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1310 Exhibit: File History for US Pat No 7,147,759, Office Action of May 27, 2005, 0...

Document IPR2014-00446, No. 1310 Exhibit - File History for US Pat No 7,147,759, Office Action of May 27, 2005, 052705 Office Action (P.T.A.B. Feb. 20, 2014)

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1001 Exhibit: US Patent No 7,147,759

Document IPR2014-01086, No. 1001 Exhibit - US Patent No 7,147,759 (P.T.A.B. Jun. 30, 2014)

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1006 Exhibit: Manos 1989

Document IPR2014-00981, No. 1006 Exhibit - Manos 1989 (P.T.A.B. Jun. 19, 2014)

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1406 Exhibit: Plasma Etching An Introduction, by Manos and Flamm, pp 185 258, A...

Document IPR2014-00447, No. 1406 Exhibit - Plasma Etching An Introduction, by Manos and Flamm, pp 185 258, Academic Press 1989 Manos (P.T.A.B. Feb. 20, 2014)

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1123 Exhibit: Ex 1123 US Patent No 5,247,531 Muller Horsche

Document IPR2014-01087, No. 1123 Exhibit - Ex 1123 US Patent No 5,247,531 Muller Horsche (P.T.A.B. May. 4, 2015)

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2003 Exhibit: exhibit

Document IPR2014-01087, No. 2003 Exhibit - exhibit (P.T.A.B. Nov. 26, 2014)

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1118 Exhibit: Claim Chart based on Wang and Kudryavtsev as used in 1 13 cv 1157...

Document IPR2014-01087, No. 1118 Exhibit - Claim Chart based on Wang and Kudryavtsev as used in 1 13 cv 11570 RGS (P.T.A.B. Jun. 30, 2014)

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1011 Exhibit: RCE dated 10 27 2005

Document IPR2014-00981, No. 1011 Exhibit - RCE dated 10 27 2005 (P.T.A.B. Jun. 19, 2014)

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1030 Exhibit: Claim Chart Wang, Kudryavtsev, and Li

Document IPR2014-00981, No. 1030 Exhibit - Claim Chart Wang, Kudryavtsev, and Li (P.T.A.B. Jun. 19, 2014)

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2011 Exhibit: Exhibit

Document IPR2014-01087, No. 2011 Exhibit - Exhibit (P.T.A.B. Dec. 31, 2014)

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1009 Exhibit: File History for US Pat No 7,147,759, Response of February 24, 2005

Document IPR2014-01086, No. 1009 Exhibit - File History for US Pat No 7,147,759, Response of February 24, 2005 (P.T.A.B. Jun. 30, 2014)

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1020 Exhibit: Li et al, Low temperature magnetron sputter deposition, hardness, an...

Document IPR2014-01086, No. 1020 Exhibit - Li et al, Low temperature magnetron sputter deposition, hardness, and electrical resistivity of amorphous and crystalline alumina thin films, J Vac Sci Technol A...

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2007 Exhibit: Exhibit

Document IPR2014-01086, No. 2007 Exhibit - Exhibit (P.T.A.B. Dec. 31, 2014)

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1419 Exhibit: List of Related Litigations

Document IPR2014-00447, No. 1419 Exhibit - List of Related Litigations (P.T.A.B. Feb. 20, 2014)

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2005 Exhibit: Exhibit Declaration

Document IPR2014-01086, No. 2005 Exhibit - Exhibit Declaration (P.T.A.B. Dec. 31, 2014)

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