(12)l#E‘Ffi'an%ifi’ill:%15l-VC’REE éhfdilllgfljfifi
`
`umfififlmfififififi
`EfiEfiE
`
`amafififia
`2001 5158 )5] 16 El (16.08.2001)
`
`
`
`pCT
`
`(10) Elfififififiw‘é
`WO 01/59502 A1
`
`(51) Elfififitfiififi
`
`G02B 17/08, H01L 21/027
`
`(21) Elfifljfififiw'B':
`
`PCT/JP01/OO912
`
`(74) l’fiflkzfi-ifli WEE-Eli. 91(SHIGA, Masatakeet
`al.); ? 169-8925 ifififlfififilz‘afia EifiET E 23§3
`1% OR I:“ )b Tokyo (JP).
`
`(22) EIIifi‘HjJEEEI:
`
`2001 $2 1519 El (09.02.2001)
`
`(25) Elfifljlfifiwéfifiz
`
`(26) afifilfiwééfiz
`
`(30) Efilfiv“—9z
`1%]352000-31285
`
`EIZFEE
`
`EIZlSEE
`
`2000 $2 )5] 9 El (09.02.2000)
`
`JP
`
`(71) HjJEEJk (*EIEIH‘: < étwtfiiliuzout): Hawaii:
`: :u p (NIKON CORPORATION) [JP/JP]; $100-$331
`iiififififiilznwwn E2§3% Tokyo (JP).
`
`(72) $11.21; i=3 at U’
`(75)
`fiwi%/HjJEEA (filélil 1:0 mt 033+): THEE):
`(TAKAHASHI, Tomowaki)
`[JP/JP].
`(fill $ 55E 7% (MI-
`TARAI, Kiyoshi)
`[JP/JP].
`E1? 48‘
`1E (KUMAGAI,
`Satoru) [JP/JP]. 122m: (TSUKAMOTO, Hiroyuki)
`[JP/JP]; T 100-8331 ifififlifl’cm IZSMDPSBT E 2%
`3% fifififl : :1 >115] Tokyo (JP).
`
`(81) TEES! (EM): AE, AG, AL, AM, AT, AU, AZ, BA, BB,
`BG, BR, BY, BZ, CA, CH, CN, CR, CU, CZ, DE, DK, DM,
`DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL,
`IN, IS, JP, KE, KG, KR, KZ, LC, LK, LR, LS, LT, LU, Lv,
`MA, MD, MG, MK, MN, MW, MX, M2, NO, NZ, PL, PT,
`RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA,
`UG, US, UZ, VN, YU, ZA, zw.
`
`(84) THEE! (rEfit): ARIPO 155$ (GH, GM, KE, LS, MW,
`MZ, SD, SL, SZ, TZ, UG, ZW), :L — 5 9 7 15%? (AM,
`AZ, BY, KG, KZ, MD, RU, TJ, TM), El — n v 1115??
`(AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT,
`LU, MC, NL, PT, SE, TR), OAPI 155$ (BF, BJ, CF, CG,
`CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG).
`
`fifi’fififiiifi:
`|§Il§§lfl§$fi§§
`
`2X-"T—zn— Pmfifimflaifilzomrm, Egfififiéné
`§PCTfifiv hwfififilztaitémrmé 12— MM?
`03714 GUJU — 1~J Eéj‘flfi
`
`(54) Title: REFLECTION/REFRACTION OPTICAL SYSTEM
`
`(54) filifiaafiffrx: fiéTJEtfi¥fi$3é
`
`
`
`1/59502A1
`
`(57) Abstract: A reflection/refraction optical system in which an effective stop installation portion is provided, a long-enough
`working distance is achieved, and as small a concave mirror as possible which is conventionally liable to be large. The system is
`characterized in that it includes, in the order from a first plane R toward a second plane W, a first image-forming optical system (G1)
`having a refracting lens, a second image-forming optical system (G2) having at least one concave lens and two reflecting mirrors,
`and a third image-forming optical system (G3) having a refracting lens, and in that the first image-forming optical lens (G1) forms
`C a first intermediate image (1M1) of the first plane R, the second image-forming optical system (G2) forms a second intermediate
`O image (1M2) by re-formation ofthe first intermediate image (1M2), and the third image-forming optical system (G3) re-forming the
`second intermediate image (1M2) on the second plane W.
`B
`
`[fifi’fi]
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 1
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 1
`
`

`

`WO 01/59502 A1
`
`||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
`
`(s7) E‘fi’a:
`
`fiflfiflbfifi%fi%fiélkfifié\V—%V7?x5yxéfifififl\kfl
`
`Lite 0 ##BfilwfififiET“? 6fifi/J\éb\%0>’6%fiifi‘é 3; t fifié‘éfififia‘fififi‘fi
`
`i%&%fi¢éo
`
`filfiRiDfiZfiwwmmu\Efivyf#6@é%1%@%$%Glt\w
`
`t<k$1o®mvyfk20®fi%%&%€f6%2%@%#%G2&\Efiv
`
`yfmgfiéfi3fififi$¥G3t\E§#\W%%1%Q%$%Glmxfififi
`
`1ER®§1$E%IM1E%$L\W$%2%@%$¥G2fi\fififilWEQ
`
`1M1éfifififé:kfi%2¢fifilM2é%fiL\%E%3%Q%$63%m‘
`
`WE%Z¢%@IM2éfififi2fiwtmfififiTé:t?%fikfbfi%fifi
`
`fii¥éfififéo
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 2
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 2
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`Ffifiéflié
`
`K%Efi%$%
`
`fifififi
`
`$%%fixfi%fifi%$%m%b‘%m;$§fi®§fimflwah6Xfyfl~
`
`a8w§fi¥fi®fi%fifi%$%fl%¢é%®fi%éoibfiwwmm\%flfifi
`
`Efifiwfifiynyifiwfififiéfifé1/4%&§®i§fl%mfi%%fi
`
`@fiflfifi%m%$%mfif5%®fihéo
`
`$flflfifi$fl%¥fifl$fll2$%081285%&E%&LT%0\%@W
`
`§%$%%%Kfi&%flo
`
`fifififi
`
`fifix$§$®flfi$¥§¢fy7$§gfiwflfifim\ififfidy7yk
`
`XN~X®wflmfifiafifin\:mawflawy%%%fiwé§%%%m\in
`
`%@h®%w%®fi§fiémr%fwéo
`
`:@%fi%fiflfétbmm\fi%§%®%fi®fifiéfifiEML\WONA
`
`(i‘fii’T—fiwfififilifit) Eié°< bfxoj‘mffocgriewo b75>b7f£75§r9\
`
`iBZEfififi< 72:6
`
`k\fiwflflwtbfifimwzéfiififixflmgflf<6°
`
`:wi5@%é\Efifii$fififi§%%fi®fl%%$%éfiflLtwfimxé
`
`
`WifiEfiiok<$fifikfiéo%0T\EfiéMé%@fi%%fifétbmfi
`
`
`%%$%EE%%®$T%$%E%&L\E%VVX%¢6:&M\##Kfibw
`
`%®t&éo
`
`CMK%LT\E%%$%®$T§%%E® %%$%%%fiié:k%fifia
`
`MTWéfi\C®%%\E%%$%fififlmb\#Ofi%fi®%fifimflflgkfi
`
`60fifi§®fi%%fifiééfifimé:km\flkwfiffiwrflfimfiéo
`
`%:Tfi%%$%kfifififimfizéfiififixfi%téfifi%$%kEflfi
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 3
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 3
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`éfik\Wb@éfi%fifi%$%fl\éfifi$émfwéo
`
`%®¢fi\fi%%$%®%%®fi¢f¢fi<t$1fimiw¢fififiéfifiéa
`
`47m\:Mifim\%fifi%®fi%$éMTWéfi\@mlfififiwgfi5®%
`
`MCBEELTAEJb 4%:325— 25170%&§$& \ 4%Fafifia63—163319%/A$E< \ #%Fafi$
`
`4— 234722%/A$E¢ \ USP — 4, 779, 966%L:Ffii<éflfc%® ras‘z-éwgma
`
`:E%%&fi®¢fi\Mfifiélfififififibfmé%®m\%%$$%M%%
`
`fififiwU94flflfl%%fl%fiéflk%$%fikéoZMB®%$%fi\Mfi%
`
`fififiénéfififififii%mfimf\fivyfwafifimémrfiv\E®N7
`
`~®fi‘c$:¥<7biffibmfl\fxmo Ycaficw filfiififil‘ffiflofflflfififiklfiafi’éfcfix
`
`
`Efifimfiflfi%<fivflbfi%oko
`
`ifi\%K\%%$k%fl%%£flfl%fiéfltfififimfiififi\%éfi%fl
`
`fi%@\%C@%$%T®Wfi%$%@flmif\%%@Efi%$%®flfifiEfi
`
`fiéfi<bfméfi\%%%$%éfiflbfwét@\%lfi(V?§WXHVX
`
`?)WT®V*%VV?4X§VX(WD)fimé<fioTLi5%Efl%oko
`
`ifigU94flmfl%%K%%éflk%$%Tfi\$Efii0%%fi®%2fi@
`
`%$%KME%E&%LTWEDLtfiof\%$%®%§fi%éééflfifét
`
`@Km\fififimfioTM@fimfi%#6:&K&D\MEfi®¢EMfifififi%
`
`@“Giépofco
`
`ik\Efi®Mfi%&E%#é%wfim\Efifi$fiwvyffifiémWT%é
`
`flfiElfifii‘EJéZfi‘ Chroma/f7°fliJJTLCfi<fF5zEéE7b§ébofco
`
`ffibE\%fi\%fi%§%figfifl6%@fi%ifiékw\%%%$%®NA
`
`kfi$fi$¥®NAk®EoE%W%K?éCkfififibflTW5o:®%%\%
`
`fi%$%flfi%mfib%fififb:kflfi%éfl\fifiméfikfi%fifi%$%é
`
`%%$%Kfifif§k\fifififibfifi%fifl %%$%¢®E:K%fim&w
`
`I k 6C7ZEO'CL/i 5o
`
`éEK\:0;afimfiwfififii%&fimW®%2fi(VIA~XM7V~%)
`
`mmfimféa47®fi%fifi%$%fim‘%m%$®%%#6fi%fififi%bt
`
`CARL ZEISS v. NIKON
`|PR201300362
`
`Exmmp4
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 4
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`%\%2Eifi®fi%fifi<fim&wkb\:®%%$KfixéMé %‘$%®
`
`vyffififi%5%<finf\%®kbfiam6%$%®fiéém@5flt%®k
`
`fia§ééfitmotothENA®%%%fl%EE%T%\mankfiémg
`
`<@%$%Mflfikémétw\Win~tfi%%$%®%fi&®fifi\wb@é
`
`U~%Vfi?4xayx(WD)fiE<Rm&w%$%&morwto
`
`ik\H:wi5&%%®fi%fifi%$%mkwrm‘%%®%%%%ffi¢fi
`
`fibéfié%%flh0\wh@éfi®%$%kfiofhko:®fifi%$%®fib
`
`%fi®%%¢¥fl\fififi£bxfimfim%%§®%$%%%fifé:kflfi%fi
`
`7330.730
`
`K%%Tfi\B:m%fifim%&\fifitfib$§%fi%fié:tfif%\U—
`
`#Vfi?xayx%fififim\fiflK&D%B&MEfiET%éEwméw%wfi
`
`fififa:&#fl%&fi%fifi%$%é%fi¢é:k&a%&¢éo
`
`%%®%fi
`
`
`$%%Tm\iififi%§fif§twm\filfiRiDfiZfiwwkflflxflfi
`
`vyxmgfié%1%@%$%G1k\wt<k%10®wvy2tzo®§%fi
`
`&E€¢é%2%@%$%G2&\EfiVVf#E&é%3%@%$%G3&\é
`
`€$\WE%1%@%$%G1M\fififilfiRwfil$fifilMlEfifib\fi
`
`fi%2%@%$%G2m\fififil¢fifiIM1éfifififfi:kfi%2¢fi@1
`
`M2%%WL\WE$3fiQfi$G3%m\fififizwfifileémfi%2fiw
`
`:«Efififé:ké%&k#éfi%fifi%$%é%fi¢éo
`
`it\$%%fim\:®fi%fififii%%fimt %§%§%&w %§%fi&
`
`%%fiféo
`
`Ewmmm‘%%k\fififlawfifiéfilfiRiKm—fififétwwfififi
`
`%%k\%1fiREfizfiwm&%féfifi®§%Efifii%&\%@U:&%%
`
`fikiéfl%§%%fiéfifif50
`
`it\fifiiwfififiéfi%b\%%%$%Kib%%%%%lfiRiKfl~%
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 5
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 5
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`%L\fifiwfi%fififii%%fiw1%1ER%%ZEWA&%L\fiZEWwfi
`
`fiéfi:&&%&k¢éfi%fififi$é%fi¢éo
`
`Efi®%$@%%
`
`®1fi\$%%Kiéfi%@fi%$%®fifififkéo
`
`@2m\filfififlmfi%fifi%$%®fi%mfikéo
`
`E3m\%1%mwmavm%mvhéo
`
`@4m\fil$fifl®fifimfim\%RW%E&@E@W%ET%60
`
`a5m\$2gmmwfi%fifi%$%wfifiuv&éo
`
`E6m‘%2%mwwnvmfififikéo
`
`E7m\fiéfimflwfiEW%E\%EW%E&@E@W%ET&6°
`
`E8m\fi3fiflm®fi%fifi%$%®%%gfi%éo
`
`E9m\%3%WW®:7W%ET&éO
`
`Elofix$3$EW®WEW%E\$fifl§®fifi§fifl§flf$éo
`
`Ellfix%4$EW®E%Efi%$%®%%ET%5O
`
`E12fi\%4%HW®:VW%ETE6°
`
`E13m\fi4$flfl®fififlfin\fififlfigfiwéfimfiufhéo
`
`@14fi\$5iflmwfififififiifiwfififlfi%éo
`
`215m\%5$mmonvm%mv%ao
`
`
`
`E16m\fi5iflflwfifimfifi\#fifl%®&@§$flfiflfi&éo
`
`217m‘fi6$fifl®fi%fififi$%®%%flf%éo
`
`‘E18MN%B%EW®ZVW%ET%EQ
`
`E19m\%6%wW®fiEW%E\%EW%®&@E@W%E?&6D
`
`E20m\%7%EW®&%Efi%$%®%%Efihéo
`
`n21m\%7%wwwavW%@v%ao
`
`E22m\%7%WW®%EW%E\#fiflfi!&0§$fi%flfikéo
`
`E23fi\%8%flfl®fifififi%$%®%%flfi&éo
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 6
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 6
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`E24fi\%8%flfl®37W%ET%éo
`
`E25fi\%8imflwfifififig\#fiflfiflfifiéflflfifif%éo
`
`E26fi\$%%mié&%§%%fi®@fikéo
`
`E27fi\fi%%fiiéfi%§%fi%®$fl%fibk®fikéo
`
`fifiéfiwiékwwfiaw%%
`
`:fiwi5@%1%@%$%G1~%3%@%$%G8%fi%¢élkfi\Cm
`
`B®%@%$%®%flfl1$®fifikfifiéi5K%fifi%éo
`
`%OT\$%%®K%Efi%$%Kihfl\Wh©éfi¥b6®fi%fifi%$%
`
`fififiktofmt\fiflflfibbfwétbm%fikt6fi®fi$¥®fi®flfi
`
`®%%W¥flfigktb\fifi§®%$%&%fifélkfifi%éo
`
`EK\fi%@fi%$%fi%fl¢é:kmiv\fifififi%$%®%fifikééfi
` LLLH'
`
`Eflfiéméwfi\$~fifimiéfifimflfifikfiéo
`
`EKEK\Efi%$%%fi(%1%@%$%&@%3%@%$%)KwaU—
`
`%§Afimétw\EwfimtwflBt&ny~wfl%\MEfi$fi®fi®Ny
`
`Vfiwwfimibxfifiéfl\%émokfifi:kfifi%éo
`
`%B6A\:wififififiEkék\%1¢%@IM1E%1ME%K1(20
`
`®wfifiwfib%1%@%$%G1®fi<KEEémTWéMfifi)®¢bfimfi
`
`fimfi@éfi\%2¢%@&%2mfifiK2(200Mfifi055%3%@%%fi
`
`G3®fi<mfifiémfwéMEfi)®¢®%mfifimfifiéfi\%mfi%®¢b
`
`%D%@LT\%%%%E%fiK%<%%fl%éo
`
`:wtw\fiflfimm\$bfifi%fifififéfi\¢%@0fi%3fi\MEfiw
`
`fi§émmbrmé<\it¢fi®®fi®fifi#\MEfiwfiEmfier§<fi
`
`mTWEwtb\A%E®fi%éflfif§$bfififl®fi§é\mb@颮fifi
`
`$M@#T%D\%@%%Ki%fi%@%fiifiwo
`
`it\¢%%mxfifi%2fiW@%mfiawwL\W%%2%@%$%®9&
`
`<k$1o®mvyfwfififié©kfék%\HT®%WEfiE?éCkflflE
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 7
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 7
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`Lwo
`
`8X®<1000XNM
`
`:®%#fi\K%Efi%$%mfifiénéfifivyffififififiéwflm¢ék
`
`bwéfififififipéo Z®7RM¢72EHMLE> J; Efil/Vfifiifififififiwmflimfifiifi:
`
`€60
`
`.
`
`$71 fifififififfi$i¥¢m J; D fi'fifiaf;%®%fi%i 5 (2&6 & é“ m 2 1 m1:
`
`®EfiVVfflgfifiéhéCEfifiibmo%b‘23Wfli®EfiVVXWB
`
`fifiéméifimfflfi\fimfiwfififl%BMEo
`
`itxE%Efi%$%m\fifithwkwfififiifim<w%é¢mH®Efi
`
`$K%%fi&é%ém\20fiflTmfifivyfmafifiéMé:kfifiibwo'
`
`%L\1SfiuTwfifivyfmgfifiémaiémfmfi\Emawfififlfia
`
`ME»,
`
`Emfiibmfifikbffi\flfi®20wfififiwfimfiméfibto‘EW%
`
`Efifimfififétbflmxfifi®20®fi%fifi\EWKEEE%E%WWW%
`
`bfiéflfllfi émcmmfiwgzs : 3: 733‘??? MM,
`
`ik\%1%@%$%G1m\¢&<k%\20BL@EVVffifiméh\%
`
`3%@%$%G3fi\@fi<&%20Hi®£vvfifififiéflélkfiflibwo
`
`EK\%1%@%$%Glitm%3%@%$%G3K\9@<&%10mi®
`
`finfibéfififb:&flfiibwoit\%1%@%$%elikm%3%@%
`
`$%G3Km\wfi<&%10Hi®¢bfififi&fi%¢é:tfifiibwo:w
`
`i5K¢6:&T\@E®&§Efi5lkfifl%éo
`
`it\fi%fifi%$%m‘fififi&9@<&%5fiuifia:kflfiibmofi
`
`%fi%%wé:&fi\E%%$%®E%EM$VVX®WfiWMfiE&fi%be
`
`EK\fi%Efi%$%®EfiVVXE\i&ffi—®fifi\%K\%Efi%&f
`
`é:kfifiibmomfikbfm\ifiufimm\7y$%%mbk5%fifix%
`
`7y$m%%®%%fl%iBméo
`
`‘
`
`E71 20®EE$§~E® 5 ”a ’% 1 fifiE‘JRclifibflfllfiafiéhfwé 160375:% 1 DD
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 8
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 8
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`fifiK1&L\fiZEWwKfiwfiKEEéMTwé$®€fi2flfifiK2kL\
`
`fil$fi®nmwmfimafilmfifiKl@flfiifi®fi%%dL%2$%@1
`
`Mzmmfimg%2MfifiK20$Eifi®fifiéd2kL\fizfiwtwfi%fi
`
`mwafié®w&¢é&%\QT®%#&fiE#6:kfiflibwo
`
`[dll
`
`< ©w
`
`IdZI
`
`< @w
`
`dlm%é%#m\%1%@%$%G1&w%2%@%$%G2®fifl&Efifi
`
`fifi?fifi¢é%®fih0\d2K%é%#fi\%2fififi$%G2&U%8%@
`fiéfiG30Eflfifififififi§fififb$®fihéo:m%%#®%@&fl%¢
`
`6k\th#®%@%$%®EfififlflfimkD‘EfififlfifiEflflfimfié
`
`&E%K\MEfiwmflmfifi%mfiéo
`
`it\E%Efi%$%fi\%1fiRW\ikfifiZEWwfithy%Dyfifi
`
`%$%fi%é:kfifiibmo
`
`fi%%miéfifififi%$%m\gxwmm\Elmfifiam\%1fiRib
`
`fiZEWWAEK\%1%@%$%G1\%2%@%$%G2&0%3%@%$%
`
`GBiDEfiéMTMEO::T\%1%@%$%G1M\%1ER®%1¢%@
`
`
`
`1M1%%2%@%$%G2@Hfim%fiféoEK‘%2%@%$%GZM\%
`
`1¢%@IM1@fifiQfifikéfiz¢%@IM2%%3%@%$%GBafifi
`
`Kfifibx%3%@%$%G8fixfiZ¢EQIM2E$2EWiKfi®éfiéO
`
`E1KH‘%1ER\%1¢%@IM1\%2¢%@IM2&3%ZEW®%@
`
`@%Kié%¢&fi@@fi%fi\%Wémwffiémfwéoik\®1fim\$
`
`%%Kiéfifififi%$%%fififlfl%fifi%fimfifiLtk%®\%1ER&0
`
`%ZEWLT®%Efifi%fiémTWEOfilfiRfififiZfiWifiwfifififim\
`%m%fifi%®fifikfiéoik\%%fifl&@§%fiflfi\%fl%$btféfi
`
`E%%fifi%éofi\%3%@%$%G3¢Km\fiDKDSNWEEéMTw
`
`be
`
`Ek\BTKfif%$flmfimfififi&fimffiv\*Wfififiéiffififl?
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 9
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 9
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`@fiDTkéo
`
`yZ/r
`200=————————*———~—+Ay4+By6+Cy8+va
`MW
`
`V:%%#E®%é
`
`zzfififimg#fifiifiwfiflfifi®fi%
`
`rzfifi@$$%
`
`K:Wfi%fi
`
`Aaamfififi%fi.
`
`EflxflTKfi¢%¥mW®fi%‘$%fixfiffigflioffifiéMTWéo
`
`i5®fifi$m\fifil57nmfil.56000fihéo
`
`HTK\$%%Kié%%ww%fifouTmfif%$?\wmfiifiéfib\
`
`Rmfifi%fiéfib‘3mflfiflfibéfiLTWéo
`
`E%1%WWJ
`
`filiflflfiiéfi%fififi$%fi\H2Kfi¢i5fl\%lfiRi0%2fiW
`
`Mmfim\%1%@%$%Gl\%2%@%$%G2&0$3%fi%$%e3iw
`
`fifléflTWEo%1%@%$%Glfl‘%lfiRWibfiK\3&0Eflzxw
`
`xvyf\3&wfi;:xfixvyf\ZfiwEvyffifi3fiwfixzxwxv
`
`meivfifiéfl\%2%@%$%G2m\1&0Mfifiy2fi®fi%:2flx
`
`VVXfiUlfiwmfifiKioffifléMTwéoit\%3%%%$%G8fi\
`
`1&0E}:xwxvyf\lfiwfivyf\2&®E%:xwxva\1&®
`
`gvyf\4&®E%:xwxvyx\1&wfivyffiwlfiwfix:xwXV
`
`yfimibfifiémfwéo
`
`itxxiwwwfififififiifimxfimfi$fi%%%k%2fiwww%mfi
`
`(M)fi§0%\%1fiRW®%fi%w%fi31gmkfiZEWwwfififififi
`
`awmmfi&@\%2fiwimfifi%4félz5x6fimm®fififimkbfm
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`Ex.2016,p.10
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 10
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`é.:nmib.ifibffifiéfi5:kfi.颮§%EEM11w<%mm:
`
`Ixcwéo if; WDM. ”iglfiRfiumo. 9128301“. %2fiW4RIJT°13.2346251%
`
`’60
`
`fiflfémfifiwfifim.%02mmuT.fi%VVf®¢T.2fiwfifiwv
`
`yiwfififim2%9mwflfimw.%®m®fi%fiwvyf®fi%@mw3Mm
`
`flTfikb.fi%®:®x&yiffifiéhéfifi%fifi%$%®fifivyfwfi
`
`%%i@%.mtbmém%®fihéo
`
`mfifiwfifi%®%fimfiiéE%KMNAmfi195%fihb.fifififimfi
`
`ib%@fi¢fi<.fifi%fifi%fié:kfifi%éo
`
`Efivyf%m%fiéfifib.%%%F21%v?v~#~®1mnm®fifim
`
`18016. $113113 1 pm wfifllfififlifii‘fiémfw/Eo
`
`it.fl3&@fl4mfififim.fifimfi.:7W%.%fiW%&OE$WE
`
`k6fifififlfiflfiwfifiiTEfiKfiEéhqfifltfifi®fi$$éfifibfw
`
`be
`
`%1
`
`@§%
`
`fi$$fi
`
`fififi
`
`1
`
`—3000.00000
`
`20.777380
`
`CaF2
`
`(3 1
`
`K 1 0.000000
`
`A I —.414199E—07,
`
`B I 0.101382E—11
`
`C I —.507220E—17
`
`D I 0.410909E—20
`
`“187.15560
`
`92.403460
`
`—558.99669
`
`25.971725
`
`CaF2
`
`—210.93675
`
`15.861605
`
`263.61227
`
`25.971725
`
`CaFZ
`
`1257.90730
`
`13.379506
`
`K 1 0.000000
`
`2
`
`3
`
`4
`
`5
`
`6
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 11
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 11
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`10
`
`A I -.355346E-07
`
`B 2 0.293775E-11
`
`C I 0.514678E-17
`
`D 2 0.170581E-19
`
`150.00000
`
`29.
`
`526565
`
`CaF2
`
`94.28503
`
`30.
`
`499818
`
`420.59234
`
`20.
`
`800000
`
`CaF2
`
`10
`
`141.55197
`
`13.
`
`169057
`
`K 1 0.000000
`
`A Z —.137576E-06
`
`B I —.430519E~10
`
`C I 0.994337E-14
`
`D Z
`
`-.468002E-17
`
`11
`
`12
`
`1.3
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`522.48173
`
`20.
`
`722934
`
`CaF2
`
`155.53167
`
`6.
`
`108278
`
`1055.46476
`
`17.
`
`359120
`
`CaF2
`
`~130.14083
`
`“22.
`
`492621
`
`671.87155
`
`21.
`
`568896
`
`CaF2
`
`~160.00000
`
`37.
`
`130352
`
`—225.56184
`
`20.
`
`677950
`
`CaF2
`
`K 1 0.000000
`
`A 2 —.144554E-06
`
`B I 0.106034E—10
`
`C I —.946352E—15
`
`D Z 0.959437E*20
`
`~101.07298
`
`14.
`
`929386
`
`156.60829
`
`20.
`
`000000
`
`CaF2
`
`241.09685
`
`.949536
`
`191.75976
`
`20.
`
`777380
`
`CaF2
`
`480.17990
`
`.469721
`
`127.28576
`
`33.
`
`411885
`
`CaFZ
`
`—1587.54253
`
`29
`
`129562
`
`K 2 0.000000
`
`CARL ZEISS V. NIKON
`|PR2013—00362
`
`EX. 2016, p. 12
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 12
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`11
`
`A I 0.223492E-06
`
`B I 0.383833E—11
`
`C 1 *.194220E-14
`
`D I 0.106429E~17
`
`238 26996
`
`35.
`
`886388
`
`{MERE
`
`376.45128
`
`25.
`
`609160
`
`CaFZ
`
`G—2
`
`150.58157
`
`97.
`
`992889
`
`K : 0.000000
`
`25
`
`26
`
`27
`
`A I “.161976E-07
`
`B I
`
`-.584652E-12
`
`C :
`
`-.193271E-16
`
`D 2 ~.650552E—21
`
`28
`
`-194.22167
`
`25.
`
`609160
`
`CaF2
`
`K 1 0.000000
`
`A : 0.132322E~07
`
`B 1 0.673254E—12
`
`C I 0.256289E-16
`
`D i 0.413237E—21
`
`*1120.36909
`
`31.
`
`786896
`
`-246.29797
`
`*31
`
`786896
`
`REF
`
`~1120.36909
`
`-25.
`
`609160
`
`CaF2
`
`~194.22167
`
`-97.
`
`992889
`
`K 1 0.000000
`
`29
`
`30
`
`31
`
`32
`
`A I 0.132322E-07
`
`B I 0.673254E—12
`
`C I 0.256289E—16
`
`D 3 0.413237E-21
`
`33
`
`150.58157
`
`~25.
`
`609160
`
`CaF2
`
`K I 0.000000
`
`A 2 —.161976E-07
`
`B I
`
`-.584652E~12
`
`C 2 —.193271E-16
`
`D 2 —.650552E~21
`
`34
`
`35
`
`36
`
`37
`
`376.45128
`
`—35.
`
`886388
`
`238.26996
`
`35.
`
`886388
`
`REF
`
`376.45128
`
`25.
`
`609160
`
`CaF2
`
`150.58157
`
`97.
`
`992889
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.13
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 13
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`12
`
`K I 0.000000
`
`A I —.161976E-O7
`
`B : —.584652E—12
`
`C I 4.193271E-16
`
`D : —.650552E-21
`
`38
`
`”194.22167
`
`25.
`
`609160
`
`CaF2
`
`K : 0.000000
`
`A': 0 132322E—07
`
`B : 0.673254E—12
`
`c : 0.256289E—16
`
`D : 0.413237E-21
`
`—1120.36909
`
`BL
`
`786896
`
`-246.29797
`
`BL
`
`010448
`
`flifiafifi
`
`—3000.00000
`
`43.
`
`702739
`
`Can
`
`G—B
`
`K 1 0.000000
`
`A 2 *.241471E~O6
`
`B : —.1897OOE—1O
`
`C I 0.150133E—14
`
`D : —.600549E—18
`
`-126.02993
`
`5.
`
`832116
`
`~506.82326
`
`18.
`
`699642
`
`CaFZ
`
`619.13207
`
`26.
`
`763769
`
`-1377.00220
`
`44.
`
`048046
`
`CaF2
`
`K 2 0.000000
`
`A 1
`
`-.502983E—07
`
`B 2 0.363010E-11
`
`C 1 -.133698E-16
`
`D I —.278297E*20
`
`—126.12121
`
`5.
`
`581666
`
`-3000.00000
`
`3L
`
`166070
`
`CaFZ
`
`*211.50805
`
`10L
`
`102525
`
`~404.56272
`
`l8.
`
`699642
`
`CaF2
`
`3000.00000
`
`18.
`
`000000
`
`321.09183
`
`25.
`
`000000
`
`CaF2
`
`3000.00000
`
`31.
`
`200000
`
`39
`
`40
`
`41
`
`42
`
`43
`
`44
`
`45
`
`46
`
`47
`
`48
`
`49
`
`50
`
`51
`
`52
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 14
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 14
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`13
`
`K 2 0.000000
`
`A I 0.262291E-07
`
`B I 0.174496E—11
`
`C I 0.726166E—16
`
`D I —.125632E~20
`
`co
`
`32.963838
`
`STO
`
`179.49045
`
`30.535668
`
`CaFZ
`
`3000.00000
`
`42.026705
`
`228.90738
`
`20.198128
`
`CaF2
`
`3000.00000
`
`1.123733
`
`Kl: 0.000000
`
`A I 0.118587E-07
`
`B I ~.220599E*11
`
`C I 0.904169E-16
`
`D 2 —.814939E~20
`
`100.73952
`
`33.183232
`
`CaF2
`
`1100 00000
`
`6.964116
`
`-2754.43020
`
`15.000000
`
`CaFZ
`
`K 1 0.000000
`
`A I —.182017E-07
`
`B I —.884609E—11
`
`C I 0.715263E-15
`
`D 2 ~.161609E-19
`
`493.21390
`
`6.009195
`
`164.38322
`
`40.068312
`
`CaF2
`
`2793.72651
`
`13.234625
`
`53
`
`54
`
`55
`
`56
`
`57
`
`58
`
`59
`
`60
`
`61
`
`62
`
`63
`
`[$2fiflfl]
`
`fi2iflmmiéfififii%fi.ESKfi¢i5fl.%lfiRiD%2fiWWA
`
`Em.%1%@%$%G1.%2%@%$%G2&0%3%@%%%G310%fi
`
`émfwé.%1%@%$%G1M.%1fiRwibflm.8&®E%:x62v
`
`yi.3&®fix:xwxvyf.2fiwlvyf.1&wfiizxflxvyf.
`
`2&®E%:XWXVVX.K10 fifiéfl\%2%@%$%G2fl.lfi®wfi
`
`fl.2&®fi%:xwxvyfkwlfiwmfififlioffifléméo%8%@%
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.15
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 15
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`14
`
`ETGBi lfiwEiz XflXV/Z 1E®EVVX\2E®E%:2fixv
`
`VX\1&®%VVX\4&®EXSXWXVVX\lfiwfivyffi§lfiwfi
`
`%:xfizVVfEiDEEéméo
`
`EE\$EEW®EEFEEEEE1\EE{EEEL%E\E2EWE®EDE
`
`(M)fi§Q%\%1ERW®%fi%wEfl31MMLfiZEWW@%fi@%fl
`
`0%mmTED\E2EWE®EEE4£E115X68mm®EEEDELTw
`
`50:flfli@\fifibffifibxéfiwfififififillzxZBmELTWéo
`
`if; wmi‘ E1EREIJT50000000T E2EW1§IJT12885033TE60
`
`EEEéEEEwEE: E1.mmu$ EEVVX®¢T ZfiwEkwv
`
`VX®EEE12£4mmHTTED TmeiEfi®VVX®EEEEw7m
`
`MTTED EEw: @xayiTEEéméFEEEEEEEEwEEVVfiwfi
`
`EE EDE mthémeTEé
`
`EEERwEEEwfifi fiTEWEEiNAET195%TED\F@E
`
`zéEEiUE< Efi
`
`EfiflfL/L/Pffiflkifi323%k:fiffi11‘
`
`E6: khTEé
`
`fiéfl$fii3:flesz<zL/~—1F~—o> 157 nm ODEEféézjaci
`
`5‘ EEE 1.0 pm @ElfiEfiEfiVfiéfl/TWEO
`
`itxfl6fiwfl7mfiTi5ETEEWE ZVWE EmWEEUEEWE
`
`EEE EEWEK EVEEEETEfiCfiEéfl‘EflcfifiEwfiifiEEfibTw
`
`60
`
`EEZ
`
`EEE
`
`EEEE
`
`EEE
`
`1
`
`—3000.00000
`
`22.000000
`
`Can
`
`(3 1
`
`K : 0.000000
`
`A : — 375155E~07
`
`B : 0 129267E—11
`
`c : ~.129447E—16
`
`D : 0.274885E-20
`
`2
`
`—218.25882
`
`41 898836
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.16
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 16
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`15
`
`3
`
`4
`
`5
`
`6
`
`7
`
`8
`
`9
`
`-3000.00000
`
`25.000000
`
`CaF2
`
`-265.75937
`
`86.054775
`
`300.00000
`
`22.000000
`
`CaFZ
`
`3000.00000
`
`11.507785
`
`K 1 0.000000
`
`A : ~.102302E-06
`
`B : 0.102917E-10
`
`C I —.714527E-15
`
`D 2 0.909317E-19
`
`'
`
`150. 00000
`
`27.000000
`
`CaFZ
`
`71.75645
`
`16.962700
`
`200. 00000
`
`20.000000
`
`CaF2
`
`10
`
`122. 85291
`
`15.439142
`
`K : 0.000000
`
`A Z —.378318E—06
`
`B Z —.498418E—10
`
`C 2
`
`-.128598E~14
`
`D I —.199685E—17
`
`146.25968
`
`30.000000
`
`CaF2
`
`139.83639
`
`10.118498
`
`460.91251
`
`28.000000
`
`CaFZ
`
`"181.83259
`
`1.474583
`
`379.98094
`
`30.000000
`
`CaFZ
`
`~160.00000
`
`7.912058
`
`~123.03514
`
`28.000000
`
`CaF2
`
`K : 0.000000
`
`A I —.208938E~06
`
`B 2 0.209050E~10
`
`C I
`
`-.124108E-14
`
`D : 0.352951E-19
`
`-120.00000
`
`23.793826
`
`154.53035
`
`26.413867
`
`CaF2
`
`3000.00000
`
`18.842245
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 17
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 17
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`16
`
`21
`
`22
`
`23
`
`24
`
`25
`
`26
`
`27
`
`.08880
`
`20.627044
`
`CaF2
`
`00000
`
`1.000000
`
`.34399
`
`30.000000
`
`CaF2
`
`.12023
`
`26.907782
`
`.000000
`
`.381003E—06
`
`B I ~.408725E—12
`
`.342442E-14
`
`D I
`
`0.111847E—17
`
`.62900
`
`35.099236
`
`fliifififi
`
`.56551
`
`24.500000
`
`CaF2
`
`C}2
`
`.71717
`
`94.548398
`
`.000000
`
`.217437E—07
`
`B I -.764297E-12
`
`.243829E—16
`
`D Z —.748680E—21
`
`28
`
`41916
`
`24.500000
`
`CaFZ
`
`29
`
`30
`
`31
`
`32
`
`.000000
`
`.124614E—O7
`
`B I
`
`0.604420E-12
`
`.282232E—16
`
`D Z
`
`0.819848E—21
`
`98312
`
`30.366264
`
`54732
`
`88312
`
`~30.366264
`
`;24.500000
`
`REF
`
`CaF2
`
`41916
`
`—94.546398
`
`.000000
`
`.124614E—07
`
`B I
`
`0.604420E-12
`
`.282232E—16
`
`D I
`
`0.819849E—21
`
`33
`
`.71717
`
`-24.500000
`
`CaF2
`
`.000000
`
`.217437E—07
`
`B I
`
`-.764297E—12
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`Ex.2016,p.18
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 18
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`17
`
`34
`
`35
`
`36
`
`37
`
`C : —.243829E-16
`
`D I
`
`-.748680E~21
`
`373.56551
`
`—35.099236
`
`232.62900
`
`35.099236
`
`REF
`
`373.56551
`
`24.500000
`
`CaFZ
`
`145.71717
`
`94.548398
`
`K 1 0.000000
`
`A I -.217437E-07
`
`B I —.764297E-12
`
`C I -.243829E-16
`
`D I
`
`-.749680E*21
`
`38
`
`~190.41916
`
`24.500000
`
`CaFZ
`
`K 3 0.000000
`
`A I 0.124514E-07
`
`B I 0.604420E-12
`
`C I 0.282232E-16
`
`D I 0.819848E~21
`
`-943.88312
`
`30.366264
`
`-236.54732
`
`33.729741
`
`fliiflfifi
`
`—450.36737
`
`41.135626
`
`CaF2
`
`G—3
`
`K 3 0.000000
`
`A I -.432734E-06
`
`B I -.232778E-10
`
`.110038E-14
`
`D :-—.185850E-17
`
`~88.82504
`
`13.515170
`
`~770.53251
`
`24.997527
`
`CaF2
`
`313.49776
`
`24.914648
`
`—1500.00000
`
`36.582629
`
`CaFZ
`
`K 1 0.000000
`
`A I -.227670E*07
`
`B Z 0.511173E-11
`
`C I -.142371E~15
`
`D I 0 782866E-21
`
`-136.02375
`
`1.001269
`
`-3000.00000
`
`34.147454
`
`CaFZ
`
`39
`
`40
`
`41
`
`42
`
`43
`
`44
`
`45
`
`46
`
`47
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.19
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 19
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`18
`
`48
`
`49
`
`5O
`
`51
`
`52
`
`53
`
`54
`
`55
`
`56
`
`57
`
`58
`
`59
`
`—172.27507
`
`80.378735
`
`—298.04283
`
`26.000000
`
`CaF2
`
`900.11429
`
`18.000000
`
`216.17422
`
`26.986309
`
`CaF2
`
`1840.88546
`
`29.082204
`
`K 2 0.000000
`
`A 1 0.305762E-07
`
`B I 0.350662E-11
`
`C I H.150807E-16
`
`D I 0.100764E-20
`
`INFINITY
`
`32.814087
`
`STO
`
`183.92572
`
`27.075959
`
`CaF2
`
`2999.93355
`
`40.709071
`
`199.36289
`
`21.746889
`
`CaF2
`
`3000.00000
`
`1.000299
`
`K : 0.000000
`
`A I 0.334340E—08
`
`B 3
`
`-.123754E—11
`
`C I 0.220160E—15
`
`[)2 ~.245539E—19
`
`107.10593
`
`31.458160
`
`CaF2
`
`1100.00000
`
`5.646428
`
`60
`
`-23185.44979
`
`15.000165
`
`CaF2
`
`K 2 0.000000
`
`A : 0.165825E—07
`
`B I —.600208E-11
`
`C I —.104560E-14
`
`[)2 0.976604E-19
`
`678.36633
`
`3.108222
`
`172.06068
`
`38.667335
`
`CaFZ
`
`2689.20000
`
`12.335033
`
`61
`
`62
`
`63
`
`E%3%mm1
`
`fi3iwflfliéfi%flfi%$%fi.H8Kfifi5fl.%1fiRi0%2fiW
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`Ex.2016,p.20
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 20
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`19
`
`wmflm\%1fififiifiG1\%2%%%$%G2&w%3%@%$%e3iv
`
`Efiémrwéo%1%@%$%G1m\%1fiRwiwflm\lfiwéjzxw
`
`XVVX\1&0EVVXg3fi0EXZXfiXVVX\1fi®EVVX\2fi®
`
`E%:xwxvyf\2&0EVVXfi02fi®E%:XflXVVXKiDfifié
`
`m\%2%@%$%e2mx1&0Mfi%\zfiwfix:xvayf&w1&®
`
`@fifimioffifléméo%3%@%$%G3fi\1W®EVVX\1&®EV
`
`Vf\1W®E%:XWXVVX\lfiwEVVf\1&®E%:XfiXVVK\
`
`1&wfi;:xflxvyf\4&®E%:xwxvyf\lfiwfivyfxlfiw
`
`fix:xfixvyffiwlfimEjzxwxvyfmiDfifiéhéo
`
`it\$$fifl®fi%fifi%$%fi\fimfigfimfik%2fiwwwfimfim
`
`fl§0%\filfiRfl®%fi%¢%fi52&m\fizfiwwbfififififl132m
`
`TfibxfiZfiWi®§%%%Xfi25X83mm®fi%%flkbfhéoChm
`
`i@\%ELT§%L\颮§%EEMZSX33m1kbfhéoik\WD
`
`uh 5% 1 fiRLEIJWz. 73469.5“C‘x % 2 fiwfiflmi 227255fl9>éo
`
`fififéflfifiwfifim\flmman\fimVVf®$fi\zfiwfifimvv
`
`fwfififimemmuTF%D\%®m®k%fiwvvf®fi%%Mm8mEL
`
`T?%D\fifi®:®x&y§TE$§fléEfi$fififi$fi®fifiVVfwfifi
`
`fiib%\mfiwmém%®fihéo
`
`wfifiwifififimfifiazflféfifififim NA H31“ 20 % (*2?) D \ filfilrifiaczfiz
`
`é%@d¢fi<xfififififiéfié:kfifi%éo
`
`Efivyf%mfifiéfifib\%%%F2I%Vvv_f~®1mnm®fifim
`
`imb‘ WEE 2pm ODEWE’FfiEfiVOCéfl’L’CWéO
`
`it\@9&wulokfiiibm\fifiW%\:7W%\#fim%&wéflw
`
`$3: 16 éibffififlxfimfiwfiéiTEZELKEE3m {Enfclrifi‘émfis‘iy'fi wait?
`
`b\éo
`
`$3
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 21
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 21
`
`

`

`W0
`
`01/59502
`
`PCT/JP01/00912
`
`20
`
`50%;
`
`5
`
`5%¥@
`
`793 FEE [5%
`
`1
`
`~136.00000
`
`15.000000
`
`0552
`
`G-l
`
`K : 0.000000
`
`A Z 0.99805OE-08
`
`B 1
`
`0.5105535—12
`
`C I 0.153012E—16
`
`D I
`
`—.2171715—21
`
`[\3
`
`070‘!er
`
`~280.24011
`
`12.367879
`
`824.65854
`
`25.000000
`
`0552
`
`—630.63185
`
`29.306996
`
`367.00000
`
`30.000000
`
`0552
`
`3369.70734
`
`49.355231
`
`185.29178
`
`30.000000
`
`CaF2
`
`765.47740
`
`105.549042
`
`87.12316
`
`25.000000
`
`0552
`
`10
`
`212.44581
`
`19.990367
`
`K : 0.000000
`
`A : 0.138348E—O6
`
`B :
`
`-.918315E—11
`
`c : 0.674753E—16
`
`D :
`
`-.616258E—19
`
`11
`
`1191.07265
`
`15.000000
`
`CaFZ
`
`12
`
`13
`
`14
`
`K I 0.000000
`
`A I —.504421E-07
`
`B 3
`
`-.198646E-10
`
`C I 0.356131E-14
`
`D I
`
`-.188067E-18
`
`72.65953
`
`9.441689
`
`94.32523
`
`15.000000
`
`CaF2
`
`135.06748
`
`56.976866
`
`K 2 0.000000
`
`A I
`
`'.593887E*07
`
`B 3
`
`-.549307E-12
`
`C 2 0.331050E—14
`
`D I
`
`0.838079E-18
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 22
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 22
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`21
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`~68.56232
`
`20.
`
`000000
`
`CaF2
`
`-70.74293
`
`41.
`
`134534
`
`567.87517
`
`25.
`
`000000
`
`CaFZ
`
`~194.21146
`
`10.
`
`854699
`
`210.32584
`
`30.
`
`000000
`
`CaF2
`
`~387.06333
`
`5.
`
`932971
`
`163.81379
`
`35.
`
`000000
`
`CaFZ
`
`1102.33199
`
`1.
`
`887552
`
`K 3 0.000000
`
`A I 0.158223E-06
`
`B : —.539232E—11
`
`C 1 0.714678E*15
`
`D I
`
`-.255633E-19
`
`140.36912
`
`31.
`
`500000
`
`CaFZ
`
`25
`
`500189
`
`25
`
`26
`
`27
`
`794 90624
`
`220.90770
`
`36.
`
`833447
`
`flififififi
`
`1036.33936
`
`22
`
`.500000
`
`CaFZ
`
`G—2
`
`188.66330
`
`94
`
`.552939
`
`K 2 0.000000
`
`A 1
`
`-.256120E—07
`
`B I
`
`-.895159E—12
`
`C I -.185484E-16
`
`D I —.417720E—21
`
`28
`
`-240.79096
`
`22
`
`.500000
`
`CaFZ
`
`K 1 0.000000
`
`A 1 0.681221E—08
`
`B 2 0.421447E—12
`
`C I 0.378121E*17
`
`/ D I 0.191012Efi21
`
`29
`
`30
`
`31
`
`32
`
`-1024.32842
`
`24
`
`.739484
`
`-258.87707
`
`~24
`
`.739484
`
`REF
`
`~1024.32842
`
`~22
`
`.500000
`
`CaFZ
`
`—240.79096
`
`~94
`
`.552939
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.23
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 23
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`22
`
`K : 0.000000.
`
`A : 0.681221E-08
`
`B I 0.421447E-12
`
`c : 0.378121E—17
`
`D I 0.191012E*21
`
`33
`
`188.66330
`
`—22.
`
`500000
`
`CaF2
`
`K : 0.000000
`
`A I
`
`-.256120E~07
`
`B I —.895159E-12
`
`C I
`
`-.185484E~16
`
`D I
`
`-.417720E—21
`
`1036.33936
`
`*
`
`36.
`
`833447
`
`220.90770
`
`36.
`
`833447
`
`REF
`
`1036.33936
`
`22.
`
`500000
`
`CaFZ
`
`188.66330
`
`94.
`
`552939
`
`K : 0.000000
`
`34
`
`35
`
`36
`
`37
`
`A Z —.256120E—07
`
`B 2 —.895159E-12
`
`C I “.185484E—16
`
`D I
`
`-.417720E~21
`
`38
`
`—240.79096
`
`22.
`
`500000
`
`CaFZ
`
`39
`
`40
`
`41
`
`42
`
`43
`
`44
`
`K : 0.000000
`
`A : 0.681221E-08
`
`B I 0.421447E-12
`
`C I 0.378121E‘17
`
`D I 0.191012E—21
`
`—1024.32842
`
`24.
`
`739484
`
`—258.87707
`
`25.
`
`486063
`
`flifiEEfi
`
`407.25535
`
`38.
`
`190207
`
`CaFZ
`
`G‘3
`
`-80.77131
`
`0.
`
`450000
`
`~90.03715
`
`13
`
`500000
`
`CaFZ
`
`—3749.47527
`
`IL
`
`431836
`
`K : 0.000000
`
`A 2 0.179888E—06
`
`B 2
`
`-.100180E—10
`
`C I 0.237530E—15
`
`D : 0.234800E-19
`
`CARL ZEISS V. NIKON
`|PR2013—00362
`
`EX. 2016, p. 24
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 24
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`23
`
`45
`
`46
`
`47
`
`48
`
`49
`
`50
`
`51
`
`52
`
`53
`
`54
`
`—29L
`
`30723
`
`31
`
`500000
`
`CaF2
`
`*124.
`
`47270
`
`.000000
`
`5459.
`
`35859
`
`30.
`
`000000
`
`CaF2
`
`—163.
`
`05643
`
`.294325
`
`222.
`
`08501
`
`25.
`
`000000
`
`CaF2
`
`716.
`
`62325
`
`34.
`
`856987
`
`312.
`
`84462
`
`20.
`
`000000
`
`CaFZ
`
`177.
`
`99457
`
`63.
`
`231363
`
`K 3 0.000000
`
`A Z —.466258E—08
`
`B I —.914422E—12
`
`C I —.675449E-16
`
`D I
`
`-.116707E—19
`
`INFINITY
`
`5.402395
`
`STO
`
`—2973 63249
`
`22.00000
`
`CaFZ
`
`K 2 0.000000
`
`55
`
`56
`
`57
`
`58
`
`59
`
`60
`
`61
`
`62
`
`63
`
`A 2 —.453537E—07
`
`B 2 *.219781E—11
`
`C I —.217836E*16
`
`D 2
`
`-.114821E*19
`
`~27L
`
`60238
`
`10.
`
`649559
`
`354.
`
`26180
`
`25.
`
`000000
`
`CaF2
`
`1836.
`
`70641
`
`14.
`
`394551
`
`207.
`
`77139
`
`25.
`
`000000
`
`CaF2
`
`900.
`
`82951
`
`2.
`
`823201
`
`129.
`
`59272
`
`30.
`
`000000
`
`CaFZ
`
`209.
`
`83508
`
`O.
`
`090000
`
`109.
`
`82374
`
`36.
`
`402419
`
`CaF2
`
`—1410.
`
`86181
`
`1L
`
`758388
`
`K 1 0.000000
`
`A I 0.738536E—07
`
`B I 0.186966E—11
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.25
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 25
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`24
`
`c : —.217835E—15
`
`D : —.11482lE—19
`
`54
`
`—257.15288
`
`13.500000
`
`0552
`
`K : 0.000000
`
`A : 0.1509935—05
`
`B : —.241393E—10
`
`c : 0.2141795—14
`
`D : —.751853E—19
`
`—1000.00000
`
`10.984355
`
`135.54835
`
`24.135094
`
`0552
`
`2954.95541
`
`17.227255
`
`55
`
`55
`
`57
`
`1%4imm1
`
`fi4immmiéfi%flfi%$%m\H11Kfifi5fi.%lfiRiD%2fi
`
`WWAEK.%1%@%$%G1.%2%@%$%G2fiwfi3%@%$%e3i
`
`0%fiémrwéo%1%@%$%G1m.%1fiRw;0fim.3&0Ex:x
`
`WZVVX\1&®EXZXWXVVX\1&®fiVVX\1&®E%:XW2V
`
`y2.2&®EVVX.1&0Ex:xwxvyf.lfiwEvyffiwlfiwE
`
`%:x22vy20fiflém.%2%@%$%G2m.Ewafi%%mfimwéo
`
`fEEéhk2fi®Mfifit2&®%%:x2xvyx&fi%fiém<méo%3
`
`%@%$%G8fi\1&®E%:XWXVVX\1&®MVVX\2&@EX:X
`
`wxvyx\lfiwfixzxwxvyf.4&wE%:x%xva.lfimfiv
`
`yfififllfiwfifl:xwxvyfflafifiémfwéo
`
`itfiififl®fi%fifi%$%m.%$%$fim%kfi2fiwwmfimfimfi
`
`0w.filfiRw®%fi%¢%fi528mn.$2fiwwwfikfififll3mmfi
`
`@0.%2fiwiw§%fi%fim25ox85mm®fi%%n&bfwéo:mm
`
`ib.i§bf§%b.颮§%fififi25ox33mlkbfwéoit.w
`
`D131. %1 ER1EIJT-73854225<2 %2fiW4flUT12.528525'63560
`
`fififa@fi%wfififi.%5mwXFuE%VVf®¢T.Zfiwfikwvy
`74727552751: 250 mm 1155350. 50450455530: 1/2/2‘075527574183 mm 11
`
`T?%D.fi#®:®x&yfifififiéhéEfi$fifi%$%®fimVVf®E%
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.26
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 26
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`25
`
`5505.550555509560
`
`X.
`Mfifiwfi%%©%fimfiféfi%$MNAmfi20%050.fififlfimfi’
`
`é%@d9&<.fifi%fi% #556: k753'6é“55
`
`EfiVVX%M%EEE%L.fiflfiléyvv~f—wlmnm®fiEmfifi
`
`
`6. $1593.53 2.0 pm @éflyfifimfii‘fxémflnéo
`
`Ek.@12&013flfifififl\fifimfix37W%\%EW%&0E$W
`
`% J: ’6 1iéi‘é‘fiéflflfibifib Wi'fiéi “GEZZHCWE ‘6 m. {Eh :‘fifiéwfi‘fiié’é ifiipfii LT
`
`0x55
`
`5541
`
`@3755
`
`@$¥«’r§
`
`EFEEBE
`
`1
`
`—3000.00000
`
`22.075897
`
`0552
`
`G1
`
`K : 0.000000
`
`A : —.5545295—07
`
`B : —.1992005—11
`
`0 : —.5747895—15
`
`D : —.3424575—20
`
`—385 80140
`
`52.772590
`
`—373 50991
`
`27.882553
`
`0552
`
`—155.04353
`
`100 139573
`
`—3000.00000
`
`35.000000
`
`0552
`
`K : 0.000000
`
`A : 0 530589E—08
`
`B : 0.169821E-11
`
`0 : —.9427595—15
`
`D : 0.4094115—21
`
`~229.11835
`
`1.000000
`
`88.82533
`
`50.737308
`
`0552
`
`65.21188
`
`45.509130
`
`-108.82430
`
`23.450398
`
`0552
`
`K : 0.000000
`
`2
`
`3
`
`4
`
`5
`
`5
`
`7
`
`8
`
`9
`
`CARL ZEISS V. NIKON
`|PR2013-00362
`
`EX. 2016, p. 27
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 27
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`26
`
`A 2 0.175350E-06
`
`B : ~.856906E*10
`
`C 1 —.429246E-14
`
`D :
`
`-.605392E-17
`
`203.63293
`
`11.655063
`
`-551.03477
`
`33.602568
`
`CaF2
`
`K 1 0.000000
`
`A I 0.118387E-07
`
`A B : 0.237898E—10
`
`C I 0.111043E-14
`
`D : 0.215322E—18
`
`—164.99352
`
`2.635484
`
`667 48114
`
`24.272368
`
`CaFZ
`
`—193.46399
`
`1.000000
`
`289.74866
`
`24.935445
`
`CaFZ
`
`-381.75231
`
`44.452566
`
`247.33191
`
`25.000000
`
`CaF2
`
`3000.00000
`
`1.000000
`
`200.29926
`
`22.917449
`
`0652
`
`~392.65115
`
`1.000000
`
`K 1 0.000000
`
`A I 0.606561Efi07
`
`B i 0.363580E—11
`
`C I
`
`-.413279E~15
`
`D : 0.280145E—19
`
`106.20173
`
`37.259044
`
`CaF2
`
`146.31984
`
`29.623795
`
`K 3 0.000000
`
`A i 0.306973E-06
`
`B I—.757118E—11
`
`C : 0.420689E—14
`
`D I —.610258E~19
`
`228.48364
`
`39.634833
`
`flififififi
`
`963.69544
`
`24.750000
`
`CaF2
`
`(3 2
`
`189.59124
`
`99.636094
`
`10
`
`11
`
`12
`
`13
`
`14
`
`15
`
`16
`
`17
`
`18
`
`19
`
`20
`
`21
`
`22
`
`23
`
`24
`
`25
`
`CARLZHSSV.MKON
`|PR201300362
`
`Ex.2016,p.28
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 28
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`27
`
`: 0.000000
`
`: —.252559B—07
`
`B : —.830414B—12
`
`: —.1757405—15
`
`D : —.258579B—21
`
`26
`
`—297.63016
`
`24.750000
`
`0532
`
`: 0.000000
`
`: 0.540102B~08
`
`B : 0.289886E-12
`
`: 0.1779755—17
`
`D : 0.1193395—21
`
`—2160 94390
`
`24.864215
`
`—281.20741
`
`~24.854215
`
`REF
`
`—2100.94390
`
`—24 750000
`
`CaFZ
`
`~297.53015 —99.536094
`
`: 0.000000
`
`27
`
`28
`
`29
`
`30
`
`: 0.546102E-08
`
`B : 0.289830B—12
`
`: 0.1779755—17
`
`D : 0.119388E-21
`
`31
`
`' 189.59124
`
`~24.750000
`
`CaF2
`
`32
`
`33
`
`34
`
`35
`
`: 0.000000
`
`: —.252659B~07
`
`B : —.330414B—12
`
`: —.1757405-15
`
`D : —.2585795~21
`
`963.59544 —39.634833
`
`228.49354
`
`39.534833
`
`REF
`
`953.59544
`
`24.750000
`
`CaF2
`
`189.59124
`
`99.535094
`
`: 0.000000
`
`: —.252559E—07
`
`B : —.830414E—12
`
`: —.17674OE—16
`
`D : ~.268579E-21
`
`36
`
`—297.63016
`
`24.750000
`
`0552
`
`K :
`
`0.000000
`
`CARL-ZEISS V. NIKON
`|PR2013—00362
`
`Ex.2016,p.29
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 29
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`28
`
`A : 0.546102Efl08
`
`B 3 0.289886E-12
`
`C I 0.177975E-17
`
`D Z 0.119388E*21
`
`-2160.94390
`
`24.864215
`
`-281.20741
`
`31.125800
`
`fiififififi
`
`. -3000.00000
`
`35.472862
`
`Can
`
`C}3
`
`K 3 0.000000
`
`A : —.170069E*06
`
`B I 0.674464E—11
`
`C : 0.186386E—14
`
`D I 0.143709E—18
`
`”92.54829
`
`3.008806
`
`—249.24892
`
`24.585174
`
`CaF2
`
`4651.12185
`
`19.289496
`
`-1377.18462
`
`30.000000
`
`CaF2
`
`K : 0.000000
`
`A : —.548419E-O7
`
`B I 0.426591E—12
`
`C I 0.201460E*15
`
`D 1 ~.141841E-19
`
`-137.02413
`
`1.000000
`
`—529.67962
`
`41.532614
`
`CaFZ
`
`-178.30383
`
`32.564995
`
`1120.95257
`
`20.000000
`
`CaF2
`
`950.03072
`
`33.000000
`
`243.45289
`
`20.000000
`
`CaF2
`
`817.22813
`
`43.500000
`
`K I 0.000000
`
`A I 0.114940E—07
`
`B I 0.694313E-12
`
`C 2 *.162058E-16
`
`D i
`
`-.112537E-20
`
`INFINITY
`
`14.493571
`
`STO
`
`259.52152
`
`30.000000
`
`CaF2
`
`37
`
`38
`
`39
`
`4O
`
`41
`
`42
`
`43
`
`44
`
`45
`
`46
`
`47
`
`48
`
`49
`
`50
`
`51
`
`52
`
`CARL ZEISS V. NIKON
`|PR2013—00362
`
`EX. 2016, p. 30
`
`CARL ZEISS V. NIKON
`IPR2013-00362
`Ex. 2016, p. 30
`
`

`

`WO 01/59502
`
`PCT/JP01/00912
`
`29
`
`53
`
`54
`
`55
`
`55
`
`57
`
`58
`
`59
`
`50
`
`51
`
`1200.60898
`
`30.738619
`
`120.15502
`
`25.979031
`
`CaFZ
`
`338.49381
`
`3.701219
`
`K 1 0.000000
`
`A I 0.433295E—07
`
`B I ~.118741E-11
`
`C I -.719231E-16
`
`D 2 —.375588E-20
`
`101.37850
`
`32.22525