`94
`
`92
`
`90
`
`SENSITIVITY– %
`
`10
`
`9
`
`78
`
`6 5 4 3 2 1 01
`
`9
`
`78
`
`PERCENT OF PARTS
`
`PERCENT OF PARTS
`
`0
`
`10
`
`20
`
`30
`40
`50
`TEMPERATURE – °C
`
`60
`
`80
`
`
`
`Figure 6. Normalized Sensitivity vs. Temperature
`
`30
`
`25
`
`20
`
`15
`
`10
`
`5 01
`
`PERCENT OF PARTS
`
`50
`
`200
`
`250
`
`300
`350
`400
`NOISE DENSITY – µg/√Hz
`
`450
`
`500
`
`550
`
`
`
`
`
`
`
`6 5 4 3 2 1 01
`
`14
`
`12
`
`10
`
`8
`
`.33
`
`1.37
`
`1.41
`
`1.45
`
`1.53
`
`1.57
`
`1.61
`
`1.49
`V
`
`Figure 3. Y-Axis Zero g BIAS Output Distribution
`
`0.16
`
`0.164
`
`0.168
`V/g
`
`0.172
`
`0.176
`
`0.18
`
`6 4 2 00
`
`.156
`
`PERCENT OF PARTS
`
`Figure 4. X-Axis Output Sensitivity Distribution at XOUT
`
`Figure 7. Noise Density Distribution
`
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`
`
`ADXL311
`
`VDD
`
`XOUT
`
`CFILT = 0.01 µF
`
`V
`
`3
`
`2
`
`1
`
`0
`
`0.45
`
`0.4
`
`0.35
`
`0.3
`
`0.25
`
`0.2
`
`0.15
`
`0.1
`
`0.05
`
`CURRENT– mA
`
`0
`
`0
`
`10
`
`20
`
`30
`50
`40
`TEMPERATURE – °C
`
`60
`
`70
`
`80
`
`
`
`Figure 8. Typical Supply Current vs. Temperature
`
`
`
`0
`
`0.4
`
`0.8
`TIME – ms
`
`1.2
`
`1.4
`
`
`
`Figure 9. Typical Turn-On Time
`
`
`
`
`
`Rev. A | Page 6 of 12
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`
`
`
`
`THEORY OF OPERATION
`The ADXL311 is a complete, dual-axis acceleration measure-
`ment system on a single monolithic IC. It contains a polysilicon
`surface-micromachined sensor and signal conditioning cir-
`cuitry to implement an open-loop acceleration measurement
`architecture. The output signals are analog voltage proportional
`to acceleration. The ADXL311 is capable of measuring both
`positive and negative accelerations to at least ±2 g. The acceler-
`ometer can measure static acceleration forces, such as gravity,
`allowing it to be used as a tilt sensor.
`
`The sensor is a surface-micromachined polysilicon structure
`built on top of the silicon wafer. Polysilicon springs suspend the
`structure over the surface of the wafer and provide a resistance
`against acceleration forces. Deflection of the structure is meas-
`ured using a differential capacitor that consists of independent
`fixed plates and central plates attached to the moving mass. The
`fixed plates are driven by 180° out of phase square waves. Accel-
`eration will deflect the beam and unbalance the differential
`capacitor, resulting in an output square wave whose amplitude is
`proportional to acceleration. Phase sensitive demodulation
`techniques are then used to rectify the signal and determine the
`direction of the acceleration.
`
`The output of the demodulator is amplified and brought off-
`chip through a 32 kΩ resistor. At this point, the user can set the
`signal bandwidth of the device by adding a capacitor. This
`filtering improves measurement resolution and helps prevent
`aliasing.
`
`Applications
`
`POWER SUPPLY DECOUPLING
`For most applications, a single 0.1 µF capacitor, CDC, will ade-
`quately decouple the accelerometer from noise on the power
`supply. However, in some cases, particularly where noise is pre-
`sent at the 100 kHz internal clock frequency (or any harmonic
`thereof), noise on the supply may cause interference on the
`ADXL311 output. If additional decoupling is needed, a 100 Ω
`(or smaller) resistor or ferrite beads may be inserted in the sup-
`ply line of the ADXL311. Additionally, a larger bulk bypass
`capacitor (in the 1 µF to 4.7 µF range) may be added in parallel
`to CDC.
`
`SETTING THE BANDWIDTH USING CX AND CY
`The ADXL311 has provisions for bandlimiting the XOUT and
`YOUT pins. Capacitors must be added at these pins to implement
`low-pass filtering for antialiasing and noise reduction. The
`equation for the 3 dB bandwidth is
`(
`(
`kΩ32
`2/1
`
`)
`×
`
`)YX,
`C
`(
`
`)
`
`
`
`F
`dB
`3–
`
`=
`
`π
`
`or, more simply
`
`ADXL311
`
`F
`dB
`3–
`
` C/F5
`
`µ=
`(
`)YX,
`
`
`
`The tolerance of the internal resistor (RFILT) can vary typically as
`much as ±15% of its nominal value of 32 kΩ; thus, the band-
`width will vary accordingly. A minimum capacitance of 1000 pF
`for CX and CY is required in all cases.
`
`Table 4. Filter Capacitor Selection, CX and CY
`Bandwidth
`Capacitor (µF)
`10 Hz
`0.47
`50 Hz
`0.10
`100 Hz
`0.05
`200 Hz
`0.027
`500 Hz
`0.01
`5 kHz
`0.001
`
`SELF TEST
`The ST pin controls the self-test feature. When this pin is set to
`VDD, an electrostatic force is exerted on the beam of the acceler-
`ometer. The resulting movement of the beam allows the user to
`test if the accelerometer is functional. The typical change in
`output will be 270 mg (corresponding to 45 mV). This pin may
`be left open circuit or connected to common in normal use.
`
`RBIAS SELECTION
`A bias resistor (RBIAS) must always be used. If no resistor is pre-
`sent, the ADXL311 may appear to work but will suffer degraded
`noise performance. The value of the resistor used is not critical.
`Any value from 50 kΩ to 2 MΩ can be used. Using a 2 MΩ
`resistor rather than a 50 kΩ will save roughly 25 µA of supply
`current.
`
`Design Trade-Offs for Selecting Filter
`Characteristics: The Noise/BW Trade-Off
`The accelerometer bandwidth selected will ultimately determine
`the measurement resolution (smallest detectable acceleration).
`Filtering can be used to lower the noise floor, which improves
`the resolution of the accelerometer. Resolution is dependent on
`the analog filter bandwidth at XOUT and YOUT.
`
`The output of the ADXL311 has a typical bandwidth of 5 kHz.
`The user must filter the signal at this point to limit aliasing
`errors. The analog bandwidth must be no more than half the
`A/D sampling frequency to minimize aliasing. The analog
`bandwidth may be further decreased to reduce noise and
`improve resolution.
`
`The ADXL311 noise has the characteristics of white Gaussian
`noise that contributes equally at all frequencies and is described
`in terms of µg/√Hz, i.e., the noise is proportional to the square
`
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`
`
`ADXL311
`
`
`root of the bandwidth of the accelerometer. It is recommended
`that the user limit bandwidth to the lowest frequency needed by
`the application, to maximize the resolution and
`dynamic range of the accelerometer.
`
`With the single pole roll-off characteristic, the typical noise of
`the ADXL202E is determined by
`(
`300
`
`
`=
`
`NOISERMS
`
`
`/g
`µ
`
`Hz
`
`)
`×
`
`(
`
`BW
`×
`
`)6.1
`
`
`
`
`=
`
`NOISERMS
`
`
`g/
`µ
`
`Hz
`
` At 100 Hz the noise will be
`)
`(
`300
`×
`Often the peak value of the noise is desired. Peak-to-peak noise
`can only be estimated by statistical methods. Table 5 is useful
`for estimating the probabilities of exceeding various peak val-
`ues, given the rms value.
`
`(
`
`100
`
`×
`
`6.1
`
`)
`
`=
`
`
`
`
` gm8.3
`
`The zero g bias output is also ratiometric, so the zero g output is
`nominally equal to VDD/2 at all supply voltages.
`
`The output noise is not ratiometric but absolute in volts; there-
`fore, the noise density decreases as the supply voltage increases.
`This is because the scale factor (mV/g) increases while the noise
`voltage remains constant.
`
`The self-test response is roughly proportional to the square of
`the supply voltage. At VDD = 5 V, the self-test response will be
`approximately equivalent to 800 mg (typical).
`
`The supply current increases as the supply voltage increases.
`Typical current consumption at VDD = 5 V is 600 µA.
`
`Using the ADXL311 as a Dual-Axis
`Tilt Sensor
`One of the most popular applications of the ADXL311 is tilt
`measurement. An accelerometer uses the force of gravity as an
`input vector to determine the orientation of an object in space.
`
`An accelerometer is most sensitive to tilt when its sensitive axis
`is perpendicular to the force of gravity, i.e., parallel to the earth’s
`surface. At this orientation, its sensitivity to changes in tilt is
`highest. When the accelerometer is oriented on axis to gravity,
`i.e., near its +1 g or –1 g reading, the change in output accelera-
`tion per degree of tilt is negligible. When the accelerometer is
`perpendicular to gravity, its output will change nearly 17.5 mg
`per degree of tilt, but at 45° degrees, it is changing only at
`12.2 mg per degree and resolution declines.
`
`DUAL-AXIS TILT SENSOR: CONVERTING
`ACCELERATION TO TILT
`When the accelerometer is oriented so both its X-axis and
`Y-axis are parallel to the earth’s surface, it can be used as a two
`axis tilt sensor with a roll axis and a pitch axis. Once the output
`signal from the accelerometer has been converted to an accel-
`eration that varies between –1 g and +1 g, the output tilt in de-
`grees is calculated as follows:
`
` ( )gAA
`
`PITCH
`SIN
`X 1/
`=
`
` ( )gAA
`SIN
`Y 1/
`
`ROLL
`=
`
`
`
`
`
`Be sure to account for overranges. It is possible for the acceler-
`ometers to output a signal greater than ±1 g due to vibration,
`shock, or other accelerations.
`
`
`
`Table 5. Estimation of Peak-to-Peak Noise
`Peak-to-Peak
`% of Time That Noise Will Exceed Nominal
`Value
`Peak-to-Peak Value
`2 × RMS
`32
`4 × RMS
`4.6
`6 × RMS
`0.27
`8 × RMS
`0.006
`
`The peak-to-peak noise value will give the best estimate of the
`uncertainty in a single measurement. Table 6 gives the typical
`noise output of the ADXL311 for various CX and CY values.
`
`Table 6. Filter Capacitor Selection (CX, CY)
`Bandwidth
`CX, CY
`RMS Noise
`Peak-to-Peak Noise
`(µF)
`(mg)
`Estimate (mg)
`(Hz)
`10
`0.47
`1.2
`7.2
`50
`0.1
`2.7
`16.2
`100
`0.047
`3.8
`22.8
`500
`0.01
`8.5
`51
`
`USING THE ADXL311 WITH OPERATING
`VOLTAGES OTHER THAN 3 V
`The ADXL311 is tested and specified at VDD = 3 V; however, it
`can be powered with VDD as low as 2.7 V or as high as 5.25 V.
`Some performance parameters will change as the supply
`voltage is varied.
`
`The ADXL311 output is ratiometric, so the output sensitivity
`(or scale factor) will vary proportionally to supply voltage. At
`VDD = 5 V the output sensitivity is typically 312 mV/g.
`
`
`
`
`
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`
`
`
`
`
`
`PIN CONFIGURATION AND FUNCTIONAL DESCRIPTIONS
`
`ADXL311
`
`ST
`
`BIAS
`
`COM
`
`
`
`1 2 3
`
`VDD
`8
`
`ADXL311
`BOTTOM VIEW
`
`4
`NC
`
`7 6 5
`
`XOUT
`
`YOUT
`
`NC
`
`Figure 10. 8-Lead CLCC
`
`Table 7. Pin Function Descriptions—8-Lead CLCC
`Pin No.
`Mnemonic
`Description
`1
`ST
`Self Test
`2
`BIAS
`Bias Resistor (≈200 kΩ)
`3
`COM
`Common
`4
`NC
`Do Not Connect
`5
`NC
`Do Not Connect
`6
`YOUT
`Y Channel Output
`7
`XOUT
`X Channel Output
`8
`VDD
`2.7 V to 5.25 V
`
`
`
`
`
`
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`
`
`ADXL311
`
`
`
`OUTLINE DIMENSIONS
`
`
`
`
`5.00
`SQ
`
`4.50
`SQ
`
`TOP VIEW
`
`R 0.20
`
`0.20
`
`1.78
`
`1.27
`
`1.27
`
`7
`
`0.50 DIAMETER
`
`1
`
`1.90
`
`2.50
`
`0.64
`
`2.50
`
`1.27
`
`5
`3
`0.38 DIAMETER
`R 0.20
`BOTTOM VIEW
`
`
`
`Figure 11. 8-Terminal Ceramic Leadless Chip Carrier [CLCC]
`(E-8)
`Dimensions shown in millimeters
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`ESD CAUTION
`ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the
`human body and test equipment and can discharge without detection. Although this product features
`proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy
`electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance
`degradation or loss of functionality.
`
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`Ordering Guide
`ADXL311Products
`ADXL311JE
`ADXL311JE–REEL
`ADXL311EB Evaluation Board
`
`
`Number of Axes
`2
`2
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`
`Specified Voltage
`3 V
`3 V
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`Temperature Range
`0°C to 70°C
`0°C to 70°C
`
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`Rev. A | Page 10 of 12
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`IPR2017-00318
`REPLY TO CONDITIONAL MOTION TO AMEND
`
`VALENCELL INC.
`EXHIBIT 2152 - PAGE 11
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`NOTES
`
`ADXL311
`
`Rev. A | Page 11 of 12
`
`IPR2017-00318
`REPLY TO CONDITIONAL MOTION TO AMEND
`
`VALENCELL INC.
`EXHIBIT 2152 - PAGE 12
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`ADXL311
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`NOTES
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`© 2003 Analog Devices, Inc. All rights reserved. Trademarks and
`registered trademarks are the property of their respective companies.
`
`C03582–0–7/03(A)
`
`Rev. A | Page 12 of 12
`
`IPR2017-00318
`REPLY TO CONDITIONAL MOTION TO AMEND
`
`VALENCELL INC.
`EXHIBIT 2152 - PAGE 13
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