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`Dlac11881on 0JOUp8
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`Adlallse Hal8
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`Material: Silicon Dioxide (Si02), bulk
`
`To pun:hae MEMS-AIIated materlala, ~-. •pment, w*s, etc.,pl81111e1olslt the links section of the MEMSNet site.
`Value
`Property
`2187.7 kQIJn"3
`Density
`
`FW!reooe
`CRC Materials Sckn:e and &VIall~
`Handbook, p.53
`CRC Materials Science and &VIall~
`Handbook, p.$3
`CRC Meterlale Science and EIV,_I'G
`Handbook, p.588
`CRC Meten.lll Sc~ and &9..-ii'G
`Handbook, p.474
`CRC Meten.l& Sc~ a'ld EIQ.-ii'G
`Handbook, p.474
`CRC Meten.l& Sc~ a'ld EtQ.-ii'G
`Handbook, p.474
`CRC Materials Science a'ld EfV.-I"G
`Handbook, p.474
`CRC Material& Science a'ld E!Vra!II'G
`Handbook, p.474
`CRC Material& Science a'ld E!Vra!l~
`Handbook, p.2&4
`CRC Meterlall Selima n E!Vra!l~
`Handbook, p.2&4
`CRC Materials Sckn:e and &VIall~
`Handbook, p.2&4
`CRC Materlale Science and &VIall~
`Handbook, p.2&4
`CRC Materlale Science and &VIall~
`Handbook, p.2&4
`CRC Meten.ll Sc~ and &9..-ii'G
`Handbook, p.2a8
`CRC Meten.l& Sc~ a'ld EtQ.-ii'G
`Handbook, p.2a8
`CRC Meten.l& Sc~ a'ld EtQ.-ii'G
`Handbook, p.2a8
`CRC Materials Sckn:e and ErVra!l~
`Handbook, p.2a8
`CRC Material& Science a'ld E!Vra!II'G
`Handbook, p.289
`CRC Material& Science n E!Vra!l~
`Handbook, p.289
`CRC Material& Science n E!Vra!l~
`Handbook, p.2B9
`CRC Meterlall Selima n ErVra!l~
`Handbook, p.2B9
`CRC Materlale Sckn:e and &VIall~
`Handbook, p.2a8
`CRC Materlale Science and &VIall~
`Handbook, p.2a8
`CRC Meten.le Sc~ and &9..-ii'G
`Handbook, p.2a8
`CRC Meten.ll Sc~ and &9..-ii'G
`Handbook, p.2a8
`
`Density
`
`Ellldlleel 11111lathofty
`
`2201 ..
`2211 kQIJn"3
`1e+180<m
`
`Cadticne
`StaiJIIIZAid SI02,Gieae,al room
`tempnlln.
`Gleaa,at room tempemure
`
`Cer8mlc,et room tempel8!ure
`
`Hlldn ... ,Knoop(KH) 710~ 100g.Cer8mic,paralllll tD optical
`exis
`Hlldness,Knoop(KH) 790~ 1110g,Cer8mic,narmll tD optical
`lllda
`Hlldness,Vick-(VH) 1260~ 500g.Cer8mic,parallel tD optical
`lllds
`Hlldness,VIck-(VH) 1103~ 500g.Cer8mlc,narmal to optical
`lllds
`Hlldness,VIcke18(VH) 1120~ 500g.c.wn1c
`
`Th81111al conducthofty
`
`1.04WimiK
`
`Th81111al conducthofty
`
`1.26WimiK
`
`Th81111al conducthofty
`
`1.87WimiK
`
`Th81111al conducthofty
`
`2.08WimiK
`
`Tltennal conducthofty
`
`2.51WimiK
`
`Thlllllltd conductMty
`
`1.38WimiK
`
`ThiiiTI'III conductMty
`
`0.58WimiK
`
`ThiiiTI'III conductMty
`
`0.67WimiK
`
`c.wnlc,at lllmp=200 c.
`
`Canmlc,at lllmp=400 c.
`
`Canmlc,at lllmp=800 c.
`
`Canmlc,at lllmp=1200 c.
`
`Canmlc.et lllmp=1800 c.
`
`Gl••·• blmp=20 c.
`Gl881 et lllmp=80 c.
`
`Gl881,et lllmp=100 c.
`
`Tltennal conducthofty
`
`0.88WimiK
`
`Gleae,at lllmp=160 C.
`
`ThiiiTI'Ial conducthofty
`
`1.2BWimiK
`
`ThiiiTI'Ial conducthofty
`
`1.32WimiK
`
`Bass at lllmp-250 c.
`
`elase,at lllmp=273.1 c.
`
`Th81111al conducthofty
`
`1.36WimiK
`
`Gleae,at lllmp=300 C.
`
`Thennal conductllotty
`
`1.43WimiK
`
`Gleae,at lllmp=360 C.
`
`Tltennal conducthofty
`
`1.5Wim/K
`
`Gleae at tamp=400 C.
`
`Tltennal conducthofty
`
`U2WimiK
`
`Glea1,at lllmp=500 C.
`
`Thllllllel conductMty
`
`1.72WimiK
`
`Thlllllltd conductMty
`
`1.8Wim/K
`
`Gl••·• lllmp=800 c.
`
`Gl••·• lllmp=700 c.
`
`ltlpe'J'--IIWI'IIret.«DhnlllrlellslllccnciC!Iidatla:bJit
`
`112
`
`IPR2015-01087 - Ex. 1036
`Micron Technology, Inc., et al., Petitioners
`1
`
`
`
`411412015
`
`Material: Silicm Dimdde (Si02}, bulk
`
`TeriTII of Use 1 COntact Us 1 Seerch
`
`htlps:llwNN.mamsnat.ag/maiBrial/silicmdimddesio2bulkf
`
`2
`
`