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Displaying 759-773 of 1,072 results

1329 Exhibit: US Patent 5,247,531 to Muller Horsche

Document IPR2014-00782, No. 1329 Exhibit - US Patent 5,247,531 to Muller Horsche (P.T.A.B. May. 4, 2015)

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2003 Exhibit: exhibit

Document IPR2014-00782, No. 2003 Exhibit - exhibit (P.T.A.B. Nov. 26, 2014)

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1306 Exhibit: TSMC 1306 Manos, Plasma Etching TSMC

Document IPR2014-00782, No. 1306 Exhibit - TSMC 1306 Manos, Plasma Etching TSMC (P.T.A.B. May. 19, 2014)

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1309 Exhibit: TSMC 1309 File History USP 7147759 Response 02 24 2005 TSMC

Document IPR2014-00782, No. 1309 Exhibit - TSMC 1309 File History USP 7147759 Response 02 24 2005 TSMC (P.T.A.B. May. 19, 2014)

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1315 Exhibit: TSMC 1315 Notice of Allowability 10 11 2006 TSMC

Document IPR2014-00782, No. 1315 Exhibit - TSMC 1315 Notice of Allowability 10 11 2006 TSMC (P.T.A.B. May. 19, 2014)

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1324 Exhibit: Deposition of Dr Hartsough for US Patent 7,147,759

Document IPR2014-00782, No. 1324 Exhibit - Deposition of Dr Hartsough for US Patent 7,147,759 (P.T.A.B. May. 4, 2015)

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1304 Exhibit: TSMC 1304 Kudryavtsev, Ionization relaxation TSMC

Document IPR2014-00782, No. 1304 Exhibit - TSMC 1304 Kudryavtsev, Ionization relaxation TSMC (P.T.A.B. May. 19, 2014)

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1316 Exhibit: TSMC 1316 European Patent Appln 1560943 Response 4 21 2008 TS...

Document IPR2014-00782, No. 1316 Exhibit - TSMC 1316 European Patent Appln 1560943 Response 4 21 2008 TSMC (P.T.A.B. May. 19, 2014)

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1325 Exhibit: Deposition of Dr Hartsough for US Patent 7,808,184

Document IPR2014-00782, No. 1325 Exhibit - Deposition of Dr Hartsough for US Patent 7,808,184 (P.T.A.B. May. 4, 2015)

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1310 Exhibit: TSMC 1310 File History USP 7147759 Office Action 05 27 05 TSMC

Document IPR2014-00782, No. 1310 Exhibit - TSMC 1310 File History USP 7147759 Office Action 05 27 05 TSMC (P.T.A.B. May. 19, 2014)

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1312 Exhibit: TSMC 1312 File History USP 7147759 Office Action 01 11 2006 TSMC

Document IPR2014-00782, No. 1312 Exhibit - TSMC 1312 File History USP 7147759 Office Action 01 11 2006 TSMC (P.T.A.B. May. 19, 2014)

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2010 Exhibit: Exhibit

Document IPR2014-00782, No. 2010 Exhibit - Exhibit (P.T.A.B. Dec. 31, 2014)

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1319 Exhibit: TSMC 1319 Claim Chart Wang in view of Kudryavtsev and Mozgrin TS...

Document IPR2014-00782, No. 1319 Exhibit - TSMC 1319 Claim Chart Wang in view of Kudryavtsev and Mozgrin TSMC (P.T.A.B. May. 19, 2014)

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1314 Exhibit: TSMC 1314 Response 08 28 2006 TSMC

Document IPR2014-00782, No. 1314 Exhibit - TSMC 1314 Response 08 28 2006 TSMC (P.T.A.B. May. 19, 2014)

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1327 Exhibit: Deposition of Dr Hartsough for US Patent 6,853,142

Document IPR2014-00782, No. 1327 Exhibit - Deposition of Dr Hartsough for US Patent 6,853,142 (P.T.A.B. May. 4, 2015)

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