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1202 Exhibit: TSMC 1202 Kortshagen Declaration

Document IPR2014-00802, No. 1202 Exhibit - TSMC 1202 Kortshagen Declaration (P.T.A.B. May. 22, 2014)

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1220 Exhibit: TSMC 1220 Claim Chart Mozgrin in view of Kudryavtsev

Document IPR2014-00802, No. 1220 Exhibit - TSMC 1220 Claim Chart Mozgrin in view of Kudryavtsev (P.T.A.B. May. 22, 2014)

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1218 Exhibit: TSMC 1218 US Patent 7811421 Application as Filed

Document IPR2014-00802, No. 1218 Exhibit - TSMC 1218 US Patent 7811421 Application as Filed (P.T.A.B. May. 22, 2014)

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3002 Exhibit: Exhibit 3002

Document IPR2014-00802, No. 3002 Exhibit - Exhibit 3002 (P.T.A.B. May. 29, 2015)

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1215 Exhibit: TSMC 1215 Office Action 4 21 2010

Document IPR2014-00802, No. 1215 Exhibit - TSMC 1215 Office Action 4 21 2010 (P.T.A.B. May. 22, 2014)

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2015 Exhibit: Hartsough Declaration

Document IPR2014-00802, No. 2015 Exhibit - Hartsough Declaration (P.T.A.B. Jan. 19, 2015)

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1209 Exhibit: TSMC 1209 Catalogue Entry at the Russian State Library Mozgrin Th...

Document IPR2014-00802, No. 1209 Exhibit - TSMC 1209 Catalogue Entry at the Russian State Library Mozgrin Thesis (P.T.A.B. May. 22, 2014)

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1228 Exhibit: Declaration of Dr Lawrence J Overzet

Document IPR2014-00802, No. 1228 Exhibit - Declaration of Dr Lawrence J Overzet (P.T.A.B. May. 1, 2015)

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1206 Exhibit: TSMC 1206 Kudryavtsev, Ionization Relaxation

Document IPR2014-00802, No. 1206 Exhibit - TSMC 1206 Kudryavtsev, Ionization Relaxation (P.T.A.B. May. 22, 2014)

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2013 Exhibit: Sinha

Document IPR2014-00802, No. 2013 Exhibit - Sinha (P.T.A.B. Jan. 19, 2015)

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1007 Exhibit: TSMC 1007 Chistyakov USP 7147759 TSMC

Document IPR2014-00844, No. 1007 Exhibit - TSMC 1007 Chistyakov USP 7147759 TSMC (P.T.A.B. May. 29, 2014)

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1214 Exhibit: Ohring

Document IPR2014-00470, No. 1214 Exhibit - Ohring (P.T.A.B. Mar. 7, 2014)

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1128 Exhibit: Dr Hartsough Deposition Transcript for US Patent No 7,808,184

Document IPR2014-00805, No. 1128 Exhibit - Dr Hartsough Deposition Transcript for US Patent No 7,808,184 (P.T.A.B. May. 1, 2015)

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1118 Exhibit: TSMC 1118 Claim Chart Mozgrin in view of Kawamata

Document IPR2014-00805, No. 1118 Exhibit - TSMC 1118 Claim Chart Mozgrin in view of Kawamata (P.T.A.B. May. 23, 2014)

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1107 Exhibit: TSMC 1107 Chistyakov USP 7147759

Document IPR2014-00805, No. 1107 Exhibit - TSMC 1107 Chistyakov USP 7147759 (P.T.A.B. May. 23, 2014)

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