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1017 Exhibit: Exhibit 1017

Document IPR2017-00883, No. 1017 Exhibit - Exhibit 1017 (P.T.A.B. Feb. 13, 2017)

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1016 Exhibit: Exhibit 1016

Document IPR2017-00883, No. 1016 Exhibit - Exhibit 1016 (P.T.A.B. Feb. 13, 2017)

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1004 Exhibit: Exhibit 1004

Document IPR2017-00883, No. 1004 Exhibit - Exhibit 1004 (P.T.A.B. Feb. 13, 2017)

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1006 Exhibit: Exhibit 1006

Document IPR2017-00883, No. 1006 Exhibit - Exhibit 1006 (P.T.A.B. Feb. 13, 2017)

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1003 Exhibit: Exhibit 1003

Document IPR2017-00883, No. 1003 Exhibit - Exhibit 1003 (P.T.A.B. Feb. 13, 2017)

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METHOD FOR FORMING INTERCONNECTION STRUCTURE

Docket 09/274,114, U.S. Patent Application (March 23, 1999)

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