UNITED STATES PATENT AND TRADEMARK OFFICE
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`Carl Zeiss SMT GMBH
`Petitioner
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`v.
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`Nikon Corporation
`Patent Owner
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`Case IPR2013-00362
`Patent 7,348,575
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`PETITIONER’S UPDATED EXHIBIT LIST
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`Carl Zeiss SMT GMBH
`Petitioner
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`v.
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`Nikon Corporation
`Patent Owner
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`Case IPR2013-00362
`Patent 7,348,575
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`PETITIONER’S UPDATED EXHIBIT LIST
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`ZEISS 1001
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`ZEISS 1002
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`ZEISS 1003
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`ZEISS 1004
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`ZEISS 1005
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`ZEISS 1006
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`ZEISS 1007
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`ZEISS 1008
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`ZEISS 1009
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`ZEISS 1010
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`ZEISS 1011
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`ZEISS 1012
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`ZEISS 1013
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`Case IPR2013-00362
`Petitioner’s Updated Exhibit List
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`LIST OF EXHIBITS
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`U.S. Patent No. 7,348,575 (“the Omura Patent”)
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`U.S. Patent No. 7,309,870 (“the Omura ’870 Patent”)
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`Judgment, Paper No. 49, Interference No. 105, 678
`(“the ’678 Judgment”)
`Judgment, Paper No. 157, Interference No. 105, 749
`(“the ’749 Judgment”)
`Judgment, Paper No. 41, Interference No. 105, 753
`(“the ’753 Judgment”)
`Judgment, Paper No. 291, Interference No. 105, 834
`(“the ’834 Judgment”)
`PCT Patent Publication WO 02/035273 (“Takahashi
`PCT”)
`US Patent Application Publication No. US
`2002/0024741 A1 (“Terasawa”)
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`US Patent No. 5,825,043 (“Suwa”)
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`M. Switkes and M. Rothschild, “Resolution
`Enhancement of 157 nm Lithography by Liquid
`Immersion,” Proc. SPIE Vol. 4691, pp. 460-465
`(2002) (“Switkes”)
`Willi Ulrich et al., “The Development of Dioptric
`Projection Lenses for DUV Lithography,” Proc.
`SPIE Vol. 4832, pp. 158-169 (2002) (“Ulrich”)
`
`PCT Patent Publication WO 99/49504 (“Fukami JP”)
`
`Satori Asai et al., “Resolution Limit for Optical
`Lithography Using Polarized Light Illumination,”
`Jpn. J. Appl. Phys. Vol. 32, pp. 5863-5866 (1993)
`(“Asai”)
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`2
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`ZEISS 1014
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`ZEISS 1015
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`ZEISS 1016
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`ZEISS 1017
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`ZEISS 1018
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`ZEISS 1019
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`ZEISS 1020
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`ZEISS 1021
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`ZEISS 1022
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`ZEISS 1023
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`ZEISS 1024
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`ZEISS 1025
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`ZEISS 1026
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`Case IPR2013-00362
`Petitioner’s Updated Exhibit List
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`European Patent Application Publication No. EP 1
`336 887 A1 (“Takahashi”)
`Certified English translation of PCT Patent
`Publication WO 99/49504 (“Fukami”)
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`Expert Declaration of Richard C. Juergens
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`Wikipedia, “Optical Power,”
`https://en.wikipedia.org/wiki/Optical_power
`(downloaded May 20, 2013)
`Willi Ulrich et al., “Trends in Optical Design of
`Projection Lenses for UV- and EUV-Lithography,”
`Proc. SPIE Vol. 4146, pp. 13-24 (2000) (“Ulrich
`2000”)
`Eugene Hecht, Optics (4th ed.), Addison Wesley
`(2002), pp. 171-173.
`Wikipedia, “Optical Axis,”
`https://en.wikipedia.org/wiki/Optical_axis
`(downloaded May 20, 2013)
`File History Excerpts from U.S. Serial No.
`11/266,288 (“the Omura Application”)
`File History Excerpts from U.S. Serial No.
`11/513,160 (“the Omura Continuation Application”)
`Decision, Paper No. 40, Interference No. 105,753
`(the “753 Decision”)
`Wikipedia, “Refractive Index,”
`http://en.wikipedia.org/wiki/Refractive_index
`(downloaded May 20, 2013)
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`U.S. Patent No. 4,346,164 (“Tabarelli”)
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`Omura Reply 1, Paper No. 200, Interference No.
`105,834
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`3
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`ZEISS 1027
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`ZEISS 1028
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`ZEISS 1029
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`ZEISS 1030
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`ZEISS 1031
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`ZEISS 1032
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`ZEISS 1033
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`European Patent Application Publication No. EP 1
`069 448 B1 (“Suenaga”)
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`Case IPR2013-00362
`Petitioner’s Updated Exhibit List
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`Curriculum Vitae of Richard C. Juergens
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`CODE V sequence data
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`US Patent Publication 2013/0329283
`(cited as exhibit 1030 during May 7, 2014 cross-
`examination of Dr. Sasian)
`US Patent No. 5,650,877
`(cited as exhibit 1031 during May 7, 2014 cross-
`examination of Dr. Sasian)
`United States Court of Appeals for the Federal
`Circuit decision in GE Lighting Solutions, LLC v.
`Agilent, Inc., Appeal No. 2013-1267 (May 1, 2014)
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`Cross-examination Transcript of Dr. Sasian for
`IPR2013-00362 on May 7, 2014
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`ZEISS 1034
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`U.S. Patent No. 7,450,300 (“Arriola Patent”)
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`ZEISS 1035
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`File History for U.S. Provisional Patent Application
`60/431,370 (“Arriola Provisional”)
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`ZEISS 1036
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`May 25, 2014 Declaration of Mr. Richard Juergens
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`ZEISS 1037
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`ZEISS 1038
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`ZEISS 1039
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`ZEISS 1040
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`ZEISS 1041
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`Cross-examination Transcript of Dr. Sasian for
`IPR2013-00363 on May 8, 2014
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`4
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`ZEISS 1042
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`ZEISS 1043
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`ZEISS 1044
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`ZEISS 1045
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`ZEISS 1046
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`ZEISS 1047
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`ZEISS 1048
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`ZEISS 1049
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`ZEISS 1050
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`ZEISS 1051
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`Code V Sequence cited in ZEISS 1036
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`Case IPR2013-00362
`Petitioner’s Updated Exhibit List
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Code V Sequence cited in ZEISS 1036
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`Email Permission from the Board to Modify Due
`Dates 4-6
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`SYNOPSYS® Invoice No. 70264518, dated March
`25, 2014
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`ZEISS 1052
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`Synopsys Key Site 28260
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`ZEISS 1053
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`ZEISS 1054
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`“Welcome to Code V PC Version 10.6 SR1 Build
`292581,” June 17, 2014, Synopsys, Inc.
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`Second Declaration of Dr. Jose Sasian
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`CERTIFICATE OF SERVICE
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`Case IPR2013-00362
`Petitioner’s Updated Exhibit List
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`Pursuant to 37 C.F.R. § 42.6(e), the undersigned certifies that on July 11,
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`2014, a complete and entire copy of this Petitioner’s Updated Exhibit List was
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`provided via electronic mail to Patent Owner by serving the correspondence email
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`address of record as follows:
`
`John S. Kern
`Robert C. Mattson
`OBLON, SPIVAK, McCLELLAND,
`MAIER &, NEUSTADT, L.L.P.
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`Email: CPdocketKern@oblon.com
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`Email: CPdocketMattson@oblon.com
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`Respectfully submitted,
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`/Christine L. Rogers/
`Christine L. Rogers
`Fish & Richardson P.C.
`60 South Sixth Street
`Suite 3200
`Minneapolis, MN 55402
`
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`Dated: July 11, 2014
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