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Displaying 54-68 of 197 results

2025 Exhibit: US6392210

Document IPR2021-01397, No. 2025-52 Exhibit - US6392210 (P.T.A.B. Jun. 10, 2022)

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2031 Exhibit: Pulsed plasma etching for semiconductor manufacturing

Document IPR2021-01397, No. 2031-58 Exhibit - Pulsed plasma etching for semiconductor manufacturing (P.T.A.B. Jun. 10, 2022)

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2030 Exhibit: Modulating power delivery in a pulsed ICP

Document IPR2021-01397, No. 2030-57 Exhibit - Modulating power delivery in a pulsed ICP (P.T.A.B. Jun. 10, 2022)

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2018 Exhibit: Evaluation of a PIN diode switch for power applications

Document IPR2021-01397, No. 2018-45 Exhibit - Evaluation of a PIN diode switch for power applications (P.T.A.B. Jun. 10, 2022)

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2023 Exhibit: US9748076

Document IPR2021-01397, No. 2023-50 Exhibit - US9748076 (P.T.A.B. Jun. 10, 2022)

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2013 Exhibit: Wiley Dictionary Definition

Document IPR2021-01397, No. 2013-39 Exhibit - Wiley Dictionary Definition (P.T.A.B. Jun. 10, 2022)

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2032 Exhibit: Proposed Protective Order

Document IPR2021-01397, No. 2032-59 Exhibit - Proposed Protective Order (P.T.A.B. Jun. 10, 2022)

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2011 Exhibit: J Voltz declaration

Document IPR2021-01397, No. 2011-36 Exhibit - J Voltz declaration (P.T.A.B. Jun. 10, 2022)

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2017 Exhibit: Dr Shannon Declaration

Document IPR2021-01397, No. 2017-44 Exhibit - Dr Shannon Declaration (P.T.A.B. Jun. 10, 2022)

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2016 Exhibit: 2022 05 24 TRANSCRIPT Deposition of Denis Shaw

Document IPR2021-01397, No. 2016-42 Exhibit - 2022 05 24 TRANSCRIPT Deposition of Denis Shaw (P.T.A.B. Jun. 10, 2022)

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2019 Exhibit: Datasheet for MA4PK2000, 3000

Document IPR2021-01397, No. 2019-46 Exhibit - Datasheet for MA4PK2000, 3000 (P.T.A.B. Jun. 10, 2022)

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2012 Exhibit: I Bhutta declaration with attachments

Document IPR2021-01397, No. 2012-38 Exhibit - I Bhutta declaration with attachments (P.T.A.B. Jun. 10, 2022)

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2014 Exhibit: EE Power definition

Document IPR2021-01397, No. 2014-40 Exhibit - EE Power definition (P.T.A.B. Jun. 10, 2022)

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2020 Exhibit: US9294100

Document IPR2021-01397, No. 2020-47 Exhibit - US9294100 (P.T.A.B. Jun. 10, 2022)

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2015 Exhibit: 2022 05 26 TRANSCRIPT Deposition of Steven H Voldman, PhD

Document IPR2021-01397, No. 2015-41 Exhibit - 2022 05 26 TRANSCRIPT Deposition of Steven H Voldman, PhD (P.T.A.B. Jun. 10, 2022)

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