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1007 Exhibit: Ex 1007 Etching of Tungsten

Document IPR2015-01768, No. 1007 Exhibit - Ex 1007 Etching of Tungsten (P.T.A.B. Aug. 18, 2015)

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1012 Exhibit: Ex 1012 Websters Dictionary

Document IPR2015-01768, No. 1012 Exhibit - Ex 1012 Websters Dictionary (P.T.A.B. Aug. 18, 2015)

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2007 Exhibit: Declaration of RSpalding ISO Motion for PHV

Document IPR2015-01768, No. 2007-2 Exhibit - Declaration of RSpalding ISO Motion for PHV (P.T.A.B. Jul. 18, 2016)

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1013 Exhibit: Ex 1013 Ooshio US4645218

Document IPR2015-01768, No. 1013 Exhibit - Ex 1013 Ooshio US4645218 (P.T.A.B. Aug. 18, 2015)

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1018 Exhibit: Cecchi Declaration

Document IPR2015-01768, No. 1018-4 Exhibit - Cecchi Declaration (P.T.A.B. Jul. 28, 2016)

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2008 Exhibit: Declaration of GCS ISO Motion for PHV

Document IPR2015-01768, No. 2008-3 Exhibit - Declaration of GCS ISO Motion for PHV (P.T.A.B. Jul. 19, 2016)

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2003 Exhibit: US 5,939,831 Fong

Document IPR2015-01768, No. 2003 Exhibit - US 5,939,831 Fong (P.T.A.B. Nov. 25, 2015)

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2001 Exhibit: US 5,294,778 Carman

Document IPR2015-01768, No. 2001 Exhibit - US 5,294,778 Carman (P.T.A.B. Nov. 25, 2015)

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1001 Exhibit: Ex 1001 RE40264 Patent

Document IPR2015-01768, No. 1001 Exhibit - Ex 1001 RE40264 Patent (P.T.A.B. Aug. 18, 2015)

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1019 Exhibit: Exhibit 1019

Document IPR2016-01510, No. 1019-19 Exhibit - Exhibit 1019 (P.T.A.B. Jul. 29, 2016)

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1024 Exhibit: Exhibit 1024

Document IPR2016-01510, No. 1024-24 Exhibit - Exhibit 1024 (P.T.A.B. Jul. 29, 2016)

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1003 Exhibit: Ex 1003 US Patent 5,151,871 Matsumura

Document IPR2017-00282, No. 1003-3 Exhibit - Ex 1003 US Patent 5,151,871 Matsumura (P.T.A.B. Dec. 2, 2016)

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1030 Exhibit: Ex1030 Intel Demonstratives

Document IPR2017-00281, No. 1030-32 Exhibit - Ex1030 Intel Demonstratives (P.T.A.B. Mar. 5, 2018)

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1024 Exhibit: Ex1024 Bravman Declaration

Document IPR2017-00281, No. 1024-25 Exhibit - Ex1024 Bravman Declaration (P.T.A.B. Dec. 20, 2017)

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1001 Exhibit: Ex 1001 US Patent No RE40,264 264 patent

Document IPR2017-00281, No. 1001 Exhibit - Ex 1001 US Patent No RE40,264 264 patent (P.T.A.B. Dec. 2, 2016)

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