UNITED S’Il-YI‘ES PATENT AND TRADEMARK OFFICE
`
`
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`
`
`3
`MACRONIX INTERNATIONAL CO., LTD. MACRONIX ASIA
`LIMI’I‘ED, MACRONIX (HONG KONG) CO., LTD. and MACRONIX
`AMERICA, INC.
`Petitioners
`
`v.
`
`SPANSION LLC
`
`Patent Owner
`
`
`
`Case No. IPR2014—00898
`
`Patent Number 7,151,027
`
`Before the HonorableDEBRA K. STEPHENSJUS'I‘IN '1'. ARBES, and
`RICHARD E. RICE, Admz‘zlz's/mflue Pate/Ifjlltgey.
`
`DECIARA’I‘ION OF BENJAMIN J. BARRETI'
`
`I, BENJAMIN J. BARRETT, hereby certify that the following is, to the
`
`best of my knowledge and belief, true and accurate:
`
`1.
`
`The document attached as Appendix A, “JI’2003078040(A) [Page 1],” is
`
`a true and accurate translation of the cover page of “JPZOO3078040(A)” (Copy
`
`attached as Appendix C) from Japanese into English.
`
`1
`
`Spansion Exhibit 2010
`Spansion Exhibit 2010
`Macronix et al v. Spansion
`Macronix et al v. Spansion
`IPR2014-00898
`IPR2014-00898
`Page 00001
`Page 00001
`
`

`

`2.
`
`The document attached as Appendix B, “]l’2003078040(A) [Paragraph
`
`0035],” is a true and accurate translation of paragraph 0035 of
`
`“jl’20030708040(r\)” (Appendix (I) fromjapanese into English.
`
`3.
`
`The Japanese term “I’D 73? < TE) I” in paragraph 0035 of
`
`“) l’2003078040(;\),” in the context in which it appears, should be accurately
`
`translated into English as “decrease,” as shown in Appendix B
`
`4.
`
`I have more than fifteen years of experience in translatingjapaiiese
`
`documents into English and more than fifteen years of experience in
`
`translatingjapanese patents and patent applications into English.
`
`I declare under penalty of perjury that the foregoing is true and correct.
`
`Executed on October 2, 2014 in La Conner, W'ashington.
`
`% N
`
`AA-‘lli
`ADDRESS
`
`BENJAMIN j BARRETT
`713 MAPLE S'l‘RElLT, LA CONNER, WA 98257
`
`2
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:21)
`Page 00002
`
`

`

`(19) Japan Patent Office (JP)
`
`(12) Japanese Unexamined Patent
`Application Publication (A)
`
`APPENDIX A
`
`(11) Japanese Unexamined Patent
`Application Publication Number
`2003–78040
`(P2003–78040A)
`(43) Publication date: March 14, 2003 (3.14.2003)
`Theme codes (reference)
`371
`5F083
`434
`5F101
`
` FI
`H01L
`
`
`
`29/78
`27/10
`
`Identification codes
`
`
`
`
`(51) Int. Cl.7
`H01L 21/8247
`
`
`27/115
`
`
`29/788
`
`
`29/792
`
`Request for examination: Not yet requested Number of claims: 22 OL (Total of 19 pages)
`
`(21) Application number
`
`Japanese Patent Application
`2001–263736 (P2001–
`263736)
`
`(71) Applicant
`
`(22) Filing date
`
`August 31, 2001 (8.31.2001)
`
`(72) Inventor
`
`
`
`
`
`(72) Inventor
`
`(74) Agent
`
`000005108
`Hitachi Co., Ltd.
`6 Kanda Surugadai 4-chome, Chiyoda-ku,
`Tokyo-to
`TSUKAMOTO, Keisuke
`c/o Hitachi Ltd. Device Development Center, 16-
`3 Shin-machi 6-chome, Ome-shi, Tokyo-to
`IKEDA, Yoshihiro
`c/o Hitachi Ltd. Device Development Center, 16-
`3 Shin-machi 6-chome, Ome-shi, Tokyo-to
`100080001
`Patent Attorney TSUTSUI, Yamato
`
`Continued on last page
`
`(54) [Title of the Invention] Semiconductor integrated circuit device and fabrication method therefor
`
`Memory cell formation region (MCFR)
`FIG. 1
`
`formation region(PCFR)
`
`Peripheral circuit
`
`(57) [Abstract]
`[Problem] To reduce defects and reduce leakage
`current in element formation regions in which memory
`cells of nonvolatile memory are formed.
`[Solution] The ends of element formation region Ac in
`which a nonvolatile memory cell is to be formed are
`extended to a length D using the region below a
`dummy conductive film DSG, thereby concentrating
`the stress applied
`from
`the
`insulation
`film 6
`surrounding the element formation region Ac into that
`extended region. As a result, defects do not extend to
`the region where the memory cell is to be formed, and
`the leakage current of the memory cell can be reduced.
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:22)
`
`

`

`APPENDIX B
`
`[0035] Furthermore, a dummy conductive film DSG,
`formed in the same layer as control electrode CG, is
`formed in the peripheral area of the memory array.
`This dummy conductive film DSG is formed in order
`to reduce the influence of impurities generated during
`memory cell formation, decrease the level difference
`between
`the memory formation region and
`the
`peripheral circuit formation region, and the like.
`
`– 2 –
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:23)
`
`

`

`(1932051112110 (1 p)
`
`(12) 9} fig 423 Eff £- fl (A)
`
`APPENDIX C
`APPENDIX C
`
`(nmwmwmfi
`1055200343040
`
`( P2003 —78040A)
`(43mm El 31152154? 3 H 14 El (20133.14)
`
`
`
`(511mm.T
`
`3311030
`
`H01L 21!8247
`
`27/115
`291733
`291792
`
`F I
`
`H011.
`
`29/78
`
`27/10
`
`1—va—Hfi)
`
`371
`
`4 3 4
`
`5F083
`
`5 F10 1
`
`
`
`Hm? 3km? 301123035122 01.. (g 19 H)
`
`(21) flifififi'
`
`$32001 — 263736£ P2001 —203736)
`
`(71) {flak 000005108
`
`(29111313
`
`315213403 8 H31 E (2001. 8. 31)
`
`
`
`flifiéfififlflflifi?
`
`fiflzflfifliflfilfifim'fima 6 w
`
`(72) £051? 3115 Eff
`
`Wfifi‘rfifiiflfi'ffilsfiflfl3 flit
`
`£4123 mamw Rflfit V503
`(nmaw 1111051
`5:11»:
`
`Wifififfliflfi‘rfilsfiflmli
`
`115$
`
`fifififlfif‘fififii’fi XM§~EV§VW
`UfiflfiA mmmm1
`
`#flj:
`
`1&5?-
`
`i211
`
`WERE <
`
`§
`
`mfiaygaewamqu
`
`
`
`
`
`
`E
`g
`*
`E
`
`WWW
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:24)
`Page 00005
`
`(54) [fiffiwfifi]
`
`$WE§E§E§3$UJEOJHJEEE
`
`wnlafil
`[0E]
`$fi%fif%0®fi%fltwflfifiénbfi
`$fififififl®kméfifié01D—fiamwfifiéfl
`
`a l
`
`fi&$fll $fifififi%0twfififiéfl5fi¥fi
`flfifiAcwfi%&.fii—fifififiDscmefifi
`éflerEéDEHWE¢5:kuxu\mmawfi
`Ltfifim\$¥fiflfifiAcéfiflfifififimgmb
`amnafi¢éfiao%wfi%\X%Ufi»%%mén
`bfifiififi1K%fifl@f1X%Utwwvh§%fi
`Efififéikflfiéba
`
`

`

`lfifififimfifll
`
`lfiflfill
`
`(a)¥§¢§fiifik%fiéht$¥
`
`[fififial
`MT,
`
`fiifisfifi®¥§¢$fififififififl
`
`fimfififikor\fififiuxorfifién.%1fifl
`ufififéfi¥fififim&\Wfifilmfimgfififi%
`
`fifi¥§¢$fi®fififim\é%u,
`(c)mfifi#®j%9tw&%nifimfiméhtfi
`
`zwfimuzmtfib.
`
`Eflfiéfib.
`
`(b)mfizaimi%fifififim$§fiufimént
`
`fifi®x%9twa\
`
`mfi$¥fifififim\mfifizfifiuflfifiéfifiga
`fifi®?§fiflfibrwa:a&%flefa¥§Wfifi
`
`(c)mfififiwi%9twéfiai5tfifiént§
`Efifik\&fifé¥fififififlfififififiof\
`
`mfi$%fimfifiu\mfl%2fimmfimfamflfifl
`
`Efififin
`
`Kfi$fi7l
`wr\
`
`fi$fi3$fi®¥fi¢$fififififififi
`
`fifimTivfiELrwéctéfiwaf饧wfifi
`
`
`Efififio
`
`lfi$fi2l
`
`fiifilfififl$§¢$fiflfi¥fimfi
`
`mr\
`
`fiflf%vtwfl\
`
`mfi¥$¢$mflfififiu\mfifi¥fim%é\fififi
`
`lmfifitfifitfi2®fiflfl3mtfiby
`mfismimi¥fiflfiwfib\fifimfi¥fifififim
`
`mfifizfimwfin\mwfi¥fifiamfiibmwzt
`
`Efifik?é¥fi¢fifi®%fifio
`
`(a)Wfi$¥fiflfimtm\filfififiéfiLrfifl
`éhtfilflfififiiutéfilgfik\
`
`[fiflfisl
`MTx
`
`fi$§7fifi®¥fiW$fififififimfl
`
`(b)fififilfifiim.%2fififiéfibffifiéh
`
`mfi$$¢fififlflfifim,ébu,
`
`tfi2fifififixflfibg2fififfiof\Wfifi2fi
`fitfiEf6%2fifia\
`
`(c)mfifizammmwwmafi¥fifififiufifié
`
`ntflfifififit\&fib\
`
`(c)Wfififi®;%utwéflnifimfiméht§
`
`Efifiéfib.
`
`mfififi%m\mfiflafifimefiméhrwéck
`
`éfifikfa$§¢fififlfifign
`
`mfififififiu.mfi%1fiiwfizfigfimxofié
`
`[fififigl
`
`(a)$§¢§fififit%fiéht$¥
`
`:a&fi&&¢6¥fi¢§fififififio
`
`(a)¥§¢§fi$fim%$$n\fi§
`[fiflfial
`fitiorgméhtfi¥fimfififbor.
`
`fimfifi?fiof.fifififliofflfiéh\%lfifl
`mfififéfi¥fiflfifi%‘mfifilwfimafifififi
`
`zwfimtsutfib\
`
`filfimmflfifafi%fififié.mfifilmfimkfi
`
`(b)mfisuiwfi¥fimfifi®§b\fifiwfi¥fi
`
`Emfizwfimtzfltfib\
`
`Wfi2mtmfi%fififimfia%fifib.Wfi%2fim
`
`fififiufiwfi¥fiflfifiw$ifimfifiantfifim
`}%U€W&\&fib.
`
`tfiflféfifi$£éfi¢bfi¥fimfifit\
`
`mfififiw$%fiflfifiimmfi%9twaLfflfif
`
`(b)mfifi¥fiflfifi®$fifiufifiéhtfifiwfi
`%Utwa.&fi¢6:&&%fiefa¥§¢fifififi
`
`6%%Dt»&%flb&w:&&fifitf饧$fifi
`E$§Eo
`
`
`fififi3$fi®¥fififififififififlfi
`
`¥%&fifl?bor\fififimxotafiéh\%lfi
`
`[fiifilol
`
`{a)¥§¢§fififimflfiéntfi
`
`fifio
`
`[fiflfi4l
`wt,
`
`mfi¥§¢§fififififiu.éat\
`
`flufififéfi¥fifififi&\mflfilmfifikfifik
`fi2®fifit3mifib.
`
`(c)mfififi®j%vtw&fiUi5KE&ént§
`Efifiéfib\
`
`(b)fifi$¥fiflfifiiuflfiéhtfi%ut»?®
`OT.
`
`mfi%fi%fi‘mafiafifimTufifiéhfwaca
`
`Efifikfé¥fiwfififlfififio
`
`(m)%1fififikfibffifiéht%1fiafifix
`Ufiéfilfifit.
`
`(a)¥$¢§fi§fitfifiéht$¥
`[fifififi]
`fifififif$of\fifififllofgfléh\%lfifi
`
`UHJWfifilafiLu\%2fi§E&fibrfifié
`htfi2§fifimibmafizfififibor.mfifi2
`
`KEE¢6$¥fifififié.Wfifilwfimkfifimfi
`zmfimt3atfib‘
`
`(b)mfiafltwfi%%flfifi®$fifimfimént
`
`fifi®fi%9twe.EET饥W$fiEfiEEv$
`O‘C‘.
`
`fifiufifif&%2¥fik~
`
`U%)flfi%2§fi®fiw®mfifi¥%mfimmfim
`ant$§fififia.&%nfi%9tw&fififib.
`
`mfismtw$¥fiflfifiwfib\fifi®$¥fimfifi
`i®}%vtwfi.fi%9tw&bffi%bfiw:k&
`
`mfiafltw$%%flfifl®5%.fiflw$¥fimfifi
`
`fifikfa¥fifi$fififififio
`
`wmfifi2fim®fifl\mw$¥fifififimfiibmw
`
`:aéfifikfé¥$¢$flfifi§fia
`
`lfiflfill]
`KEPT\
`
`fififiloflfim¥$¢$flfifififi
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:25)
`Page00006
`
`

`

`fifi¥fi¢$fififi§fiu\égu\
`
`mfi¥§¢$fiflfififim,éma
`
`(c)mfij%9twmifitfifléhtflfia\
`
`(c)fififi%9t»®i&flfifiéhtflfik\
`
`(d)fiflflfikfi%9tw&fififlfi§fi?étb
`
`(d)mfififikfi%9twéfififlflfifiTétw
`
`K\afix%9twm¥§¢fifitufiméhtfiafi
`%a‘%€L.
`
`K‘mfix%9twm¥§¢fifitu%méhtfiafi
`%a\éfib.
`
`Wfififl®$¥fifififitmfi.mfifififififififié
`
`Wfififimfi¥fififiitm\mflflgfififififiéfl
`
`hfwawzaéfifie¢é¥§¢fifififlfifio
`
`fwtw:t&%fik¢6$fi¢fifififififio
`
`[fiifi12]
`Kfiwf\
`
`fififilofifi®¥§¢$fififi§fi
`
`[fiifilsl
`mxwr‘
`
`fififileafim$§¢$fififififi
`
`mfififiwx%utww%2§fiu‘Wfl§fi®$%fi
`
`Wflfifimfi%9tw®%2flfifi‘mflfifi®$%fi
`
`flfifiémirfiELrwtw:&&fi@t¢6$§¢
`
`m%&&irfiflféfiwk\Lkwbwtfififitfi
`
`fiflfifififio
`[fiifilsl
`
`taiawc‘
`
`fiifilofifi®¥§fififififififi
`
`mfififiw$%fiflfléfiiTEELaw%2Efiwfi
`
`fltu.fi®%2¥fi®fl%ML%fififiéh6:aE
`
`fiéh.
`
`fiflfifimx%vtwmfizgfiu\mfififlmfi%fi
`
`fifikfb¥fi¢fiflfifififio
`
`fififi%flifflfifb$mt.Lfiwfiwkflfifiu
`fifiéhfwé:efififitfa¥$¢$fiflflfifio
`
`[fiflfilQ]
`Kifl‘f\
`
`fi$fi16$fi®¥fifififififififi
`
`[fififi14]
`mxwf.
`
`fififilsfifim¥$¢$fififififi
`
`fifi$$¢fififlfi§fifl,ébfi‘
`
`(c)fifififi®;%9tméfinifimfiméht§
`
`mfififiwfi%fiflfifi&airfiflLamfizfifiw
`
`Efifiéfib.
`
`fi%mm\fimfizafimméflb$fiflfiéflbck
`éfifikfé$§¢fifififififlu
`
`mfififi%m\mfiflafifimTflfiménrwbck
`
`éfifiafa$§¢fififlfififin
`
`lfiifi15]
`
`fififiQtL<fifififilOfifl®$
`
`[fififizol
`
`fi$fi1\2.4\6\8.15£l
`
`fififififi$§fim5wr‘
`
`mfl$§fififififififim.ébm~
`
`(c)mfi§fi®%%9twéfibifitfifiéntfi
`
`fififiéfib\
`
`Ulwafhm—Emifi®¥$#fififlfi§fimfi
`wr\
`
`mfififififiu\7n—?{V¢fifififié:t€fifi
`
`kT6¥§WfiEEE§Eo
`
`mfifi%fimfifiu‘mfifizfimmfififéfififig
`fifiwTETEELTwé:e&fifi&fb¥§¢fifi
`
`fififileOwhfhm~fitfifi
`lfififi21]
`m¥§¢fifififi§fiu£wr\
`
`E%%Eo
`
`mfi¥fiwfififlfififim‘
`
`(a)¥$#§fififitfiflén\fi
`lfififilfi]
`fifimxotgfiént$¥fififififi%ot.
`
`W$%%Utwfififléh6$¥%mfifiwfifit\E
`mfififififiéhéfl®$%fifififiéfib.
`
`%1$fififi§f5$¥%flfi&.mfifilmfimafi
`
`mfifi¥fifififiaflmi¥fifififiamfimm\WE
`
`EkfizmfimmsutfiL\
`
`fififififififa:t&fifi&¢é¥fi¢$fififlfi
`
`Wiautmfi¥fififimfi%%§fib\mfifizfifl
`
`En
`
`Kfififbfififl&éfifafi¥fimfifit‘
`
`(b)mfifi¥fiflfifiiufifiéntfi%9twfifi
`O'C‘
`
`(m)%1fififi&fibffifiéht%1fiflfifix
`Ukbfilafik.
`
`Hu)fifi%l§fitfl.%2fififi%fibffifié
`htfiZfiEfifiibfiafi2fifiTboT\flfifi2
`
`[fiifi22]
`1‘
`
`$§W$fififi§fiwflfifimv&o
`
`$§¢$¥flfifiéht¥§¢§fitmfififiéfiflf
`
`élfik‘
`
`WEfififiufififlkEfifikéfifibeflt,
`mfifififlfififififi®MEummfifififi&%fifb
`
`Ifit‘
`
`fimtfififéfizgfik.
`
`mfi¥$¢§fimmfi%éfiotfim.fififififlfi;
`
`HM)Wfl%2Efiwfiwmmfi$¥fimfimmfim
`ént¥§¢fifi£.&€bfi%vfifléfififib‘
`
`mfisutmfi%fiflfl®5E\fifi®$¥fimfimx
`%Utwfi\X%UtwébffifiL&WCtéfimk
`
`¢6$§¢fifififififio
`
`fiflfifimfififiéflbflflIEt\
`
`éfifézaafima¢5$§¢fifififififiwfifix
`
`Eu
`
`lfifimfimtfifil
`
`m001]
`
`[fififi17]
`uxwr\
`
`fififils$fiw¥fi¢$fififififi
`
`lfiwmfi?5fifififil$%%m\¥$mfiflfififi
`
`fifiifl%®flfifi%uwb\fifl\mfiwfi%fififi
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:26)
`Page00007
`
`

`

`fififififififiéht¥§¢fifififi¥fiflfimLTfi
`
`Tbififi.flevtwfififienomfiw$%fimfi
`
`fie&%m@¢eswceoo
`
`fiafiflt.$hfifi¢L%&k%fiEu¢+wo
`
`looofl
`
`[fiflwfifil¥fififififififififi\fifififififié
`htfi?%flfifl(7§§f7)wifififlfifléht
`
`$¥$flfimbfiéoC®$¥fififififitflifi\$
`$fi$fififilbfi®$¥fiflfifitfifiéh.:wfi
`
`[0010]:0;5&K%fi$bé&,x%utwm
`vayfifik$fifififit®fi$\y—xfifith
`
`4yfifia®mm\u—afimfiemcrcificée
`
`K\:wywaafifl‘tyx7yfmmfiafimtu
`
`fiotfifimm.$fittofciia
`
`$9$fififitflifl.$¥fiflfifififflfléhéo
`$¥fiflfi¥il§li filili ST 1 (Shel low Trench Is
`
`[0011]it‘mflbtiit\flfihfi¥fiflfi
`mime,Efi®fi%9twfi%méhfwétb\—
`
`MmmflfifiémwffifléhéuC®STIafl.$
`
`O®fi%vtwfimk%fiibtaLT%‘mflafi%
`
`fififififlfiflbtfiWtfifififlVU3Vfifi£®fi
`
`Dewafi—®%—fifitfifiénrw6#%Utw
`
`§\?AT$Etaotbifio
`l0012]$%%®amm\$¥emEfiWm$§w
`
`fifiwkwefifiéoothba
`
`[0013]it.$¥%®m®aflfi\$$%fififi
`mm¥fi¢§fi®kfiefifiéfibckmxvu—ya
`
`mmfifi&@a:&mb6u
`
`fifiéflflL\fiflflmflmyyflyfiém$W&mm
`
`E (CMP ;Chemica1 Mechanical Polishing) 52%;:
`ibfififéltfiififiwfiflfifimvyJVEEE
`
`216356“ Zfl§$¥m®fimilfifimb kb‘é 1303'???)
`
`a [
`
`OOOSIMiH\$fifi§3$$fii3fififififi
`
`V‘aEJFfififi)‘ =E U
`
`(E E P R OM : Electrically Erase
`
`ble Programmable Read Onlyr Memory) $03551) L S
`
`l0014]it.$%%®mmamu,Uwygmm
`fifie®6:em;0.fiawfifiiumtsfififim
`
`I
`
`(Large Scale Integrated Circuit} ii —E®Fafifi
`
`WLE@6:emb&
`
`(Ev?)TMfiKEEéht.flEW$¥%mfifii
`cfiméneo
`
`[00151xawmmaeeouemmwemafifi
`fifififi,$Wfl§®fififiifififi®fifi6fi6wm
`
`[0004llwi5&$¥%fifififi.f¥yfww
`
`eeeeam
`
`fimihfiilfifififiitlifibk :EC’NEZBJE VJ fl‘é‘ < 7‘;
`U.Et.fi37?ffifiéhéfimflfibo
`
`melel
`[fifiéflfifétbwifil$Emfiwffifiéhé
`
`[0005)&$\%%9twwfimmtfimfét
`
`fimwfieifififitbwmfi¥éfi$flfififhd\
`
`8L Ir‘btgbzaSAC (Self-Aligned Contact} fiifiéfifi
`
`kmkfivfihéo
`
`PVC FV’fVJVfi'? FEfifiELtNORflw7‘H7-‘yty
`
`[0017](1)$¥fiw$§¢%fi@%§fim.fi
`
`2:.)< :6 D {COP‘CEIL filil‘i
`
`IE DM (Internationa
`
`1 Electron Devices Meeting)
`
`,
`
`I 9 9 8, p p 9 7 9
`
`fvtwflfifiéh6$¥fiflfififibof\fififim
`xorzmén\fiifimmfififafi¥fififififl‘
`
`— 9 8 2,
`
`“A Novel 4. GFZNOR Cell Technology WithL
`
`$1wifikfifitfizwfiflt2fllfifiéht$¥
`
`ightly Doped Source(LDS} Junction For High Density
`Flash Memories” EC. gflfié‘i’bfhéu
`
`fifififimfi%&\ertweonfimfiflént
`
`fifififiwTifwfibtemcbéa
`
`[0 0 0 5 I
`
`[fifififi&bi5k?éfigl$fififigfi\¥§¢
`fifififitfit‘mfiwifit$fi%&%%9towr
`
`fifiLtfi%\?fimfiflctwaE%iwfiLto
`
`looo7lme.$%®fiflmmfiouon\xev
`twm$fifi$m¢66:®fifimowffifibtfi
`
`%\$¥fiflfifi®fiflfiéuéfi%Kfifififlfiflk
`
`b‘fi‘éfi'ifwéo
`
`[0 0 0 8] Efli‘ot fiéfifiifififilfiifigfimfi-‘E U '12»
`fifi‘ifififiwylE‘E-‘fiiili.
`2‘ :E U fibéflfilj‘é tbiu‘é
`
`[0018](2)$¥%®¥¥W$fl@%%fifi\fi
`
`fifiuxorfifiéh‘filfifiuflfifo$%fimfi
`
`Etfilwfiflkfififlfi2mfimfl2mififibtC
`
`mfi¥fimfimfifléfizfiWKQETefifiac§fi
`
`Ltomfbéu
`
`[0019](3>$%%®¥§¢fififififififi‘x
`
`%Utwfififiéh6$¥%fifific&of\fififim
`
`Lofzfieh\filfifififlfi?b$¥fiflfififi.
`$1mfifiefifimfizwfimwfififlflént$%fi
`
`flfifiwfie.fiflw$¥fifififl®%2fim®§&\
`
`EfififlE%%(HT‘Hflfifikh5lfififiéflé
`
`flm$¥fifififi®fiium<foemcba
`
`Eflflfififififififififéofiof\fi¥Utwfifi
`
`[0020](4)$%%m$§¢%fi@fi§fia.x
`
`fiéhémfiwfi¥fififififi\fihEVTTEEéfl
`
`entwflfimeh5$¥fififificeor\fififit
`
`t%®fiflflfl\fiflflflfififléhéfl®$¥fiflfi
`
`iOTEE3h\filfiWKEET§$¥fimfififi\
`
`fifimfién.chem$%fififififia\fiwmwfi
`
`%1wfimefifim%2wfimmfifififiéht$%fi
`
`fififififléhéo
`
`flfifimfie.fifl®$¥fifififitmm}%3twt
`
`[oooelfiof.fiflTofimmfificflmuam
`
`LTwET6X%9twéfifibmw%®T&5a
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:27)
`Page00008
`
`

`

`loozu
`
`I¥W®%E®%EIHF\$¥W®¥fi®fifié®fi
`
`mgdmrfimuflwféo&B\$mmfifitfimf
`6th®é§fifihffi-$E%fif6$0fifi—wfi
`
`%&HL.%®fiflfiL®fi%fi%fi¢5°
`
`(0022)($Mmfifil)@1t$%mmfifim¥
`fififififi$fifi®¥%¥fiméfifoE1wfiafi.
`
`
`f$UfwfiflfifiMCFR&fib\E%fi\HEE§
`
`fifififiPCFRfifiToX%UtwfifififiMCFR
`Kfi‘NORED$§%EX%Utwfi7u4fiMCA
`
`Rtfifién.Eflflfififlfifitm‘fiflfi%mwfl
`
`kLTEREMISFET‘Sfififiéhrwéofiz
`fi.@1®A—Afifi®fi%®fib9\@3fi.Elm
`
`B—B%fi®fi%@?$éo
`
`fi)%%fiéh180\FVJVfifi17:Kfi\7§
`
`7(FV4V3VۤF)DC(P1)fi\yhzfifi
`17imm.7firty~x:y59b)sc(PU
`
`flfifiénfwao:®7§#DC{P1)a‘x%v
`'iZJVfiiCéflli'ZL'C-figfifiéh'fb‘éflg‘ fiysc (P
`
`1)M.flfl®9HFfiWLKEfiéfléfi%UtWM
`
`CGDV—R‘Eifil 70%klzfifififilzfifiéflét A: 15
`
`K‘Yffiflflfiféy—ZHSLéfififéo%B\
`7§V(V—XJV§9FJSC(P1Jfi\YfiflK
`
`flfifémfifibb\y—XfiSLéfimfbofifif
`
`6I5K.7§7DC(P1)£7§VSCIP1)t
`
`fl\fiuflfiIfifififiéhéo
`[0 0 2 8] if; Fl/zf‘x’f-Eifil 7J:ii\ 7'"?!ch
`
`(P1)£iUi§ch(P2)miézfififiat
`
`[OOZSIEIKfiTlfifl\}%Utwfimfififl
`
`9130‘:mffifDC(P2)imm,flEybE
`
`u\xfimmflfibt$¥%fififi(79?47)Ac
`
`SBLZE-Wéfiiiétl’b'fb‘fiu :GJEIJEy HfiSBLm x
`
`fi\YfiflK#E®mfifitfifiéhThéu10$?
`fimfifiAcu\wzfi.@mvunvfiegiotb
`
`fififififififi(flfi)éflfwénwg‘$%%fifi
`fiAcmfl\$¥fi$fi§fifbéfi§fi6ffifién
`
`wao:®fi§fi6m\@2£iwfl3ufifxfi
`K.Wifi‘$§¢EE¢®E®W%Kflbmihts
`
`fifitfifibfwao
`
`l0029]it.7§fsc(P1)H.E1K%T
`£5K\:®7§VSC(P2}EfiLT#fi®V—z
`
`fiCSLKEfiéhfwéoSwfifiV—XfiCSLB
`
`XfiWEfiELT£U\mEyFfiSBLtfiEGEfi
`
`fififiéfik‘éhéc {fiififi‘éiiic‘ 7°5fiDC (P2)
`
`Tlfififfifiéhfwéuit.$¥fifififiAc
`
`£7578C(P2)tfl\fibfifilfiffifiéfl
`
`51‘ p fl’ylil/ 8 fi‘fléififiififi 1 ifiilfitfi Ltfififi‘c‘
`ha
`
`6°
`
`[0030]:®£5K\%%Uf»MCfi.$K.V
`
`[0024]:w$¥%flfifiAchfim®Ewa‘
`
`—2.vayfififbé~fiwnfifl¥§Wfifil7
`
`Mifi\fio.3nm?%0\$¥fifififiAcfimfi
`
`WSWH\Wifi\WO.4nm?&6oit\$¥%
`
`fififiAcmEé(Xfifiwfi)fl\xfimmfifiéh
`6%ifi‘1283yb®fl$flthcmfimb.m
`
`8 0 u m'C‘fifléo ENE. $¥H¢JfiffifiA 6 Mi XJ’JT'H]
`
`Mificmwe UtvaCfififiéfiEéhTwéc
`
`k\%n6mfimfiflént%¢$w%mfifi(pflv
`111/) 8 (Ac) L ?#$2Vfifi2ffiifi£bcfiéfiként
`
`V—bfififi9t\V—bfififigtmfiméhtfifi
`
`fifi<7u—f4V7E—b)FGt.fifiEfiFGL
`
`Kfifiéhtfififi21k\fififizltmfiméht
`flflfifi(flybu—WV—b)CGtTfifiéhéo
`
`[0 0 2 5] C®$%fléfiififiifiA c (Dié‘fildi‘ ij'r'n'l
`
`Yfimmfififéfi%UtWMcwy—z\Fv%yfi
`
`Kflfiféfifiafitfizgfi)CGfi\#Emfififi
`
`fil7fifl\fififi6mibfifléh.Yfimmmfié
`
`Kmfiéfl1w5¢:mfifl§ficemxfifimfiL
`u‘flifl\%0.3am?&v.%fifificcfiwfi
`
`h5%%UEWMC®fiWEECGm\UHFEWL&
`
`HwtfiménéuY3WKEE$h6fi%Ut»MC
`
`fiLsu\wifi,%0.ssumfikéuit\:m
`
`®FVXVfifil7fl\737DC(P1)‘DC(P
`
`WflEECGM\Yfiflflflfi$h5fi%vthC®
`fiflEfiCGk—WflfifiénéktbK‘Yfimmfi
`
`2)EfiLT\%h%fl£témEybfiSBLKEfi
`
`wmfifiéh‘Yfimmfifiéhbfi%vthcmy
`
`ETbUHFfiWLkfiéo
`
`[0026]:wfiflafi66&$¥fifififiAcem
`mmm‘@25;3m3m%¢;5m\Wid.fimv
`
`Hzfifi17®%h¥nfl\VHRESLEiogfiW
`GEEfi‘éfléo if; XfirfilfififiTéithwMC
`
`03 FM yfiifilfltfilcififltéh. E5115“? bfis B LL:
`
`Hayfi‘Emv32yfifiiwfimvuayfiflmk
`
`fifimufifiénéoXfimmfififévatWMc
`
`fifiéhtfififi(mF.0Nofitw5)21%;0
`
`my—Xfifil7fikfiflfifiéhY—XESLKEfi
`
`fiéfi§fi\§fi§fi(%lfifi)FGfiifififikfi
`
`Wtfifiénac
`
`gifltafhbfififi9fififiénrwéo:mfifi
`fifiFGfi\X%9twfiumflbffiméhTwé
`
`(@3$$)o
`
`(00311::v.x%Ut»®§%%a\fiamL
`
`fiifi%§fi¢flowffl%?éo
`
`[0 0 3 2] iii @éfiammlowfi‘fiwfiféo 2*
`
`[0027):wfiflfificcwfi%®$¥fimfifiA
`
`uflux:fifl¥fi¢fifi17(v~x\FVJVfi
`
`%Utwu¥—¢&¥%flnmu\%%Utwmfiw%
`ECG(U~FfiWL)KfliH9V®%E&mmL\
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:19)(cid:28)
`Page 00009
`
`

`

`X%Utwmkv4yfifitfifivbfissLJufli
`
`éh\%®TKfi\Vflbfififi9bfi%fiéflfw
`
`H4V®§EEWWL.$¥EfififiAc(pmvxw
`8)Kfiifi3V®EE%WWL.3%Utwmywx
`
`6°:mfhrfifiGmfifi®$%fimfifiLAc¢t
`
`imxffl¥§¢fifi27tywx,FVKVfifi)fl
`
`fifi(V—XfiSL)%flid0v(fifi§fl)mfifi
`+69%w%%.fi%Utwm%+$wfifi{V—1.
`
`Fvfiyfififi)K$yhivflfiuyflfiib‘:h
`
`fififififiFGKfiAénba
`
`[0 0 3 3] W; fififljbfiti’flcowffiflfififéa )2
`$Utwmfwfififi$wfmfi.fi¥thmflmE
`
`fifléhfwbo
`
`[0038]::T.®1K%Tl5t\%%th%
`fififi®$¥fifififiAcfi\fifi®%%vtwav
`
`(Vfififi%#6XfiWKE$DfiUflUTW6oCG
`EéDwib.E$d1fi\$¥%fififiAcéfifif
`
`éfiumwbhbvxamfn%&fiflbtfimfib
`
`ECG(U—FfiWL)Kflifi2.TVGEEémm
`
`U,Efld2fi‘fifikfifiibéfifiéfifibtfifl
`
`L‘fi%UtW®FV4yfifi(mEvbfiSBL)t
`
`fifiénfiifimfififlfiw1fi\dlfi\fio.2n
`
`wifio.SVQEEEWML\$¥fimfifiAc(p
`fivlws)3;@x%9t»®y—xfifi(y—1fi
`
`m'C‘E'L d Zli. W0. 3umT$y53 10d 20*
`
`séu.mflbkw_»fx%9tw%fiLt%étfi
`
`SL)Eflifiovtfifif50:®%fiffifwwy
`
`$fiflfifiAcfl$Bfi$£flfi®Eéfl0.3umE
`
`wx\Fv4vfifimm§mfimhbm§mv\x%u
`
`fifbotckmb.%ibto
`
`twm%_¢(“1”%L<m“0”)&%k&fofi
`
`mflfih6%%fl\%%flt»mfifififiFGKfifi%
`sEAéntxeftfimamgTvsv).wia\
`
`“0” mf—flfléfltfiéhfmt:tfi§rbfl%a it.
`Efiflmntw%fiu‘3%UtwmflfiEfiFGKfi
`
`[0039]:0;5m.$$flm%fimfiwtm\$
`¥fifififiAcmfifi%WELt®T\$¥fifififiA
`
`cfl$05%%k%®%¥&EfiTbl&fifiééo%
`m%%\9—?Efiwfiééfififis‘%%vtwm$
`
`Ew¥$$éfififa:afifisa
`
`E?flfiléhffib(fifi%flfltfi£b)\mz
`ii.
`“1” 03?—§’7§3%E’£%én'cwt:a7bibvaéa
`
`[00401m6.®4ufififiu\$¥fimfifiA
`cfimd‘fififififififib‘$%fifififiAcma‘
`
`[0034lkwv.m%mfikowrfiw¢6°is
`
`Uf»fi§%fiiht§*5&fi£¢éflfi.fi¥9f
`ww%flfificc(U—FfiWL)KMifi10.5v
`
`%®%a%®fiéfififililéfi$73 (stress) flgflfllbéo
`
`fim\5%9?»%flfifi®flfi%ma\fimEfiaw
`fifi’éé‘flbgwfibia EfifliCfioffiéfifififlfiéfi-E
`
`
`
`ngEWML‘$%%flfifiAc(pflfilwa)£
`
`éhrwétb\$¥fifififiAa®fl$tm\mhfi
`
`xfififvtmevfiyfifi(mEybfiSBL)K
`
`fi$T69:mifiuxztmflflmbét\$¥%m
`
`Mialo.5V®EEEWML.x%thwy—z
`
`fifiAcEfiflffififi¢KEfl$®kfi(Del.D
`
`fim(V—XfiSL)&7u—%4V7&fi(fiflfi
`
`fl. 0 p e niflifi} ilfifi’fbo %®%%x FN (Fowl
`er-Nordheim)
`I" V$JPE§EC J: U \ $Jfi$ffic G75“:
`
`%%Utwmf¥$wfifi(y—z\Fvfiyfififi)
`
`e 2) zfiibbo :mkfifiéfiLTU—&Em£fi%$
`L‘mmthim.:@u_§amfi.tvz7y7
`
`mfiwsmmtmmotssmn\xaamorLi
`90
`
`K.%%wmmfifibnéo
`
`[0041]LwL&fi&\$fifi®%fim£wrfi\
`
`[0035l$t,isvtw7vxmfififium\fl
`
`$¥fiflfifiAc®fi%€WEbt®f\ESEfi¢$
`
`flaficctfiufifififisntfiiwgafiEDSG
`
`fifiméhrwao:in—fifififinsca\%%
`
`5K.£fimmfisutwfifiménéfifi(fl%vt
`w7v4MCAR)$Tfi\K%DelflfiUf\fl?
`
`wafifififiiub&%wfifiéfifib\it\%%
`
`wamuwyfifiéflfifé:afifisé.
`
`Dtwfimfimkfiflfifififififi&m&ifiym<f
`6%mtbmfifiéhao
`
`[0042]@B.$¥%fififiAc®%E%fiiK
`u‘ii—fifififiDSGflfifiéh\36K\%®T
`
`[0036):myiwflgfifiDseb$¥%mfifi
`
`(pflviw8)iflfifiéh\:fl&#¥%fififiA
`cammmt.fiiH.ON0E21%xoflaflfi
`
`fi.flfi%fi(%1%fi)Fefiiwflflmfigiva
`
`éf—fifififigflfifiéhfwb(E2fiin3§
`
`E)°
`
`
`
`[0037l—fi\Eflfifififififimb\fimfifim
`
`mfi¥fiflfifiLAcflfiflén\10$¥fimfifiL
`
`Actta.fifimMISFETS®E—b%ficé
`
`fim¢6fi%fifififiméhrwéagzufififi
`m\:wEHrEEGH\flfl§fiCG&EUET%m
`
`fitm\0N0E21$i9méfififi\fifi%fi(fi
`IEE)FGHifififikfi$lbtéE—bfififi9
`
`fififiénfwéufiof‘%®fiflfix&fix%ut
`
`wfifi&aofm6(@ny—ZfififififiLtw)
`w.mwaya—aafimnseum‘afiwmmén
`
`6:a&<\7u—f4yyfifiatofmbtb‘f
`
`+$wfififléhf.U—a%fiu%Emeo
`
`l0043]:t.$%flmfifinfiwrm,fiiwg
`EEEDSGwTéflfiL\$¥fifififiACEfifib
`
`tmfi‘fisvtwfifififléxfi<¢6:km<.k
`
`fififiéfiéctmfiséa
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:20)(cid:19)
`Page00010
`
`

`

`[0051]&K\fifikmi0pflfilwsmfifi
`K\wifi.fi58mfigm%@mE&%fiLtfi(7
`
`vfim)\:®fl@mfiéfifib\¥§¢§fil(pfl
`'7IJT/8) @ififififiibfbo mm“ fimmfia
`L‘flia\fiE10.5nmfifimfifimfiéfifif
`
`6°:mflfimfim\$fi§fif%9€wwfwbfi§
`E9&fifiT§o
`
`[0044]&K.$$fl®fi§m¥§¢§fififififi
`
`wflfifi%®#flflowffififéoE6~E12fl\
`
`$$fim¥fi¢fifi®$§fimflfifi$éfi¢§fim¥
`%%fi@fibv.@6~@8m.@1mc—Cfifi%a
`
`fimb.®9~@12fi\®1®D#DME%&%ET
`
`a [
`
`0045]if.EGKfiTi5K\Wifi1~10
`
`awflfi®kfifiéfif§pfl®$$fivu:ywea
`b¥§¢§fi1%flifi‘m&m¢&:auib¥$¢
`
`[0052l&m‘V—hfifimgmi%t.flifl\
`EH1OOMEEQUVEFHTLK§%%VUZVE
`
`§E1®$fiu.fivFfimE(®fifif)&fiflf
`
`100$§t§fififiéCVDETfifiT60&K,V
`
`50&wv\flykfimmtm\fiifi\§m9U:y
`
`E(Efifif)mifififififiéflflb\fifibtw7
`:a-Hfi/“z FE (IRE $4: Fifi/“x HE] kW) ’5:
`
`filhfi(@%fif)E717KLT§%%9937E
`
`10?F§4iy%yr¢6:&fli9\%%Utw%
`
`mafia,Xfimtfi$fimfififiiézb§47fiw
`
`vzym‘$¥fimfifiiwgmv92yfiafi§f
`
`fifi“VFG’(10)E%fi¢60
`
`loosalkwv.maufi7;§m\¥§¢§fi1
`LK\fi5—VFG'(10)&‘%fiTéflflEflC
`
`Gtéfifi?6tb\Mifi\0N0fi2lmiimfi
`
`fifiéfim¢&a:m0NoE21m\fimv92y
`a.gmv92yfisxwfimv92yfiwfifififih
`
`D.Wifl\CVDEE;UEE5nmE§®%EVU
`
`:1 Vig‘ EH 7 n mEECDE‘IIS‘I/ U :1 Vfidb‘ctffiflfigtl
`
`nmfigmwavu zyifiéflifizfitifififé C kICJ; Ui’fé
`
`a l
`
`0046]&wfi\uvxbfi&%£b\$mvvn
`Vfiavxytbf\*fiwgfiléxyfyrféz
`
`ktxnméz50mflgmfi¥fifim4&fimfén
`
`[0047]%®%\¥§¢Efi1&$1150tfiF
`fififlkTélbtioT‘$®W%K.fiifl\fig
`
`somfiawfimvv:Vfismxafififlmfiéfim
`T50:wfim9U2VE5m‘fi®WEK$BtF§
`
`xxyfyrwyx—véfififétfit\kwlfif
`
`flfénax.fitE®QmVU:yfitt.$BK\
`
`fimmfluflbfiihéflmvv=yfi6t¥§¢§fi
`
`1amfifimibéxbvzéfififatbmfifif
`
`10nmE§®§mvuzyfiéfifiLTbiwa
`[0054]CCT‘EflflfififififiKfiwffl‘fi
`
`flfififimfifitwonofi21\%%%vvnyfi1
`
`ofiififirfifififiséfifiiéoRwfi\fim@%
`
`& [
`
`0048)&K‘$¥fiflfi4®fi$§§v¥fiwg
`
`EILECVDET.fiifi\fiE600mEE®flm
`
`fimfifiw$§fi§filwfifiéfixyb%#Lt%\
`
`yu=yfiaxbtéfififiéfifib\mwfi.115
`
`0t?60fi©fiflfl(7:—W)éfib\flkvyfi
`
`EmfiflfifififiwpfivIW8®fifim\fiifi\%
`fimmxbfifismfifiwfiwhfififigbéfimf
`
`yfiSfiflfiméfléukwT.CMPmfifiwtflw
`
`fimvunyfis%mfib\%®§E&¥flmLtfi.
`
`60:wf—b%§fi9bm\fiflflfifimfifitfim
`éfléfififiMISFETSmE—Ffififighkt
`
`gmyuzyfié%£féutfi.:®fi\§mvu:
`
`6(fl2fifl)o
`
`Vfimfifififiwfimvvzyfismififl¥$W§fi
`
`l0 0 5 5] $301K *léfifiigtfil id?“ fi£+§afia L
`
`Imfifimgfimbrwéfi‘Qfi®¥§¢§filmm
`
`#I&¢.fififlmxxwfimfififilflmxnfimv
`
`T\flifi.flyfi4.75X10m/rnFEEFH
`73ht§fiflVUfiyfi22ECVDEK$U200
`
`D=Vfi6®§Em\%&E%fif50
`
`l0049]fli®1fifli9.i¥fifim4fifi\$
`maynyfisfiflwfiiht$%fififififlénéa
`
`mflgvfififéztfifim?éufiwfx%®t%n
`wifi\300mEE®$¢VU=yfiz4mifififi
`
`fifi&CVDfifififi¢6°C®$%%992yfi22
`
`[0050]&m.E7ufi?;5u.¥fl¢§film
`fifié?zyh%#btfi.¥fi¢§filéflifi‘fi
`
`fl\EflflflfififififlfifléhéfififiMISFET
`Smf—bfifickt9.$t,%%9tw%flfifi
`
`fimfa:amxn¥§¢§fi1®fifim\xw—flm
`
`Kfifiéhé$fififii¥9twmfiwaficckt
`
`fi£Efifif)wlfiafififiéfififéokwf.¥
`
`25°
`
`fiwfifilmpfl$fim(flim\$9$)édfiyfl
`Bfifibtfi.fiflfl&flb\mfi$fi%&mfiéfi6
`
`:ttior.$%Dfi»%fififimpEVm»8&%
`
`flféo:mpflwlwafi,¥$¢§filmfifiufi
`mLtfiflfi.$¥%mfifiAcatéo::f\fim
`
`
`Efififlfifififiwf%‘$¥fiflfifiLAc§fifiK
`
`fimféo
`
`[0056]&K‘E9K%?lfim\%%Ufi»%fi
`
`ffiififib W/“K Hfi (Elfifi'i‘) 73?} M: L‘Cfiflfi/D
`:yfi24\§%%9937fi22\0N0fi215$
`
`UflfiwyFG'(5%&?U=VfilO)EF§JI
`vfyffén
`
`[0057]:0P341y?y¢mxb\%%%vu
`
`:yzzmgmbflwgficc(22)fi:6$fifi9
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:20)(cid:20)
`Page00011
`
`

`

`U nyfil ofihgfxéfifiEfiFG (10) fiifiéfik‘én
`
`21\fifi¥mFG($fifl992yfilo)fiififi
`
`éofifififiFG(10)H\Xfimmfifiénax%
`Utwfitfi%éh\fiW¥fiCGfl\YfiWKEET
`
`hbfififi9éfi¢6NORfl$fi¥&fi%vfiwfi%
`
`fl$h\fiflfifififlfififlfifimMISFETSfl
`
`6ififififiéfl.U—FfiWLéfififbofifl\fl
`flEfiCGfi~§%%VUnVE22Efi6f‘fiflfi
`
`fig,vvfi4kfimfififiitm‘fififi.%bwn
`
`fifléhbo
`
`[0065]&wf,E10KfiTi5K\§m993
`yfi28®:%u.wim,cvomfizoOmfifim
`
`éfiflvunyfikfiflfi&fifiitMVUfifFfia
`
`fimvusyfisowxbtfififiéfifibtfi.fim
`
`wfigfiffiflbfbtwu@9fi\@8®E—E%E
`
`vuflyfisomflltfifffiiDc(P1)E:U
`
`Kfimb‘$t\®1®D—Dfifitfimfég
`
`7§VSC(P1)®fia—y%%flfétb.Vfix
`
`[00581:CT‘BflfifififlfifiKfime.V
`vzbfi(@fifif)évxiflLfgmvvnyfi2
`
`%fi(®fifif)%7X§KLKF§JIy%V#f%
`
`mvvzyfisoékfifilwfyyb\fiwfimv
`
`4%;U%%%992ymz2&F541y%y7¢6
`:am;v.afimMISFET‘smwa—FEEG
`
`Dayfi28EF5JIv%y7¢6:tKior\n
`
`*fl¥§¢fifi17(y_2\vayfifi)i%nn
`
`éfififé(fl2$fl)u
`
`ya&%m—w01fiiwfifi$HM1&fimféow
`
`[0059]&K\fi%UtWfifififi®pflWIW8
`Knfi$fl%(flim‘t$)%dfiyfl%flhbt
`
`5‘FVXyfim{17)LKm\:y5¢b$wwc
`1&fifib\V—xfifii(17)mfi‘flfi$HMl
`
`&\flflfléfib\fi$$%%&Mfiéfiéltmxo
`
`Efififéo
`
`'fofl$$¢fifi17(ywx,Fu¥yfifi)&
`
`fifiTboit.Z®fi\pfl$fi%{Wifi.$7
`i)éflbffiyfl5%$T6:tK;DV—Ffififi
`
`[0066]Lfififlvvzyfiaomiy%yru\
`fimvu:yufiibfimVU:ywiy%va—b
`
`fikg<aéxfitfififfiw\gmvunyfizsfi
`
`9®FE%¥$W4V7§%fi(®fififJfififibf
`Bath
`
`
`
`[0 0 6 0] iii“ Eiflflfifiéfififififilfiswffi. p
`Ewiwsmnfl$fim(wifl.t$JE4tyHB
`
`flfibtfi.fiflfiéfibmfi$fi%&fifiéfié:a
`
`E3u%£éhthéuféo
`
`[0067lit,$mvuzyfizsmiv%yr
`u\vunvava2ymm¢a§mv92ywx
`
`v%ywakfiké<téifia%#Tfiw\Efil
`$flmv92VEfifi<mhflwximfaagam‘
`
`Exor.V—b%ficmfimm;rrfl¥£¢fifi
`
`Cwlvfyffi.ngUJVEZBflEfiWKIy
`
`(@fifif)&%fl?5o
`
`%y73n6;5&%#fifiw.%W%ficc$fifi%
`
`l0061]&b?.fiifi\850t®fifl§<54
`Ffim)&MT:&K£U§$&VU:VE10£;3
`
`fichmEt§m992yfi2Séfififitféo
`
`:nuxb.7xbvyflfi74®flfimfif&$éfi
`
`22mfl¥fl54bflmfl(fifimfi)2e&fimf
`
`$¢Ei0$fifltfiéfif§uyfiyb$—»Cl$
`
`$0:wfi4hflmfi2eu\vvay§fi®ifiu%
`
`mfififilOnmEEwfimvvnyfifififiéhbfi
`
`fimfifiwfififiHMlfififlfifiCG¢fifififiFG
`Kfibffififié£tw77§4y)fififiénéo
`
`#tfifiwfififfifléhaoit\:wfifi‘fiflw
`
`[0068]kt.my5¢b$—»01£;0Efi$
`
`fifififiFG(§%%VU=VE10)%fifi%EI%
`
`HMlmmfléfiuf\nfl$fi%(flifi\t$)&
`
`fi£vunyfi22)mly?yr®fiu‘fwbfi§
`
`dtyflbfl$btfi‘mflfl§fib\fifi$mwéfi
`
`figmfifltittyfi—Véfififétbufimf
`
`fiéfiéckmiot.wfl$§¢fifi19ammf
`
`6°:¢m*fl¥fiwfifi19m\:m=y5¢b$h
`wc1mmfifiénbféit®§flfifiéfififét
`
`wmfifléhén
`
`[oosglkwfi\fl11mfi¢iét,:yyyb
`m—»01£;6Efi$HM1®W%Efihfimvva
`
`a [
`
`0062lfiwfi\¥§¢§filtfi\flifi‘CV
`Dfivgmvuzyfi2swxéfifigfiéfififé,
`
`[0053]::T,Eflflfififlfifimfiwrm,$
`$99:VE28%EfiWKIy?V7T6:kK;o
`
`f.Emfiflfimfifiwfi_bfifiGwMEmfi%kv
`
`vasomtflm\fiifl‘fiwgm992yfiazm
`
`1—WXA—fitflfifif)Efiflféokm\fifl@
`
`fififififiwpflviwawn§$fiw(uypitfi
`tfiAs)&4fiyfiEfl$Lfi%\950tflofi
`
`iimfififiéfiflféukwv\1y%fiy¢f6:
`amxoffim9U2yE30ifiiflzyfi?hm—
`
`WC 1 EifififlfifiHM 1 gammy/u :- Vfi3 2 PE:
`
`wfimfléfiL\fifi$fi%%fifiéfibzktio
`T\EflfiMISFETSfi®ffl¥fi¢fifi27
`
`@fifbu:mimv92yfi32m\%fifé¥fiw
`Efi1®%%m%.flflfimccmtflmfimvvny
`
`(V—R.Fv4yfifi)afififéu
`
`fiaofiIvTVVén~757%wmflVa—FT6
`
`[0064)uthfiuiD\fi%flfiwfifififi
`K\%@EECG{§fi&VUJVE22).ONOfi
`
`wéfiCtmufiflénéa
`
`[007olkwfi,$fi¢§fi1§flifi7yfi¥m
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:20)(cid:21)
`Page00012
`
`

`

`fifiéfiififiwffi’fifibtw 3V5? Mix—v14; 1354:
`
`[0078]:wifitfiflfilfitfiwf\¥$¢§
`
`URfifiHMIWEfiHEflVUJVfi3OiE\fifi
`
`1 OnmEEECDTi Hwy)
`fiflfiétfiffifé, 9317M.
`fixasomfifimTiN($m%5y)émfizfiy
`
`fitfiflLtfiaWflmflwflintflmVUJyfi
`6‘fifi\mmWEE$UtF§fly?Vf®FfiH
`
`yéfififfitbmfiflénbfiwflfimfi(fimvv
`
`Manama (@fifif) L, 36:; 3 5 OmEE
`
`nyfi5)®&mfififib‘$¥fimfifiumbémfi
`
`mW(flV¥2?V)fi§CVD%EiUfiET6°
`
`fix§<kéo
`
`[OOTIthT\3V??F$-WC1££$E§
`fiHMlfi$®WE.TiNfiEifiTiEbBfléfi
`
`[0079]$t\nfi¥¥§¢fifi17(y—x\F
`
`v4yfifiw$wfl$§fififl19&%m+6fi®4
`
`EfiEQCMPfifiiU%fiT5:&K;U.75¢?
`
`fiyflBflfiuioTE\$¥fifififiKmfifimb
`
`a [
`
`léfififéaWE\FVJVfifi(17Jh®SV5
`
`abmwwc1wm\7§fnc(P1)é%&L.V
`
`0080]ébfi.¥fiv937fifi\fimfl®ké
`
`bzfifi(17)imfififiHM1WE7§fsc(P
`1)&%mfaamx.mmutxam‘:mrars
`
`wfifi&étbyflifi.zyfl¢b$hWC1$fifi
`fiHMléaafiémmfimfiatwummenagm
`
`C(Pl)fi.YfiWKEE¢6EfiTEU‘V—Zfi
`
`v92Vfi28®flfifitb\$¥fifififitmhfim
`
`SLafimffia
`
`béo
`
`[0072]&wfi\75¢?1téfihfik992y
`
`[0081]umbtflb‘fififiwfifimxnfi\fi
`
`ESOLK\%XH\CVDEKiUSOOmEfiflE
`
`mvu=yfis5miémfififi%fiflféo
`
`[0073lkwfi\ffiypltmfimVUzyfia
`5&&£fa:am;nny¢¢%m_»c2&%fi¢
`
`fibtfib\$¥fifififiAc®fi%E@Ebtmf\
`fifififlfiflbof%\X%Ut»fi%fiéfl5fifii
`
`fifi\flfififlfif\3%Utwmv—fififiéfifif
`
`6%wfi%éfiélafifééo
`
`69&£\E12¢Efi\FV4VEfiL®7§yDC
`(P1)t®:V#?F$—WC2®AfifihTEU.
`
`[0082]($flmfifi2)®13u$$mmfifim
`$§¢fifififi§fi®¥fl$fi®&fi#0@1303$
`
`y—zfifitwfififsc(P1)t®:y§ab$—
`
`fl‘1%UtwfiflfifiMCFRéfib\Eflfi\fifl
`
`wc2fl\E12aflflfiéfifitfihéa
`
`EfififififiPCFRfifi¢gfi%UtWfifififiK
`
`[0074]&wfi~nyfifibfi—wc2méfibfi
`mvunyfissit.fifififiéfififéoWifi‘
`
`u.NOR§©$fi¥fifi%9twfl7u#fimagé
`
`h\Emfifififififimuxfiflflfiw~thrfim
`
`loomflfimeEEfifif)Ezfiy€%tivfi
`
`fiMISFETSfififiéhfwéo$$fi®fifi®¥
`
`fiL\éBE.250mEE®WE4OECVDEK$
`
`$¢$fififi§Eu\EltfikLT%6m&;5K\
`
`Ufififén
`[0075]&wf.wfl40%mambfifififiéfl
`fibtmvfizbfiévxymF54Ivfyffa:
`
`$%%K%AclwfifififififiAc2fififiéhfw
`
`bflfifi‘%®fiflfi$fimfi$1tflfif®étw\
`
`ammflwufifib.fifimt%fi®Afl%+6°
`
`emxoffi1EEfiM1fixfifi1EfifiM1t7?
`
`7P1k®§fi$<7fifpz)aéfimféowb\
`
`[00831m3\@13K%T;5K‘fi%9tw%
`mfifififi‘XfifiKfiELt$%fifl%Aclfi.Y
`
`757DC(P2)3;375780(P2)&fim¢
`
`fimt#fimmfifiuafiénffio\:®$¥fififl
`
`5°E$®$IEEfiM1m‘EIE£U5EEy}E
`SBLkmo.E12tfiffifitmfintm7§fs
`
`C(P2)L®%IEEEM1H.#fiVHZ§CSL
`
`ktbo
`
`Ac1®fi%fl\YfiWEfiET5Efi%Ac2KLO
`
`ffifiénrwéu
`
`[0084]ZG$5K.$%EQEEKBWTH\$
`¥fififiAc1®fi%&\fifi%Ac2K;oTfifiL
`
`[0076]:®&\%1E&fiMli&fifi&mvu
`
`tor.@14uafxam‘mmmmbafim&§m
`
`:yfisstu\flifi.CVDfiuioflmvvzv
`fimxfitfififi%fifib\$5K.%®LK,WE%
`
`éfiéckfifigéofior‘ifimfimlmfifimm
`i,$6K\$fi%$¥%fifiAclmfi¢T6:ké
`
`mak5§fififi%fififézamxof\$2EE$
`
`fififélkfiffiéc%®%%.$fifitfi%fltw
`
`fififiénéfi.:hewflfimom1m\%%¢5°
`
`fififléhéfifi(fif9fiw7v4MCFR)if
`
`[00771&L\fimmfiwbt¥fi¢$fififififi
`@fifififitxwru.wifl\1)®kwu:yfi6
`
`fl.kmDe1fifiUf\ifUtflmU—?Efi&fi
`
`fiTéCkfifgéo
`
`wflfimwtbwflm2.lew—mmmwfifiwfi
`
`[0085]&E.@13Efiwffi\$¥fiflfiAc
`
`wmmfl\3)¥§wgfi1(pflvlws}®fimm
`fifimwtmmflk£7vflm).4)€—hfi§fi9
`
`lmffiféEfifiAcZTfifiLtfi\Elsufif
`
`:5t.w<ob®$¥fi$$AclfiK<®lS®§
`
`wfifiwfimflflfi.flias)fiJhflfifi2ew%
`
`fi‘fi‘ 20®$¥fiifiififiAc lfih’.) ‘ fifiifliA c 2 E
`
`fl®%®mflfl%.fikmmflflIfiéfiféa
`
`fiHT%$wo
`
`(cid:51)(cid:68)(cid:74)(cid:72)(cid:3)(cid:19)(cid:19)(cid:19)(cid:20)(cid:22)
`Page00013
`
`

`

`[0086]($flmfifi3)§16u$$mmfifim
`
`¥fiwfifififififiwfifi$fifiéfifoElewfifi
`ii fi-‘ED-EJDfiZEEfiEfiMCFRéfiu gaunt Ea);
`
`EfififlfifiPCFR&fiTnfi%Utwfifififim
`fl.NORfl®$fi¥flfiffltWfi7v#fiKEEé
`
`n‘fiflfi%fimfifium\Eflfifim~w&Lrfifi
`
`mMISFETSfififléhrwbn$$fl®fifi®$
`fifikfififil§i€fifii
`El 1 561% L138 67151?ch é ii.
`
`[0093]:®$%%fififiDAcLKfi\fl%9t
`
`wabffifi¢5%%9twfififiénfh&wofl
`
`b\#¥%fififiDAciflm\YfifiKfiflEECG
`fififibrwbfl‘:wflflamcemfifimm\7§
`
`VDC$7578Cfififl$hThflwo
`
`(0094]it.fifl§fiCG®Yfifi®fl%Km,
`:0WWEficewaémL%{flflfificcaéam
`
`LEwfifiawfififi)CAfi§Em%méntma
`
`fi%DtW%fififiK\fifiéflt§fi®$¥fifififi
`Ac‘AcwwfiB‘%fl®$%%flfifiAcwmfi
`
`L211 8G:$6L\Tfi:73=6fiifi (CA) fi‘fiéfifié‘flfhfxb‘
`filfiflfifiCGiCOPTEi l1 staifinrwmfimm
`
`fi‘w®$¥fimfifiAcmfiibm<aorwéflfi
`
`fiflumfiflambfiéfiféo
`
`u\%®m&§%m®%m1afimv&atb\fima
`fimmfimb.fimmfi$fimkafiféo
`
`[0095]:mxfim‘xfifimfimmfiwrm\fi
`fiw$%fifi%Ac1®§%K$%%mfifiDAcéfi
`
`[0087IWB\EIGE%T$5K\}%Utw%
`
`”twfi‘:wfific$fl%$¢éfiézkfifié‘%
`
`fififitfi\Xfifltflfibt$¥fifififiAc‘Ac
`wfl\YfifiK—E®fififimfifiénffln.:wfi
`
`thfififléhéfifi.010\E21Kfiffi¥fi
`E‘ZfiA c 1 LL RISE (D e 2) fi‘flffi‘fi“ FED 1321/0)
`
`¥fimfifiAc\AcW®56\YfimKowrfiflm
`
`vhafiméfififézeflrga
`
`flfifé$¥fimfifiAcwafim®fifl.fl®$%
`fifififiAc®%h;UE<tofwéo
`
`l0096]it.flfimL%CA®T&flfiL\$¥
`fifififiDAc%%fiLt®fi\i¥Utwfifififié
`
`[0088]C®i5K\$$fl®EfiKfime.fi
`
`i§<féltfl<~Kfififi&fi5ltflfééa
`
`fl®$¥fifififiAcW®fiéflmfi¥fifififiAci
`
`bm<fifibt®?\@17Kfififim‘mfi®%¥
`Efififé:afiva.fiflmi¥fifififiAcwmk
`
`[0097lit.$m®%fi2fifimbtxfiu\:
`h5®$¥%&%(Ac1\DACJwfi%&\%fi%
`
`ACZKIOTEEThH\%fl®fifi2ffifibt%
`
`%(De2)m¥$$éfififa:tfifi%éo%®%
`fl.fifufiwwfl—flfifiéfififéltfifébo
`
`%(K%De1®%§®fifi)éfibctfiv%éo
`
`[0098]@22K\$$fi®%§®$§¢$fififi
`
`[0089)$t\%mwfifilvfl%thfit.i
`
`fifimfimf6fififléfifo@%f6;5txx$u
`
`¥fifififiAc\Acwwfifi€WE¢hfi‘fi%Ut
`
`tWMCfl7V4fiKEE$hTDé.flL\DAc
`
`wflfifléfléfifiif