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1004 Exhibit: Ex 1004 Tegal EP0399676A1

Document IPR2016-00470, No. 1004 Exhibit - Ex 1004 Tegal EP0399676A1 (P.T.A.B. Jan. 15, 2016)

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1009 Exhibit: Ex 1009 Cecchi Declaration

Document IPR2016-00470, No. 1009 Exhibit - Ex 1009 Cecchi Declaration (P.T.A.B. Jan. 15, 2016)

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1007 Exhibit: Ex 1007 CIP 60058650 FH

Document IPR2016-00470, No. 1007 Exhibit - Ex 1007 CIP 60058650 FH (P.T.A.B. Jan. 15, 2016)

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1002 Exhibit: Ex 1002 Kadomura US6063710

Document IPR2016-00470, No. 1002 Exhibit - Ex 1002 Kadomura US6063710 (P.T.A.B. Jan. 15, 2016)

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2001 Exhibit: PTAB decision granting institution 01764

Document IPR2016-00470, No. 2001 Exhibit - PTAB decision granting institution 01764 (P.T.A.B. Apr. 27, 2016)

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1001 Exhibit: Ex 1001 USRE40264E1

Document IPR2016-00470, No. 1001 Exhibit - Ex 1001 USRE40264E1 (P.T.A.B. Jan. 15, 2016)

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1010 Exhibit: Ex 1010 Cecchi CV

Document IPR2016-00470, No. 1010 Exhibit - Ex 1010 Cecchi CV (P.T.A.B. Jan. 15, 2016)

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2002 Exhibit: PTAB decision denying institution 01766

Document IPR2016-00470, No. 2002 Exhibit - PTAB decision denying institution 01766 (P.T.A.B. Apr. 27, 2016)

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2003 Exhibit: PTAB decision denying institution 01759

Document IPR2016-00470, No. 2003 Exhibit - PTAB decision denying institution 01759 (P.T.A.B. Apr. 27, 2016)

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1008 Exhibit: Ex 1008 Parent FH 08567224

Document IPR2016-00470, No. 1008 Exhibit - Ex 1008 Parent FH 08567224 (P.T.A.B. Jan. 15, 2016)

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1003 Exhibit: Ex 1003 Wang US5219485

Document IPR2016-00470, No. 1003 Exhibit - Ex 1003 Wang US5219485 (P.T.A.B. Jan. 15, 2016)

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1019 Exhibit: Ex 1019 Petitioners Demonstrative Exhibits Slides

Document IPR2015-01768, No. 1019-5 Exhibit - Ex 1019 Petitioners Demonstrative Exhibits Slides (P.T.A.B. Oct. 6, 2016)

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2002 Exhibit: US 5,320,982 Tsubone

Document IPR2015-01768, No. 2002 Exhibit - US 5,320,982 Tsubone (P.T.A.B. Nov. 25, 2015)

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1002 Exhibit: Ex 1002 Tegal EP 903047249

Document IPR2015-01768, No. 1002 Exhibit - Ex 1002 Tegal EP 903047249 (P.T.A.B. Aug. 18, 2015)

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1005 Exhibit: Ex 1005 Thomas US4680086

Document IPR2015-01768, No. 1005 Exhibit - Ex 1005 Thomas US4680086 (P.T.A.B. Aug. 18, 2015)

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