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1012 Exhibit: Ex 1012 Plasma Etching Technology

Document IPR2015-01766, No. 1012 Exhibit - Ex 1012 Plasma Etching Technology (P.T.A.B. Aug. 18, 2015)

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1002 Exhibit: Ex 1002 Tegal EP App 903047249

Document IPR2015-01766, No. 1002 Exhibit - Ex 1002 Tegal EP App 903047249 (P.T.A.B. Aug. 18, 2015)

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1003 Exhibit: Ex 1003 Matsumura US5151871

Document IPR2015-01766, No. 1003 Exhibit - Ex 1003 Matsumura US5151871 (P.T.A.B. Aug. 18, 2015)

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1010 Exhibit: Ex 1010 Websters Dictionary

Document IPR2015-01766, No. 1010 Exhibit - Ex 1010 Websters Dictionary (P.T.A.B. Aug. 18, 2015)

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1013 Exhibit: Ex 1013 Jasbir Singh Heat Transfer Fluids

Document IPR2015-01766, No. 1013 Exhibit - Ex 1013 Jasbir Singh Heat Transfer Fluids (P.T.A.B. Aug. 18, 2015)

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1004 Exhibit: Ex 1004 Narita US4913790

Document IPR2015-01766, No. 1004 Exhibit - Ex 1004 Narita US4913790 (P.T.A.B. Aug. 18, 2015)

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1006 Exhibit: Exhibit 1006

Document IPR2016-01512, No. 1006-6 Exhibit - Exhibit 1006 (P.T.A.B. Jul. 29, 2016)

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1018 Exhibit: Exhibit 1018

Document IPR2016-01510, No. 1018-18 Exhibit - Exhibit 1018 (P.T.A.B. Jul. 29, 2016)

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1015 Exhibit: Ex 1015 IPR2015 01768, Paper 7

Document IPR2017-00282, No. 1015-14 Exhibit - Ex 1015 IPR2015 01768, Paper 7 (P.T.A.B. Dec. 2, 2016)

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1029 Exhibit: Ex1029 Intel Demonstratives

Document IPR2017-00282, No. 1029-31 Exhibit - Ex1029 Intel Demonstratives (P.T.A.B. Mar. 5, 2018)

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1021 Exhibit: Exhibit 1021

Document IPR2016-01510, No. 1021-21 Exhibit - Exhibit 1021 (P.T.A.B. Jul. 29, 2016)

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1012 Exhibit: Exhibit 1012

Document IPR2016-01510, No. 1012-12 Exhibit - Exhibit 1012 (P.T.A.B. Jul. 29, 2016)

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1005 Exhibit: Ex 1005 US Patent 6,063,710 Kadomura

Document IPR2017-00282, No. 1005-5 Exhibit - Ex 1005 US Patent 6,063,710 Kadomura (P.T.A.B. Dec. 2, 2016)

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2001 Exhibit: US 5,320,982 Tsubone

Document IPR2015-01766, No. 2001-2 Exhibit - US 5,320,982 Tsubone (P.T.A.B. Nov. 25, 2015)

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1006 Exhibit: Ex 1006 Wang EP0272140A2

Document IPR2016-00470, No. 1006 Exhibit - Ex 1006 Wang EP0272140A2 (P.T.A.B. Jan. 15, 2016)

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