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1014 Exhibit: TSMC 1014 Notice of Allowance 8 19 2010 TSMC

Document IPR2014-00844, No. 1014 Exhibit - TSMC 1014 Notice of Allowance 8 19 2010 TSMC (P.T.A.B. May. 29, 2014)

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1015 Exhibit: TSMC 1015 US 7811421 Application as Filed TSMC

Document IPR2014-00844, No. 1015 Exhibit - TSMC 1015 US 7811421 Application as Filed TSMC (P.T.A.B. May. 29, 2014)

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1001 Exhibit: TSMC 1001 Chistyakov USP 7811421 TSMC

Document IPR2014-00844, No. 1001 Exhibit - TSMC 1001 Chistyakov USP 7811421 TSMC (P.T.A.B. May. 29, 2014)

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1108 Exhibit: Plasma Etching

Document IPR2014-01069, No. 1108 Exhibit - Plasma Etching (P.T.A.B. Jun. 30, 2014)

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1008 Exhibit: TSMC 1008 Manos, Plasma Etching TSMC

Document IPR2014-00844, No. 1008 Exhibit - TSMC 1008 Manos, Plasma Etching TSMC (P.T.A.B. May. 29, 2014)

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1105 Exhibit: US Patent No 6,190,512

Document IPR2014-01069, No. 1105 Exhibit - US Patent No 6,190,512 (P.T.A.B. Jun. 30, 2014)

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1021 Exhibit: Amendment and Response for RCE

Document IPR2014-01037, No. 1021 Exhibit - Amendment and Response for RCE (P.T.A.B. Jun. 30, 2014)

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1208 Exhibit: Mozgrin Thesis Russian

Document IPR2014-00470, No. 1208 Exhibit - Mozgrin Thesis Russian (P.T.A.B. Mar. 7, 2014)

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1019 Exhibit: Exhibit C05

Document IPR2014-01037, No. 1019 Exhibit - Exhibit C05 (P.T.A.B. Jun. 30, 2014)

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1219 Exhibit: Response in EP1560943 04 21 2008

Document IPR2014-00470, No. 1219 Exhibit - Response in EP1560943 04 21 2008 (P.T.A.B. Mar. 7, 2014)

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1018 Exhibit: Exhibit C09

Document IPR2014-01037, No. 1018 Exhibit - Exhibit C09 (P.T.A.B. Jun. 30, 2014)

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1218 Exhibit: US Patent 7811421 Application as Filed

Document IPR2014-00470, No. 1218 Exhibit - US Patent 7811421 Application as Filed (P.T.A.B. Mar. 7, 2014)

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1123 Exhibit: Exhibit C14

Document IPR2014-01069, No. 1123 Exhibit - Exhibit C14 (P.T.A.B. Jun. 30, 2014)

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1207 Exhibit: Mozgrin Thesis Translation

Document IPR2014-00470, No. 1207 Exhibit - Mozgrin Thesis Translation (P.T.A.B. Mar. 7, 2014)

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1218 Exhibit: 421 Application

Document IPR2014-00992, No. 1218 Exhibit - 421 Application (P.T.A.B. Jun. 19, 2014)

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