5i19!2015
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`Titanium nitride - Wikipedia. the free encyclopedia
`
`Titanium nitride
`
`From Wikipedia, the free encyclopedia
`
`MIT EXHIBIT 2021
`
`IPR20l5—0l087
`
`Mi°“””~M‘T
`
`Titanium Nitride
`
`Titanium nitride (TiN) (sometimes known as “Tinite”
`or “TiNite” or “TiN”) is an extremely hard ceramic
`material, often used as a coating on titanium alloys,
`steel, carbide, and aluminium components to improve
`the substrate's surface properties.
`
`Applied as a thin coating, TiN is used to harden and
`protect cutting and sliding surfaces, for decorative
`purposes (due to its gold appearance), and as a non-
`toxic exterior for medical implants. In most
`
`applications a coating of less than 5 micrometres
`
`(0.00020 in) is applied.
`
`Contents
`
`1 Characteristics
`I
`' 2 Uses
`I 3 Fabrication
`
`I 4 Other commercial variants
`
`I 5 As a constituent in steel making
`I 6 References
`
`IUPAC name
`
`Titanium nitride
`
`Identifiers
`
`Egsistry
`Number
`
`25533‘20'4"
`
`EC number 247-117-5
`
`InChI
`JmO1_3D
`
`Image
`
`images
`
`(http://chemapps. stolaf. edu/jmol/jmol . php?
`
`Characteristics
`
`Summary of characteristicslllm
`
`I Vickers hardness 2400
`
`I Modulus of elasticity 251 GPa
`- Thermal conductivity 19.2 W/(m-°C)
`I Thermal expansion coefficient 9.35>< l0_6 K-1
`I Superconducting transition temperature 5.6 K
`I Magnetic susceptibility +38><10‘6 emu/mol
`
`by hot concentrated acids. ( Chemically stable at 20
`degrees Celsius, tested in laboratory. Reference states
`that the coating will be slowly attacked by
`concentrated acid solutions with rising temperatures.
`The book does not reference specific temperatures
`
`model=N%23%5BTi%5D)
`93091
`
`pubchem
`
`SMILES
`
`Properties
`
`Chemical
`
`TiN
`
`f0Fm111a
`Mo1ar mass 61.374 g/H101
`
`Appearance Coating of golden color
`
`Odor
`
`Odorless
`
`Density
`
`5.22 g/cm3
`
`point
`
`°c
`
`I0
`
`Solubility in insoluble
`Water
`
`crysta1
`
`Structure
`cubic, C133
`
`http:ilen.wikipedia.org‘wi|-cii’Titanium_nitride
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`5i19f2015
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`Titanium nitride - Wikipedia. the free encyclopedia
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`related to the increase of acidic corrosion, though the
`reference states that it is inert at 20 degrees Celsius.
`)[1]
`
`Structure
`Space group Fm§m, No. 225
`Coordination Octahedral
`geometry
`
`.
`.
`.
`Except where noted otherwise, data is given for
`materials in their standard state (at 25 °C (77 °F),
`100 kpa)
`
`TiN has infrared (IR) reflectivity properties, reflecting
`.
`t
`.
`.1
`t
`1
`t 1
`Id A
`h. h
`m_ a 396° rum Sm_n ar 0 6 emen a _gO
`( u)’ W 10
`gives it a yellowish color. Depending on the substrate
`material and surface finish, TiN will have a coefficient
`of friction ranging from 0.4 to 0.9 against another TiN
`surface (non-lubricated). The typical TiN formation
`has a crystal structure of NaCl-type with a roughly 1:1
`stoichiometry; however TiNX compounds with x ranging from 0.6 to 1.2 are thermodynamically stable.[3] A
`
`I verify (What is: J/X?)
`
`Infebex references
`
`thin film of titanium nitride was chilled to near absolute zero converting it into the first known
`superinsulator, with resistance suddenly increased by a factor of 100,000.[4]
`
`Uses
`
`A well-known use for TiN coating is for edge retention and corrosion resistance on machine tooling, such
`as drill bits and milling cutters, often improving their lifetime by a factor of three or more. (Please Cite
`http://vvww.tincoat.net/TiN.html, for drilling annealed 1018 tool life was increased 32 times, for milling
`tool life was increased 4 times.)
`
`Because of TiN's metallic gold color, it is used to coat costume jewelry and automotive trim for decorative
`purposes. TiN is also widely used as a top-layer coating, usually with nickel (Ni) or chromium (Cr) plated
`substrates, on consumer plumbing fixtures and door hardware. As a coating it is used in aerospace and
`military applications and to protect the sliding surfaces of suspension forks of bicycles and motorcycles as
`well as the shock shafts of radio controlled cars. TiN is non-toxic, meets FDA guidelines and has seen use
`in medical devices such as scalpel blades and orthopedic bone saw blades where sharpness and edge
`retention are important.[5] TiN coatings have also been used in implanted prostheses (especially hip
`replacement implants) and other medical implants.
`
`Though less visible, thin films of TiN are also used in microelectronics, where they serve as a conductive
`barrier between the active device and the metal contacts used to operate the circuit. The film blocks the
`diffusion of metal of the conductor into the silicon, but it is conductive enough (30-70 ufl-cm) to allow a
`good electrical connection. In this context, TiN is classified as a "barrier metal", even though it is clearly a
`ceramic from the perspective of chemistry or mechanical behavior. Recent chip design in the 45 nm
`technology and beyond also makes use of TiN as a metal material for improved transistor performance. In
`combination with gate dielectrics (e. g. HfSiO) that have a higher permittivity compared to standard SiO2
`
`the gate length can be scaled down with low leakage, higher drive current and the same or better threshold
`voltage.[6]
`
`Due to their high biostability, TiN layers may also be used as electrodes in bioelectronic applications [7] like
`in intelligent implants or in-vivo biosensors that have to withstand the severe corrosion caused by the body
`fluid. TiN electrodes have already been applied in the subretinal prosthesis project [8] as well as in
`biomedical microelectromechanical systems (BioMEMS).[9]
`
`http:ilen.wi kipedia.orgr'wi I-(UT itani um_nitride
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`5i'19i'2015
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`Titanium nitride - Wikipedia, the free encyclopedia
`
`Fabrication
`
`The most common methods of TiN thin film creation are physical vapor deposition (PVD, usually sputter
`deposition, cathodic arc deposition or electron beam heating) and chemical vapor deposition (CVD).[10] In
`both methods, pure titanium is Sublimated and reacted with nitrogen in a high-energy, vacuum environment.
`TiN film may also be produced on Ti workpieces by reactive growth (for example, annealing) in a nitrogen
`atmosphere. PVD is preferred for steel parts because the deposition temperatures exceeds the austenitizing
`temperature of steel. TiN layers are also sputtered on a variety of higher melting point materials such as
`stainless steels, titanium and titanium alloys.[1 1] Its high Young's modulus (values between 450 and 5 90
`GPa have been reported in the literature U21) means that thick coatings tend to flake away, making them
`much less durable than thin ones. Titanium nitride coatings can also be deposited by thermal spraying
`whereas TiN powders are produced by nitridation of titanium with nitrogen or ammonia at 1200 °C.[1]
`
`Bulk ceramic objects can be fabricated by packing powdered metallic titanium into the desired shape,
`compressing it to the proper density, then igniting it in an atmosphere of pure nitrogen. The heat released by
`the chemical reaction between the metal and gas is sufficient to sinter the nitride reaction product into a
`hard, finished item. See powder metallurgy.
`
`Other commercial variants
`
`There are several commercially-used variants of TiN that have been developed in the past decade, such as
`titanium carbon nitride (TiCN), titanium aluminium nitride (TiAlN or AlTiN), and titanium aluminum
`carbon nitride, which may be used individually or in alternating layers with TiN. These coatings offer
`similar or superior enhancements in corrosion resistance and hardness, and additional colors ranging from
`light gray to nearly black, to a dark iridescent bluish-purple depending on the exact process of application.
`These coatings are becoming common on sporting goods, particularly knives and handguns, where they are
`used for both cosmetic and functional reasons.[13]
`
`As a constituent in steel making
`
`Titanium nitride is also produced intentionally within some steels by judicious addition
`of titanium to the alloy. TiN forms at very high temperatures because of its very low
`enthalpy of formation, and even nucleates directly from the melt in secondary
`steelmaking. It forms discrete, micrometre-sized cubic particles at grain boundaries
`and triple points, and prevents grain growth by Ostwald ripening up to very high
`homologous temperatures. Titanium nitride has the lowest solubility product of any
`metal nitride or carbide in austenite, a useful attribute in microalloyed steel formulas.
`
`References
`
`http:ilI'en.wi kipediaorg.-‘wi I-tiff ilani um_nitride
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`3.r'6
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`5"19f'2015
`
`Titarium nitride - Wikipedia, the free encyclopedia
`
`
`
`TiN-coated drill
`
`bit
`
`Dark gray TiCN
`
`coating on a
`Gerber
`
`pocketknife
`
`mp:h'en.wikipedia.org.'wiki!Tilarium_rni1Iide
`
`

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`5i'19i'2015
`
`Titanium nitride - Wikipedia, the free encyclopedia
`
`
`
`Titanium nitride (TiN) coated
`
`punches using cathodic arc deposition
`
`technique
`
`
`
`A knife with a titanium oxynitride
`
`coating
`
`. Hugh 0. Pierson (1996). Handbook of refractory carbides and
`nitrides: properties, characteristics, processing, and applications
`(http://books . google. com/?id=pbt-RWodmVAC&pg=PA1 93).
`William Andrew. p. 193. ISBN 0-8155-1392-5.
`Stone, D. S.; K. B. Yoder; W. D. Sproul (1991). "Hardness and
`elastic modulus of TiN based on continuous indentation technique
`and new correlation". Journal of Vacuum Science and TechnologyA 9
`(4): 2543-2547. doi:l0. 1116/1.577270
`(https://dx.doi.org/10.1 1 16%2F 1 . 577270).
`Toth, L.E. (1971). Transition Metal Carbides and Nitrides. New
`York: Academic Press. ISBN 0-12-695950-1.
`
`"Newly discovered 'superinsulators' promise to transform materials
`research, electronics design"
`(http://wvvw.physorg. com/news 126797387. html). Phys0rg. com.
`2008-04-07.
`
`"Products" (http://www.ionfusion.com). IonFusion Surgical.
`Retrieved 2009-06-25.
`
`Dziura, Thaddeus G.; Benjamin Bunday; Casey Smith; Muhammad
`M. Hussain; Rusty Harris; Xiafang Zhang; Jimmy M. Price (2008).
`"Measurement of high-k and metal film thickness on FinFET
`sidewalls using scatterometry". Proceedings of SPIE (International
`Society for Optical Engineering) 6922 (2): 69220V.
`doi: 10. 1117/12.773593 (https://dx.doi.org/10. 1 1 17%2F 12.773593).
`M. Birkholz, K.-E. Ehwald, D. Wolansky, I. Costina, C. Baristyran-
`Kaynak, M. Frohlich, H. Beyer, A. Kapp, F. Lisdat (2010).
`"Corrosion-resistant metal layers from a CMOS process for
`bioelectronic applications"
`(http://wvvw.researchgate.net/profile/Mario_Birkholz/publication/230
`817001_Corrosion-
`resistant_metal_layers_from_a_CMOS_process_for_bioelectronic_ap
`plications/file/ea85e52dfb001d07b5.pdf) (PDF). Surf Coat. Technol.
`204 (12-13): 2055-2059. doi:10.1016/j.surfcoat.2009.09.075
`(https://dx.doi.org/10. 1016%2Fj . surfcoat.2009.09.075).
`H. Hammerle, K. Kobuch, K. Kohler, W. Nisch, H. Sachs, M.
`
`Stelzle, (2002). "Biostability of micro-photodiode arrays for
`subretinal implantation". Biomat. 23 (3): 797-804.
`doi:10.1016/S0142-96l2(01)00185-5
`(https://dx.doi.org/10.1016%2FSO142-9612%2801%2900185-5).
`M. Birkholz, K.-E. Ehwald, P. Kulse, J. Drews, M. Frohlich, U.
`
`Haak, M. Kaynak, E. Matthus, K. Schulz, D. Wolansky (2011).
`lITT1¢_...¢1__'__ 'T‘_'\T ___ .____L_...._-....
`....
`.. ¢....I__.._1 ,.,_. ._I...¢.£‘...._-_ L‘... f‘11\ lff\('1
`
`http:ilI'en.wikipediaorg.-‘wikii'Titanium_nitride
`
`

`
`5-'19r'2015
`
`Titarium nitride- Wikipedia. the-free encyclopedia
`" UlIl'aIl'lll'l 111V 1'I1Cl'l'lDT'cll'lCS E13 '61 ICCl'll'lOlOgy pl'clIIOI1'I1 IOT k,lVllJD-
`
`integrated MEMS and BioMEMS devices"
`(https://wvvw.researchgate.net/profile/Mario_Birkholz/publication/229
`602874_Ultrathin_TiN_Membranes_as_a_Technology_Platform_for_
`CMOSIntegrated_MEMS_and_BioMEMS_Devices/file/ef3 l752dd8b
`34a9bed.pdf) (PDF). Adv. Func. Mat. 21 (9): 1652-1654.
`doi: 10. 1002/adfm.201002062
`
`(https://dx.doi. org/10. l002%2Fadfm.201002062).
`10. "Wear Coatings for Industrial Products" (http://wvvw. diffusion-
`alloys.com/our-services/wear-coatings-for-industrial-products/).
`Diffusion Alloys Limited. Retrieved 2013-06-14.
`11. "Coatings" (http://coatingservicesgroup.com/coatings). Coating
`Services Group, LLC. Retrieved 2009-06-25.
`12. G. Abadias, (2008). "Stress and preferred orientation in nitride based
`PVD coatings". Surf Coat. Technol. 202 (11): 2223-2235.
`doi: 10. 1016/j.surfcoat.2007.08.029
`(https://dx.doi. org/l0. 10 1 6%2Fj . surfcoat.2007.08.029).
`13. "Product Development" (http://coatingservicesgroup.corn/product-
`development). Coating Services Group, LLC. Retrieved 2009-06-25.
`
`Retrieved from "http://en.wikipedia.org/w/index.php?title=Titanium_nitride&oldid=652747544"
`
`Categories: Titanium compounds I Nitrides l Semiconductor device fabrication I Superhard materials
`
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