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1021 Exhibit: US Patent No 4,846,920

Document IPR2021-01030, No. 1021-20 Exhibit - US Patent No 4,846,920 (P.T.A.B. Jun. 4, 2021)

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1019 Exhibit: US Patent No 6,695,954

Document IPR2021-01030, No. 1019-18 Exhibit - US Patent No 6,695,954 (P.T.A.B. Jun. 4, 2021)

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1052 Exhibit: US Patent No 7,378,356 File History Part 1 of 4

Document IPR2021-01030, No. 1052-39 Exhibit - US Patent No 7,378,356 File History Part 1 of 4 (P.T.A.B. Jun. 4, 2021)

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1007 Exhibit: US Patent No 5,651,865

Document IPR2021-01030, No. 1007-6 Exhibit - US Patent No 5,651,865 (P.T.A.B. Jun. 4, 2021)

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1002 Exhibit: Declaration of Dr Vivek Subramanian

Document IPR2021-01030, No. 1002-64 Exhibit - Declaration of Dr Vivek Subramanian (P.T.A.B. Jun. 4, 2021)

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1030 Exhibit: US Patent No 6,506,686

Document IPR2021-01030, No. 1030-26 Exhibit - US Patent No 6,506,686 (P.T.A.B. Jun. 4, 2021)

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1034 Exhibit: US Publication No 20010041252

Document IPR2021-01030, No. 1034-30 Exhibit - US Publication No 20010041252 (P.T.A.B. Jun. 4, 2021)

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1066 Exhibit: Advanced Energy Industries 2000

Document IPR2021-01030, No. 1066-51 Exhibit - Advanced Energy Industries 2000 (P.T.A.B. Jun. 4, 2021)

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1005 Exhibit: US Patent No 6,342,134

Document IPR2021-01030, No. 1005-4 Exhibit - US Patent No 6,342,134 (P.T.A.B. Jun. 4, 2021)

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1033 Exhibit: US Patent No 5,830,327

Document IPR2021-01030, No. 1033-29 Exhibit - US Patent No 5,830,327 (P.T.A.B. Jun. 4, 2021)

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1055 Exhibit: 50 Fed Reg 36,061

Document IPR2021-01030, No. 1055-44 Exhibit - 50 Fed Reg 36,061 (P.T.A.B. Jun. 4, 2021)

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1082 Exhibit: Order Governing Proceedings Case No 6 20 cv 00634

Document IPR2021-01030, No. 1082-62 Exhibit - Order Governing Proceedings Case No 6 20 cv 00634 (P.T.A.B. Jun. 4, 2021)

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1041 Exhibit: Wolf

Document IPR2021-01030, No. 1041-35 Exhibit - Wolf (P.T.A.B. Jun. 4, 2021)

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1042 Exhibit: Declaration of Dr Ingrid Hsieh Yee Part 3 of 3

Document IPR2021-01030, No. 1042-67 Exhibit - Declaration of Dr Ingrid Hsieh Yee Part 3 of 3 (P.T.A.B. Jun. 4, 2021)

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1026 Exhibit: Pinnacle UM 05 2000

Document IPR2021-01030, No. 1026-24 Exhibit - Pinnacle UM 05 2000 (P.T.A.B. Jun. 4, 2021)

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