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1020 Exhibit: Ex 1020 Petitioners Demonstrative Exhibits Graphics

Document IPR2015-01768, No. 1020-6 Exhibit - Ex 1020 Petitioners Demonstrative Exhibits Graphics (P.T.A.B. Oct. 6, 2016)

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1010 Exhibit: Ex 1010 Cecchi Declaration

Document IPR2015-01768, No. 1010 Exhibit - Ex 1010 Cecchi Declaration (P.T.A.B. Aug. 18, 2015)

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1006 Exhibit: Ex 1006 Wang US5219485

Document IPR2015-01768, No. 1006 Exhibit - Ex 1006 Wang US5219485 (P.T.A.B. Aug. 18, 2015)

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2006 Exhibit: PTAB Decision IPR 01766

Document IPR2015-01768, No. 2006 Exhibit - PTAB Decision IPR 01766 (P.T.A.B. May. 16, 2016)

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1016 Exhibit: Ex 1016 Chu PHV Declaration

Document IPR2015-01768, No. 1016 Exhibit - Ex 1016 Chu PHV Declaration (P.T.A.B. May. 9, 2016)

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2005 Exhibit: PTAB Decision IPR 01759

Document IPR2015-01768, No. 2005 Exhibit - PTAB Decision IPR 01759 (P.T.A.B. May. 16, 2016)

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1017 Exhibit: Ex 1017 Gordnia PHV Declaration

Document IPR2015-01768, No. 1017 Exhibit - Ex 1017 Gordnia PHV Declaration (P.T.A.B. May. 9, 2016)

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2004 Exhibit: US 20010003676

Document IPR2015-01768, No. 2004 Exhibit - US 20010003676 (P.T.A.B. Nov. 25, 2015)

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1003 Exhibit: Ex 1003 Matsumura US5151871

Document IPR2015-01768, No. 1003 Exhibit - Ex 1003 Matsumura US5151871 (P.T.A.B. Aug. 18, 2015)

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1004 Exhibit: Ex 1004 Narita US4913790

Document IPR2015-01768, No. 1004 Exhibit - Ex 1004 Narita US4913790 (P.T.A.B. Aug. 18, 2015)

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1015 Exhibit: Ex 1015 Plasma Etching Technology

Document IPR2015-01768, No. 1015 Exhibit - Ex 1015 Plasma Etching Technology (P.T.A.B. Aug. 18, 2015)

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1014 Exhibit: Ex 1014 Cecchi CV

Document IPR2015-01768, No. 1014 Exhibit - Ex 1014 Cecchi CV (P.T.A.B. Aug. 18, 2015)

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3001 Exhibit: Exhibit 3001

Document IPR2015-01768, No. 3001-8 Exhibit - Exhibit 3001 (P.T.A.B. Dec. 15, 2016)

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1008 Exhibit: Ex 1008 Wang US4992391

Document IPR2015-01768, No. 1008 Exhibit - Ex 1008 Wang US4992391 (P.T.A.B. Aug. 18, 2015)

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1011 Exhibit: Ex 1011 American Heritage Dictionary

Document IPR2015-01768, No. 1011 Exhibit - Ex 1011 American Heritage Dictionary (P.T.A.B. Aug. 18, 2015)

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