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1308 Exhibit: Exhibit 1308 Office Action 2 11 2004 TSMC

Document IPR2014-00829, No. 1308 Exhibit - Exhibit 1308 Office Action 2 11 2004 TSMC (P.T.A.B. May. 28, 2014)

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1305 Exhibit: Exhibit 1305 Pinsley USP 3761836 TSMC

Document IPR2014-00829, No. 1305 Exhibit - Exhibit 1305 Pinsley USP 3761836 TSMC (P.T.A.B. May. 28, 2014)

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1309 Exhibit: Exhibit 1309 Amendment and Response 5 6 2004 TSMC

Document IPR2014-00829, No. 1309 Exhibit - Exhibit 1309 Amendment and Response 5 6 2004 TSMC (P.T.A.B. May. 28, 2014)

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1311 Exhibit: Exhibit 1311 Vicek I, A collisional radiative model TSMC

Document IPR2014-00829, No. 1311 Exhibit - Exhibit 1311 Vicek I, A collisional radiative model TSMC (P.T.A.B. May. 28, 2014)

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2004 Exhibit: deposition transcript

Document IPR2014-00829, No. 2004 Exhibit - deposition transcript (P.T.A.B. Feb. 9, 2015)

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1313 Exhibit: Exhibit 1313 Affidavit of Anthony J Fitzpatrick

Document IPR2014-00829, No. 1313 Exhibit - Exhibit 1313 Affidavit of Anthony J Fitzpatrick (P.T.A.B. Nov. 20, 2014)

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3001 Exhibit: Ex 3001

Document IPR2014-00829, No. 3001 Exhibit - Ex 3001 (P.T.A.B. Nov. 17, 2014)

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1312 Exhibit: Exhibit 1312 Vicek II, A collisional radiative model TSMC

Document IPR2014-00829, No. 1312 Exhibit - Exhibit 1312 Vicek II, A collisional radiative model TSMC (P.T.A.B. May. 28, 2014)

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1304 Exhibit: Exhibit 1304 Kudryavtsev, Ionization relaxation TSMC

Document IPR2014-00829, No. 1304 Exhibit - Exhibit 1304 Kudryavtsev, Ionization relaxation TSMC (P.T.A.B. May. 28, 2014)

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1307 Exhibit: Exhibit 1307 Iwamura USP 5753886 TSMC

Document IPR2014-00829, No. 1307 Exhibit - Exhibit 1307 Iwamura USP 5753886 TSMC (P.T.A.B. May. 28, 2014)

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2006 Exhibit: deposition transcript

Document IPR2014-00829, No. 2006 Exhibit - deposition transcript (P.T.A.B. May. 12, 2015)

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2005 Exhibit: declaration

Document IPR2014-00829, No. 2005 Exhibit - declaration (P.T.A.B. Feb. 9, 2015)

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1315 Exhibit: Ex 1315 Kortshagen Suppl Declaration

Document IPR2014-00829, No. 1315 Exhibit - Ex 1315 Kortshagen Suppl Declaration (P.T.A.B. Apr. 27, 2015)

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2007 Exhibit: demonstratives for oral argument

Document IPR2014-00829, No. 2007 Exhibit - demonstratives for oral argument (P.T.A.B. Jun. 10, 2015)

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2002 Exhibit: affidavit

Document IPR2014-00829, No. 2002 Exhibit - affidavit (P.T.A.B. Jan. 15, 2015)

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