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1307 Exhibit: 1307 Response 3 8 2004

Document IPR2014-00865, No. 1307 Exhibit - 1307 Response 3 8 2004 (P.T.A.B. May. 30, 2014)

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1302 Exhibit: Kortshagen Declaration

Document IPR2014-00497, No. 1302 Exhibit - Kortshagen Declaration (P.T.A.B. Mar. 13, 2014)

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1005 Exhibit: US Patent 6413382 Wang

Document IPR2014-00494, No. 1005 Exhibit - US Patent 6413382 Wang (P.T.A.B. Mar. 13, 2014)

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1314 Exhibit: Claim Chart Mozgrin Kudryavtsev 131

Document IPR2014-01063, No. 1314 Exhibit - Claim Chart Mozgrin Kudryavtsev 131 (P.T.A.B. Jun. 30, 2014)

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1206 Exhibit: Mozgrin Thesis Translation

Document IPR2014-00496, No. 1206 Exhibit - Mozgrin Thesis Translation (P.T.A.B. Mar. 13, 2014)

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1311 Exhibit: 1311 Response for RCE 5 2 2006

Document IPR2014-00865, No. 1311 Exhibit - 1311 Response for RCE 5 2 2006 (P.T.A.B. May. 30, 2014)

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1013 Exhibit: Smith

Document IPR2014-00494, No. 1013 Exhibit - Smith (P.T.A.B. Mar. 13, 2014)

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1315 Exhibit: 1315 Claim Chart Wang in View of Kudryavtsev

Document IPR2014-00865, No. 1315 Exhibit - 1315 Claim Chart Wang in View of Kudryavtsev (P.T.A.B. May. 30, 2014)

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1305 Exhibit: US Patent 6413382 Wang

Document IPR2014-00497, No. 1305 Exhibit - US Patent 6413382 Wang (P.T.A.B. Mar. 13, 2014)

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1311 Exhibit: Response and RCE 05 02 2006

Document IPR2014-00497, No. 1311 Exhibit - Response and RCE 05 02 2006 (P.T.A.B. Mar. 13, 2014)

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1009 Exhibit: Notice of Allowability 03 29 2004

Document IPR2014-00494, No. 1009 Exhibit - Notice of Allowability 03 29 2004 (P.T.A.B. Mar. 13, 2014)

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1212 Exhibit: US Patent 7147759 Chistyakov

Document IPR2014-00496, No. 1212 Exhibit - US Patent 7147759 Chistyakov (P.T.A.B. Mar. 13, 2014)

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1301 Exhibit: 1301 Chistyakov USP 6853142

Document IPR2014-00865, No. 1301 Exhibit - 1301 Chistyakov USP 6853142 (P.T.A.B. May. 30, 2014)

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1213 Exhibit: 1213 Response for RCE 5 2 2006

Document IPR2014-00867, No. 1213 Exhibit - 1213 Response for RCE 5 2 2006 (P.T.A.B. May. 30, 2014)

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1214 Exhibit: 1214 Manos, Plasma Etching

Document IPR2014-00867, No. 1214 Exhibit - 1214 Manos, Plasma Etching (P.T.A.B. May. 30, 2014)

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