1 ‘$895,523
`Examiner
`smrm. Dorxmm K.
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`
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`No{ice of Alfowabifiiy
`MEENAKSHJ S. SAHU
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`Appiicatéon No.
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`Ap;a’iican,£§5A)
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`
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`-- The MAILING GA TE of {iris czammun-icafion rappears on the ccwer sheet with the correspondence address»-
`‘All claims being aflowable, PRQ8ECUTiON QM THE MERITS IE3 (QR REM/EGNS) CLOSED in this appfioation.
`If not included
`herewith (or previously maited). a Natice of Allowance (PTQL-85) or other appropriate communication wiil be mailed in due cowse. THIS
`NOTiC$£ OF ALLOWABI-LITY 38 NOT A GRANT OF PATEN? RIGWFS.
`‘Chis app?licatio11 is subject to withdraw-2:3 from issue at -the initiative
`of the Office or upon petition by the app!¥i>a:1t.. See 37* CFR 1.313 and MPEP 1308.
`.
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`1 , g This communicaticmis raspcmsive to 11/06/2006.
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`2.
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`The afiowed ciaim(s) is/are $81;
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`3. C] Ackfiowledgmemt is made af 22 ciaim for foreign priority under 35 U.S.C. § %19{a}?(d} or (£3.
`a)‘{'J Ali
`b) 1:] Snnxa”
`:2) £3 None
`ofthe:
`1. [:1 Carfiffeci ccvpies of the priority documents have been received.
`2; E] Certified copées of the iariority documents have been reseivexzi in Appficaticm No. WW
`3, [3 Cczmpies cm‘ the rremifised mpiea of the pfiarity dacuments havebesn received in this nat§a.t1alstage‘appIication from the
`lnwnationai Bureau (PCT Ruie 172(3)).
`A
`* Certified copies not raceivedz ________
`
`Appiicant baa THREE MONTRE FROM THE "MAFLING DATE““of this communication to file a remy o0mpfyi:t1;c; with the requirements
`noted bafow. Failure to tim~.°2!y compiy wiil resuit in ABANDONMENT of this appiication;
`"W153 THR-EE»MQNTfi PERKDD $8 NCIT EIZKTEINSEAELE.
`
`4. E] A suasrxrrum om»: om DE€;LAF&‘ATiC3N mustbe submitted. Note the attachvsd E><A§vuN'm*s AMENLDMEINT ori‘.~1OTtCE OF
`INFORMAL F°A’TEi\!T‘ APPLREATIQN gF‘Tt:;¥~‘t52} vmich gives reasc:n{s)w?zy1‘h-ezoathhor de<>1a;rat.ion isvdeficient.
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`5.
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`-
`C€.‘3R¥?ECTEf3 KEFQAWWGS ( as “raptawnxant sheets“) must be submitted.
`(a) fl including changes required by the Notice af D'rafisperson’s Patent Drawing Review( PTO~’948} attached
`'1) 1:] hereto ear 2) [3 to Paper No./Mai: Dam
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`(tn) fl includirwg cfiangea required by the attached Examiners Amendmeent I Comment or in tha Office action of
`Paper No./Mail Date _"__,__W.
`Identifying indicia suczh as the appiimtion number (see 37 CPR 1.84(c)} shoufd be written on the drawings in the from: (not the back) of
`each shizet. Replacement sheath?) ahouid be sabeicaci as such in the header according to 37 CFR 1.121{d).
`
`6. [3 DEPOSW OF and/or INFORMATION about the deposit of BIOLOGKJAL MATERIAL must be submitted. Note the
`attached Examinaefis comment r€agar<3§n-g REQUJREMENT FOR THE DEPOSIT OF ’BlQLOGl€ZAL MATERiA.L.
`
`Attaehme-m~(s)
`1. E Notice of Refarences Cited_(PTtZ3w8*1~32}
`2, {1} Notice c>f Draft;mrson's Pa-teem Drawing Review (P‘¥‘O~948)
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`3. £8 information Discfosure Statezwzenta (PTOISBIOS),
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`Paper No./Mail Sate 6/’! 2106.7 V
`9/ 7
`4. {:2 Examinefs Comment ¥-‘tegarding Req,u‘iremevmt for Deposit
`cf Bioiogical Mateziai
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`'
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`5. [:3 Notice of Informal Patent Appiication
`6. ['3 Interview Summary (PTO—4?3_),
`Paper No./Mai! Date
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`T. [:1 Exanwiners Amendment/Comment
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`.
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`8. Q Examiner's Staiemerwt cf Reasons for Allowance
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`9. [:3 {)the:*
`
`
`Mack I. aBer'n3an/
`
`Primary E.xaminer, Art Unit 2881
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`
`
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`Notice af Aifowabiiity
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`'
`
` ASML 1 40 5
`US. Fates! and Tragiamaak Offacc:
`PTOL4-37 (fiav. 0~8~06)
`
`
`Part of Paper No./Mail Gate QDOBUSMA
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`

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`.Appiio.aiion/Control Number: 11/395,523
`Art Unit: 288'?
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`'
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`Page 2
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`DEETAJLEED ACTION
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`1%. Preliminary amendment filed. on Novembervfi, 2006. and adciiiiorzloi new ciaims
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`75 to 81 is noted.
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`Allowable Subject Matter
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`2. Claims 1, 30, 37, 67, 74, 7'5 and 78 are aliowed,
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`3. The foilowing is an examine-fa statement of reasons for allowance:
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`Prior art ’f8ii$ to oiiociose a light source or light bulb or a methoo‘ of producing
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`light, comprising: a chamber; an ignition ‘source for ionizing a gas within the
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`chamber; and at ieast one laser for providing energy to the ionized gas within the
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`chamber to produce a high brightness light.
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`High brightness iight sources have several alpplvications partiouiarily in the fields of
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`lithography and wafer inspoction. in the instant appiioation, the ignition source is
`a -cathode and anode which generate an eleotrioai discharge and provide ionized
`gas or plasma. Duriiag operation, the cathode and anode can getiveryhot am!
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`can wear out and omit particles that coniaminate the iighi sourcoano reduce the
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`e»ffic>iem:y of the light source. To ovorco-me fhi-ls, a lasar which provides energy io
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`susiain the piasma or ionized -gas is inciuded, The iernperature in {ha plasma
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`rises due to heating by the iaser beam and these high temperatures lead to
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`

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`Application/Control Number: 11/395,523
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`Page 3
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`Ari Unit: 2881
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`increased radiation at the shorter wavelengths such as in the ultraviolet.
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`Prior art by Hoshino et al. (US 2005/0167618 A1) disclose a light source which
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`has a laser that generates a plasma by focusing me laser beam onto a target
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`materiai that injected dcwnwarcl through a !’}C}Z.‘¥‘.i€.’¢.
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`in the instant application the
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`plasma is prcduced by an elecmcal discharge but maintained by a laser and
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`does not have tlfia cfebris prtzblem <31‘ laser produced plasma (LPP) scsurces.
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`Prior art by Sate (JP 6? i93358 A) discrloses 3 light source whem a laser beam
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`excites gas (for emitting UV and FUV fight) that is sealed in a bulb tube but falls
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`to disclose an ignition source that generates the piasma and a laser beam to
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`maintain the plasma as in the insiant application, which results in 3 more
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`powerful iight source.
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`Application ii/695,348 (US 200?/0228300 Al) has been checked for double
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`patentirig issuéés.
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`4. Claims 2 to 29, 31 to 36, 38 tel 66, 68 to 73, ?6 to. 77 and 7'9 to 81 are allowed
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`by virtue of their dependencies on claims 3,30, 37, 67, 75 and 78.
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`

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`Appiicaiion/Control Number; ll/395,523
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`Page 4
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`Ari Unit: 2881
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`Conclusion
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`Any comments considered necessary by applicant must be submitted no
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`later than the payment of the is:-sue fee and, to avoid processing delays, should
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`preferably accompany the issue fee. Such subml$s.ions should be clearly labeled
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`“CZ»ommen’ts on Statement of Reasons far Aliowance.”
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`Any inquiry conceming this cammunication or earlier c<immun_ic:ait*ioris frorii
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`the examiner ahauid be direcieé is MEENAKSW ‘:3. sAHu»whoseie1ephone
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`number is (571 )2’70~3’*i0'i.
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`’Tl2e examiner can normaily be reached an Monday -
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`Friday 8AM » 5PM ea-si.
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`if attempts to reach the examiner by telephone are unsuccessful , the
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`examiners supervisor, Robert HM Kim. can be reached an 571~272~2293. The fax
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`phone number for the organization where this application or proceeding is
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`assi—gneci is 57”‘i~273-8300.
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`

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`Application/Control Number: 11l3’95,£S23
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`Page 5
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`Art Unit: 288?
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`
`{Jack i. Barman}
`' Primary Examiner, Art Unit 2881
`
`/Meenakshi 3 Sam)!
`
`Examiner, Art Unit 2881