a2) United States Patent
`US 6,967,409 B2
`(10) Patent No.:
`Segawaet al. Nov.22, 2005
`
`(45) Date of Patent:
`
`US006967409B2
`
`(54) SEMICONDUCTOR DEVICE AND METHOD
`OF MANUFACTURING THE SAME
`
`(56)
`
`(75)
`
`Inventors: Mizuki Segawa, Osaka (JP); Isao
`Miyanaga, Osaka (JP); Toshiki Yabu,
`Osaka (JP); Takashi Nakabayashi,
`Osaka (JP); Takashi Uehara, Osaka
`(JP); Kyoji Yamashita, Osaka (JP);
`Takaaki Ukeda, Osaka (JP); Masatoshi
`Arai, Osaka (JP); Takayuki Yamada,
`Osaka (JP); Michikazu Matsumoto,
`Osaka (JP)
`
`(73) Assignee: Matsushita Electric Industrial Co.,
`Ltd., Osaka (JP)
`
`(*) Notice:
`
`Subject to any disclaimer, the term of this
`patent is extended or adjusted under 35
`US.C. 154(b) by 127 days.
`
`(21) Appl. No.: 10/454,682
`
`(22)
`
`Filed:
`
`Jun. 5, 2003
`
`(65)
`
`Prior Publication Data
`
`US 2003/0205820 Al Nov. 6, 2003
`
`Related U.S. Application Data
`
`(62) Division of application No. 09/902,157, filed on Jul. 11,
`2001, now Pat. No. 6,709,950, which is a division of
`application No. 08/685,726,filed on Jul. 24, 1996, now Pat.
`No. 6,281,562.
`
`(30)
`
`Foreign Application Priority Data
`
`Jul. 27, 1995
`Dec. 19, 1995
`
`(IP) wcceesseesseceesccssseessseecneseneesensaes 7-192181
`(IP)
`voececeeeeececeeseeeeecesseseneeecnseeeees 7-330112
`
`(SL) Unt. C17 oe eeeeecceeesessessessesseeseeneenes HO1L 29/40
`(52) US. Che cece ceceesensnseeseenesenensnesenensnenens 257/774
`(58) Field of Search oe 257/304, 510,
`257/774, 311
`
`References Cited
`U.S. PATENT DOCUMENTS
`
`4,578,128 A
`4,966,870 A
`5,177,028 A
`5,196,910 A
`
`3/1986 Mundtet al.
`10/1990 Barberetal.
`1/1993 Manning
`3/1993 Moriuchietal.
`
`(Continued)
`FOREIGN PATENT DOCUMENTS
`
`EP
`EP
`
`0234988 Al
`0 243 988
`
`4/1987
`11/1987
`
`(Continued)
`
`Primary Examiner—RoyPotter
`(74) Attorney, Agent, or Firm—McDermott Will & Emery
`LLP
`
`(57)
`
`ABSTRACT
`
`An isolation which is higher in a stepwise manner than an
`active area of a silicon substrate is formed. On the active
`
`area, an FET including a gate oxide film, a gate electrode, a
`gate protection film, sidewalls and the like is formed. An
`insulating film is deposited on the entire top surface of the
`substrate, and a resist film for exposing an area stretching
`over the active area, a part of the isolation and the gate
`protection film is formed on the insulating film. There is no
`need to provide an alignment margin for avoiding interfer-
`ence with the isolation and the like to a region where a
`connection hole is formed. Since the isolation is higher in a
`stepwise manner than the active area, the isolation is pre-
`vented from being removed by over-etch in the formation of
`a connection hole to come in contact with a portion where
`an impurity concentration is low in the active area. In this
`manner, the integration of a semiconductor device can be
`improved and an area occupied by the semiconductor device
`can be decreased without causing degradation of junction
`voltage resistance and increase of a junction leakage current
`in the semiconductor device.
`
`81 Claims, 21 Drawing Sheets
`
`
`
`Exhibit 2076
`
`TSMCv. IP Bridge
`IPR2016-01246
`
`Page 1 of 40
`
`Page 1 of 40
`
`Exhibit 2076
`TSMC v. IP Bridge
`IPR2016-01246
`
`

`

`US 6,967,409 B2
` Page 2
`
`U.S. PATENT DOCUMENTS
`
`FOREIGN PATENT DOCUMENTS
`
`5,286,674 A
`5,319,235 A
`5,384,281 A
`5,393,708 A
`5,397,910 A
`5,401,673 A
`5,413,961 A
`5,433,794 A
`5,497,016 A
`5,521,422 A
`5,561,311 A
`5,777,370 A
`5,804,862 A *
`6,022,781 A
`6,281,562 B1
`
`2/1994 Roth et al.
`6/1994 Kihara et al.
`1/1995 Kenneyetal.
`2/1995 Hsia etal.
`3/1995 Ishimaru
`3/1995 Urayama
`5/1995. Kim
`7/1995 Fazan etal.
`3/1996 Koh
`5/1996 Mandelmanetal.
`10/1996 Hamamotoetal.
`:
`7/1998 Omid-Zohooretal.
`9/1998 Matumoto veces 257/396
`2/2000 Noble, In.
`8/2001 Segawaetal.
`
`EP
`EP
`Jp
`IP
`JP
`Ip
`1p
`JP
`JP
`JP
`JP
`1P
`
`0 513 639
`0 706 206 A2
`59181062 A
`62-85461
`03079033 A
`4-48647
`4.68564
`4-305922
`6-45432
`6-163843
`7-273330
`09162302 A
`
`11/1992
`4/1996
`10/1984
`4/1987
`4/1991
`2/1992
`3/1992
`10/1992
`2/1994
`6/1994
`10/1995
`6/1997
`/
`
`* cited by examiner
`
`Page 2 of 40
`
`Page 2 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 1 of 21
`
`US 6,967,409 B2
`
`FIG. 1Ca)
`
`51
`
`FIG. 1(b) NN Ss *
`
`2b
`
`,
`
`2b
`
`Page 3 of 40
`
`Page 3 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 2 of 21
`
`US 6,967,409 B2
`
`4x
`
`4a
`LZany,
`
`CG;
`
`4b
`
`\
`
`FIG. 2(c) |
`
`=a
`
`12
`
`FIG. 2¢d)
`
`FIG. 2(e)
`
`Page 4 of 40
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`Page 4 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 3 of 21
`
`US 6,967,409 B2
`
`1
`
`4x
`
`FIG. 3(c)
`
`Ta
`
`1
`La
`Te
`FARES
`
`Tb LTZAN
`
`4b
`
`\
`
`FIG. 3(f) &
`
`FIG. 3(d) IN
`
`FIG. 3(e) (APN. a
`
`Page 5 of 40
`
`Page 5 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 4 of 21
`
`US 6,967,409 B2
`
`
` PERS
`
`FIG. 4(c)
`
` ayy
`
`Page 6 of 40
`
`Page 6 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 5 of 21
`
`US 6,967,409 B2
`
`FIG. 5(a) Fr
`
`FIG. 5¢c) &
`
`FIG. 5(b) LAPZN.
`
`Page 7 of 40
`
`Page 7 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 6 of 21
`
`US 6,967,409 B2
`
`1
`
`2b
`
`FIG. 6(c)
`
`FIG. 6(d) =
`
`19x FIG. 6(b)|
`
`FIG. 6(F) Fe *
`
`Page 8 of 40
`
`Page 8 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 7 of 21
`
`US 6,967,409 B2
`
`FIG. 7(a)
`
`FIG. 7c)
`
`FIG. 70b)
`
`Page 9 of 40
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`Page 9 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 8 of 21
`
`US 6,967,409 B2
`
`FIG. 8€a)
`
`FIG. 8(b)
`
`
`FIG.8Cc) PsN
`
`VLLLLLALLELLE
`DW
`ie
`
`
`
` iN
`
`Page 10 of 40
`
`Page 10 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 9 of 21
`
`US 6,967,409 B2
`
`FIG. 9€a)
`
`FIG. 9Cb)
`
`
`EE—
`
` 23
`FIG. 9(c) AT7enNie
`PRES
` LS
`
`Page 11 of 40
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`Page 11 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 10 of 21
`
`US 6,967,409 B2
`
`FIG. 10¢a)
`
`
`
`i) ca
`
`N
`
`FIG. 10¢c)
`
`Khe
`SS Nes
`
`Page 12 of 40
`
`Page 12 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 11 of 21
`
`US 6,967,409 B2
`
`
`FIG. 110d)
`
`
`ele
`LLLLLLLLLL
`FIG. 11(c) EE SN
`
`
`=NN
`
`
`
`Page 13 of 40
`
`Page 13 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 12 of 21
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`US 6,967,409 B2
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`
`
`Page 14 of 40
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`Page 14 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 13 of 21
`
`US 6,967,409 B2
`
`Reiso
`
`Re fet
`
`Reiso
`
`VATA
` FIG. 138(c)
`
`FIG. 13(a)
`
`FIG. 130) KY
`
`Page 15 of 40
`
`Page 15 of 40
`
`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 14 of 21
`
`US 6,967,409 B2
`
`FIG. 14€a)
`
`[EFS
`(ASS
`
`F [C. |4(b) EEErrr 2b
`LSSaRNS SNSSS
`
`
`
`
`IS) NAN
`AN
`
`
`
`
`
`y/LLL]a. Porch|PL!L£LLL) “lL!LE
`
`SSN
`
`
`ASsSSSSNSS
`
`bya
`
`KD
`
`KANNAN
`
`
`
`Sr?
`CSTed
`ViLLL)
`
`oo
`SSOo
`ELLL
`
`Page 16 of 40
`
`Page 16 of 40
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`

`

`U.S. Patent
`
`US 6,967,409 B2
`
`Refet
`
`Reiso
`
`Nov.22, 2005
`
`Sheet 15 of 21
`
`Page 17 of 40
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`Page 17 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 16 of 21
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`US 6,967,409 B2
`
`Page 18 of 40
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`Page 18 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 17 of 21
`
`US 6,967,409 B2
`
`FIG. 17
`PRIOR ART
`
`
`
`Page 19 of 40
`
`Page 19 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 18 of 21
`
`US 6,967,409 B2
`
`PRIOR ART
`
`FIG. 18(a)
`
`DIAMETER
`OF HOLE
`
`END OF ISOLASION
`
`PRIOR ART
`
`FIG. 18(b)
`PRIOR ART
`
`FIG. 18(c)
`
`Page 20 of 40
`
`Page 20 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 19 of 21
`
`US 6,967,409 B2
`
`FIG. 19
`PRIOR ART
`
`POLeeLLY
`
`RNAAo&£
`
`Page 21 of 40
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`Page 21 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 20 of 21
`
`US 6,967,409 B2
`
`FIG. 20Ca)
`
`PRIOR ART
`
`
`
`107b
`103
`1070
`
`
`CLLLLYaTohREEEIEZA
`PRIOR ART a Yn——
`FIG. 200d) KA —
`=
`
`109b
`409
`.
`|
`108b
`108
`a
`+s
`
`
`alllNYpret z
`
`105a
`116
`FIG. 20Cb) Ws
`CXS
`ws
`faKYYywfe]NPATeeaeee
`
`
`
`PRIOR ART
`
`
`
`
`FIG, 2() (Cc) ITTIIT
`
`KNNO CSA
`
`PRIOR ART
`
`408
`
`PRIOR ART
`
`
`
`Page 22 of 40
`
`Page 22 of 40
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`

`

`U.S. Patent
`
`Nov.22, 2005
`
`Sheet 21 of 21
`
`US 6,967,409 B2
`
`FIG. 21(a)
`PRIOR ART
`
`FIG. 210b)
`PRIOR ART
`
`IMPURITY ION
`113
`
`Page 23 of 40
`
`Page 23 of 40
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`

`

`US 6,967,409 B2
`
`1
`SEMICONDUCTOR DEVICE AND METHOD
`OF MANUFACTURING THE SAME
`
`The Application is a Divisional Application of applica-
`tion Ser. No. 09/902,157 filed on Jul. 11, 2001 now USS. Pat.
`No. 6,709,950, which is a Divisional Application of appli-
`cation Ser. No. 08/685,726 filed on Jul. 24, 1996, which is
`now USS. Pat. No. 6,281,562.
`
`BACKGROUND OF THE INVENTION
`
`The present invention relates to a semiconductor device
`including transistors and connection betweenthe transistors
`for constituting an LSI with high integration and a decreased
`area.
`
`With the recent development of a semiconductor device
`with high integration and high performance,
`there are
`increasing demands for more refinement of the semiconduc-
`tor device. The improvementof the conventional techniques
`cannot follow these demands, and novel
`techniques are
`unavoidably introduced in some technical
`fields. For
`example, as a method of forming an isolation, the LOCOS
`isolation method is conventionally adopted in view of its
`simpleness and low cost. Recently, however, it is considered
`that a trench buried type isolation (hereinafter referred to as
`the trench isolation) is more advantageous for manufactur-
`ing a refined semiconductor device.
`Specifically, in the LOCOSisolation method, since selec-
`tive oxidation is conducted, the so-called bird’s beak occurs
`in the boundary with a mask for preventing the oxidation. As
`a result, the dimension ofa transistor is changed because an
`insulating film of the isolation invades a transistor region
`against the actually designed mask dimension. This dimen-
`sional change is unallowable in the refinement of a semi-
`conductor device after the 0.5 wm generation. Therefore,
`even in the mass-production techniques, the isolation form-
`ing method hasstarted to be changedto the trench isolation
`method in which the dimensional change is very small. For
`example, IBM corporation has introduced the trench isola-
`tion structure as a 0.5 wm CMOSprocess for the mass-
`production of an MPU (IBM Journal of Research and
`Development, VOL. 39, No. 4, 1995, pp. 33-42).
`Furthermore, in a semiconductor device mounting ele-
`ments such as a MOSFETin an active area surrounded with
`
`an isolation, an insulating film is deposited on the active
`area, the isolation and a gate electrode, and a contact hole is
`formed by partly exposing the insulating film for connection
`between the active area and an interconnection member on
`a layer above the insulating film. This structure is known as
`a very commonstructure for the semiconductor device.
`FIG. 17 is a sectional view for showingthe structure of a
`conventional semiconductor device. In FIG. 17, a reference
`numeral 1 denotesa silicon substrate, a reference numeral 2b
`denotes an isolation with a trench isolation structure which
`
`is made of a silicon oxide film and whose top surface is
`flattened so as to be at the same level as the top surface of
`the silicon substrate 1, a reference numeral 3 denotes a gate
`oxide film madeofa silicon oxidefilm, a reference numeral
`4a denotes a polysilicon electrode working as a gate
`electrode, a reference numeral 4b denotes a polysilicon
`interconnection formed simultaneously with the polysilicon
`electrode 4a, a reference numeral 6 denotes a low-
`concentration source/drain region formed by doping the
`silicon substrate with an n-type impurity at a low
`concentration, a reference numeral 7a denotes an electrode
`sidewall, a reference numeral 7b denotes an interconnection
`sidewall, a reference numeral 8 denotes a high-concentration
`
`10
`
`15
`
`20
`
`25
`
`30
`
`35
`
`40
`
`45
`
`50
`
`55
`
`60
`
`65
`
`2
`source/drain region formed by doping the silicon substrate
`with an n-type impurity at a high concentration, a reference
`numeral 12 denotes an insulating film made of a silicon
`oxide film, and a reference numeral 13 denotes a local
`interconnection made of a polysilicon film formed on the
`insulating film 12.
`The local interconnection 13 is also filled within a con-
`nection hole 14 formedin a part of the insulating film 12, so
`as to be contacted with the source/drain region in the active
`area through the connection hole 14.
`In this case,
`the
`connection hole 14 is formed apart from the isolation 2b by
`a predetermined distance. In other words, in the conven-
`tional layout rule for such a semiconductor device, there is
`arule that the edge of a connection hole is previously located
`away from the boundary between the active area and the
`isolation region so as to prevent a part of the connection hole
`14 from stretching over the isolation 2b even when a mask
`alignmentshift is caused in photolithography (this distance
`between the connection hole and the isolation is designated
`as an alignment margin).
`However, in the structure of the semiconductor device as
`shown in FIG. 17, there arise problems in the attempts to
`further improve the integration for the following reason:
`A distance La between the polysilicon electrode 4a and
`the isolation 2b is estimated as an index ofthe integration.
`In order to prevent the connection hole 14 from interfering
`the isolation 2b as described above,
`the distance La is
`required to be 1.2 um, namely, the sum of the diameter of the
`connection hole 14,that is, 0.5 um, the width ofthe electrode
`sidewall 7a, that is, 0.1 ym, the alignment margin from the
`polysilicon electrode 4a, that is, 0.3 4m, and the alignment
`margin from the isolation 2b, that is, 0.3 wm. A connection
`hole has attained a more and morerefined diameter with the
`
`development of processing techniques, and also a gate
`length has been decreased as small as 0.3 um orless. Still,
`the alignment margin in consideration of the mask alignment
`shift in the photolithography is required to be approximately
`0.3 wm. Accordingly, as the gate length and the connection
`hole diameter are more refined, the proportion of the align-
`ment margin is increased. This alignment margin has
`become an obstacle to the high integration.
`Therefore, attempts have been made to form the connec-
`tion hole 14 without considering the alignment margin in
`view of the alignment shift in the photolithography. Manu-
`facturing procedures adopted in such a case will now be
`described by exemplifying an n-channel MOSFETreferring
`to FIGS. 18(a) through 18(c).
`First, as is shown in FIG. 18(a), after forming an isolation
`2b having the trench structure in a silicon substrate 1 doped
`with a p-type impurity (or p-type well), etch backor the like
`is conducted for flattening so as to place the surfaces of the
`isolation 2b and thesilicon substrate 1 at the samelevel. In
`
`an active area surrounded with the isolation 2b, a gate oxide
`film 3, a polysilicon electrode 4a serving as a gate electrode,
`an electrode sidewall 7a, a low-concentration source/drain
`region 6 and a high-concentration source/drain region 8 are
`formed. On the isolation 2b are disposed a polysilicon
`interconnection 4b formed simultaneously with the polysili-
`con electrode 4a and an interconnection sidewall 7b. At this
`
`point, the top surface of the high-concentration source/drain
`region 8 in the active area is placed at the same level as the
`top surface of the isolation 2b. Then, an insulating film 12
`of a silicon oxide film is formed on the entire top surface of
`the substrate.
`
`Next, as is shown in FIG. 18(b), a resist film 25a used as
`a mask for forming a connection hole is formed on the
`
`Page 24 of 40
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`

`US 6,967,409 B2
`
`4
`gate interconnection 107b is provided with interconnection
`sidewalls 1085 on its both side surfaces. On the gate
`electrode 107a, the gate interconnection 107b and the high-
`concentration source/drain region 106b, an upper gate elec-
`trode 109a, an upper gate interconnection 109b and a
`source/drain electrode 109c each madeofsilicide are respec-
`tively formed. Furthermore,
`this semiconductor device
`includes an interlayer insulating film 111 made ofa silicon
`oxide film, a metallic interconnection 112 formed on the
`interlayer insulating film 111, and a contact member 113
`(buried conductive layer) filled in a connection hole formed
`in the interlayer insulating film 111 for connecting the
`metallic interconnection 112 with the source/drain electrode
`109¢.
`
`10
`
`15
`
`20
`
`25
`
`30
`
`3
`insulating film 12, and the connection hole 14 is formedby,
`for example, dry etching.
`Then, as is shown in FIG. 18(c), the resist film 25a is
`removed, and a polysilicon film is deposited on the insulat-
`ing film 12 and within the connection hole 14. The poly-
`silicon film is then made into a desired pattern, thereby
`forming a local interconnection 13.
`Atthis point, in the case where the alignment margin in
`view of the mask alignment shift in the formation of the
`connection hole 14 is not considered in estimating the
`distance La between the polysilicon electrode 4a and the
`isolation 2b, a part of the isolation 2b is included in the
`connection hole 14 when the exposing area of the resist film
`25a is shifted toward the isolation 2b due to the mask
`Now, the manufacturing procedures for the semiconduc-
`alignment shift in the photolithography. Through over-etch
`tor device including the conventional trench isolation and
`in conducting the dry etching of the insulating film 12,
`the MOSFET with the salicide structure shown in FIG. 19
`although the high-concentration source/drain region 8 made
`will be described referring to FIGS. 20(a) through 20(e).
`of the silicon substrate is not largely etched because of its
`small etchingrate, the part of the isolation 2b includedin the
`First, as is shown in FIG. 20(a), a silicon oxide film 116
`connection hole 14 is selectively removed, resulting in
`and a silicon nitride film 117 are successively deposited on
`forming a recess 40 in part of the connection hole 14. When
`a silicon substrate 101, andaresist film 120 for exposing an
`the recess 40 in the connection hole 14 has a depth exceed-
`isolation region and maskingatransistor region is formed on
`ing a given proportion to the depth of the high-concentration
`the silicon nitridefilm 117. Then, by usingtheresistfilm 120
`source/drain region 8, junction voltage resistance can be
`as a mask, etching is conducted, soas to selectively remove
`decreased and a junction leakage current can be increased
`the silicon nitride film 116 and the silicon oxide film 117,
`because the concentration of the impurity in the high-
`and further etch the silicon substrate 101, thereby forming a
`concentration source/drain region 8 is low at that depth.
`trench 104. Then, impurity ions are injected into the bottom
`of the trench 104, thereby forming a channel stop region 115.
`In order to prevent these phenomena,it is necessary to
`provide a predetermined alignment margin as is shownin the
`Then, as is shown in FIG. 20(5), a silicon oxide film (not
`structure of FIG. 17 so as to prevent the connection hole 14
`shown) is deposited, and the entire top surface is flattened
`from interfering the isolation 2b even when the alignment
`until the surface of the silicon nitride film 117 is exposed.
`shift is caused in the lithography. In this manner, in the
`Through this procedure, a trench isolation 105a made ofthe
`silicon oxide film filled in the trench 104 is formed in the
`conventional layout rule for a semiconductor device, an
`alignment margin in view of the mask alignmentshift in the
`photolithography is unavoidably provided.
`Furthermore, a distance between the polysilicon electrode
`4a and the connection hole 14is also required to be provided
`with an alignment margin. Otherwise, the connection hole
`14 can interfere the polysilicon electrode 4a due to the
`fluctuation caused in the manufacturing procedures, result-
`ing in causing electric short-circuit between an upper layer
`interconnection buried in the connection hole and the gate
`electrode.
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`35
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`40
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`45
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`50
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`isolation region Reiso.
`Next, as is shown in FIG. 20(c), after the silicon nitride
`film 117 andthe silicon oxide film 116 are removed, a gate
`oxide film 103 is formed onthe silicon substrate 101, and a
`polysilicon film 107 is deposited thereon. Then, a photore-
`sist film 121 for exposing areas excluding a region for
`forming a gate is formed on the polysilicon film 107.
`Then, as is shownin FIG. 20(d), by using the photoresist
`film 121 as a mask, dry etching is conducted,
`thereby
`selectively removing the polysilicon film 107 and the gate
`oxide film 103. Thus, a gate electrode 107a of the MOSFET
`in the transistor region Refet and a gate interconnection
`107b stretching over the isolation 105a and the silicon
`substrate 101 are formed. After removing the photoresist
`film 121, impurity ions are injected into the silicon substrate
`101 by using the gate electrode 107a as a mask, thereby
`forming a low-concentration source/drain region 106a.
`Then,a silicon oxide film 108 is deposited on the entire top
`surface of the substrate.
`
`As described above, it is necessary to provide the con-
`nection hole 14 with margins for preventing the interference
`with other elements around the connection hole, which has
`become a large obstacle to the high integration of an LSI.
`Also in the case where a semiconductor device having the
`so-called salicide structure is manufactured, the following
`problemsare caused due to a recess formed in theisolation:
`FIG. 19 is a sectional view for showing an example of a
`semiconductor device including the conventional
`trench
`isolation and a MOSFEThavingthe salicide structure. As is
`shown in FIG. 19, a trench isolation 105a@ is formed in a
`silicon substrate 101. In an active area surrounded with the
`
`55
`
`Next, as is shownin FIG. 20(e), the silicon oxide film 108
`is anisotropically dry-etched,
`thereby forming electrode
`sidewalls 108a and interconnection sidewalls 1085 on both
`
`isolation 105a, a gate insulating film 103, a gate electrode
`107a, and electrode sidewalls 108a on both side surfaces of
`the gate electrode 107a are formed. Also in the active area,
`a low-concentration source/drain region 106a@ and a high-
`concentration source/drain region 106b are formed on both
`sides of the gate electrode 107a. A channel stop region 115
`is formed below the isolation 105a. Furthermore, in areas of
`the silicon substrate 101 excluding the isolation 105a@ and
`the active area, a gate interconnection 107b made of the
`same polysilicon film as that for the gate electrode 1074 is
`formed with a gate insulating film 1035 sandwiched, and the
`
`60
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`65
`
`side surfaces of the gate electrode 107a and the gate inter-
`connection 1075, respectively. At this point, the gate oxide
`film 103 below the silicon oxide film 108 is simultaneously
`removed, and the gate oxide film 103 below the gate
`electrode 107a alone remains. Then,
`impurity ions are
`diagonally injected by using the gate electrode 107a and the
`electrode sidewalls 108a as masks, thereby forming a high-
`concentration source/drain region 1065. Then,after a Ti film
`is deposited on the entire top surface, high temperature
`annealing is conducted, thereby causing a reaction between
`the Ti film and the components madeofsilicon directly in
`
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`US 6,967,409 B2
`
`5
`contact with the Ti film. Thus, an upper gate electrode 1092,
`an upper gate interconnection 109b and a source/drain
`electrode 109c made of silicide are formed.
`
`The-procedures to be conducted thereafter are omitted,
`but the semiconductor device including the MOSFEThav-
`ing the structure as shown in FIG. 19 can be ultimately
`manufactured. In FIG. 19, the metallic interconnection 112
`is formed on the interlayer insulating film 111, and the
`metallic interconnection 112 is connected with the source/
`drain electrode 109c through the contact member 113
`including a W plug and the like filled in the contact hole.
`When the aforementioned trench isolation structure is
`adopted, the dimensional change of the source/drain region
`can be suppressed because the bird’s beak, that is, the oxide
`film invasion of an active area, which is caused in the
`LOCOSmethod wherea thick silicon oxide film is formed
`
`by thermal oxidation, can be avoided. Furthermore, in the
`procedure shownin FIG. 20(c), the surfaces of the isolation
`105a and the silicon substrate 101 in the transistor region
`Refet are placed at the samelevel.
`In such a semiconductor device having the trench type
`isolation, however, there arise the following problems:
`When the procedures proceed from the state shown in
`FIG. 20(d) to the state shown in FIG. 20(e), the silicon oxide
`film 108 is anisotropically etched so as to form the sidewalls
`108a and 108b. At this point, over-etch is required. Through
`this over-etch, the surface of the isolation 1054 is removed
`by some depth.
`FIGS. 21(a) and 21(b) are enlarged sectional views
`around the boundary between the high-concentration source/
`drain region 1065 andthe isolation 105a after this over-etch.
`As is shown in FIG. 21(a), between the procedures shown
`in FIGS. 20(d) and 20(e), the impurity ions are diagonally
`injected so as to form the high-concentration source/drain
`region 106b. Through this ion injection,
`the high-
`concentration source/drain region 106b is formed also below
`the edge of the isolation 105a because the isolation 105a is
`previously etched by some depth. Accordingly, the high-
`concentration source/drain region 106b is brought closer to
`the channel stop region 115, resulting in causing the prob-
`lems of degradation of the junction voltage resistance and
`increase of the junction leakage current.
`In addition, as is shown in FIG. 21(5), in the case where
`the Ti film or the like is deposited on the high-concentration
`source/drain region 106b so as to obtain the silicide layer
`through the reaction with the silicon below,the thus formed
`silicide layer can invade the interface between the silicon
`substrate 101 and the isolation 105a with ease. As a result,
`a short-circuit current can be caused between the source/
`drain electrode 109c made of silicide and the channel stop
`region 115.
`
`SUMMARY OF THE INVENTION
`
`invention is improving the
`The object of the present
`structure of an isolation, so as to prevent the problems
`caused because the edge of the isolation is trenched in
`etching for the formation of a connection hole or sidewalls.
`In order to achieve the object, the invention proposesfirst
`and second semiconductor devices and first through third
`methods of manufacturing a semiconductor device as
`described below.
`Thefirst semiconductor device of this invention in which
`
`a semiconductor elementis disposed in each ofplural active
`areas in a semiconductor substrate comprises an isolation for
`surrounding and isolating each active area,
`the isolation
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`10
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`15
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`20
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`25
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`30
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`35
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`40
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`45
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`55
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`60
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`65
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`having a top surface at a higher level than a surface of the
`active area and having a step portion in a boundary with the
`active area; an insulating film formed so as to stretch over
`each active area and the isolation; plural holes each formed
`by removinga portion ofthe insulating film disposedat least
`on the active area; plural buried conductive layers filled in
`the respective holes; and plural interconnection members
`formed on the insulating film so as to be connected with the
`respective active areas through the respective buried con-
`ductive layers.
`Owingto this structure, in the case where a part of or all
`the holes are formedsoasto stretch overthe active areas and
`the isolation due to mask alignment shift
`in
`photolithography, a part of the isolation is removed by
`over-etch for ensuring the formation of the holes. In such a
`case, even when the top surface of the isolation is trenched
`to be lower than the surface of the active area, the depth of
`the holes formed in the isolation is small in the boundary
`with the active area because of the level difference between
`the top surface of the isolation and the surface of the active
`area. Accordingly, degradation of the junction voltageresis-
`tance and increase of the junction leakage current can be
`suppressed. Therefore, there is no need to provide a portion
`of the active area where each hole is formed with an
`alignment margin for avoiding the interference with the
`isolation caused by the mask alignment shift in the lithog-
`raphy. Thus, the area of the active area can be decreased,
`resulting in improving the integration of the semiconductor
`device.
`
`In the first semiconductor device, at least a part of the
`plural holes can be formed so as to stretch over the active
`area and the isolation due to fluctuation in manufacturing
`procedures.
`In other words, even when no margin for the mask
`alignment
`in the lithography is provided,
`the problems
`caused in the formation of the holes can be avoided.
`
`Furthermore, the angle between a side surface of the step
`portion and the surface of the active area is preferably 70
`degrees or more.
`As aresult, when the hole interferes the isolation, the part
`of the isolation included in the hole is definitely prevented
`from being etched through over-etch in the formation of the
`holes down to a depth where the impurity concentration is
`low in the active area.
`
`The isolation is preferably a trench isolation made of an
`insulating material filled in a trench formedby trenching the
`semiconductor substrate by a predetermined depth.
`This is because no bird’s beak is caused in the trench
`
`isolation differently from a LOCOSfilm as described above,
`and hence, the trenchisolation is suitable particularly for the
`high integration and refinement of the semiconductor
`device.
`
`In the first semiconductor device, when the semiconduc-
`tor element is a MISFETincluding a gate insulating film and
`a gate electrode formed on the active area; and source/drain
`regions formed in the active area on both sides of the gate
`electrode,
`the following preferred embodiments can be
`adopted:
`The semiconductor device can further comprise a gate
`interconnection made of the same material as that for the
`gate electrode and formed onthe isolation, each of the holes
`can be formed on an area including the source/drain region,
`the isolation and the gate interconnection, and the plural
`interconnection members can be connected with the gate
`interconnection on the isolation.
`
`Owing to this configuration, in the case where the inter-
`connection members work as local
`interconnections for
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`US 6,967,409 B2
`
`8
`In the second semiconductor device, the step sidewall is
`preferably made of an insulating material.
`Also in the second semiconductor device, the semicon-
`ductor element can be a MISFETincludinga gate insulating
`film and a gate electrode formed on the active area; and
`source/drain regions formed in the active area on both sides
`of the gate electrode. This semiconductor device can be
`further provided with electrode sidewalls formed on both
`side surfaces of the gate electrode, and the step sidewall can
`be formed simultaneously with the electrode sidewalls.
`Owingto this structure, the semiconductor elements can
`be a MISFET having the LDD structure suitable for the
`refinement. Because of this structure together with the
`trench isolation structure,
`the semiconductor device can
`attain a structure particularly suitable for the refinement and
`the high integration.
`The first method of manufacturing a semiconductor
`device in which a semiconductor elementis disposed in each
`of plural active areas in a semiconductor substrate comprises
`a first step of forming an isolation in a part of the semicon-
`ductor substrate,
`the isolation having a top surface at a
`higher level than a surface of the semiconductor substrate
`and having a step portion in a boundary with the surface of
`the semiconductor substrate; a second step of introducing an
`impurity at a high concentration into each active area of the
`semiconductor substrate surrounded by the isolation; a third
`step of forming an insulating film on the active area and the
`isolation; a fourth step of forming, on the insulating film, a
`Owingto this structure, a part of the gate protection film
`masking member having an exposing area above an area at
`included in the hole is removed by the over-etch in the
`least
`including a portion of the active area where the
`formation of the holes. However,
`the gate electrode is
`impurity at the high concentration is introduced;afifth step
`protected by the gate protection film, and hence, electrical
`of conducting etching by using the masking memberso as to
`short circuit between the gate electrode and the intercon-
`selectively remove the insulating film and form holes; and a
`nection membercan be prevented. Accordingly, there is no
`sixth step of forming a buried conductive layerbyfilling the
`need to provide an alignment margin from the gate electrode
`holes with a conductive material and forming, on the insu-
`in the area where each hole is formed, resulting in further
`lating film, interconnection members to be connected with
`improving the integration.
`the buried conductive layer. In this method, in the fourth
`The interconnection members can befirst layer metallic
`step, an alignment marginis not provided for preventing the
`interconnections, and the insulating film can be an interlayer
`exposing area of the masking member from including a
`insulating film disposed between the semiconductor
`portion above the isolation when mask shift is caused in
`substrate, and thefirst layer metallic interconnections. In this
`photolithography.
`case,
`the semiconductor device preferably further
`In adopting this method, even whena partof theisolation
`comprises, between the interlayer insulating film and the
`is removed by over-etch in the fifth step so that the top
`surface ofthe isolation is e