United States Patent [19]
`Sukegawa et al.
`
`I lllll llllllll Ill lllll lllll lllll lllll lllll 111111111111111111111111111111111
`US005487040A
`[11] Patent Number:
`[45] Date of Patent:
`
`5,487,040
`Jan.23, 1996
`
`[54] SEMICONDUCTOR MEMORY DEVICE AND
`DEFECTIVE MEMORY CELL REPAIR
`CIRCUIT
`
`[75]
`
`Inventors: Shunichi Sukegawa, Ourne; Tetsuya
`Saeltl, Tachikawa, both of Japan
`
`Primary Examiner-David C. Nelms
`Assistant Examiner-Huan Hoang
`Attorney, Agent, or Firm-William E. Hiller; Richard L.
`Donaldson
`
`[73] Assignees: Texas Instruments Incorporated,
`Dallas, Tex.; Hitachi Ltd., Japan
`
`[57]
`
`ABSTRACT
`
`[21] Appl. No.: 90,848
`
`[22] Filed:
`
`Jul. 12, 1993
`
`[30]
`
`Foreign Application Priority Data
`
`Jul. 10, 1992
`
`[JP]
`
`Japan .................................... 4-207332
`
`Int. Cl.6
`••...........•.•.•.•••.•..............•••••••••••.... GllC 13/00
`[51]
`[52] U.S. CI •................. 365/200; 365/230.03; 365/225.7;
`365/230.06; 3951182.05
`[58] Field of Search ............................... 365/200, 230.03,
`365/210, 233, 225.7, 230.06; 371/10.1,
`10.2, 10.3
`
`[56]
`
`References Cited
`
`U.S. PATENT DOCUMENTS
`
`To provide a type of semiconductor rnernory device char(cid:173)
`acterized by the fact that the area occupied by the redundant
`rnernory address decoder on the chip is minimized without
`reducing the redundancy of the defective rnernory, and hence
`the cost of the semiconductor rnernory device can be cut.
`
`~
`
`It has both redundant decoders that select the redundant
`rnernory in response to the all address bits and the redundant
`decoders which select the redundant rnernory group in
`response to a portion of the address bits, so as to increase the
`efficiency in saving the defective rnernory.
`
`5,272,672 1211993 Ogihara ................................... 365/200
`
`6 Claims, 9 Drawing Sheets
`
`70 --\
`
`74 ---\
`
`76 ---\
`
`78 ---
`
`\
`
`100
`
`102
`
`104
`106
`
`108
`110
`
`ARRAY A
`
`RWA 0-3
`
`/
`
`ARRAY 8
`
`ARRAY C
`
`RWC 0-3
`
`ARRAY D
`
`ARRAY E
`
`RWE 0-3
`
`ARRAY F
`
`112
`
`ARRAY G
`ill ARRAY H
`
`RWG 0-3
`
`72
`
`IFUSE
`FA
`
`82
`
`IFUSE
`FC1
`
`IFUSE
`FC2
`84 8 6
`
`IFUSE
`FE1
`
`IFUSE
`FE2
`88
`
`9 0
`
`IFUSE
`FG1
`
`IFUSE
`FG2
`92
`
`94
`
`MICRON-1005.001
`
`

`
`-. = ~ =
`
`-....l
`QC
`~
`-.
`Ut
`
`'-=
`~
`""'"
`~
`00 =(cid:173)
`('!>
`
`~
`
`~
`
`'-= ~
`'-=
`""'"
`~~
`N
`
`~ = ~ a
`
`•
`C/'J.
`~ •
`
`LOCAL 1/0
`
`MAIN I/
`0
`
`~DRANT 8
`
`S/A-
`
`/
`
`/
`
`0
`
`~ fTl ~
`
`I
`
`1TTTT
`
`I ]\
`
`1/0 SWITCH
`
`QUADRANT7
`
`0
`,....,
`:::0
`.-
`0
`(")
`
`0
`,....,
`:::0
`.-
`0
`(")
`
`I MA MS MA I VBB A. BUFFER I MA
`
`o o o o D D o o oAD
`MA I ROW CLOCK
`
`C.DEC.
`
`0
`.........
`~
`
`S R TIMER
`
`ADD 0 0 0 0 DD D
`
`(")
`.........
`)>
`
`(")
`
`0
`:::0
`
`0
`
`(")
`.........
`)>
`
`,....,
`0
`:::0
`MS
`
`(")
`
`0
`.........
`~
`
`ROW LED
`
`~
`
`0
`
`C.DEC.
`
`0
`
`~ ~
`
`(")
`.........
`)>
`
`(")
`
`0
`~
`,....,
`0
`:::0
`
`(")
`.........
`)>
`
`(")
`
`,....,
`0
`:::0
`
`0
`
`AD ~C.DEC.
`..,_____
`0
`,....,
`:::0
`.-
`0
`(")
`
`QUADRANT 1
`
`QUADRANT 2
`
`: 2K BITS/WORD LINf
`~ 1 M ARRAY : 256 WORDS/BIT LINE
`1l1ill ~
`. MAIN 1/0
`
`• -Ilill
`I M/A
`
`YS LINE LOCAL 1/0 YS LINE
`
`'
`
`~
`
`MAIN 1/01mr '-+--------
`
`I
`
`-
`
`!I
`1/0 SWITCH III]
`
`\___j
`
`AD ,_~C.DEC.
`,_!....--
`0
`,....,
`:::0
`.-
`0
`(")
`
`llill, ;-1
`I
`M/ A . WORD LINE QUADRANT 6
`
`l
`
`\
`
`""'""
`S/A~
`
`C.DEC.
`
`~ fTl ~
`
`0
`
`(")
`.........
`)>
`
`(")
`
`0
`:::0
`
`0
`
`0
`~
`
`("")
`.........
`)>
`
`("")
`
`0
`~
`
`QUADRANT 5
`
`C.DEC.
`
`ROW LED
`
`,....,
`0
`:::0
`MS
`
`VPP GEN.
`
`ADD D D D 0 D D D 0
`
`DD DD DD D DAD
`
`I MA
`
`MA I 1/0 BUFFER I MA MS MA I 1/0 BUFFER
`
`~
`
`~· -
`
`C.DEC.
`
`0
`~
`
`~
`
`0
`
`(")
`.........
`)>
`
`(")
`
`,....,
`0
`:::0
`
`0
`~
`
`(")
`.........
`)>
`
`(")
`
`,....,
`0
`:::0
`
`~
`
`0
`
`C.DEC.
`
`QUADRANT 3
`
`QUADRANT 4
`
`MICRON-1005.002
`
`

`
`U.S. Patent
`
`Jan. 23, 1996
`
`Sheet 2 of 9
`
`5,487,040
`
`10
`
`~12
`
`Fig. 2
`
`MICRON-1005.003
`
`

`
`U.S. Patent
`
`Jan. 23, 1996
`
`Sheet 3 of 9
`
`5,487,040
`
`--4/
`
`17
`
`52
`48
`
`:5
`
`15
`
`58
`43
`19
`56
`46
`19
`
`44
`
`MICRON-1005.004
`
`

`
`-.. = ..s;. =
`
`......)
`OQ
`-.. ..s;.
`Ul
`
`IC
`c ....,
`,&::..
`~ ......
`=--~
`rr.i.
`
`IC =--
`"""'
`IC
`~
`~
`
`i:...i
`
`~ a
`""=
`•
`00
`e •
`
`Fig. 4
`
`I
`
`I
`
`I
`
`I
`
`I
`
`111 L:_](Fof-F1 ~F2-?°:F3----;:-,,n~r:;?;::,,:9,,,7;? .-:-.:P~4 :P---
`
`. . . . .
`
`TOTAL NUMBER OF FUSES = 26
`
`3 '-I 0-0C 1---~
`
`~ :;J
`
`F23
`
`F21
`
`F20
`
`F3
`
`F2
`
`F1
`
`FD
`
`A 11
`
`A_ DJ
`
`I r---..
`
`A10 I
`
`.---....
`
`A_ 10
`
`MICRON-1005.005
`
`

`
`.... = ~ =
`
`....:J
`QO
`~
`....
`Ul
`
`~
`
`s,
`=--a
`
`U1
`
`r::l'l
`
`="
`~
`~
`~
`
`J~
`~ ?
`
`~ = i ~
`
`•
`00
`d •
`
`• •• • •• • •• • •• • •• • •• • •• • •• • ••.••.••.•.•. •.. •
`
`:
`
`1 •
`
`2 REDUNDANT ROWS (
`
`o---; ~ -o+------rr'
`
`I
`
`?rrr~ll ii
`
`QUADRANT 5
`
`.. ·1. ·111
`
`: : : : : : : : : : : : : : : : : : : : : : : : : : : : : : :1
`
`(ANY TO ANY)
`
`4 MEG ARRAY
`
`6
`
`QUADRANT
`
`ROW REDUNDANT MECHANISM
`
`:: .
`::·
`<
`.
`I• -· .: .' .. ii' : .!-· !+ !· :::1::111
`
`··
`
`·· · ··
`
`.. · · · · .. ·
`ARRAYr~~· ............... · · ·
`
`"---MS DRIVER
`
`1
`
`MS SIGNAL
`
`.
`
`·
`. ....
`1. H
`; ~
`::.
`.
`
`·-· · . · . · . ·
`
`::
`
`::
`
`1
`::
`
`I::
`
`. . . .
`
`ADDRESS BUS) (~rr'n 1,,mµ; ¥11~ ~l,;6§ ;:-~-=-=-=o=o:l\_PREDECODER
`
`11
`
`. .
`.
`. . . . I
`
`. .
`.
`
`Fig. 5
`
`ll
`
`. .
`.
`..
`
`. .
`.
`.
`
`r.
`
`FUSE DECODER
`
`F
`
`rm rt,A rW r~ r'TT'I r~ r~ rln1i
`I\
`REDUNDANT ENERGIZATION LINE ~ :
`.
`,_
`:. ··
`
`USE SWITCH
`
`FUSE DECODER -
`ADDRESS BUS---~ \
`
`7
`
`~
`
`SELECTION LINE
`4 WORDS/ROW REDUNDANT
`
`IT
`
`· "
`
`. . . .
`
`..
`
`..
`
`..
`
`..
`
`.
`
`.
`
`.
`
`.
`
`.
`
`.
`
`.
`
`MICRON-1005.006
`
`

`
`U.S. Patent
`
`Jan. 23, 1996
`
`Sheet 6 of 9
`
`5,487,040
`
`YIELD={I P(n)}k
`n=O
`P(n)= (AD) n EXP(-AD)
`n1
`k= BLOCK NUMBER/CHIP
`m= REDUNDANCY NUMBER/BLOCK
`A= BLOCK REGION
`
`NUMBER OF DEFECTIVE MEMORIES
`Fig. 6
`
`1 0
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`1S
`16
`17
`
`vcc vcc
`000
`D
`NC
`001
`NC
`NC
`NC
`NC
`NC
`NC
`NC
`NC
`w w
`RE
`RE
`NC
`NC
`AO
`AO
`A1
`A1
`A2
`A2
`A3
`A3
`A4
`A4
`AS
`AS
`vcc vcc
`
`l l
`
`SOJ/TSOP TYPE II
`
`16M x 4
`64M x 1
`Fig. 7
`
`34
`33
`32
`31
`30
`29
`28
`27
`26
`25
`24
`23
`22
`21
`20
`19
`18
`
`vss vss
`003 Q
`002 NC
`NC
`NC
`NC
`NC
`NC
`NC
`CE
`CE
`G
`NC
`NC
`NC
`A12 A12
`A 11 A 11
`A10 A10
`A9
`A9
`AB
`A8
`A7
`A7
`A6
`A6
`vss vss
`
`j J
`
`MICRON-1005.007
`
`

`
`U.S. Patent
`
`Jan. 23, 1996
`
`Sheet 7 of 9
`
`5,487,040
`
`70 --...
`\
`
`74 --.\
`
`76
`
`--...~
`
`78
`
`--...
`\
`
`100
`
`102
`104
`
`106
`
`108
`
`110
`
`112
`
`114
`
`ARRAY A RWA 0-3
`
`ARRAY 8
`
`ARRAY C RWC 0-3
`
`ARRAY D
`
`ARRAY E RWE 0-3
`
`ARRAY F
`
`ARRAY G RWG 0-3
`
`ARRAY H
`
`Fig. 8
`
`72
`
`v
`
`I
`
`IFUSE
`FA
`
`82
`
`!FUSE
`FC1
`
`!FUSE
`FC2
`84 8
`6
`
`!FUSE
`FE1
`
`!FUSE
`FE2
`88
`
`9
`0
`
`!FUSE
`FG1
`
`!FUSE
`FG2
`92
`
`94
`
`MICRON-1005.008
`
`

`
`Q
`~
`Q
`,..
`""'-l
`00
`~
`,..
`Ol
`
`\C
`
`s,
`[
`Q"'
`CJ)
`
`·QC
`
`~
`
`="'
`\C
`""""
`\C
`J~
`~
`
`~
`~
`•
`rJ'J.
`d •
`
`"'""' ~ a
`
`Q=O, 1,2,3
`
`Fig. 9
`
`RR2X3 ______________________ ___,
`RR1X3 -------------------~
`RROX3 _________________ _.
`RR2X2----------------
`RR1X2 -------------~
`RRQX2-------------'
`RR2X1 _________ _____,
`RR1X1 _______ ___,
`RROX1-----
`RR2X0---'
`RR1XO
`
`RRQSQ
`
`TLRR_Q
`
`IV4
`
`N4
`
`RRQS
`
`IV1
`
`N3
`
`N1
`MP1 q
`
`F1
`
`RRL2
`
`MICRON-1005.009
`
`

`
`U.S. Patent
`
`Jan.23, 1996
`
`Sheet 9 of 9
`
`5,487,040
`
`ADDRESS FUSE
`AGREEMENT
`
`START
`UP
`68
`
`PCH_1
`
`REN_
`
`AF_0
`
`AF_ 1
`
`AF_2
`
`AF_3
`
`AF_4
`
`AF_5
`
`AF_6
`
`AF _7
`
`AF_8
`
`AF_9
`
`AF_ 10
`
`AF_ 11
`
`Fig. 10
`
`N2
`
`N3
`
`MICRON-1005.010
`
`

`
`5,487,040
`
`1
`SEMICONDUCTOR MEMORY DEVICE AND
`DEFECTIVE MEMORY CELL REPAIR
`CIRCUIT
`
`This invention pertains to a type of IC. More specifically,
`this invention pertains to a type of IC device formed on a
`semiconductor substrate, such as dynamic random access
`memory or other memory device.
`
`PRIOR ART
`
`The rapid development of the dynamic random access
`memory DRAM as a type of large scale IC semiconductor
`device is well known, such as the development from the 16K
`DRAM disclosed by Rao in U.S. Pat. No. 4,055,444 to the 15
`IM DRAM disclosed by McElroy in U.S. Pat. No. 4,658,
`377, and further to 4M and 16M DRAM. At present, the
`64M DRAM, which has more than 64 million memory cells
`and their periphery circuit formed on a single chip, is in the
`pilot manufacturing stage, and it is planned to perform mass
`production for it as the next-generation DRAM. At present,
`the designers of the 64M DRAM ultralarge scale IC (ULSI)
`semiconductor memory device are facing many problems.
`For example, one of the features with which people are
`concerned is how to eliminate defective memory cells. As 25
`indicated by the planar capacitor cell disclosed in U.S. Pat.
`No. 4,240,092 by Kuo and the trench capacitor cell disclosed
`by Baglee et al: in U.S. Pat. No. 4,721,987, the development
`of the ultralarge scale DRAM is promoted by the reduction
`in the memory cell geometry. For the 64M DRAM or an 30
`even higher integration degree, the geometry is extremely
`small, and the technology in the submicron range (smaller
`than 1 millionth of meter) has to be used for manufacturing.
`Consequently, the percentage of defective circuit and defec-
`tive devices caused by particles, which were not formerly a
`serious problem in the conventional manufacturing opera(cid:173)
`tion, will increase for such minute geometry.
`FIG. 1 shows a 64M bits dynamic random access memory
`chip known as 64M DRAM prepared using the submicron 40
`technology. This chip is equally divided to eight quadrants
`of 8M bits. Each of the eight memory quadrants contains
`eight IM bits memory blocks. Each memory block is made
`of two 512K bits portions. The column decoder (C. dee) is
`placed at the center of each memory quadrant along the axial 45
`line in the longitudinal direction as viewed from above the
`chip. Row decoder (R. dee) is placed along the axial line in
`the transverse direction of the chip adjacent to the corre(cid:173)
`sponding memory quadrant. The peripheral circuit contain(cid:173)
`ing input/output buffer (A. buffer, 1/0 buffer), timing gen- 50
`erator (S. R. timer, Row. clock) and control circuit (Row
`red.) is placed at the central portion along both horizontal
`axis and vertical axis of the chip. In addition, the bonding
`pad is placed at the center along the vertical axis of the chip.
`FIG. 2 is a plane view showing a portion of the memory 55
`array 12. Memory cells of memory array 12 are of the
`improved trench capacitor type made using submicron tech(cid:173)
`nology. The memory cell has an area of about 4.8 µm2
`, and
`is placed for every two word lines. Bit lines 17 are made of
`3-layer polycide for improving the tolerance with respect to 60
`noise. Word lines 19 are made of polysilicon, and a word line
`is connected for every 64 bits. In the prior art, redundant
`circuits were introduced for repairing the defective memory
`array.
`FIG. 3 is an oblique view illustrating a portion of memory 65
`array 12. Bit line 17 is connected to the each memory cells
`and is insulated from word line 19 by an interlayer insulating
`
`20
`
`2
`oxide layer. Word line 19 has a submicron width of about 0.6
`µm. Word line 19 forms the gate of transfer gate 43. It is
`isolated from substrate 10 by means of a thin oxide layer.
`Other word lines 19, 19 pass through over upper trench
`5 capacitors 44, 45, and are connected to the other trench
`capacitors not shown in the figure. They are isolated from
`polysilicon field plate 48 by means of an oxide layer. The
`gate portion of word line 19, source 56 and drain 58 form
`transfer gate 43. An arsenic layer 50 implanted on the outer
`side of the wall of the trench capacitor forms the N+-type
`10 memory node of the capacitor. On the wall of the trench
`capacitor, a layer 52 of oxide and nitride which acts as a
`dielectric layer between the implanted arsenic portion on the
`trench wall and polysilicon field plate 48 is formed. Transfer
`gate 43 and trench capacitor 44 form memory cell 46.
`FIG. 4 shows the redundant address coincidental circuit.
`It has routes among transistors selected from multiple tran(cid:173)
`sistors. A laser beam or a high voltage is applied to bum the
`fuses of the portion corresponding to the prescribed address
`bits.
`FIG. 5 shows the redundant mechanism for compensating
`defective memory cells of a 64M DRAM. This is carried out
`by replacing the defective memory with normally operable
`redundant memory. There are four redundant rows for the
`5 l 2K bits memory block. These four row lines can be used
`at the same time. Thirty two decoders can be programmed at
`will for each redundant row. Each redundant row decoder
`has a 13-bit row address. Fuses are used for the row
`redundant program. On average, in a single repair, 12 fuses
`are burned. The row redundancy adopts a method that allows
`ANY TO ANY programming for realizing a high yield.
`When this ANY TO ANY redundant mechanism is adopted,
`the 64 redundant rows present in one quadrant can be
`allotted selectively to all quadrants, including the present
`quadrant. In the operation of this redundant function, with
`the aid of the output of the 32 fuse decoders commonly
`connected to the row address bus, a memory selection driver
`MS is driven to specify the memory block constituted by the
`prescribed 512K memory cells. Among these prescribed
`memory cells, four redundant row lines are activated. At the
`same time, by selecting the activated four redundant row
`lines 1-4, the defective bit can be repaired. When the four
`lines are selected at the same time, the defects caused by
`short-circuits among the word lines can be corrected. Con(cid:173)
`sequently, the redundancy can be increased to about 6 times
`that of the fixed or flexible fuse decoder with the redundant
`memory set in the prescribed memory block. However, since
`the number of fuse decoders is increased, and the redundant
`memory address bits should be about the total address bits,
`the number of fuses that can be programmed becomes larger
`than that in the conventional case; and the redundant
`memory placed in each quadrant can be replaced to the main
`memory of the other quadrants; hence, increase in the data
`lines is not hampered. In the above, the redundant function
`has been displayed for the row address. However, the same
`configuration may also be used to program the redundant
`mechanism for the column address. In addition, 2-stage
`decoding can be performed by means of 2-stage program(cid:173)
`mable predecoder and fuse decoder.
`FIG. 6 shows the relationship between the number of
`defective memories in a prescribed area (abscissa) vs. redun(cid:173)
`dancy (ordinate) for models A-E. The broken line A repre(cid:173)
`sents model of the 64M DRAM, while the solid lines B and
`E show the other models of the 64M DRAM. Although the
`area remains the same for the various memory cells, they
`nevertheless have different redundancies due to their differ-
`ent quadrants, word configurations, and bit line configura-
`
`35
`
`MICRON-1005.011
`
`

`
`5,487,040
`
`15
`
`3
`tions. On the other hand, C and D show the redundancy
`configurations when the 16M DRAM, etc. are used. All of
`the redundancies are calculated on the basis of the number
`of defects in the same unit area. Here, attention should be
`paid to the fact that the ANY TO ANY method tolerates 5
`about four times the defective memory of those in the
`conventional case in the stage with yield over 80% as an
`indication of the maturing period on the basis of the learning
`curves of the semiconductor devices. That is, for the defec(cid:173)
`tive devices containing four times as many defective 10
`memory cells as in the conventional method without redun(cid:173)
`dant repair, by using the ANY TO ANY method, only 20%
`of the chips have to be disposed of, while the remaining
`chips can be assembled and shipped after passing the
`electrical tests for shipment.
`The other purposes, advantages, and features of this
`invention are clear to the specialists in the field as explained
`in the following with reference to embodiments.
`The major problem with the conventional configuration of
`the address redundant coincidental circuit is as follows: 20
`there should be address decoders for selecting multiple
`redundant word lines for repairing the word line short-circuit
`defects for the redundant address decoders including fuses,
`and there should be a necessary number of decoders as
`related to the memory blocks for repairing defects in one 25
`word line or defects in 1-bit memory cell. Consequently, the
`effective area is reduced, and the integration density of the
`circuit is hampered. In particular, the fuses must have an area
`appropriate for use as the target of laser beams. Conse(cid:173)
`quently, they cannot be made as small as the transistors. As 30
`a result, it is necessary to reduce the redundant address
`decoders.
`The configuration of the redundant address decoder cir(cid:173)
`cuit of this invention consists of multiple memory array
`blocks, multiple redundant word line groups placed in each
`memory block, a first redundant memory decoder which can
`energize the word line group at the same time, a second
`redundant memory decoder which selects one or several
`redundant word lines of the energized redundant word lines,
`and a redundant mechanism which can be programmed to
`use the redundant memory to replace the defective memory
`in any other memory block.
`
`35
`
`4
`FIG. 7 shows the pin layout of the 64M DRAM with
`64Mxl bit or 16Mx4 bit configuration.
`FIG. 8 shows the layout of the defective memory redun(cid:173)
`dant mechanism.
`FIG. 9 is the circuit diagram of RRQS row redundant
`quadrant selection.
`FIG. 10 is a circuit diagram of the fuse decoder of the
`redundant address coincidental circuit.
`In reference numerals as shown in the drawings:
`2, transistor group
`3, P channel transistor
`4, fuse
`5, 8, inverter
`6, inverter group
`7, "NAND" gate
`10, semiconductor chip
`12, semiconductor substrate
`15, bit line contact
`17, bit line
`19, word line
`28, drain
`41, 42, interlevel connection line
`43, transfer gate
`44, 45, trench capacitor region
`46, memory cell
`48, field plate
`50, impurity region
`56, source region
`70, 74, 76, 78, redundant word (row) line group
`72, redundant word (row) selection line
`82, 84, 88, 92, word line group selection fuse decoder
`86, 90, 84, word line selection fuse decoder
`100, 102, 104, 106, 108, 110, 112, 114, memory array
`40 block
`
`DESCRIPTION OF THE PREFERRED
`EMBODIMENTS
`
`SUMMARY OF THE INVENTION
`
`By means of the redundant address decoder with the
`aforementioned configuration, a defective bit can be
`replaced by any one redundant word line using the total
`address bit decoder, and a defect in the word line due to short
`circuit can be replaced by any redundant word line group by
`the half-address bit decoder; hence, the redundant memory
`mechanism corresponding to the defective mode can be
`realized using the smallest possible chip area.
`
`BRIEF DESCRIPTION OF THE DRAWINGS
`
`FIG. 1 is a plane view of the semiconductor memory chip.
`FIG. 2 is a plane view of a portion of the memory array.
`FIG. 3 is an oblique view of a portion of the memory
`array.
`FIG. 4 shows the redundant memory address coincidental
`circuit.
`FIG. 5 shows a redundant mechanism for repairing defec(cid:173)
`tive memory cells of a 64[M] DRAM.
`FIG. 6 shows the correlation between defective memory
`number and redundancy as represented by the yield.
`
`45
`
`In an embodiment of this invention, the memory device
`consists of multiple memory arrays which have memory
`cells arranged in a matrix configuration and have a redun(cid:173)
`dant row group for replacing the defective row groups and
`peripheral circuit which reads information from the memory
`50 cells and then rewrites the information into the memory
`cells; this peripheral circuit contains a row redundant circuit
`which selects the redundant row group of the memory cell
`only in the memory array having the defective row group of
`the memory cells in response to the defective row group
`55 address of the memory cells, and a redundant circuit which
`selects one or several redundant row lines in the aforemen(cid:173)
`tioned redundant row group for replacing the defective bit.
`It is preferred that the row redundant circuit contain a row
`redundant decoder which can be programmed for maintain-
`ing the defective row address, and which allows 2-stage
`programming for maintaining the information for identify(cid:173)
`ing the memory array containing the defective row of the
`memory cell.
`In another embodiment of this invention, the memory
`65 device integrated on a single semiconductor substrate con(cid:173)
`sists of multiple memory arrays, which have memory cells
`arranged in a matrix configuration and a redundant column
`
`60
`
`MICRON-1005.012
`
`

`
`5,487,040
`
`10
`
`25
`
`5
`group of memory cells for replacing the defective column
`group, and a column redundant circuit which selects the
`redundant column group of the memory cells only in the
`memory array having the defective column of memory cells
`in response to the address of the defective column group of 5
`the memory cells. It is preferred that the column redundant
`circuit contain a column redundant decoder which can be
`programmed for maintaining the defective address, and
`which allows 2-stage programming for maintaining the
`information for identifying the memory array containing the
`defective column of the memory cell. The memory device
`preferably contains a first redundant decoder which can be
`programmed to ensure maintaining the address of the defec(cid:173)
`tive row, receiving the row address, and generating the
`redundant row decoder signal and redundant row factor
`signal; a second redundant decoder which can be pro- 15
`grammed to ensure maintaining the position of the array
`containing the defective row, receiving the redundant row
`decoder signal, and generating the array selection signal; and
`redundant energization circuit which connects to the redun(cid:173)
`dant row factor energization signal of the second redundant 20
`decoder, the array selection signal of the second redundant
`decoder and the redundant row of the memory cell, and
`which energizes the selected redundant row of memory cells
`in the memory array having the defective row of memory
`cells.
`·
`According to this invention, the memory device may be
`the memory device disclosed in the claim and containing
`row redundant circuit and column redundant circuit.
`FIG. 7 shows a memory device with a bonding selectable 30
`64M bitsxl or 16M bitsx4 configuration. The selection can
`be performed by using the bonding wire to connect the
`prescribed bonding pad to VSS just as in the conventional
`technology in the manufacturing stage. Generally speaking,
`the specifications of the 64M DRAM can be determined for 35
`the memory array by means of time-shared input of a total
`of 13 bits of address input terminals AO-Al2 arranged for
`11-25 pins. Consequently, by taking the row address array,
`judgment can be made on whether the redundant memory
`decoder connected to the internal address bus is for selecting 40
`the standard memory array or for selecting the redundant
`memory array. In explanation of this invention, when the all
`address bits are mentioned, this means the all bits of the row
`and column address, namely, 26 bits, or the bits of the
`address of either row or column address. Consequently, the 45
`half-address bits refer to the 13 bits, or the upper 6 or 7 bits.
`These specifications can be changed by the designer to
`optimize the selection of the configuration of the output bits
`of the memory device.
`FIG. 8 shows the redundant mechanism. In the redun- 50
`dancy programming, the memory quadrant has 8 blocks of
`1 M bits memory arrays, each of which is divided into two
`512K bits portions. Each memory array block has 4 row
`redundant memories. They can be selected at the same time
`by means of fuse decoder 82 or 92. Selected at the same time 55
`is the redundant row address by using about half the address
`bits instead of all of the bit data of the address bus. The
`number of the fuse decoders is half that in the case of the all
`address decoding; hence, the circuit area can be reduced.
`The simultaneous selection of the four row redundant 60
`memories is a very effective function in the case of the
`defect related to short circuit of the word lines. This is
`because the method in which the memory cell configuration
`is arranged for every two word lines and the four word lines
`are repaired at the same time in the case when a short circuit
`defect takes place for the adjacent word lines is more
`effective than the method in which each word line is
`
`6
`address-decoded and repaired. The 4-line simultaneous
`selection method may be used not only in the case of defect
`caused by word line short circuit, but also in the case for
`defective bit. In this case, the standard memory is replaced
`by the redundant row. On the other hand, in the case when
`repair is to be made for a defective bit and a defect in one
`word line, the operation is performed by selecting one line
`of the row redundant memory. As the number of the row
`lines allows that redundancy is increased, the corresponding
`redundant memory address decoders are needed. When
`decoders corresponding to the defective bit in the all redun-
`dant row memory are arranged, the redundancy can be
`increased. However, the overall area of the chip is increased.
`Attention should be paid to this feature. Consequently, in the
`case when there are many defective word lines in the defect
`pattern intrinsic to the chip layout design, the number of
`decoders for repairing the defective bit can be reduced. In
`the submicron technology developed on the basis of
`progress in small-scale processing, the probability at which
`all of the defects are defective bits is small, while the defects
`caused by short circuit of the word lines are increased. In this
`case, fuse decoders 82-92 for selecting the four row redun(cid:173)
`dant lines in response to the half-bit address are arranged to
`repair the defects caused by short circuit of word lines. The
`fuse decoders 86-94 for repairing the defective bit in
`response to the all address bits at the same time are arranged
`to reduce the chip area occupied by the total fuse decoders.
`In this configuration, there is no decrease in the redundancy,
`and the integration degree of the chip can be increased. In
`the redundant mechanism shown in FIG. 8, connection is
`made between one memory quadrant and fuse decoders. In
`the case when the ANY TO ANY method for the redundant
`mechanism is used, fuse decoders 82-94 can function for
`replacing the defective memory in the other quadrants not
`shown in the figure. In this case, the all bits means that all
`of the row address are used. When the fixed method is used
`instead of the ANY TO ANY method, it is enough to use
`only the row address characteristic for the memory block as
`the redundant mechanism in the block only. Consequently,
`the number of the fuse decoders can be further reduced.
`FIG. 9 shows the RRQS (ROW redundant quadrant
`selection) circuit. It can make use of the fuse decoder shown
`in FIG. 8. The address bit signal is decoded and the quadrant
`to which the redundant row belongs is identified. The device
`has four RRQS circuits, each of which selects the quadrant
`of the array. The RRQS circuit is designed as a 12-input
`"NOR" gate. When this circuit is designed, if the redundant
`address does not belong to the repaired quadrant, the fuses
`corresponding to RRQS are blown. The fuses are not blown
`with respect to the repaired row for the quadrant [sic]. In this
`way, in the case when the redundant row is addressed and
`belongs to the quadrant, node Nl always takes on the low
`level, and activated output RRQS signals, that is, TLR_Q
`and RRQSQ, are generated. In the case when the redundant
`row does not belong to the quadrant or it is not the addressed
`redundant row, node Nl remains on the high level. The
`RRL2 signal is used in turning MPl on and to charge Nl to
`the high level during prechange. In the case when MP2
`having the inverter IVl is not selected, [it is] used for
`holding node Nl at the precharge level. Attention should be
`put on the fact that by means of appropriate design, for the
`redundant address, any number of activated quadrants can be
`selected. This is realized by not blowing the fuses corre(cid:173)
`sponding to the selected address in the RRQS circuit con-
`65 cerning the quadrant having the repaired row. When the fuse
`of RRQS circuit is blown, the predecoded address bit signal
`is applied to the gate of the transistor, and the potential of
`
`MICRON-1005.013
`
`

`
`5,487,040
`
`7
`node Nl is not discharged. On the other hand, if the fuse is
`not blown, the selected transistor discharges node Nl, and
`the output of inverter IV2 can be set to the logical high level.
`FIG. 10 shows the fuse decoder of another redundant
`address coincidental circuit. It also makes use of the fuse 5
`decoder shown in FIG. 8. In the case when the redundant
`memory is used, it is only necessary to blow energized fuse
`FE. The p channel transistor PCH_l is energized by start
`signal STARTUP and generates REN_ signal. Logic opera(cid:173)
`tion is performed by the "NAND" logic gate for the various IO
`input signals from Nl to N3 "OR" connected via the
`programmable fuses to the "NOR" logic output of REN_
`signal and address signals AF _0-AFll. In this way, it is
`judged by the device that a redundant memory is to be used.
`Although four fuses are set in parallel as a group, for each 15
`"NOR" gate, with the high resistance after the series(cid:173)
`connected fuse is blown or with the medium resistance due
`to incomplete blowing, it is impossible to reach the logic
`level of the "NAND" logic gate in the next stage. Conse(cid:173)
`quently, the agreement signal of the address has a high 20
`reliability. In addition, although the fan-out of p channel
`transistor PCH_l is large, in the conventional operation
`state, a transistor with the conventional size is enough for
`driving about 12 gates.
`This invention has been explained above in detail with 25
`reference to the embodiments. However, these examples are
`only for explanation of the invention, they have no limiting
`function. In addition, many changes can be made in the
`detailed features of the embodiments of the invention, and
`they can be made by specialists in this field with reference 30
`to the above explanation. In the above description, this
`invention was explained with respect to DRAM. However,
`it may also be used as the redundant configuration for any
`other type of memory containing read-only memory (ROM)
`and static random access memory (SRAM). In addition, the 35
`n channel transistors may be replaced by p channel transis(cid:173)
`tors. Furthermore,
`the field-effect
`transistors may be
`replaced by bipolar transistors with the same effect. Here,
`the field-effect transistors may be MOS transistors. These
`configurations may be formed on an IC by using conven- 40
`tional semiconductor manufacturing technology. All of these
`variations and other embodiments are included in the real
`range and technical ideas of this invention.
`The effects of the invention disclosed above may be 45
`summarized as follows.
`(1) In a semiconductor IC, the defective memory cell
`caused by short circuit of the word lines can be replaced by
`the row redundant memory cell group, and the defective
`memory cell due to a defective bit can be replaced by the 50
`other redundant row memory.
`(2) Since both the fuse decoders dedicated to the redun(cid:173)
`dant word line group and the fuse decoders dedicated to the
`redundant word line are set in a single memory chip, the
`overall area of the fuse decoder can be reduced.
`(3) It provides a type of semiconductor IC characterized
`by the fact that the manufacturing yield can be increased.
`We claim:
`1. A semiconductor memory device comprising:
`a plurality of memory blocks, each of said memory blocks
`having an array of memory cells provided thereon
`arranged in a matrix of rows and columns of individual
`memory cells
`
`8
`each array of memory cells including a main array sector
`of rows and columns of memory cells as part of a
`regular memory configuration, at least some of the
`arrays of memory cells including a redundant group of
`a plurality of one of the rows and columns of memory
`cells as redundant memory;
`a plurality of redundant group selection lines correspond(cid:173)
`ing in number to the plurality of said one of the rows
`and columns of memory cells included in each of said
`redundant groups;
`the plurality of said one of the rows and columns of
`memory cells included in each of said redundant groups
`having a first redundant address of a portion