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3002 Exhibit: Ex 3002

Document IPR2014-00808, No. 3002 Exhibit - Ex 3002 (P.T.A.B. Jun. 1, 2015)

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1336 Exhibit: Deposition Transcript of Larry D Hartsough for 184 Patent

Document IPR2014-00808, No. 1336 Exhibit - Deposition Transcript of Larry D Hartsough for 184 Patent (P.T.A.B. Apr. 30, 2015)

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1308 Exhibit: Exhibit 1308 Mozgrin Thesis Original Russian TSMC

Document IPR2014-00808, No. 1308 Exhibit - Exhibit 1308 Mozgrin Thesis Original Russian TSMC (P.T.A.B. May. 23, 2014)

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1309 Exhibit: Exhibit 1309 Catalogue Entry at the Russian State Library Mozgrin Th...

Document IPR2014-00808, No. 1309 Exhibit - Exhibit 1309 Catalogue Entry at the Russian State Library Mozgrin Thesis TSMC (P.T.A.B. May. 23, 2014)

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1303 Exhibit: Exhibit 1303 Mozgrin, High Current Low Pressure TSMC

Document IPR2014-00808, No. 1303 Exhibit - Exhibit 1303 Mozgrin, High Current Low Pressure TSMC (P.T.A.B. May. 23, 2014)

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2004 Exhibit: Ex 2004 Declaration of Dr Hartsough

Document IPR2014-00808, No. 2004 Exhibit - Ex 2004 Declaration of Dr Hartsough (P.T.A.B. Jan. 12, 2015)

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1335 Exhibit: Deposition Transcript of Larry D Hartsough for 155 Patent

Document IPR2014-00808, No. 1335 Exhibit - Deposition Transcript of Larry D Hartsough for 155 Patent (P.T.A.B. Apr. 30, 2015)

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1330 Exhibit: Supplemental Declaration of Uwe Kortshagen

Document IPR2014-00808, No. 1330 Exhibit - Supplemental Declaration of Uwe Kortshagen (P.T.A.B. Apr. 30, 2015)

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2007 Exhibit: Ex 2007 Transcript of deposition of Dr Kortshagen

Document IPR2014-00808, No. 2007 Exhibit - Ex 2007 Transcript of deposition of Dr Kortshagen (P.T.A.B. Jan. 12, 2015)

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2003 Exhibit: Ex 2003 Vardanian Aff in Support of Motion for Admission PHV

Document IPR2014-00808, No. 2003 Exhibit - Ex 2003 Vardanian Aff in Support of Motion for Admission PHV (P.T.A.B. Nov. 26, 2014)

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1305 Exhibit: Exhibit 1305 Kudryavtsev, Ionization Relaxation TSMC

Document IPR2014-00808, No. 1305 Exhibit - Exhibit 1305 Kudryavtsev, Ionization Relaxation TSMC (P.T.A.B. May. 23, 2014)

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1332 Exhibit: Deposition Transcript of Larry D Hartsough for 775 Patent

Document IPR2014-00808, No. 1332 Exhibit - Deposition Transcript of Larry D Hartsough for 775 Patent (P.T.A.B. Apr. 30, 2015)

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1328 Exhibit: Affidavit of Anthony J Fitzpatrick in Support of Petitioners Motion

Document IPR2014-00808, No. 1328 Exhibit - Affidavit of Anthony J Fitzpatrick in Support of Petitioners Motion (P.T.A.B. Oct. 28, 2014)

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1320 Exhibit: Exhibit 1320 Ohring, The Materials Science of Thin Films

Document IPR2014-00808, No. 1320 Exhibit - Exhibit 1320 Ohring, The Materials Science of Thin Films (P.T.A.B. May. 23, 2014)

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1322 Exhibit: Exhibit 1322 Claim Chart Mozgrin in view of Kudryavtsev

Document IPR2014-00808, No. 1322 Exhibit - Exhibit 1322 Claim Chart Mozgrin in view of Kudryavtsev (P.T.A.B. May. 23, 2014)

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