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Displaying 69-83 of 173 results

5 Power of Attorney: Power of Attorney

Document IPR2015-01277, No. 5 Power of Attorney - Power of Attorney (P.T.A.B. Jun. 5, 2015)

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3 Power of Attorney: Power of Attorney

Document IPR2015-01277, No. 3 Power of Attorney - Power of Attorney (P.T.A.B. May. 29, 2015)

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2 Power of Attorney: Power of Attorney

Document IPR2015-01277, No. 2 Power of Attorney - Power of Attorney (P.T.A.B. May. 29, 2015)

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1 Power of Attorney: Power of Attorney

Document IPR2015-01277, No. 1 Power of Attorney - Power of Attorney (P.T.A.B. May. 29, 2015)

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1020 Exhibit: Summary of IPRs

Document IPR2015-01277, No. 1020 Exhibit - Summary of IPRs (P.T.A.B. Apr. 5, 2016)

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2086 Exhibit: Tarud PHV declaration

Document IPR2015-01277, No. 2086 Exhibit - Tarud PHV declaration (P.T.A.B. Apr. 4, 2016)

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1203 Exhibit: French Patent Publication No FR2554302A1 Grtner

Document IPR2016-00556, No. 1203 Exhibit - French Patent Publication No FR2554302A1 Grtner (P.T.A.B. Feb. 5, 2016)

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1208 Exhibit: Energetiq EQ 10M Soft X Ray

Document IPR2016-00556, No. 1208 Exhibit - Energetiq EQ 10M Soft X Ray (P.T.A.B. Feb. 5, 2016)

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1216 Exhibit: US Patent No 7,786,455

Document IPR2016-00556, No. 1216 Exhibit - US Patent No 7,786,455 (P.T.A.B. Feb. 5, 2016)

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1210 Exhibit: Notice of Allowability dated August 6, 2012

Document IPR2016-00556, No. 1210 Exhibit - Notice of Allowability dated August 6, 2012 (P.T.A.B. Feb. 5, 2016)

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1206 Exhibit: Eden Declaration

Document IPR2016-00556, No. 1206 Exhibit - Eden Declaration (P.T.A.B. Feb. 5, 2016)

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1205 Exhibit: Japanese Patent Publication No JP2003 317675 Ikeuchi

Document IPR2016-00556, No. 1205 Exhibit - Japanese Patent Publication No JP2003 317675 Ikeuchi (P.T.A.B. Feb. 5, 2016)

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1212 Exhibit: Energetiq v ASML 3172015 Reply Brief

Document IPR2016-00556, No. 1212 Exhibit - Energetiq v ASML 3172015 Reply Brief (P.T.A.B. Feb. 5, 2016)

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1215 Exhibit: US Patent No 7,989,786

Document IPR2016-00556, No. 1215 Exhibit - US Patent No 7,989,786 (P.T.A.B. Feb. 5, 2016)

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1201 Exhibit: US Patent No 8,309,943

Document IPR2016-00556, No. 1201 Exhibit - US Patent No 8,309,943 (P.T.A.B. Feb. 5, 2016)

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