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1007 Exhibit: Exhibit 1007

Document IPR2017-00923, No. 1007-7 Exhibit - Exhibit 1007 (P.T.A.B. Feb. 16, 2017)

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1012 Exhibit: Exhibit 1012

Document IPR2017-00923, No. 1012-12 Exhibit - Exhibit 1012 (P.T.A.B. Feb. 16, 2017)

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1018 Exhibit: Exhibit 1018

Document IPR2017-00923, No. 1018-18 Exhibit - Exhibit 1018 (P.T.A.B. Feb. 16, 2017)

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1010 Exhibit: Exhibit 1010

Document IPR2017-00923, No. 1010-10 Exhibit - Exhibit 1010 (P.T.A.B. Feb. 16, 2017)

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1006 Exhibit: Exhibit 1006

Document IPR2017-00923, No. 1006-6 Exhibit - Exhibit 1006 (P.T.A.B. Feb. 16, 2017)

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1015 Exhibit: Exhibit 1015

Document IPR2017-00923, No. 1015-15 Exhibit - Exhibit 1015 (P.T.A.B. Feb. 16, 2017)

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1008 Exhibit: Exhibit 1008

Document IPR2017-00923, No. 1008-8 Exhibit - Exhibit 1008 (P.T.A.B. Feb. 16, 2017)

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3003 Exhibit: IPR2017 00922 Decision Granting Institution of Inter Partes Review a...

Document IPR2016-01377, No. 3003-66 Exhibit - IPR2017 00922 Decision Granting Institution of Inter Partes Review and Granting Petitioners Motion for Joinder (P.T.A.B. Aug. 8, 2017)

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2019 Exhibit: Microlithography Science and Technology, 2nd ed, by Kazuaki Suzuk...

Document IPR2016-01377, No. 2019-41 Exhibit - Microlithography Science and Technology, 2nd ed, by Kazuaki Suzuki and Bruce W Smith 2007 Chapter 11 (P.T.A.B. Apr. 14, 2017)

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2020 Exhibit: Silicon Processing for the VLSI Era Vol 1 by S Wolf and RN Tauber

Document IPR2016-01377, No. 2020-42 Exhibit - Silicon Processing for the VLSI Era Vol 1 by S Wolf and RN Tauber (P.T.A.B. Apr. 14, 2017)

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3001 Exhibit: Mask, MERRIAM WEBSTERCOM

Document IPR2016-01377, No. 3001-30 Exhibit - Mask, MERRIAM WEBSTERCOM (P.T.A.B. Jan. 18, 2017)

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1015 Exhibit: TSMC Exhibit 1015

Document IPR2016-01377, No. 1015-14 Exhibit - TSMC Exhibit 1015 (P.T.A.B. Jul. 12, 2016)

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1009 Exhibit: Exhibit 1009

Document IPR2017-00881, No. 1009 Exhibit - Exhibit 1009 (P.T.A.B. Feb. 13, 2017)

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1001 Exhibit: Exhibit 1001

Document IPR2017-00881, No. 1001 Exhibit - Exhibit 1001 (P.T.A.B. Feb. 13, 2017)

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1013 Exhibit: Exhibit 1013

Document IPR2017-00881, No. 1013 Exhibit - Exhibit 1013 (P.T.A.B. Feb. 13, 2017)

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