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1013 Exhibit: 1013 Smith, Thin Film Deposition

Document IPR2014-00866, No. 1013 Exhibit - 1013 Smith, Thin Film Deposition (P.T.A.B. May. 30, 2014)

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1005 Exhibit: US Patent No 6,413,382

Document IPR2014-01075, No. 1005 Exhibit - US Patent No 6,413,382 (P.T.A.B. Jun. 30, 2014)

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1016 Exhibit: Exhibit D07

Document IPR2014-01075, No. 1016 Exhibit - Exhibit D07 (P.T.A.B. Jun. 30, 2014)

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1010 Exhibit: US Patent No 7,147,759

Document IPR2014-01075, No. 1010 Exhibit - US Patent No 7,147,759 (P.T.A.B. Jun. 30, 2014)

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1017 Exhibit: Exhibit D08

Document IPR2014-01075, No. 1017 Exhibit - Exhibit D08 (P.T.A.B. Jun. 30, 2014)

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1004 Exhibit: US Patent No 6,190,512

Document IPR2014-01075, No. 1004 Exhibit - US Patent No 6,190,512 (P.T.A.B. Jun. 30, 2014)

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1007 Exhibit: USPTO Office Action

Document IPR2014-01075, No. 1007 Exhibit - USPTO Office Action (P.T.A.B. Jun. 30, 2014)

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1008 Exhibit: Amendment and Response

Document IPR2014-01075, No. 1008 Exhibit - Amendment and Response (P.T.A.B. Jun. 30, 2014)

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1011 Exhibit: Amendment and Response for RCE

Document IPR2014-01075, No. 1011 Exhibit - Amendment and Response for RCE (P.T.A.B. Jun. 30, 2014)

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1013 Exhibit: Thin Film Deposition

Document IPR2014-01075, No. 1013 Exhibit - Thin Film Deposition (P.T.A.B. Jun. 30, 2014)

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1012 Exhibit: The Materials Science of Thin Films

Document IPR2014-01075, No. 1012 Exhibit - The Materials Science of Thin Films (P.T.A.B. Jun. 30, 2014)

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1003 Exhibit: High Current Low Pressure Quasi Stationary Discharge in a Magnetic...

Document IPR2014-01075, No. 1003 Exhibit - High Current Low Pressure Quasi Stationary Discharge in a Magnetic Field (P.T.A.B. Jun. 30, 2014)

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1014 Exhibit: Letter from Robert Jackson dated April 21, 2008

Document IPR2014-01075, No. 1014 Exhibit - Letter from Robert Jackson dated April 21, 2008 (P.T.A.B. Jun. 30, 2014)

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1009 Exhibit: Patent Term Adjustment

Document IPR2014-01075, No. 1009 Exhibit - Patent Term Adjustment (P.T.A.B. Jun. 30, 2014)

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1006 Exhibit: Plasma Etching

Document IPR2014-01075, No. 1006 Exhibit - Plasma Etching (P.T.A.B. Jun. 30, 2014)

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