United States Patent [19]
`
`Riseman
`
`'
`
`[11]
`[45]
`
`4,106,050
`Aug. 8, 1978
`
`[54] INTEGRATED CIRCUIT STRUCTURE WITH
`FULLY ENCLOSED AIR ISOLATION
`[75] Inventor:
`Jacob Risernan, Poughkeepsie, NY.
`[73] Assignee:
`International Business Machines
`Corporation, Armonk, NY.
`[21] Appl. No.: 719,888
`[22] Filed:
`Sep. 2, 1976
`
`[51] Int. Cl.2 ........................................... .. H01L 27/04
`[52] US. Cl. .................. ..
`[58] Field of Search ...................... .. 357/49, 47, 50, 55
`[56]
`References Cited
`U.S. PATENT DOCUMENTS
`
`3,332,137
`3,489,961
`3,513,022
`3,647,585
`
`7/1967 Kenney ............................ .. 357/49 X
`l/ 1970 Frescura et al. ............. .. 357/49 X
`5/1970 Casterline et al. ..
`357/49 X
`3/1972 Fritzinger et al. ................... .. 156/17
`
`3,689,992
`9/1972 Schutze et al. ...................... .. 29/577
`3,787,710
`l/1974 Cunningham
`357/49 X
`3,905,037
`9/1975 Bean et al. ........................... .. 357/60
`Primary Examiner-Stanley D. Miller, Jr.
`Assistant Examiner-James W. Davie
`Attorney, Agent, or Firm—-Julius B. Kraft; Theodore E.
`Galanthay
`ABSTRACT
`[57]
`An integrated circuit member structure comprising a
`semiconductor substrate having formed therein a pat
`tern of cavities extending from one surface of the sub
`strate into the substrate and fully enclosed within said
`member, a plurality of pockets of semiconductor mate
`rial extending from said substrate laterally surrounded
`and electrically insulated by said cavities and a planar
`layer of electrically insulative material on said surface.
`
`5 Claims, 8 Drawing Figures
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`001
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`Petitioner Samsung - SAM1009
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`U. S. Patent
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`Aug. s, 1978
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`Sheetl 0f2
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`4,106,050
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`U. S. Patent
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`Aug. s, 1978 I Sl-1eet2 of2
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`4,106,050
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`FIG. 4A
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`NAN N :LN-bo [\D
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`INTEGRATED CIRCUIT STRUCTURE WITH
`FULLY ENCLOSED AIR ISOLATION
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`BACKGROUND OF THE INVENTION
`The present invention relates to integrated circuit
`structures and more particularly to dielectric isolation
`in such integrated circuit structures, particularly by
`air-isolation.
`The form of most existing integrated circuits is the
`so-called monolithic form. Such a structure contains
`great numbers of active and passive devices in a block
`or monolith of semiconductor material. Electrical con
`nections between these active and passive devices are
`generally made on a surface of the semiconductor block
`of material. Until recently, junction isolation has been
`by far the most widely practiced manner of isolating
`devices or circuits in the integrated circuit from each
`other. For example, active P-type diffusions are custom
`arily used to isolate conventional FET and bipolar de
`vices from one another and from other devices such as
`the resistors and capacitors. Such junction isolation is
`also used in integrated circuits utilizing ?eld effect tran
`sistor devices. More detailed descriptions of junction
`isolation may be found in U.S. Pat. Nos. 3,319,311;
`3,451,866; 3,508,209 and 3,539,876.
`Although junction isolation has provided excellent
`electrical isolation in integrated circuits which have
`functioned very effectively over the years, at the pres
`ent stage of the development of the integrated circuit
`art, there is an increasing demand in the ?eld of digital
`integrated circuits for faster switching circuits. It has
`long been recognized that the capacitive effect of the
`isolating P-N junctions has a slowing effect on the
`switching speed of the integrated circuits. Until re
`cently, the switching demands of the integrated circuits
`have been of a suf?ciently low frequency that the ca
`pacitive effect in junction isolation has presented no‘
`major problems. However, with the higher frequency
`switching demand which can be expected in the ?eld in
`the future, the capacitive effect produced by junction
`isolation may be an increasing problem. In addition,
`junction isolation requires relatively large spacing be
`tween devices, and, thus, relatively low device densities
`which is contrary to higher device densities required in
`large scale integration. Junction isolation also tends to
`give rise to parasitic transistor effects between the isola
`tion region and its two abutting regions. Consequently,
`in recent years there has been a revival of interest in
`integrated circuits having dielectric isolation instead of 50
`junction isolation. In such dielectrically isolated cir
`cuits, the semiconductor devices are isolated from each
`other by insulative dielectric materials or by air.
`conventionally, such dielectric isolation in integrated
`circuits has been formed by etching channels in a semi
`conductor member corresponding to the isolation re
`gions from the back side of the member, i.e., the side
`opposite to the planar surface at which the devices and
`wiring of the integrated circuit are to be formed. This
`leaves an irregular or channeled surface over which a
`substrate back side, usually a composite of a thin dielec
`tric layer forming the interface with the semiconductor
`member covered by a thicker layer of polycrystalline
`silicon is deposited. Alternatively, the polycrystalline
`silicon need not be deposited in which case, the chan
`nels would provide air-isolation. Next, the other or
`planar surface of the semiconductor member may be
`either mechanically ground down or chemically etched
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`until the bottom portions of the previously etched chan
`nels are reached. This leaves the structure wherein a
`plurality of pockets of semiconductor material sur
`rounded by a thin dielectric layer are either supported
`on a polycrystalline silicon substrate and separated from
`each other by the extensions of the polycrystalline sub
`strate or in the absence of the polysilicon, a structure in
`which the pockets of semiconductor material are, in
`effect, “air-isolated” from each other. While such struc
`tures provide an essentially ?at and thus wirable planar
`surface of coplanar pockets of semiconductor material,
`such integrated circuit structures have limited utility
`with integrated circuits of high device densities. This is
`due to the fact that the etched channels which corre
`spond to the isolation regions must be formed from the
`back side of the integrated circuit substrate and etched
`until the level of the active planar‘ surface of the sub
`strate is reached.
`It is recognized in the art that when etching from the
`back side of an integrated circuit member the etching
`must be made to greater depth than when etching di
`rectly from the planar front surface in order to insure
`uniform lateral isolation. It is- also recognized that when
`etching through a member, the extent of lateral etching
`will be substantially the same as the depth of etching.
`Accordingly, when etching channels from the back side
`of the substrate, so much lateral “real estate” is con
`sumed on the wafer that such an approach has very
`limited practicality in high density integrated circuits.
`On the other hand, if the etching to form the channels
`in the above dielectric isolation or air-isolation structure
`is carried out from the active or front surface of the
`integrated circuit, only limited lateral vetching is neces
`sary to reach practical isolation depths. However, the
`result is an essentially corrugated active surface rather
`than a planar one. Such a corrugated active surface is,
`of course, difficult to wire, i.e., form integrated circuit
`metallurgy interconnections by conventional photo
`lithographic integrated circuit fabrication techniques.
`Another approach which has been utilized for form
`ing lateral dielectric isolation in the art involves the
`formation of recessed silicon dioxide lateral isolation
`regions, usually in the eptitaxial layer where the semi
`conductor devices are to be formed, through the expe
`dient of ?rst selectively etching a pattern of recesses in
`the layer of silicon, and then thermally oxidizing the
`silicon in the recesses with appropriate oxidation block
`ing masks, e.g., silicon nitride masks, to form recessed
`or inset regions of silicon dioxide which provide the
`lateral electrical isolation. Representative of the prior
`art teaching in this area are U.S. Pat. No. 3,648,125 and
`an article entitled, “Locos Devices,” E. Kooi et al.,
`Philips Research Report 26, pp. 166 - 180 (1971).
`While this approach has provided both planarity at
`the active device integrated circuit surface as well as
`good lateral dielectric isolation, it has encountered
`some problems. Originally, the art applied the silicon
`nitride masks directly onto the silicon substrates. This
`gave rise to problems associated-with high stresses cre
`ated on the underlying silicon substrate by the silicon
`nitride-silicon interface. Such stresses were found in
`many cases to produce dislocations in the silicon sub
`strate which appear to result in undesirable leakage
`current pipes and otherwise adversely affect the electri
`cal characteristics of the interface. In order to minimize
`such interface stresses with silicon nitride layers, it has
`become the practice in the art to form a thin layer of
`silicon dioxide. between the silicon substrate and the
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`silicon nitride layer. During such thermal oxidation,
`position including those described in Volume 10, pp.
`there is a substantial additional lateral penetration of
`533 - 546, of the Encyclopedia of Chemical Technol
`silicon oxide from the thermal oxidation beneath the
`ogy, Kirk and Othmer, Second Edition, published in
`silicon nitride. This lateral penetration is greatest at the
`1966 by Interscience Publishers. However, the silicate
`mask-substrate interface to provide a laterally sloping
`glasses, such as those described on pp. 540 - 545 in the
`structure known and recognized in the prior art as the
`above encyclopedia, have been found‘ to be particularly _
`undesirable, “bird’s beak.”
`desirable. The term “siliceous glass” as used in this
`The publications, “Local Oxidation of Silicon; New
`application, is meant to include all silica-containing
`Technological Aspects,” by J. A. Appels et al., Philips
`glasses including glasses which are substantially unmod
`Research Report 26, pp. 157 - 165, June 1971, and “Se
`i?ed silica (SiOZ). In addition, among the silicate glasses
`lective Oxidation of Silicon and Its Device Applica
`which may be used are alkali silicate glasses which are
`tion,” E. Kooi et al., Semiconductor Silicon 1973, pub
`modi?ed by NazO, soda-lime glasses, borosilicate
`lished by the Electrochemical Society, Edited by H. R.
`glasses, alumino-silicate glasses, and lead glasses. Then, '
`Huff and R. R. Burgess, pp. 860 — 879, are representa
`the two substrates are bonded together by fusing the
`tive of the recognition in the prior art of the “bird’s
`planar layer over the second substrate to the silicon
`beak” problems associated with silicon dioxide-silicon
`dioxide layer over the ?rst substrate to thereby fully
`nitride composite masks, particularly when used in the
`enclose the cavities. Finally, the second silicon substrate
`formation of recessed silicon dioxide by thermal oxida
`is removed from the fused structure.
`tion. Because of such “bird’s beak” problems, the art has
`The resulting structure is one having a planar surface,
`experienced some dif?culty in achieving well-de?ned
`at which the active devices of the integrated circuit may
`lateral isolation boundaries.
`be subsequently formed, i.e., the surface of the ?rst
`In addition, while, as previously mentioned, air isola
`silicon substrate covered by the planar layer of silicon
`tion has been used in the prior art in integrated circuits,
`dioxide. Further, since the cavities have been formed by
`no practical approach has been developed for the appli
`etching down from this surface rather than the back side
`cation of air isolation to high density, large scale inte
`surface of the structure, only minimal lateral integrated
`grated circuits.
`circuit “real estate” has been consumed in forming such
`cavities. In addition, the back side surface of the struc
`ture remains unetched and thus planar. Finally, because
`of the fully enclosed air-isolation, the structure has
`cavities capable of absorbing changes in volume of the
`silicon material resulting from the application of heat
`during the processing steps. Thus, heat-induced stresses
`are minimized.
`>
`The foregoing and other objects, features and advan
`tages of the invention will be apparent from the follow
`ing more particular description of the preferred embodi
`ments of the invention, as illustrated in the accompany
`ing drawings.
`BRIEF DESCRIPTION OF THE DRAWINGS
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`SUMMARY OF THE INVENTION
`Accordingly, it is an object of the present invention
`to provide an air-isolated integrated circuit structure
`with a planar wirable surface.
`It is another object of the present invention to pro
`vide an air-isolated integrated circuit structure in which
`the air isolation regions are of minimal dimensions so
`that the integrated circuit structure is adaptable to high
`device density integrated circuits.
`It is a further object of the present invention to pro
`vide an air-isolated integrated circuit structure in which
`both the upper and lower surfaces of the structure are
`planar.
`'
`It is yet a further object of the present invention to
`provide a dielectrically isolated integrated circuit struc
`ture in which both upper and lower surfaces are planar
`and which is substantially free from stresses created by
`changes in volume in the semiconductor material dur
`45
`ing integrated circuit fabrication heating steps.
`It is an even further object of the present invention to
`provide a method for fabricating an integrated circuit
`structure having the above described advantages.
`In accordance with the present invention, there is
`provided an integrated circuit member comprising a
`semiconductor substrate having formed therein a pat
`tern of cavities extending from one surface of the sub
`strate into the substrate and fully enclosed within the
`member, a plurality of pockets of semiconductor mate
`rial extending from said surface laterally surrounded
`and electrically insulated by said cavities and a planar
`layer of electrically insulative material on the surface.
`The integrated circuit member is formed by a fabrica
`tion method comprising ?rst etching a pattern of cavi
`ties extending from one surface of a ?rst silicon sub
`strate into the substrate; the cavities laterally surround
`and electrically isolate the plurality of silicon substrate
`pockets. Next, a ?rst layer of silicon dioxide is formed
`on this ?rst substrate surface. There is also formed over
`a second silicon substrate a planar second layer com
`prising a glass, and preferably a siliceous glass. The
`glass composition may be any conventional glass com
`
`FIGS. 1 — 7 are diagrammatic sectional views of a
`portion of an integrated circuit in order to illustrate the
`method of forming the preferred embodiment of the
`present invention.
`PREFERRED EMBODIMENTS OF THE
`PRESENT INVENTION
`FIGS. 1 — 7 illustrate the preferred embodiment of
`the present invention. On a suitable P- wafer 10 having
`a resistivity of 10 ohm/cm, an N+ region 11 which will
`subsequently serve as a subcollector is formed by con
`ventional thermal diffusion of impurities as set forth for
`example in U.S. Pat. No. 3,539,876. When introduced
`into substrate 10, N+ region 11 has a surface concentra
`tion of 1021 atoms/cm3. Region 11 may also be formed
`by conventional ion implantation techniques.
`Then, FIG. 2, a pattern of recesses or cavities 12 are
`etched in the substrate. This pattern of recesses corre
`sponds to the desired air-isolation pattern for the inte
`grated circuit structure. Recesses 12 are formed by
`etching utilizing a conventional mask such as a silicon
`dioxide mask formed by standard photolithographic
`integrated circuit fabrication techniques which mask
`has apertures corresponding to the recessed pattern to
`be formed. Then, the substrate may be etched in the
`conventional manner through the apertures de?ned in
`the silicon dioxide mask.
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`It should be noted that these recesses may be formed
`utilizing a conventional etchant for silicon such as a
`composition of nitric acid and diluted hydro?uoric acid
`in which case they will have the conventional sloped or
`tapered shape of recesses etched in silicon. Alterna
`tively, they may be formed by a technique of vertical
`walled etching as described in the aforementioned
`R.C.A. Review article, June 1970, particularly at pages
`272 — 275, wherein the substrate 10 should have a (110)
`surface orientation and the etchant utilized would be a
`boiling mixture of 100 grams KOH in 100 cc of water in
`which case recesses 12 will have the substantially verti
`cal-walled structure. For purposes of the present illus
`tration, recesses 12 are in the order of 2 microns in
`depth.
`Next, FIG. 3, utilizing conventional integrated circuit
`fabrication techniques, N-type epitaxial‘layer 13 is de
`posited over the substrate. Epitaxial layer 13 has a maxi
`mum impurity concentration or doping level of 1018
`atoms/cm3 and is deposited by conventional techniques
`at a temperature in the order of from 950° — 1150° C.
`During the deposition of epitaxiallayer 13, portions of
`the layer 13’ are deposited in cavities 12. Layer 13 has a
`thickness of about 2 microns. It should be noted that if
`it is considered desirable in the integrated circuit struc
`ture to avoid deposition of epitaxial layer portions 13’ in
`the'cavities 12, epitaxial layer 13 may be deposited im
`mediately after Step 1 and prior to the formation of the
`cavities in Step 2. In such a case, cavities 12 should be
`etched to a depth beyond the P—/N+ junction. Since
`substrate 10 is P-—, it may be subject to conventional
`surface inversion problems well-known in the art in
`certain integrated circuit applications. A higher concen
`tration of P dopant may be introduced in those portions
`of cavity 12 abutting substrate 10 by standard impurity
`introduction techniques such as diffusion or ion implan
`tation subsequent to the formation of the trench but
`prior to the formation of silicon dioxide layer 14.
`Next, FIG. 4, a layer of silicon dioxide 14 referably
`having a thickness in the order of from 3000 R — 10,000
`A is formed over the surface as shown using any con
`ventional silicon dioxide formation technique such as
`chemical vapor deposition or RF sputter deposition, or
`preferably, by standard thermal oxidation.
`Next, as shown in FIG. 4A, a layer of silicon dioxide
`20 which is to provide the planar surface of the inte
`grated circuit structure is deposited on a separate wafer
`21 of silicon. Wafer 21 should be as thin as possible but
`still be handleable without breakage. Wafer 21 may be
`either monocrystalline or polycrystalline silicon. Such a
`thickness may be conveniently between 3 and 5 mils.
`Silicon dioxide layer 20 which has a thickness in the
`order from % to 3 microns may be formed by any of the
`conventional techniques for forming silicon dioxide on
`a semiconductor substrate, e.g., chemical vapor deposi
`tion, sputter deposition or thermal oxidation of the sili
`con substrate. However, in accordance with one aspect
`of the present invention which will be described in the
`present embodiment, it .may be desirable to have an
`intermediate layer of an etch barrier material such as
`silicon nitride between silicon substrate 21 and silicon
`dioxide layer 20. As will be hereinafter described, when
`silicon substrate 21 is removed by chemical etching,
`silicon nitride is somewhat more resistant to conven~
`tional silicon etchants than is silicon dioxide, although
`65
`silicon dioxide is also resistant to such etchants and may
`be used alone without the nitride. In any event, if, as in
`FIG. 4A, silicon nitride is to be used, a layer 22 having
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`a thickness in the order of from 1000 A — 2000 A may be
`formed by any conventional technique such as the
`chemical vapor deposition reaction of silane and ammo
`nia. Alternatively, silicon nitride layer 22; may be depos
`ited by conventional RF sputter deposition techniques.
`At this point, the structure of FIG. 4A is abutted
`against the structure of FIG. 4 and silicon dioxide layer
`20 is fused to'silicon dioxide layer 14. to fully enclose
`cavity patter-n12.
`‘
`_
`The fusion of layers 14 and 20 may be achieved 'by
`heating the abutting structure in the steam atmosphere '
`at temperatures in the order of 1200° C for about one;
`half hour. Alternatively, fusion temperature may‘ be
`reduced by forming a thin layer of phosphosilicate glass- '7
`or borosilicate glass on the surfaces of either silicon
`dioxide layers 14 and 20. This may be accomplished by
`the simple expedient of slightly etching the surfaces of
`layers 14 and 20 prior to the fusion step to make these
`layers hydrophilic and then depositing a small amount
`of either boric acid solution (saturated aqueous boric
`acid solution) or dilute phosphoric acid solution on
`either or both of the layers 14 and 20. This results in a
`thin layer of either borosilicate or phosphosilicate glass
`being formed on the surface of the silicon dioxide layers
`thus treated. These glasses may also be formed by dop
`ing with boron or silicon in the conventional manner.
`When such a thin borosilicate or- phosphosilicate glass
`layer is formed on the surface, the fusion step maybe
`then carried out at a lower temperature in theorder of
`1 100° C by heating in an oxidizing ambient, e. g., heating
`in steam for about 15 minutes followed by heating in dry ,
`oxygen for about 15 minutes to complete the fusion.
`Alternatively, the slight etch to make one of the layers
`hydrophilic may be used alone to similarly reduce the
`required fusion temperatures.
`In a variation of the illustrated embodiment, any
`standard borosilicate or phosphosilicate glass having a
`high melting point of at least 1100° C may be used in
`place of silicon dioxide to provide the siliceous material
`of layer 20. This high temperature glass may be depos—
`ited by any conventional technique such as sedimenta
`tion, RF sputtering or vapor phase deposition.
`Silicon substrate 21 is then removed and silicon ni
`tride layer 22 optionally removed to provide the struc
`ture shown in FIG. 6 wherein silicon dioxide layer 20
`provides a planar surface over the entire structure fully
`enclosing air-isolation cavity pattern 12. Silicon wafer
`21 may be removed by any combination of conventional
`wafer polishing, grinding or etching techniques. Most
`conveniently, most of the upper portion of substrate 21, '
`FIG. 5, may be ?rst removed by any conventional pol
`ishing or grinding technique followed by any conven
`tional etching technique including chemical etching or
`sputter etching with either nonreactive or reactive ions.
`As set forth previously, the etching may be carried out
`using selected etchants or etching techniques to which
`either the silicon nitride layer 22 if used or the silicon
`dioxide layer 20 is more resistant than is silicon wafer
`21. If present, the silicon nitride layer 22 may be option
`ally removed using a conventional etchant for silicon
`nitride to which the silicon dioxide is resistant. Such a
`conventional etchant for silicon nitride is hot phos
`phoric acid or hot phosphoric salt.
`The resulting structure shown in FIG. 6 has a planar
`silicon dioxide layer over a plurality of silicon pockets
`23 which are laterally air-isolated by cavity pattern 12.
`Then, utilizing the structure of FIG. 6, the active
`devices of the integrated circuit may be formed utilizing
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`1. An integrated circuit member structure compris
`conventional integrated circuit fabrication techniques
`ing:
`to introduce regions of selected conductivity-types such
`a semiconductor substrate having formed therein a
`as P region 24 into isolated silicon pockets 23 (FIG. 7)
`pattern of cavities extending from one surface of
`through openings 25 formed in silicon dioxide layer 20
`said substrate into the substrate,
`by conventional integrated circuit photolithographic
`' a plurality of pockets of semiconductor material ex
`fabrication techniques. Then, after such regions are
`tending from said surface laterally surrounded and
`formed, the regions may be readily interconnected by
`electrically insulated by said cavities,
`conventional integrated circuit metallization or wiring
`a planar layer of electrically insulative material over
`techniques subsequently formed on the planar surface of
`said surface,
`silicon dioxide layer 20, e.g., metallization layer 26 con
`_ said cavities being fully enclosed by the combination
`nected to P region 24 through metal contact 27.
`of said substrate and said planar layer, and
`It should be noted that for any of the foregoing pro
`a metallization pattern formed on said layervof insula
`cessing steps involving etching either to form recesses
`tive material and selectively connected to a plural
`in layers or substrates or to remove layers, any conven
`ity of said pockets.
`tional etching technique may be employed such as those
`2. The structure of claim 1 wherein the lateral sur
`described in U.S. Pat. No. 3,539,876. Alternatively, any
`faces of said pockets abutting said cavities have formed
`of the above etching steps may be carried out by sputter
`thereon a layer of electrically insulative material.
`etching, utilizing conventional sputter etching appara
`3. The integrated circuit member of claim 2 wherein
`tus and methods such as those described in U.S. Pat. No.
`said substrate is a silicon substrate and said planar layer
`3,598,710, particularly sputter etching carried out utiliz
`is a layer of silicon dioxide.
`ing reactive gases such as oxygen or hydrogen or chlo
`4. The integrated circuit member of claim 3 wherein
`rine. U.S. Pat. No. 3,471,396 sets forth a listing of inert
`said layer formed on said cavities is a layer of silicon
`or reactive gases or combinations thereof which may be
`dioxide.
`used in sputter etching.
`5. The integrated circuit member of claim 2 wherein
`While the invention has been particularly shown and
`each of a plurality of said pockets is formed of a semi
`conductor material of one ‘conductivity-type having
`described with reference to the preferred embodiments
`formed therein at least one region of opposite conduc
`thereof, it will be understood by those skilled in the art
`tivity-type extending from the substrate surface of the
`that various changes in form and details may be made
`pocket into the pocket to provide an integrated circuit
`therein without departing from the spirit and scope of
`30
`device.
`the invention.
`What is claimed is:
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`007