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1217 Exhibit: Ohring

Document IPR2014-00496, No. 1217 Exhibit - Ohring (P.T.A.B. Mar. 13, 2014)

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1201 Exhibit: US Patent 6853142 Chistyakov

Document IPR2014-00496, No. 1201 Exhibit - US Patent 6853142 Chistyakov (P.T.A.B. Mar. 13, 2014)

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1304 Exhibit: Kudryavtsev

Document IPR2014-00497, No. 1304 Exhibit - Kudryavtsev (P.T.A.B. Mar. 13, 2014)

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1218 Exhibit: 1218 European Patent Appln 1560943 Response 4 21 2008

Document IPR2014-00867, No. 1218 Exhibit - 1218 European Patent Appln 1560943 Response 4 21 2008 (P.T.A.B. May. 30, 2014)

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1202 Exhibit: 1202 Kortshagen Declaration

Document IPR2014-00867, No. 1202 Exhibit - 1202 Kortshagen Declaration (P.T.A.B. May. 30, 2014)

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1205 Exhibit: US Patent 6413382 Wang

Document IPR2014-00496, No. 1205 Exhibit - US Patent 6413382 Wang (P.T.A.B. Mar. 13, 2014)

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1015 Exhibit: Claim Chart Mozgrin and Lantsman

Document IPR2014-00494, No. 1015 Exhibit - Claim Chart Mozgrin and Lantsman (P.T.A.B. Mar. 13, 2014)

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1221 Exhibit: 1221 Claim Chart Wang in view of Kudryavtsev

Document IPR2014-00867, No. 1221 Exhibit - 1221 Claim Chart Wang in view of Kudryavtsev (P.T.A.B. May. 30, 2014)

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1210 Exhibit: Response 03 08 2004

Document IPR2014-00496, No. 1210 Exhibit - Response 03 08 2004 (P.T.A.B. Mar. 13, 2014)

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1007 Exhibit: Office Action 10 07 2003

Document IPR2014-00494, No. 1007 Exhibit - Office Action 10 07 2003 (P.T.A.B. Mar. 13, 2014)

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1308 Exhibit: Notice of Allowability 03 29 2004

Document IPR2014-00497, No. 1308 Exhibit - Notice of Allowability 03 29 2004 (P.T.A.B. Mar. 13, 2014)

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1220 Exhibit: Claim Chart Mozgrin, Kudryavtsev, and Mozgrin Thesis

Document IPR2014-00496, No. 1220 Exhibit - Claim Chart Mozgrin, Kudryavtsev, and Mozgrin Thesis (P.T.A.B. Mar. 13, 2014)

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1418 Exhibit: Claim Chart Mozgrin Lantsman

Document IPR2014-01016, No. 1418 Exhibit - Claim Chart Mozgrin Lantsman (P.T.A.B. Jun. 23, 2014)

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1409 Exhibit: Notice of Allowance March 29, 2004

Document IPR2014-01016, No. 1409 Exhibit - Notice of Allowance March 29, 2004 (P.T.A.B. Jun. 23, 2014)

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1312 Exhibit: 1312 Manos, Plasma Etching

Document IPR2014-00865, No. 1312 Exhibit - 1312 Manos, Plasma Etching (P.T.A.B. May. 30, 2014)

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