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1319 Exhibit: Ex 1319 Dr Hartsough Depo Transcript for USP 6,853,142

Document IPR2014-00827, No. 1319 Exhibit - Ex 1319 Dr Hartsough Depo Transcript for USP 6,853,142 (P.T.A.B. Apr. 16, 2015)

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1321 Exhibit: Ex 1321 Dr Hartsough Depo Transcript for USP 7,808,184

Document IPR2014-00827, No. 1321 Exhibit - Ex 1321 Dr Hartsough Depo Transcript for USP 7,808,184 (P.T.A.B. Apr. 16, 2015)

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1312 Exhibit: TSMC 1312 Manos, Plasma Etching TSMC

Document IPR2014-00827, No. 1312 Exhibit - TSMC 1312 Manos, Plasma Etching TSMC (P.T.A.B. May. 28, 2014)

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2006 Exhibit: exhibit

Document IPR2014-00827, No. 2006 Exhibit - exhibit (P.T.A.B. Jan. 2, 2015)

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2009 Exhibit: exhibit

Document IPR2014-00827, No. 2009 Exhibit - exhibit (P.T.A.B. Jan. 2, 2015)

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1302 Exhibit: TSMC 1302 Kortshagen Declaration TSMC

Document IPR2014-00827, No. 1302 Exhibit - TSMC 1302 Kortshagen Declaration TSMC (P.T.A.B. May. 28, 2014)

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1315 Exhibit: TSMC 1315 Claim Chart Wang in View of Kudryavtsev TSMC

Document IPR2014-00827, No. 1315 Exhibit - TSMC 1315 Claim Chart Wang in View of Kudryavtsev TSMC (P.T.A.B. May. 28, 2014)

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1314 Exhibit: TSMC 1314 Claim Chart Mozgrin in view of Kudryavtsev TSMC

Document IPR2014-00827, No. 1314 Exhibit - TSMC 1314 Claim Chart Mozgrin in view of Kudryavtsev TSMC (P.T.A.B. May. 28, 2014)

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1307 Exhibit: TSMC 1307 Response 3 8 2004 TSMC

Document IPR2014-00827, No. 1307 Exhibit - TSMC 1307 Response 3 8 2004 TSMC (P.T.A.B. May. 28, 2014)

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