throbber
UNITED STATES PATENT AND TRADEMARK OFFICE
`__________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`__________
`
`
`
`LAM RESEARCH CORP.,
`
`Petitioner
`
`v.
`
`DANIEL L. FLAMM,
`
`Patent Owner
`___________
`
`U.S. Patent No. 6,017,221
`
`Issued: January 5, 2000
`
`Named Inventor: Daniel L. Flamm
`
`Title: PROCESS DEPENDING ON PLASMA DISCHARGES
`SUSTAINED BY INDUCTIVE COUPLING
`___________
`
`Case IPR2015-01767
`Patent 6,017,221
`
`PETITIONER'S REPLY
`
`
`
`Mail Stop: PATENT BOARD
`Patent Trial and Appeal Board
`U.S. Patent & Trademark Office
`P.O. Box 1450
`Alexandria, VA 22313-1450
`
`9885502
`
`
`
`
`
`
`

`
` Case IPR2015-01767
`
`
` U.S. Patent No. 6,017,221
`
`
`TABLE OF CONTENTS
`
`Page
`
`INTRODUCTION ........................................................................................ 1 
`
`THE CHALLENGED CLAIMS ARE UNPATENTABLE ......................... 4 
`
`A.  Ground 1 and Ground 2: Claim 1 is Anticipated By
`Lieberman93 and Lieberman 94 Under § 102(b) ............................... 4 
`
`1. 
`
`2. 
`
`3. 
`
`The Petition Shows that Lieberman 93 and Lieberman
`94 Teach An Inductive Coupling Structure In Which A
`Phase Portion and An Anti-phase Portion of
`Capacitive Currents Are Selectively Balanced as per
`Claim 1 ..................................................................................... 5 
`
`The Petition Shows that Lieberman 93 and Lieberman
`94 Teach Selectively Balanced as per Claim 1 ........................ 8 
`
`The Petition Shows that Lieberman 93 and Lieberman
`94 Teach A Wave Adjustment Circuit Adjusting The
`Phase Portion and The Anti-Phase Portion of
`Capacitively Coupled Currents as per Claim 1 ...................... 11 
`
`B. 
`
`Ground 3 and Ground 4: Claim 1 is Obvious Under § 103(a) ........ 18 
`
`1. 
`
`The Petition Showed a PHOSITA Would Recognize
`Reasons for Combinability for Claim 1 ................................. 18 
`
`C. 
`
`Grounds 1-4: Flamm Has Waived Arguments for Dependent
`Claims ............................................................................................... 22 
`
`D.  Grounds 5-8: Flamm Has Waived Arguments for Claim 4 ............ 22 
`
`- i -
`
`
`
`
`
`
`I. 
`
`II. 
`
`
`
`9885502
`
`
`

`
`
`
`
`
`
`
`
`
`
`
` Case IPR2015-01767
` U.S. Patent No. 6,017,221
`
`TABLE OF AUTHORITIES
`
` Page(s)
`
`Cases
`Allied Erecting and Dismantling Co., v. Genesis Attachments, LLC,
`Slip Op. No. 15-1533 .......................................................................................... 20
`
`In re Keller,
`642 F.2d 413 (C.C.P.A., 1981) ........................................................................... 20
`
`KSR Int'l. Co. v. Teleflex Inc.,
`550 U.S. 398, 416 (2007) .............................................................................. 20, 21
`
`In re Mouttet,
`686 F.3d 1322 (Fed. Cir. 2012) .......................................................................... 20
`
`Sakraida v. Ag. Pro., Inc.,
`425 U.S. 273, 282 reh’g denied, 426 U.S. 955 (1976) ....................................... 21
`
`In re Sasse.
`629 F.2d675 (CCPA 1980) ................................................................................. 21
`
`Verdegaal Bros. v. Union Oil Co. of California,
`814 F.2d 628 (Fed. Cir. 1987) .............................................................................. 2
`
`Statutes
`
`35 U.S.C. § 102(b) ..................................................................................................... 1
`
`35 U.S.C. § 103(a) ........................................................................................... 1, 4, 18
`
`
`
`9885502
`
`
`- ii -
`
`
`
`

`
`
`
`
` Case IPR2015-01767
` U.S. Patent No. 6,017,221
`
`
`
`
`
`
`
`
`
`EXHIBIT LIST
`
`Description
`Exhibit
`1001 U.S. Patent No. 6,017,221 (the '221 patent)
`
`1002 Michael A. Lieberman and Richard A. Gottscho, Design of High Density Plasma
`Sources for Materials Processing, UNIVERSITY OF CALIFORNIA, BERKELEY
`TECHNICAL REPORT NO. UCB/ERL M93/3 (JANUARY 11, 1993) (on file with the
`University of California, Berkeley Library) (Lieberman93)
`
`1003 U.S. Patent No. 5,573,595 (Dible)
`
`1004 U.S. Patent No. 4,877,999 (Knapp)
`
`1005 U.S. Patent No. 5,065,118 (Collins)
`
`1006
`
`J. Hopwood, Review of Inductively Coupled Plasmas for Plasma Processing,
`Plasma Sources Sci. Technol. 1, 109-116 (1992) (Hopwood)
`
`1007 Declaration of Joseph L. Cecchi, Ph.D.
`
`1008 Merriam-Webster's Collegiate Dictionary, Eleventh Edition, 2012
`
`1009
`
`'221 Patent Prosecution History, 10/2/98 Office Action and 4/2/99 Response
`
`1010 Declaration of Miyoko Tsubamoto
`
`1011 Curriculum Vitae of Joseph L. Cecchi, Ph.D.
`
`1012 Michael A. Lieberman and Richard A. Gottscho, Design of High-Density Plasma
`Sources for Materials Processing, PLASMA SOURCES FOR THIN FILM DEPOSITION
`AND ETCHING (PHYSICS OF THIN FILMS VOLUME 18), August 1994 (Lieberman94)
`
`1013 Publisher's Webpage for PLASMA SOURCES FOR THIN FILM DEPOSITION AND
`ETCHING (1st Edition),
`http://store.elsevier.com/product.jsp?isbn=9780125330183&_requestid=1611063
`(last visited Aug. 13, 2015).
`
`1014 Declaration of Morgan Chu In Support of LAM's Unopposed Motion for Pro
`Hac Vice Admission
`
`9885502
`
`
`- iii -
`
`
`
`

`
`
`
`
`
`
`
`
`
`
`Description
`Exhibit
`1015 Declaration of Talin Gordnia In Support of LAM's Unopposed Motion for Pro
`Hac Vice Admission
`
` Case IPR2015-01767
` U.S. Patent No. 6,017,221
`
`1016
`
`"Balun Transformers",
`https://www.minicircuits.com/pages/BalunApplicatioNote.htm (printed June 17,
`2016).
`
`1017 THE RADIO HANDBOOK, Ed. William I. Orr (16th edition) (1962).
`
`1018 U.S. Patent RE40,264 E
`
`1019 Figure 3(b)
`
`1020 Figures 3(a)
`
`1021 Deposition of Daniel L. Flamm, Sc. D., Oakland, California, Tuesday, July 26,
`2016
`
`1022 Second Declaration of Joseph L. Cecchi, Ph.D.
`
`1023 Rudolf F. Graf, MODERN DICTIONARY OF ELECTRONICS (6th edition) (1984)
`
`1024 Doug Jorgesen and Christopher Marki, "Balun Basics Primer, A Tutorial on
`Baluns, Balun Transformers, Magic-Ts, and 180o Hybrids," Marki Microwave
`(2014).
`
`
`
`9885502
`
`
`- iv -
`
`
`
`

`
`
`
`I.
`
`INTRODUCTION
`
`
`
`
`
`
`
` Case IPR2015-01767
` U.S. Patent No. 6,017,221
`
`On February 24, 2016, the Board ordered an IPR with respect to the
`
`following grounds of unpatentability:
`
`(1) Whether claims 1 and 5-7 are unpatentable under § 102(b) as anticipated
`
`by Lieberman93;
`
`(2) Whether claims 1 and 5-7 are unpatentable under § 102(b) as anticipated
`
`by Lieberman94;
`
`(3) Whether claims 1 and 5-7 are unpatentable under § 103(a) as obvious
`
`over the combination of Lieberman93 and Dible;
`
`(4) Whether claims 1 and 5-7 are unpatentable under § 103(a) as obvious
`
`over the combination of Lieberman94 and Dible;
`
`(5) Whether claim 4 is unpatentable under § 103(a) as obvious over the
`
`combination of Lieberman93 and Collins
`
`(6) Whether claim 4 is unpatentable under § 103(a) as obvious over the
`
`combination of Lieberman93, Dible and Collins;
`
`(7) Whether claim 4 is unpatentable under § 103(a) as obvious over the
`
`combination of Lieberman94 and Collins; and
`
`(8) Whether claim 4 is unpatentable under § 103(a) as obvious over the
`
`combination of Lieberman94, Dible and Collins.
`
`Flamm argues that Lieberman does not teach "an inductive coupling
`
`9885502
`
`
`- 1 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`structure in which a phase portion and an anti -phase portion of capacitive currents
`
`coupled from the inductive coupling structure are selectively balanced; wherein
`
`said inductive coupling structure is adjusted using a wave adjustment circuit" as
`
`recited in claim 1. Under Federal Circuit law, "[a] claim is anticipated only if each
`
`and every element as set forth in the claim is found, either expressly or inherently
`
`described, in a single prior art reference." Verdegaal Bros. v. Union Oil Co. of
`
`California, 814 F.2d 628, 631 (Fed. Cir. 1987).
`
`For independent claim 1, Flamm argues that Lieberman's capacitive currents
`
`are not the same as the capacitive currents in the '221 patent. Flamm points to the
`
`Lieberman disclosure that the maximum coil-to-plasma voltage is reduced by a
`
`factor of two and argues that Lieberman is only concerned with the magnitude of
`
`the capacitive current. But Flamm ignores that Lieberman teaches that the
`
`capacitive current reduction places a virtual ground in the middle of the coil and
`
`thereby reduces the capacitive currents.
`
`
`
`Flamm argues that the petition misconstrues "selectively balanced" by
`
`ignoring the word "selectively" and only focusing on the word "balanced." But,
`
`Flamm admits that "selectively balanced" is a broad term and includes any
`
`substantial change to the inductive coupling structure that impacts the capacitively
`
`coupled currents. Flamm argues that Lieberman teaches a conventional balanced
`
`magnetic transformer that is not a balun and cannot adjust to selectively balance.
`
`9885502
`
`
`- 2 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`However, Flamm admits that there are known balun magnetic transformers, e.g.,
`
`the Ruthroff Balun Transformer, which are suitable for RF frequencies up to 1.5
`
`GHz. Flamm's own testimony supports that a PHOSITA would understand that the
`
`core of a flux coupled balun transformer that operates in the practical frequency
`
`range of 20 hertz to 1 gigahertz would be made of suitable known material for the
`
`RF power application.
`
`Dr. Cecchi's testimony confirms these findings. In particular, Dr. Cecchi
`
`opines that a PHOSITA would know that the Lieberman balanced transformer core
`
`would need to be made of suitable material for the RF power application. Dr.
`
`Cecchi further opines that it is well within the skill of a PHOSITA based upon
`
`Lieberman's teachings to construct a balanced transformer suitable to adjust the
`
`phase portion and the anti-phase portion of the capacitively coupled currents.
`
`Dr. Cecchi's opinions should be credited and Flamm statements in his
`
`opinion should be given little weight for two reasons. First, Dr. Cecchi provides an
`
`opinion that is underpinned with objective evidence and scientific explanations. In
`
`contrast, Flamm's opinions provide only bald statements without any such
`
`underpinning. Second, Flamm has reason to be biased. During cross examination,
`
`Flamm admits that he is the sole inventor and sole owner of the '221 patent. Ex.
`
`1021, 17:2-7. Flamm admits that he worked as a consultant and an expert on many
`
`litigation cases. See e.g. Id., 9:11-10:16. Also, Flamm admits that he is a patent
`
`9885502
`
`
`- 3 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`attorney with prosecution experience. See e.g. Id., 10:14-15 . Finally, Flamm
`
`stands to gain large monetary sums contingent upon the outcome of this IPR.
`
`Complaint, Daniel L. Flamm, Sc.D. v. Samsung Electronics Co., LTD et al., No.
`
`1:15-cv-00613 (W.D. Tex. July 21, 2015); Complaint, Daniel L. Flamm, Sc.D. v.
`
`Global Foundries U.S., Inc., No. 5:16-cv-01578 (N.D. Cal. April 22, 2016);
`
`Complaint, Daniel L. Flamm, Sc.D. v. Intel Corp., No. 5:16-cv-01579 (N.D. Cal.
`
`April 22, 2016); Complaint, Daniel L. Flamm, Sc.D. v. Maxim Integrated
`
`Products, Inc., No. 5:16-cv-01580 (N.D. Cal. April 22, 2016); Complaint, Daniel
`
`L. Flamm, Sc.D. v. Micron Tech., Inc., No. 5:16-cv-01581 (N.D. Cal. April 22,
`
`2016).
`
`II. THE CHALLENGED CLAIMS ARE UNPATENTABLE
`A. Ground 1 and Ground 2: Claim 1 is Anticipated By Lieberman93
`and Lieberman 94 Under § 102(b)
`
`The petition shows that Lieberman93 and Lieberman 94 ("Lieberman")
`
`teach an inductive coupling structure in which a phase portion and anti-phase
`
`portion of the capacitive currents coupled from the inductive coupling structure are
`
`selectively balanced. See Pet., 24-27. Lieberman teaches "two exciting coil
`
`configurations, cylindrical and planar . . . shown in Fig. 25," where "[t]he planar
`
`coil is a flat helix wound from near the axis to near the outer radius of the source
`
`chamber," and further describes that "[p]lanar and cylindrical coils can also be
`
`united to give 'cylindrical cap' or 'hemispherical' coil shapes." Ex. 1002, 23; Ex.
`
`9885502
`
`
`- 4 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`1012, 52; Ex. 1007, ¶ 70. Lieberman teaches that the inductive "coil can be driven
`
`push-pull using a balanced transformer." Ex. 1002, 23; Ex. 1012, 53; Ex. 1007,
`
`¶ 71. Dr. Cecchi attests that a PHOSITA would understand the discussion of
`
`driving the inductive coil "push-pull" in Lieberman to correspond to the claimed
`
`"phase and an anti-phase portion of capacitive currents coupled from an inductive
`
`coupling structure" recited by claim 1. Ex. 1007, ¶ 71.
`
`Lieberman also teaches that a phase and an anti-phase portion are selectively
`
`balanced. Ex. 1002, 23; Ex. 1012, 53. Lieberman teaches that driving the coil
`
`"push-pull using a balanced transformer, . . . places a virtual ground in the middle
`
`of the coil." Ex. 1002, 23; Ex. 1012, 53. Dr. Cecchi attests that a PHOSITA
`
`would have understood that the virtual ground would provide substantially zero
`
`AC voltage at one point in the inductive coil, manifesting selective balancing of
`
`the phase and the anti-phase portions Ex. 1007. ¶ 72.
`
`1.
`
`The Petition Shows that Lieberman 93 and Lieberman 94
`Teach An Inductive Coupling Structure In Which A Phase
`Portion and An Anti-phase Portion of Capacitive Currents
`Are Selectively Balanced as per Claim 1
`
`The petition shows that Lieberman 93 and Lieberman 94 teach an inductive
`
`coupling structure in which a phase portion and an anti-phase portion of capacitive
`
`currents are selectively balanced as per claim 1. See Pet., 23-26, 28 ([1.c] and
`
`[1.d]). Lieberman teaches an inductive coupling. See, e.g., Ex. 1002, 23; Ex.
`
`1012, 52 ("The planar coil is a flat helix wound from near the axis to near the outer
`
`9885502
`
`
`- 5 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`radius of the source chamber ('electric stovetop' coil shape)."). Lieberman teaches
`
`the phase portion and the anti-phase portion of capacitive currents are selectively
`
`balanced. See, e.g., Ex. 1002, 23; Ex. 1012, 53 ("The coil can be driven push-pull
`
`using a balanced transformer, which places a virtual ground in the middle of the
`
`coil and reduces the maximum coil-to-plasma voltage by a factor of two. This
`
`reduces the undesired capacitively coupled RF current flowing from coil to plasma
`
`by a factor of two.").
`
`Flamm argues that Lieberman's capacitive currents are not the same as the
`
`capacitive currents in the '221 patent. POR, 6. Flamm points to the Lieberman
`
`disclosure that the maximum coil-to-plasma voltage is reduced by a factor of two
`
`and argues that Lieberman is only concerned with the magnitude of the capacitive
`
`current. Id. But Flamm ignores that Lieberman teaches that the capacitive current
`
`reduction places a virtual ground in the middle of the coil and thereby reduces the
`
`phasor vector sum of the capacitive currents. See Pet., 24-26, 28 ([1.d]) and Ex.
`
`1022, ¶¶ 50-51.
`
`Dr. Cecchi's testimony confirms these findings. In particular, Dr. Cecchi
`
`opines that a PHOSITA would understand the discussion of driving the inductive
`
`coil "push-pull" in Lieberman to correspond to the claimed "phase and an anti-
`
`phase portion of capacitive currents coupled from an inductive coupling structure"
`
`recited by claim 1. See Ex. 1007, ¶¶ 71-72. Dr. Cecchi opines that a PHOSITA
`
`9885502
`
`
`- 6 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`would understand that the discussion of driving the inductive coil "push-pull" via a
`
`balancing transformer with a virtual ground in the center of the coil in Lieberman
`
`describes the balancing of the phase and the anti-phase portion of capacitive
`
`currents coupled from an inductive coupling structure, just as the specification of
`
`the '221 patent describes how "[p]ower transfer can be occurred with a balanced
`
`feed such as an inductively-coupled push-pull arrangement," noting that, "[p]ush-
`
`pull balanced coupling ignites the plasma more easily than conventional
`
`unbalanced coil tap matching and generally is easier to adjust in selected
`
`applications." Ex. 1001, 16:18-45; see also Ex. 1007, ¶¶ 71. Flamm has not
`
`submitted any expert testimony (as opposed to attorney argument) to the contrary.
`
`Next, Flamm argues that Lieberman merely addresses lowering the
`
`magnitude of a current that flows in a closed path within the plasma source by
`
`itself (e.g., coil to plasma and return). POR, 6. This is only attorney argument and
`
`should not be given any weight. Flamm provides no cite to Lieberman for support
`
`for this argument. It is further telling that Flamm has not submitted any expert
`
`testimony to underpin this argument.
`
`Dr. Cecchi's opinion demonstrates how a PHOSITA would understand that
`
`Lieberman teaches balancing the total phasor vector sum of the phase and anti-
`
`phase capacitive current coupled from the inductive circuit. Ex. 1022, ¶¶ 50-51.
`
`9885502
`
`
`- 7 -
`
`
`
`

`
`
`
`
` Case IPR2015-01767
`
`
` U.S. Patent No. 6,017,221
`
`
`In contrast, Flamm simply provides a bald statement that Lieberman teaches
`
`a configuration that is useful to reduce the magnitude of voltage between the coil
`
`and plasma, and the magnitude of a capacitive current. Ex 2001, ¶ 22. Dr.
`
`Cecchi's opinion should be credited and Flamm's statement should be given little
`
`weight for two reasons. First, Dr. Cecchi provides an opinion that is underpinned
`
`with objective evidence and scientific explanations. In contrast, Flamm's bald
`
`statements are without any such underpinning. Second, as shown above, the
`
`objective evidence shows that Flamm has reason to be biased.
`
`2.
`
`The Petition Shows that Lieberman 93 and Lieberman 94
`Teach Selectively Balanced as per Claim 1
`
`Flamm argues that the Petition misconstrues "selectively balanced" by
`
`ignoring the word "selectively" and only focusing on the word "balanced." POR,
`
`15. However, when crossed examined, Flamm admits that the claim term,
`
`"selectively balanced" is a broad term that includes a large range of inductive
`
`coupling structures that provide varying degrees of balance of the phase portion
`
`and anti-phase portion of the coupled capacitive currents.
`
`
`
`Flamm admits that an inductive coupling structure is selectively balanced
`
`when the phase portion and the anti-phase portion of the coupled capacitive
`
`currents are as little as 10 percent balanced.
`
`Q
`
`--it would appear then, when you say 10 percent balanced, that
`
`that would be covered --
`
`9885502
`
`
`- 8 -
`
`
`
`

`
`
`
`
` Case IPR2015-01767
`
`
` U.S. Patent No. 6,017,221
`
`
`That would probably be within the bounds of – with selecting a
`
`A
`
`10 percent balance would probably be within the bounds.
`
`Ex. 1021, 197:4-8.
`
`
`
`Flamm admits that an inductive coupling structure is selectively balanced
`
`when the phase portion and the anti-phase portion of the coupled capacitive
`
`currents are substantially balanced, within the range from 10 percent balanced to
`
`something less than 100 percent balanced. Id., 197:7- 198:20 (e.g. "selecting a 10
`
`percent balance would probably be within the bounds" and "when you say 10
`
`percent, it strikes me that ... to be within the scope …"). In sum, Flamm admits
`
`that "selectively balanced" is a broad term and includes any substantial change to
`
`the inductive coupling structure that impacts the capacitively coupled currents.
`
`
`
`Flamm then argues that Lieberman's inductive coupling structure is not
`
`selectively balanced because Lieberman teaches that the balanced transformer
`
`reduces the undesired capacitively coupled current by a factor of two. This
`
`argument should be rejected.
`
`
`
`First, Flamm ignores the broad scope of the claim term, "selectively
`
`balanced." Even if Lieberman's statement, ("[t]his reduces the undesired
`
`capacitively coupled rf current by a factor of two.") could be viewed as not solving
`
`the problem because Lieberman does not eliminate the undesired currents (it is
`
`does not), Lieberman's inductive coupling structure would still meet the scope of
`
`9885502
`
`
`- 9 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`the claim term, "selectively balanced", because Lieberman's inductive coupling
`
`structure would provide a range of balancing within the large range admitted by
`
`Flamm. Dr Cecchi opines that a PHOSITA would understand that Lieberman's
`
`inductive coupling structure would balance the phase portion and the anti-phase
`
`portion of the coupled capacitive currents as required by the scope of the claim.
`
`Ex. 1022, ¶¶ 50-51.
`
`Second, the petition shows that Lieberman teaches that a phase and an anti-
`
`phase portion are selectively balanced. See Pet., 24-26, 28 ([1.d]). Moreover,
`
`Lieberman teaches that driving the coil "push-pull using a balanced transformer, . .
`
`. places a virtual ground in the middle of the coil." Ex. 1002, 23; Ex. 1012, 53.
`
`Dr. Cecchi attests that a PHOSITA would have understood that by selecting a
`
`virtual ground, where there would be substantially zero AC voltage at one point in
`
`the inductive coil, the capacitively coupled currents would be reduced or
`
`substantially eliminated, manifesting a selective balancing of the phase and the
`
`anti-phase portions. Ex. 1022, ¶¶ 50-51 and see Ex. 1007, ¶ 72.
`
`Next, Flamm argues that Lieberman's statement (reduction by a factor of
`
`two) teaches away from selective balancing. See POR. 13. This a backdoor
`
`argument that the '221 patent claim 1 is limited to inductive coupling structures
`
`that substantially eliminate the phase and anti-phase portions of the capacitive
`
`currents. This argument should be rejected because as shown above Flamm admits
`
`9885502
`
`
`- 10 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`that "selectively balanced" as recited in the '221 patent claim 1 encompasses a
`
`wider range and is not limited to the complete elimination of the phase and anti-
`
`phase portions of the capacitive currents.
`
`Finally, Dr. Cecchi's opinions should be credited and Flamm's opinions
`
`should be given little weight for two reasons. First, Dr. Cecchi provides an opinion
`
`that is underpinned with objective evidence and scientific explanations. In
`
`contrast, Flamm provides only bald statements without any such underpinning.
`
`Second, as shown above, Flamm has reason to be biased.
`
`3.
`
`The Petition Shows that Lieberman 93 and Lieberman 94
`Teach A Wave Adjustment Circuit Adjusting The Phase
`Portion and The Anti-Phase Portion of Capacitively
`Coupled Currents as per Claim 1
`
`The petition shows that Lieberman teaches "said wave adjustment circuit
`
`adjusting the phase portion and anti-phase portion of the capacitively coupled
`
`currents," recited by claim 1. See Pet., 27-28. Lieberman states, "[t]he coil can be
`
`driven push-pull using a balanced transformer, which places a virtual ground in the
`
`middle of the coil . . . . [which] reduces the undesired capacitively coupled rf
`
`current flowing from the coil to plasma by a factor of two." Ex. 1002, 23; Ex.
`
`1012, 53. As Lieberman's balanced transformer results in "a virtual ground in the
`
`middle of the coil," it corresponds to the claimed "wave adjustment circuit" which
`
`adjusts "the phase and anti-phase portion of the capacitive current." Ex. 1002, 23;
`
`Ex. 1012, 53. The specification of the '221 patent confirms this in its description of
`
`9885502
`
`
`- 11 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`how "the wave adjustment circuits are adjusted to provide substantially zero AC
`
`voltage at one point on the inductive coil," such wave adjustment circuits including
`
`a "(balanced-unbalanced) toroidal transformer." Ex. 1001, 10:14-19, 16:28-30. Dr.
`
`Cecchi testimony confirms these findings as well. Ex. 1007, ¶¶ 73-76.
`
`Flamm criticizes the Board's decision to institute because the decision relies
`
`on the Petition that shows the '221 patent describes an embodiment that includes a
`
`wave adjustment circuit comprising a balun (balanced-unbalanced) toroidal
`
`transformer, where "the midpoint 406 between the phase 405 and anti-phase
`
`voltage on the coil is effectively rf grounded," and also uses push-pull balanced
`
`coupling, which Lieberman also teaches. See POR, 8-10. Flamm argues that
`
`Lieberman teaches a conventional balanced magnetic transformer that is not a
`
`balun. See POR, 8.
`
`When cross examined, Flamm admitted that the '221 patent does not disclose
`
`the internal structure of the balun transformer. See e.g. Ex. 1021, 43:23-24 ("the
`
`[Fig. 4] drawing does not show the structure of element 401.") Flamm admits that
`
`a PHOSITA would have to refer to an external reference such as the ARRL
`
`handbook to build the structure of element 401. See e.g. Id., 50:14-23. Flamm
`
`admits that the '221 patent Figure 4 does not convey enough information to
`
`construct element 401. Id., 50:25-51:3. Flamm admits that such structures are
`
`known prior art. See e.g. Id., 51:4-52:3 ("To construct the actual equipment, the
`
`9885502
`
`
`- 12 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`person of ordinary skill in the art would know … baluns, I myself did when I was
`
`as young as maybe 16 years old, because I was a radio ham."). Flamm admits that
`
`balun is a class of structures. See e.g. Id., 55:18-19.
`
`During cross examination, Flamm was presented with Ex. 1016 that shows a
`
`flux coupled transformer, the Ruthroff Balun Transformer, and discloses that the
`
`Ruthroff Balun Transformer is suitable for RF frequency up to 1.5 GHz. See Ex.
`
`1016, 1 and Figs. 1a-1c. The following testimony followed:
`
`Q Do you agree that Figure 1Aand Figure 1C then show a balun
`
`transformer.
`
`A I think I can agree with that.
`
`Ex. 1021, 159:24-160:1.
`
`In addition, Flamm was presented with page 6 of Ex. 1024 and was asked to
`
`read the first two sentences:
`
`"The most common type of balun by volume is the flux coupled
`
`balun transformer. This is a balun created by winding two
`
`separate wires around a magnetic core (the same as any
`
`transformer) and grounding one side of the primary winding."
`
`Ex. 1021, 97:21-98:2. Flamm was then asked: "In view of what you read,
`
`would you agree that a balun transformer can be made from a transformer, as long
`
`as the core is not iron, but ferrite?", and refuses to answer the question and only
`
`9885502
`
`
`- 13 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`gives evasive answers. See e.g. Id., 98:3-99:12. During the deposition, Flamm
`
`was directed to the table on page 9 of Ex. 1024 that discloses that flux coupled
`
`balun transformer have a practical frequency range of 20 hertz to 1 gigahertz. Ex.
`
`1021, 107:8-17. The following was asked and answered:
`
`Q Is there any reason to believe that you couldn't construct the
`
`flux coupled balun transformer as shown in Figure 4 to be in
`
`the practical range of 20 hertz to 1 gigahertz as shown in the
`
`table on page 9?
`
`A So I'm not clear on the meaning of your question. So, could
`
`you construct a transformer that resembles what's depicted in
`
`the figure, or could you construct a device to be more accurate?
`
`Yes, I think you could construct a device such as is shown in
`
`the figure.
`
`Id., 108:1-12. Flamm states that a flux coupled balun transformer that
`
`operates in the practical frequency range of 20 hertz to 1 gigahertz is not operable
`
`for high-power applications assuming that the transformer has a ferrite or iron rod
`
`core. See e.g. Id., 110:9-110:2. But Flamm earlier in the deposition attests that a
`
`PHOSITA would understand that the core of the balun transformer, element 40, of
`
`the '221 patent is a ferrite material such as powdered iron. Id., 80:19-21. Flamm's
`
`own testimony supports that a PHOSITA would understand that the core of a flux
`
`9885502
`
`
`- 14 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`coupled balun transformer that operates in the practical frequency range of 20 hertz
`
`to 1 gigahertz would be made of suitable known material for the RF power
`
`application.
`
`
`
`Dr. Cecchi's testimony confirms these findings. In particular, Dr. Cecchi
`
`opines that a PHOSITA would know that Lieberman's balanced transformer core
`
`would need to be made of material for the RF power application. See Ex. 1022, ¶
`
`52. Dr. Cecchi opines that it is well within the skill of a PHOSITA based upon
`
`Lieberman's teachings to construct a balanced transformer suitable to adjust the
`
`phase portion and the anti-phase portion of the capacitively coupled currents. Id.
`
`
`
`Moreover, Lieberman teaches that the Lieberman balanced transformer
`
`operates in a push–pull arrangement, just as the '221 patent transformer, element
`
`401, shown in Figure 4. Under cross examination, Flamm first attests that
`
`transformer 401 is not a push-pull arrangement. Ex. 1021, 40:10-13. But later
`
`when confronted with the disclosure found in column 16, lines 18-20 of the '221
`
`patent specification, Flamm admits that the transformer is a push-pull arrangement.
`
`Id. at 48:10-49:25. Dr. Cecchi agrees that the transformer, element 401, shown in
`
`Figure 4 of the '221 patent operates as a push-pull arrangement. Ex. 1007, ¶ 71.
`
`Dr. Cecchi opines that the Lieberman balanced transformer operates in the push-
`
`pull arrangement just as the '221 patent transformer 401. Id. Moreover, Dr.
`
`Cecchi opines that the Lieberman balanced transformer accomplishes selective
`
`9885502
`
`
`- 15 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`balancing of the phase and the anti-phase portions of the capacitively coupled
`
`currents and thereby, teaches "the wave adjustment circuit." Id., ¶¶ 72-73.
`
`
`
`Flamm argues that the Lieberman balanced transformer does not adjust
`
`anything because the secondary windings of Lieberman's balanced transformer is
`
`not grounded. POR, 7. During the deposition, Flamm admits that the '221 patent
`
`transformer 401 does not show a ground. Ex. 1021, 67: 6-7. Flamm admits that a
`
`PHOSITA would know how the '221 patent transformer 401 is to be grounded. Id.,
`
`67:10-13. During cross examination, Flamm was presented with Exhibits 1016
`
`and 1024 which show that balun transformers are commonly made by grounding
`
`the center tap of the secondary windings of a flux coupled transformer (Ex. 1016, 1
`
`and Fig. 1c; Ex. 1024, 6 and Fig. 4). See Ex. 1021, 156:24-25, 159:7-23, 97:6-8,
`
`97:21-98:2 and 100:6-18. In particular, it was pointed out that Figure 1c in Ex.
`
`1016 shows a grounding of the center tap. See Id., 159:22-23. Moreover, it was
`
`pointed out that Ex. 1024 teaches that in the middle of the secondary winding of
`
`the flux coupled balun transformer, a virtual ground exists and connecting this
`
`point to ground can improve the balance of the output. See Id., 102:18-22. When
`
`asked if this is technically correct, Flamm admits that this is technically correct.
`
`Ex. Id., 102:23- 103:1. Dr. Cecchi agrees with Flamm that Exhibit 1016 and 1024
`
`show a balun flux transformer with the center tap grounded on the secondary. Ex.
`
`9885502
`
`
`- 16 -
`
`
`
`

`
` Case IPR2015-01767
`
`
`
` U.S. Patent No. 6,017,221
`
`
`
`1022, ¶ 53. Dr. Cecchi opines that Exhibits 1016 and 1024 show the skill of a
`
`PHOSITA at the time of the '221 patent filing. Id.
`
`
`
`Neither Flamm nor his counsel objected to Exhibits 1016 and 1024 at the
`
`deposition. During the deposition, Flamm did not dispute that these exhibits show
`
`the background knowledge that a skilled artisan would have possessed at the time
`
`of the '221 patent filing. It is proper for the Board to consider evidence that shows
`
`the background understanding of a skilled artisan even if the evidence was not
`
`identified at the petition stage. See e.g. Ariosa Diagnostics v. Verinata Health, Inc.
`
`Slip Op 2015-1215 and 1226 at page 11.
`
`
`
`Moreover, further evidence confirms that just as a PHOSITA would know
`
`how to build the '221 patent transformer 401 shown in Figure 4, a PHOSITA
`
`would know how to build Lieberman's balanced transformer. First, the definition
`
`of a balanced transformer is: 1."push-pull transformer" and 2. an "output
`
`transformer with a grounde

This document is available on Docket Alarm but you must sign up to view it.


Or .

Accessing this document will incur an additional charge of $.

After purchase, you can access this document again without charge.

Accept $ Charge
throbber

Still Working On It

This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.

Give it another minute or two to complete, and then try the refresh button.

throbber

A few More Minutes ... Still Working

It can take up to 5 minutes for us to download a document if the court servers are running slowly.

Thank you for your continued patience.

This document could not be displayed.

We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.

Your account does not support viewing this document.

You need a Paid Account to view this document. Click here to change your account type.

Your account does not support viewing this document.

Set your membership status to view this document.

With a Docket Alarm membership, you'll get a whole lot more, including:

  • Up-to-date information for this case.
  • Email alerts whenever there is an update.
  • Full text search for other cases.
  • Get email alerts whenever a new case matches your search.

Become a Member

One Moment Please

The filing “” is large (MB) and is being downloaded.

Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.

Your document is on its way!

If you do not receive the document in five minutes, contact support at support@docketalarm.com.

Sealed Document

We are unable to display this document, it may be under a court ordered seal.

If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.


Access Government Site

We are redirecting you
to a mobile optimized page.





Document Unreadable or Corrupt

Refresh this Document
Go to the Docket

We are unable to display this document.

Refresh this Document
Go to the Docket