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1125 Exhibit: Exhibit 1125 Claim Chart Mozgrin in view of Lantsman and Mozgrin Th...

Document IPR2014-00821, No. 1125 Exhibit - Exhibit 1125 Claim Chart Mozgrin in view of Lantsman and Mozgrin Thesis TSMC (P.T.A.B. May. 27, 2014)

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2012 Exhibit: deposition transcript

Document IPR2014-00821, No. 2012 Exhibit - deposition transcript (P.T.A.B. May. 15, 2015)

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1117 Exhibit: Exhibit 1117 Fu USP 6306265 TSMC

Document IPR2014-00821, No. 1117 Exhibit - Exhibit 1117 Fu USP 6306265 TSMC (P.T.A.B. May. 27, 2014)

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1113 Exhibit: Exhibit 1113 Manos, Plasma Etching TSMC

Document IPR2014-00821, No. 1113 Exhibit - Exhibit 1113 Manos, Plasma Etching TSMC (P.T.A.B. May. 27, 2014)

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1102 Exhibit: Exhibit 1102 Kortshagen Declaration TSMC

Document IPR2014-00821, No. 1102 Exhibit - Exhibit 1102 Kortshagen Declaration TSMC (P.T.A.B. May. 27, 2014)

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2011 Exhibit: exhibit

Document IPR2014-00821, No. 2011 Exhibit - exhibit (P.T.A.B. Jan. 2, 2015)

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1109 Exhibit: Exhibit 1109 Notice of Allowability 3 29 2004 TSMC

Document IPR2014-00821, No. 1109 Exhibit - Exhibit 1109 Notice of Allowability 3 29 2004 TSMC (P.T.A.B. May. 27, 2014)

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1124 Exhibit: Exhibit 1124 Claim Chart Wang in view of Lantsman and Kudryavtsev...

Document IPR2014-00821, No. 1124 Exhibit - Exhibit 1124 Claim Chart Wang in view of Lantsman and Kudryavtsev TSMC (P.T.A.B. May. 27, 2014)

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1106 Exhibit: Exhibit 1106 Kudryavtsev, Ionization Relaxation TSMC

Document IPR2014-00821, No. 1106 Exhibit - Exhibit 1106 Kudryavtsev, Ionization Relaxation TSMC (P.T.A.B. May. 27, 2014)

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1129 Exhibit: Ex 1129 Declaration of Dr Lawrence J Overzet

Document IPR2014-00821, No. 1129 Exhibit - Ex 1129 Declaration of Dr Lawrence J Overzet (P.T.A.B. Apr. 16, 2015)

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1131 Exhibit: Ex 1131 Dr Hartsough Depo Transcript for USP 6,896,775

Document IPR2014-00821, No. 1131 Exhibit - Ex 1131 Dr Hartsough Depo Transcript for USP 6,896,775 (P.T.A.B. Apr. 16, 2015)

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2006 Exhibit: exhibit

Document IPR2014-00821, No. 2006 Exhibit - exhibit (P.T.A.B. Jan. 2, 2015)

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2005 Exhibit: exhibit declaration

Document IPR2014-00821, No. 2005 Exhibit - exhibit declaration (P.T.A.B. Jan. 2, 2015)

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2002 Exhibit: exhibit

Document IPR2014-00821, No. 2002 Exhibit - exhibit (P.T.A.B. Nov. 26, 2014)

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1112 Exhibit: Exhibit 1112 Response for RCE 5 2 2006 TSMC

Document IPR2014-00821, No. 1112 Exhibit - Exhibit 1112 Response for RCE 5 2 2006 TSMC (P.T.A.B. May. 27, 2014)

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