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Displaying 759-773 of 840 results

1002 Exhibit: Ex 1002 US Patent 5,605,600 Muller

Document IPR2017-00281, No. 1002-2 Exhibit - Ex 1002 US Patent 5,605,600 Muller (P.T.A.B. Dec. 2, 2016)

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1016 Exhibit: Ex 1016 IPR2015 01764, Paper 7

Document IPR2017-00281, No. 1016-15 Exhibit - Ex 1016 IPR2015 01764, Paper 7 (P.T.A.B. Dec. 2, 2016)

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1026 Exhibit: Ex1026 IPR2015 00560, Paper 21

Document IPR2017-00281, No. 1026-27 Exhibit - Ex1026 IPR2015 00560, Paper 21 (P.T.A.B. Dec. 20, 2017)

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1027 Exhibit: Ex1027 IPR2016 00470, Paper 5

Document IPR2017-00281, No. 1027-28 Exhibit - Ex1027 IPR2016 00470, Paper 5 (P.T.A.B. Dec. 20, 2017)

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1019 Exhibit: Ex 1019 US Patent No 5,174,856 Hwang

Document IPR2017-00281, No. 1019-18 Exhibit - Ex 1019 US Patent No 5,174,856 Hwang (P.T.A.B. Dec. 2, 2016)

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1023 Exhibit: Ex1023 Affidavit of Chad S Campbell in Support of Petitioner Pro Hac...

Document IPR2017-00281, No. 1023-23 Exhibit - Ex1023 Affidavit of Chad S Campbell in Support of Petitioner Pro Hac Vice Motion (P.T.A.B. Jan. 20, 2017)

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1020 Exhibit: Ex 1020 US Patent No 4,331,485 Gat

Document IPR2017-00281, No. 1020-19 Exhibit - Ex 1020 US Patent No 4,331,485 Gat (P.T.A.B. Dec. 2, 2016)

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1013 Exhibit: Ex 1013 US Patent No 5,393,374 Sato

Document IPR2017-00281, No. 1013-12 Exhibit - Ex 1013 US Patent No 5,393,374 Sato (P.T.A.B. Dec. 2, 2016)

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1012 Exhibit: Ex 1012 US Patent No 5,628,871 Shinagawa

Document IPR2017-00281, No. 1012-11 Exhibit - Ex 1012 US Patent No 5,628,871 Shinagawa (P.T.A.B. Dec. 2, 2016)

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2002 Exhibit: Stadheim Declaration in Support of PHV Motion

Document IPR2017-00281, No. 2002-31 Exhibit - Stadheim Declaration in Support of PHV Motion (P.T.A.B. Feb. 14, 2018)

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1025 Exhibit: Ex1025 IPR2016 00352, Paper 25

Document IPR2017-00281, No. 1025-26 Exhibit - Ex1025 IPR2016 00352, Paper 25 (P.T.A.B. Dec. 20, 2017)

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1022 Exhibit: Ex1022 Affidavit of Jared Bobrow in Support of Petitioner Pro Hac Vic...

Document IPR2017-00281, No. 1022-22 Exhibit - Ex1022 Affidavit of Jared Bobrow in Support of Petitioner Pro Hac Vice Motion (P.T.A.B. Jan. 20, 2017)

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2003 Exhibit: Flamm CV

Document IPR2017-00281, No. 2003-33 Exhibit - Flamm CV (P.T.A.B. Mar. 6, 2018)

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1008 Exhibit: Ex 1008 Wright, A Closed Loop Temperature Control System for a Lo...

Document IPR2017-00281, No. 1008-7 Exhibit - Ex 1008 Wright, A Closed Loop Temperature Control System for a Low Temperature Etch Chuck Wright (P.T.A.B. Dec. 2, 2016)

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1005 Exhibit: Ex 1005 US Patent 6,063,710 Kadomura

Document IPR2017-00281, No. 1005-5 Exhibit - Ex 1005 US Patent 6,063,710 Kadomura (P.T.A.B. Dec. 2, 2016)

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