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1116 Exhibit: Raizer

Document IPR2014-01057, No. 1116 Exhibit - Raizer (P.T.A.B. Jun. 27, 2014)

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1103 Exhibit: Mozgrin 1995

Document IPR2014-01013, No. 1103 Exhibit - Mozgrin 1995 (P.T.A.B. Jun. 23, 2014)

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1120 Exhibit: 1120 Catalogue Entry at the Russian State Library Mozgrin Thesis

Document IPR2014-00863, No. 1120 Exhibit - 1120 Catalogue Entry at the Russian State Library Mozgrin Thesis (P.T.A.B. May. 30, 2014)

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1416 Exhibit: Claim Chart Mozgrin Kudryavtsev

Document IPR2014-00498, No. 1416 Exhibit - Claim Chart Mozgrin Kudryavtsev (P.T.A.B. Mar. 13, 2014)

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1121 Exhibit: Claim Chart Mozgrin and Lantsman

Document IPR2014-01057, No. 1121 Exhibit - Claim Chart Mozgrin and Lantsman (P.T.A.B. Jun. 27, 2014)

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1112 Exhibit: Response of 05 02 06

Document IPR2014-01013, No. 1112 Exhibit - Response of 05 02 06 (P.T.A.B. Jun. 23, 2014)

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1110 Exhibit: Response of 04 21 08 in EP 1560943

Document IPR2014-01013, No. 1110 Exhibit - Response of 04 21 08 in EP 1560943 (P.T.A.B. Jun. 23, 2014)

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1122 Exhibit: Claim Chart Based on Wang and Lantsman

Document IPR2014-01013, No. 1122 Exhibit - Claim Chart Based on Wang and Lantsman (P.T.A.B. Jun. 23, 2014)

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1006 Exhibit: 1006 Manos, Plasma Etching

Document IPR2014-00866, No. 1006 Exhibit - 1006 Manos, Plasma Etching (P.T.A.B. May. 30, 2014)

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1115 Exhibit: Smith 1995

Document IPR2014-01013, No. 1115 Exhibit - Smith 1995 (P.T.A.B. Jun. 23, 2014)

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1005 Exhibit: 1005 Wang USP 6413382

Document IPR2014-00866, No. 1005 Exhibit - 1005 Wang USP 6413382 (P.T.A.B. May. 30, 2014)

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1409 Exhibit: Notice of Allowability 03 29 2004

Document IPR2014-00498, No. 1409 Exhibit - Notice of Allowability 03 29 2004 (P.T.A.B. Mar. 13, 2014)

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1117 Exhibit: 1117 Fu USP 6306265

Document IPR2014-00863, No. 1117 Exhibit - 1117 Fu USP 6306265 (P.T.A.B. May. 30, 2014)

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1105 Exhibit: US Patent No 6,413,382 Wang

Document IPR2014-01013, No. 1105 Exhibit - US Patent No 6,413,382 Wang (P.T.A.B. Jun. 23, 2014)

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1103 Exhibit: Mozgrin 1995

Document IPR2014-00495, No. 1103 Exhibit - Mozgrin 1995 (P.T.A.B. Mar. 13, 2014)

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