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1104 Exhibit: A A Kudryavtsev and VN Skerbov, Ionization relaxation in a plasma p...

Document IPR2014-01076, No. 1104 Exhibit - A A Kudryavtsev and VN Skerbov, Ionization relaxation in a plasma produced by a pulsed inert gas discharge, Sov Phys Tech Phys 281, pp 30 35, January 19...

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1101 Exhibit: US Patent No 6,805,779

Document IPR2014-01076, No. 1101 Exhibit - US Patent No 6,805,779 (P.T.A.B. Jun. 30, 2014)

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1304 Exhibit: A A Kudryavtsev and VN Skerbov, Ionization relaxation in a plasma p...

Document IPR2014-01072, No. 1304 Exhibit - A A Kudryavtsev and VN Skerbov, Ionization relaxation in a plasma produced by a pulsed inert gas discharge, Sov Phys Tech Phys 281, pp 30 35, January 19...

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1402 Exhibit: Exhibit 1402 Kortshagen Declaration

Document IPR2014-00918, No. 1402 Exhibit - Exhibit 1402 Kortshagen Declaration (P.T.A.B. Jun. 9, 2014)

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1108 Exhibit: File History for US Patent No 6,805,779, Office Action dated Februa...

Document IPR2014-01076, No. 1108 Exhibit - File History for US Patent No 6,805,779, Office Action dated February 11, 2004 (P.T.A.B. Jun. 30, 2014)

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2001 Exhibit: exhibit

Document IPR2014-01076, No. 2001 Exhibit - exhibit (P.T.A.B. Jan. 8, 2015)

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2004 Exhibit: deposition transcript

Document IPR2014-01076, No. 2004 Exhibit - deposition transcript (P.T.A.B. Feb. 9, 2015)

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1205 Exhibit: TSMC 1205 Pinsley USP 3761836

Document IPR2014-00856, No. 1205 Exhibit - TSMC 1205 Pinsley USP 3761836 (P.T.A.B. May. 30, 2014)

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1204 Exhibit: TSMC 1204 Kudryavtsev, Ionization relaxation

Document IPR2014-00856, No. 1204 Exhibit - TSMC 1204 Kudryavtsev, Ionization relaxation (P.T.A.B. May. 30, 2014)

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1211 Exhibit: Vlcek 1 1989

Document IPR2014-01022, No. 1211 Exhibit - Vlcek 1 1989 (P.T.A.B. Jun. 23, 2014)

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1208 Exhibit: TSMC 1208 Office Action 2 11 2004

Document IPR2014-00856, No. 1208 Exhibit - TSMC 1208 Office Action 2 11 2004 (P.T.A.B. May. 30, 2014)

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1214 Exhibit: TSMC 1214 Wells PCT Publ WO8301349

Document IPR2014-00856, No. 1214 Exhibit - TSMC 1214 Wells PCT Publ WO8301349 (P.T.A.B. May. 30, 2014)

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1307 Exhibit: TSMC 1307 Iwamura USP 5753886 TSMC

Document IPR2014-00859, No. 1307 Exhibit - TSMC 1307 Iwamura USP 5753886 TSMC (P.T.A.B. May. 30, 2014)

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1002 Exhibit: Kortshagen Declaration

Document IPR2014-00598, No. 1002 Exhibit - Kortshagen Declaration (P.T.A.B. Apr. 9, 2014)

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3001 Exhibit: Ex 3001

Document IPR2014-01076, No. 3001 Exhibit - Ex 3001 (P.T.A.B. Nov. 17, 2014)

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